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Небесная энциклопедия

Космические корабли и станции, автоматические КА и методы их проектирования, бортовые комплексы управления, системы и средства жизнеобеспечения, особенности технологии производства ракетно-космических систем

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Применить Всего найдено 2. Отображено 2.
08-08-2023 дата публикации

Wafer box storage device with self-dehumidification function

Номер: CN116552989A
Автор: XU HUIJIE, SUN XIAODONG, GU YONG, YE SHOUBAO, XU HAOBIN, YAN XUEJUN, CHENG FEI, YOU YANG
Принадлежит:

The invention relates to the technical field of wafer storage, in particular to a wafer box storage device with a self-dehumidification function, which comprises a base, the periphery of the base is sleeved with a shell, the inner periphery of the shell is provided with a fixing groove, the upper part of the base is provided with an arc-shaped groove, the inner periphery of the shell is provided with a sealing block, and the sealing block is in lap joint with the arc-shaped groove. The shell and the base can be fixed by inserting a fixing rod into a fixing groove formed in the inner circumference of the shell, in addition, a fourth arc-shaped elastic piece arranged at the end of the fixing rod applies a vertically-downward force to the shell through the elasticity of the fourth arc-shaped elastic piece so that a sealing block can be tightly pressed in an arc-shaped groove, and therefore the sealing performance of the device is guaranteed; gas is introduced through the gas inlet valve, the ...

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Номер записи: 1
06-06-2023 дата публикации

Pneumatic vacuum valve

Номер: CN116221428A
Автор: XU HUIJIE, SUN XIAODONG, GU YONG, YE SHOUBAO, XU HAOBIN, YAN XUEJUN, CHENG FEI, YOU YANG
Принадлежит:

The invention relates to the technical field of semiconductor manufacturing equipment, in particular to a pneumatic vacuum valve which comprises a valve body, a first groove is inwards formed in the bottom face of the valve body, a driving mechanism and a first flange connector are arranged at the upper end and the lower end of the valve body respectively, and an opening and a pipeline arranged on the opening are arranged on the side face of the valve body. A first air outlet wind shielding assembly is arranged at the end, close to the first flange connector, of the first groove, an energy storage device is arranged on the first air outlet wind shielding assembly, a supporting rod is arranged in the valve body, and one end of the supporting rod penetrates through a sealing via hole structure on the top face of the first groove to be connected with a driving mechanism. The other end of the supporting rod is connected with the first air outlet wind-shielding assembly, and a second air outlet ...

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Номер записи: 2