16-02-2017 дата публикации
Номер: US20170044287A1
A composition comprising a polymer compound (A) containing a repeating unit having a group represented by the formula (1), a compound (B) decomposing to generate an acid by irradiation with an electromagnetic wave or an electronic beam or by heating, and a compound (C) reacting with a hydroxyl group in the presence of an acid: 3. The composition according to claim 1 , wherein the compound (B) is a sulfonic acid ester compound claim 1 , a triazine compound claim 1 , a sulfonium salt or an iodonium salt.4. The composition according to claim 1 , wherein the compound (C) is a melamine compound or a urea compound.5. The composition according to claim 1 , further comprising a solvent.6. A method of producing a film claim 5 , comprising a step of applying the composition according to on a substrate claim 5 , to form a film claim 5 , a step of irradiating a part or several parts of the film with an electromagnetic wave or an electronic beam claim 5 , a step of developing the part or several parts of the film irradiated with an electromagnetic wave or an electronic beam claim 5 , thereby patterning the film claim 5 , and a step of heating the patterned film claim 5 , thereby cross-linking a compound contained in the film.7. A method of producing a film claim 5 , comprising a step of applying the composition according to on a substrate claim 5 , to form a film claim 5 , a step of irradiating a part or several parts of the film with an electromagnetic wave or an electronic beam claim 5 , a step of developing the part or several parts of the film irradiated with an electromagnetic wave or an electronic beam claim 5 , thereby patterning the film claim 5 , and a step of irradiating the patterned film with an electromagnetic wave or an electronic beam claim 5 , then claim 5 , heating the film claim 5 , thereby cross-linking a compound contained in the film.8. The method of producing a film according to claim 6 , wherein the electromagnetic wave is ultraviolet radiation.9. A film ...
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