27-06-2013 дата публикации
Номер: US20130163850A1
A mask pattern and a correcting method thereof are provided. The correcting method includes the following steps. An original pattern having a first original contour and a second original contour is provided. The first original contour has a first original corner. The second original contour has a second original corner, which is near the first original corner. The first and second original corners are cut to form a cut pattern. An optical proximity correction (OPC) process is applied to the cut pattern to form the mask pattern. 1. A correcting method of a mask pattern , comprising:providing an original pattern having a first original contour and a second original contour, the first original contour having a first original corner and the second original contour having a second original corner, which is near the first original corner;cutting the first and second original corners to form a cut pattern; andapplying an optical proximity correction (OPC) process to the cut pattern to form the mask pattern.2. The correcting method according to claim 1 , wherein in the step of forming the cut pattern claim 1 , two cutting directions where the first and the second original corners are cut are substantially parallel with each other.3. The correcting method according to claim 1 , wherein in the step of forming the cut pattern claim 1 , the cutting direction of the first original corner is tilted toward an extension direction of the first original contour at 45 degree substantially.4. The correcting method according to claim 1 , wherein the first original contour has an original straight line claim 1 , the original straight line is connected to the first original corner claim 1 , and in the step of forming the cut pattern claim 1 , less than 50 percentage of the original straight line is cut.5. The correcting method according to claim 1 , wherein the first original contour further has a third original corner claim 1 , the original pattern further has a third original contour ...
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