04-04-2023 дата публикации
Номер: CN115912893A
Принадлежит:
The invention discloses a megasonic power supply system based on a DSP and an FPGA. The megasonic power supply system comprises an EMI filter circuit, a PFC circuit, a silicon carbide drive circuit, an impedance matching circuit, a voltage feedback circuit, a current feedback circuit and a DSP circuit. The input end of the EMI filter circuit is connected to a mains supply, and the mains supply is filtered by two fuses, a filter capacitor and a common mode inductor in sequence, then is slowly started by a relay, and finally outputs a first voltage V1 through a bridge rectifier circuit; the PFC circuit corrects a power factor and is connected to the output end of the bridge rectifier circuit, and the PFC circuit boosts the first voltage V1 to a second voltage V2; the silicon carbide drive circuit is connected to the output end of the PFC circuit. According to the megasonic power supply system based on the DSP and the FPGA, a DSP floating point algorithm is integrated, and a high-frequency ...
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