22-08-2023 дата публикации
Номер: CN116616779A
Принадлежит:
The invention discloses a micro-balloon integrated extensible stimulating electrode and pressure sensor array and a method, and the method comprises the steps: 1, processing photoresist through employing a photoetching technology, and obtaining a pressure sensor substrate layer; secondly, a pressure sensor sensitive layer is obtained through a sputtering process and dry etching; 3, obtaining a pressure sensor packaging layer by adopting a photoetching process; 4, obtaining a stimulating electrode conducting layer by adopting a sputtering process and dry etching; 5, obtaining a stimulating electrode packaging layer by adopting a photoetching process; 6, releasing the prepared stimulating electrode and the pressure sensor array from the silicon wafer by means of a wet etching process; 7, transferring the stimulating electrode and the pressure sensor array from the surface of the silicon wafer by means of a water-soluble adhesive tape; and 8, integrating the stimulating electrode, the pressure ...
Подробнее