29-08-2023 дата публикации
Номер: CN116651616A
Принадлежит:
The invention provides a metal fluoride capturer and an excimer laser. The metal fluoride capturer comprises a cylinder body, a fan and a pressurizing motor, an air inlet is formed in the middle of the cylinder body; pressurizing cavities are formed in the two ends of the cylinder body; an air outlet is formed in the side wall of the pressurizing cavity; the fan is rotatably arranged in the pressurizing cavity; and a power output shaft of the pressurizing motor is connected with the fan, drives the fan to rotate and is used for forcing the purified working gas to be discharged from the gas outlet. The pressurization motor and the fan are additionally arranged at the two ends of the cylinder body of the metal fluoride capturer, and the pressurization effect is achieved through high-speed rotation of the fan, so that the flow of working gas flowing back to the discharge cavity is increased, and the filtering capacity of the metal fluoride capturer to metal fluoride is enhanced; while the ...
Подробнее