12-03-2015 дата публикации
Номер: US20150069379A1
A thin file transistor includes a gate electrode, a source electrode, a drain electrode, a gate-insulating layer, and an oxide semiconductor layer. The oxide semiconductor layer includes indium-gallium-zinc oxide with a formula of InGaZnO, in which x, y and z satisfy the following formulas 1.5≦(y/x)≦2 and 1.5≦(y/z)≦2. The gate-insulating layer is positioned between the gate electrode and the oxide semiconductor layer. The source electrode and the drain electrode are respectively connected to two different sides of the oxide semiconductor. 1. A thin film transistor , comprising:{'sub': x', 'y', 'z', 'w, 'b': '2', 'an oxide semiconductor layer comprising indium gallium zinc oxide represented by a general formula of InGaZnO, wherein x, y, z and w respectively represent atomic ratios of indium, zinc and oxygen, and x, y and z satisfy the requirements of the following formulae: 1.5≦(y/x)≦2 and 1.5≦(y/z)≦;'}a gate electrode;a gate insulating layer positioned between the gate electrode and the oxide semiconductor layer; anda source electrode and a drain electrode respectively connected to different sides of the oxide semiconductor layer.2. The thin film transistor according to wherein x and z satisfy the following formula: 0.9≦(x/z)≦1.13. The thin film transistor according to claim 1 , wherein y and w satisfy the following formula: 0.375≦(y/w)≦0.5.4. The thin film transistor according to claim 1 , wherein when (x+y+z) is defined as 1 claim 1 , x satisfies the following formula: 0.25≦x≦0.3.5. The thin film transistor according to claim 1 , wherein when (x+y+z) is defined as 1 claim 1 , y satisfies the following formula: 0.42≦y≦0.5.6. The thin film transistor according to claim 1 , wherein when (x+y+z) is defined as 1 claim 1 , z satisfies the following formula: 0.25≦z≦0.3.7. The thin film transistor according to claim 1 , wherein when (x+y+z±w) is defined as 1 claim 1 , x satisfies the following formula: 0.125≦x≦0.134.8. The thin film transistor according to claim 1 , ...
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