21-05-2020 дата публикации
Номер: US20200161361A1
Принадлежит:
An image sensor and forming method thereof are disclosed. The image sensor comprises: a semiconductor substrate which comprises a first silicon substrate layer, a substrate oxide layer and a second silicon substrate layer that are stacked; a transmission gate electrode disposed on the surface of the second silicon substrate layer; a floating diffusion disposed in the semiconductor substrate on one side of the transmission gate electrode; a photodiode doped region disposed in the first silicon substrate layer; and a conductive via structure disposed in the semiconductor substrate on the other side of the transmission gate electrode, penetrating through the second silicon substrate layer and the substrate oxide layer and electrically connected to the photodiode doped region. 1. An image sensor , comprising:a semiconductor substrate, comprising a first silicon substrate layer, a substrate oxide layer and a second silicon substrate layer that are stacked;a transmission gate electrode, disposed on a surface of the second silicon substrate layer;a floating diffusion, disposed in the semiconductor substrate on one side of the transmission gate electrode;a photodiode doped region, disposed in the first silicon substrate layer; anda conductive via structure, disposed in the semiconductor substrate on the other side of the transmission gate electrode, penetrating through the second silicon substrate layer and the substrate oxide layer, and electrically connected to the photodiode doped region.2. The image sensor according to claim 1 , wherein the boundary of the photodiode doped region extends to below the floating diffusion.3. The image sensor according to claim 1 , wherein the material of the conductive via structure is N-type doped poly-silicon.4. The image sensor according to claim 3 , further comprising:an N-type doped silicon region, disposed in the first silicon substrate layer, wherein the conductive via structure is electrically connected with the photodiode doped ...
Подробнее