12-03-2014 дата публикации
Номер: CN103633184A
Принадлежит:
Disclosed are a processing system and method for depositing thin films on a substrate of a solar cell. Included can be a substrate pre-wash unit, a liquid cover transfer unit, a liquid supply unit, a chemical plating bath unit, a liquid discharge unit and a substrate final-wash unit, wherein the liquid cover transfer unit is used for transferring a liquid cover onto the substrate to form a fixed and tightly sealed seal structure body having a confined space and the liquid supply unit is used for injecting a proper amount of liquid for the chemical plating bath unit to perform thin film deposition process later. Through the method provided by the invention, the liquid is always limited on the substrate before thin films are completely formed. Compared with the prior art, the processing system and method can significantly reduce the supplying amount of liquid and the thin films are limited to and formed on only one surface of the substrate with more uniform thin film deposition and no additional ...
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