Substrate Processing Apparatus

A substrate processing apparatus includes a first hole portion formed through a sidewall of the process chamber and horizontally extending outward and a second hole portion formed to be contiguous with the first hole portion and defining a supply channel for a process gas. The apparatus also includes a gas nozzle, a plurality of seal members and an annular spacer. A proximal end of the gas nozzle is inserted into the first hole portion. The plurality of seal members is spaced apart from each other between an outer circumferential surface of the gas nozzle and the first hole portion. The annular spacer is inserted into the first hole portion and is pressed against an annular surface of an opening periphery of the second hole portion by the gas nozzle in a state where the proximal end of the gas nozzle is engaged with the annular spacer. 1. A substrate processing apparatus which supplies a process gas to a substrate placed in a hermetic process chamber to perform substrate processing , comprising:a first hole portion formed through an inner circumferential surface of a sidewall of the process chamber and horizontally extending outward, the first hole portion having a circular cross-section;a second hole portion formed through the sidewall of the process chamber to be contiguous with an outer end of the first hole portion and defining a supply channel for the process gas, the second hole portion being concentric with the first hole portion and having a smaller diameter than the first hole portion and a circular cross-section;a gas nozzle, a proximal end of which is inserted into the first hole portion through an inner end of the first hole portion, the gas nozzle being configured to supply the process gas from the second hole portion to the substrate;a plurality of seal members spaced apart from each other in a longitudinal direction of the gas nozzle between an outer circumferential surface of the gas nozzle and the first hole portion, the seal member being formed in ...

Support Structure for Suspended Injector and Substrate Processing Apparatus Using Same

A support structure for a suspended injector includes a suspended injector having a tubular vertical portion extending in a vertical direction, one or more chamfered portions formed by chamfering an outer peripheral surface near an upper end of the tubular vertical portion, a pair of holding members each having a flat surface formed on an inner peripheral surface of each of the pair of holding members to engage with each of the chamfered portions, each of the pair of holding members holding the tubular vertical portion of the suspended injector by sandwiching the tubular vertical portion of the suspended injector from both sides each of the pair of holding members, and a support structure part configured to fixedly support the pair of holding members, and configured to suspend and support the suspended injector. 1. A support structure for a suspended injector , comprising:a suspended injector having a tubular vertical portion extending in a vertical direction;one or more chamfered portions formed by chamfering an outer peripheral surface near an upper end of the tubular vertical portion;a pair of holding members each having a flat surface formed on an inner peripheral surface of each of the pair of holding members to engage with each of the chamfered portions, each of the pair of holding members holding the tubular vertical portion of the suspended injector by sandwiching the tubular vertical portion of the suspended injector from both sides each of the pair of holding members; anda support structure part configured to fixedly support the pair of holding members, and configured to suspend and support the suspended injector.2. The support structure of claim 1 , wherein the suspended injector is made of quartz and the pair of holding members is made of a resin.3. The support structure of claim 2 , wherein the resin is a fluorocarbon resin.4. The support structure of claim 1 , wherein the support structure part has a structure which sandwiches and supports the pair of ...

FILM FORMING APPARATUS

A film forming apparatus for forming films on substrates mounted on a rotary table by rotating the rotary table and causing the substrates to sequentially pass through areas to which process gases are supplied, including: recess portions formed in one surface of the rotary table along a circumferential direction and configured to accommodate the substrates; mounting portions disposed with the recess portions and configured to support regions of the substrates closer to centers than peripheral edge portions thereof; groove portions formed within the recess portions so as to surround the mounting portions; communication paths formed so as to extend from regions of the groove portions existing at a side of a rotational center of the rotary table toward an external area of the recess portions; and an exhaust port through which an interior of a vacuum container is vacuum-exhausted.

SUBSTRATE WARPING MONITORING DEVICE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME, AND SUBSTRATE WARPING MONITORING METHOD

There is provided a substrate warping monitoring device for monitoring a warping of a substrate mounted in a substrate mounting region formed in a rotary table along a circumferential direction during rotation of the rotary table, including: an optical displacement meter located above the rotary table and configured to irradiate a light to a predetermined position on the rotary table, receive a reflected light reflected off the rotary table and the substrate which passes through the predetermined position and measure a surface profile of the substrate; a memory part configured to store a measurement value acquired when the light is irradiated on a predetermined reference surface, as a reference value; and a calculation part configured to calculate a warping amount of the substrate based on the surface profile of the substrate measured by the optical displacement meter and the reference value stored in the memory part.

PACKAGE PRODUCTION METHOD AND PACKAGE PRODUCED BY THE METHOD

The present invention relates to a package production method includes the step of superposing a pair of substrates on each other, and bonding the substrates to each other to hermetically seal the inside of a sealing region surrounded by a sealing material, which is formed on any of the substrates. The sealing material is formed of a sintered body obtained by sintering a metal powder of at least one selected from gold, silver, palladium and platinum, the metal powder having a purity of 99.9% by weight or more and an average particle size of 0.005 μm to 1.0 μm, at least one core material having a width smaller than the width of the sealing material in a cross-sectional shape, and protruding from the periphery is formed on the substrate, and the core material compresses the sealing material to exhibit a sealing effect when the pair of substrates are bonded to each other. Accordingly, a sufficient sealing effect can be exhibited while a pressuring force to the substrate is reduced. 1. A package production method , comprising the step of superposing a pair of substrates on each other , and bonding the substrates to each other to hermetically seal the inside of a sealing region surrounded by a sealing material , the sealing material being formed on at least one of the substrates , whereinthe sealing material is formed of a sintered body obtained by sintering a metal powder of at least one selected from gold, silver, palladium and platinum, the metal powder having a purity of 99.9% by weight or more and an average particle size of 0.005 μm to 1.0 μm,at least one core material having a width smaller than the width of the sealing material in a cross-sectional shape, and protruding from the periphery is formed on the substrate,the core material compresses the sealing material when the pair of substrates are bonded to each other,the bulk-like metal film including any metal selected from gold, silver, palladium, platinum, titanium, chromium, copper, tungsten, nickel and an ...

Substrate Warpage Detection Device, Substrate Warpage Detection Method, and Substrate Processing Apparatus and Substrate Processing Method Using the Same

A substrate warpage detection device for detecting warpage of a substrate loaded on a substrate loading region having a recess shape formed on a rotary table along a circumferential direction during rotation of the rotary table, includes a light transmitting part configured to transmit a light beam obliquely upward from a side of the rotary table such that a lower portion of the light beam collides with an upper end of a side surface of the rotary table and an upper portion of the light beam positioned more upward than the lower portion of the light beam passes a portion near the surface of the rotary table, and a light receiving part installed to face the light transmitting part and configured to receive the light beam passing the portion near the surface of the rotary table so as to detect an amount of received light. 1. A substrate warpage detection device for detecting warpage of a substrate loaded on a substrate loading region having a recess shape formed on a rotary table along a circumferential direction during rotation of the rotary table , the device comprising:a light transmitting part configured to transmit a light beam obliquely upward from a side of the rotary table such that a lower portion of the light beam collides with an upper end of a side surface of the rotary table and an upper portion of the light beam positioned more upward than the lower portion of the light beam passes a portion near a surface of the rotary table; anda light receiving part installed to face the light transmitting part and configured to receive the light beam passing the portion near the surface of the rotary table so as to detect an amount of received light,wherein the light transmitting part is disposed such that the amount of received light detected by the light receiving part when the substrate loaded on the substrate loading region protrudes upward from the surface of the rotary table by a predetermined height becomes less than a predetermined threshold value.2. The ...

METHOD OF MANUFACTURING GLASS CONTAINER

A method of manufacturing a glass container that includes a mouth portion, a body portion, and a bottom portion, includes: a step of molding a glass container, in which a bubble is not yet formed, from molten glass; a step of forming a bubble-forming passage by pulling out a needle-like member after inserting the needle-like member into a bottom portion of the glass container in which a bubble is not yet formed; a step of injecting air from an inlet of the bubble-forming passage to form a reverse teardrop-shaped internal space, which is widened in the bottom portion from the bubble-forming passage as a starting point, in the bottom portion of the glass container in which a bubble is not yet formed, and to obtain a glass container that includes an internal space communicating with the outside; and a step of closing an inlet side of the reverse teardrop-shaped internal space by flow of not yet cured glass, which is caused by the potential heat of the not yet cured glass, to obtain a glass container that includes a bubble formed in the bottom portion and independent of the outside.

AIRTIGHT-SEALING PACKAGE MEMBER, PRODUCTION METHOD THEREFOR, AND AIRTIGHT-SEALED PACKAGE PRODUCTION METHOD USING THIS AIRTIGHT-SEALING PACKAGE MEMBER

The present invention is to provide an hermetic-sealing package member including a substrate and at least one frame-like sealing material for defining a sealing region formed on the substrate, in which the sealing material is formed of a sintered body obtained by sintering at least one metal powder selected from gold, silver, palladium, or platinum having a purity of 99.9 wt % or greater and an average particle size of 0.005 μm to 1.0 μm, and with respect to an arbitrary cross-section toward an outside from the sealing region, a length of an upper end of the sealing material is shorter than a length of a lower end. Examples of a cross-sectional shape of the sealing material may include one formed to have a base portion having a certain height and at least one mountain portion protruding from the base portion or one formed to have a mountain portion having substantially a triangular shape in which the length of the lower end of the sealing material is a bottom. By use of the hermetic-sealing package member of the present invention, a load is reduced at the time of hermetic-sealing and a sufficient sealing effect can be obtained. 1. A hermetic-sealing package member comprising a substrate and at least one frame-like sealing material for defining a sealing region formed on the substrate , whereinthe sealing material is formed of a sintered body obtained by sintering of at least one metal powder selected from gold, silver, palladium, or platinum having a purity of 99.9 wt % or greater and an average particle size of 0.005 μm to 1.0 μm, andthe sealing material is formed such that a shape of an arbitrary cross-section toward an outside from the sealing region includes a base portion having a certain height and at least one mountain portion protruding from the base portion, and a length of an upper end of the sealing material is shorter than a length of a lower end.2. (canceled)3. The hermetic-sealing package member according to claim 1 , wherein a ratio (h′/h) of a height ...

STRUCTURE AND METHOD FOR SEALING THROUGH-HOLE, AND TRANSFER SUBSTRATE FOR SEALING THROUGH-HOLE

A sealing structure with a surface of a base material with a through-hole, an underlying metal film, and a sealing member bonded to the underlying metal film to seal the through-hole. The sealing member includes a compressed product of a metal powder including gold having a purity of 99.9% by mass or more and a lid-like metal film including a bulk-like metal including gold and having a thickness of not less than 0.01 μm and not more than 5 μm. The sealing material includes an outer periphery-side densified region in contact with an underlying metal film and a center-side porous region in contact with the through-hole. The shape of pores in the densified region is specified, and the horizontal length (l) of a pore in the radial direction at any cross-section of the densified region and the width (W) of the densified region satisfy the relationship of l≤0.1W.

THROUGH-HOLE SEALING STRUCTURE AND SEALING METHOD, AND TRANSFER SUBSTRATE FOR SEALING THROUGH-HOLE

A sealing structure including: a set of base members forming a sealed space; a through-hole which is formed in at least one of the base members, and communicates with the sealed space; and a sealing member that seals the through-hole. An underlying metal film including a bulk-like metal such as gold is provided on a surface of the base member provided with the through-hole. The sealing member seals the through-hole while being bonded to the underlying metal film, and includes: a sealing material which is bonded to the underlying metal film, and includes a compressed product of a metal powder of gold or the like, the metal powder having a purity of 99.9% by mass or more; and a lid-like metal film which is bonded to the sealing material, and includes a bulk-like metal such as gold. Further, the sealing material includes: an outer periphery-side densified region being in contact with an underlying metal film; and a center-side porous region being in contact with the through-hole. The densified region has a porosity of 10% or less in terms of an area ratio at any cross-section.

METHOD AND APPARATUS FOR MEASURING CONCENTRATION OF OXIDANT AND SYSTEM FOR CLEANING ELECTRONIC MATERIAL

To measure the concentration of an oxidant in an oxidative cleaning liquid used in a process of cleaning an electronic material in a simple, easy, consistent, and accurate manner without being affected by impurities included in the cleaning liquid, such as metals. A method for measuring the concentration of an oxidant in a sample liquid used as a cleaning liquid in a process of cleaning an electronic material includes decomposing at least part of an oxidant included in the sample liquid by heating or the like; measuring the amount of oxygen gas generated by decomposition of the oxidant; and determining the concentration of the oxidant in the sample liquid on the basis of the amount of the oxygen gas. 1. A method for measuring a concentration of an oxidant in a sample liquid used as a cleaning liquid in a process of cleaning an electronic material , the method comprising:decomposing at least part of an oxidant included in the sample liquid;measuring an amount of released gas generated by decomposition of the oxidant, the released gas including oxygen gas; anddetermining the concentration of the oxidant in the sample liquid based on the amount of the released gas.2. The method for measuring a concentration of an oxidant according to claim 1 , wherein the sample liquid is successively introduced to decomposing device for decomposing the oxidant claim 1 , the decomposing device discharging the released gas including oxygen gas claim 1 , and wherein the concentration of the oxidant in the sample liquid is determined from a flow rate of the sample liquid and a flow rate of the released gas.3. The method for measuring a concentration of an oxidant according to claim 1 , wherein the oxidant is decomposed by using at least one selected from heating claim 1 , ultraviolet radiation claim 1 , ultrasound claim 1 , and a catalyst.4. The method for measuring a concentration of an oxidant according to claim 3 , wherein the sample liquid is a sulfuric acid solution including an ...

BOTULINUM TOXIN PRODUCING METHOD

Provided is a toxin producing method which is simple achieves a high toxin yield, and obtains a toxin having high specific activity. This toxin producing method includes: (A) a step in which a toxin is produced from toxin-producing bacteria in a medium, and a mixture a is obtained which contains a toxin, a bacterial component, and a nucleic acid component derived from the toxin; (B) a step in which the mixture a is subjected to the removal of the bacterial component, and a mixture b is obtained which contains a nucleic acid component and a toxin; (C) a step in which an endonuclease is added to the mixture b and a mixture c is obtained which contains a nucleic acid degradation product and a toxin; and (D) a step in which the mixture c is subjected to removal of the nucleic acid degradation product, and an isolated toxin liquid d is obtained. 1botulinum. A method for producing a toxin , comprising steps of:{'i': botulinum', 'botulinum', 'botulinum', 'botulinum, '(A) producing a toxin from a toxin-producing bacterium in a culture medium to produce a mixture a containing a bacterial component and a nucleic acid component both derived from the toxin and the toxin;'}{'i': 'botulinum', '(B) subjecting the mixture a to a removal of the bacterial component to produce a mixture b containing the nucleic acid component and the toxin;'}{'i': 'botulinum', '(C) adding an endonuclease to the mixture b to produce a mixture c containing a nucleic acid degradation product and the toxin; and'}{'i': 'botulinum', '(D) subjecting the mixture c to a removal of the nucleic acid degradation product to produce an isolated toxin liquid d.'}2botulinumSerratiaSerratia marcescens.. The method for producing a toxin according to claim 1 , wherein claim 1 , in the step (C) claim 1 , the endonuclease is an endonuclease derived from a bacterium3botulinum. The method for producing a toxin according to claim 1 , wherein the step (C) is carried out under a condition of pH 5.8 to 6.5.4botulinum. The ...

Package production method and package produced by the method

The present invention relates to a package production method includes the step of superposing a pair of substrates on each other, and bonding the substrates to each other to hermetically seal the inside of a sealing region surrounded by a sealing material, which is formed on any of the substrates. The sealing material is formed of a sintered body obtained by sintering a metal powder of at least one selected from gold, silver, palladium and platinum, the metal powder having a purity of 99.9% by weight or more and an average particle size of 0.005 μm to 1.0 μm, at least one core material having a width smaller than the width of the sealing material in a cross-sectional shape, and protruding from the periphery is formed on the substrate, and the core material compresses the sealing material to exhibit a sealing effect when the pair of substrates are bonded to each other. Accordingly, a sufficient sealing effect can be exhibited while a pressuring force to the substrate is reduced.

Botulinum toxin producing method

Provided is a botulinum toxin producing method which is simple achieves a high toxin yield, and obtains a toxin having high specific activity. This botulinum toxin producing method includes: (A) a step in which a botulinum toxin is produced from botulinum toxin-producing bacteria in a medium, and a mixture a is obtained which contains a botulinum toxin, a bacterial component, and a nucleic acid component derived from the botulinum toxin; (B) a step in which the mixture a is subjected to the removal of the bacterial component, and a mixture b is obtained which contains a nucleic acid component and a botulinum toxin; (C) a step in which an endonuclease is added to the mixture b and a mixture c is obtained which contains a nucleic acid degradation product and a botulinum toxin; and (D) a step in which the mixture c is subjected to removal of the nucleic acid degradation product, and an isolated botulinum toxin liquid d is obtained.

Botulinum toxin producing method

Provided is a botulinum toxin producing method which is simple achieves a high toxin yield, and obtains a toxin having high specific activity. This botulinum toxin producing method includes: (A) a step in which a botulinum toxin is produced from botulinum toxin-producing bacteria in a medium, and a mixture a is obtained which contains a botulinum toxin, a bacterial cell component, and a nucleic acid component derived from the botulinum toxin; (B) a step in which the mixture a is subjected to the removal of the bacterial cell component, and a mixture b is obtained which contains a nucleic acid component and a botulinum toxin; (C) a step in which an endonuclease is added to the mixture b and a mixture c is obtained which contains a nucleic acid degradation product and a botulinum toxin; and (D) a step in which the mixture c is subjected to removal of the nucleic acid degradation product, and an isolated botulinum toxin liquid d is obtained.

Substrate warpage detection device, substrate warpage detection method, and substrate processing apparatus and substrate processing method using the same

A substrate warpage detection device for detecting warpage of a substrate loaded on a substrate loading region having a recess shape formed on a rotary table along a circumferential direction during rotation of the rotary table, includes a light transmitting part configured to transmit a light beam obliquely upward from a side of the rotary table such that a lower portion of the light beam collides with an upper end of a side surface of the rotary table and an upper portion of the light beam positioned more upward than the lower portion of the light beam passes a portion near the surface of the rotary table, and a light receiving part installed to face the light transmitting part and configured to receive the light beam passing the portion near the surface of the rotary table so as to detect an amount of received light.

Botulinum toxin producing method

Provided is a botulinum toxin producing method which is simple achieves a high toxin yield, and obtains a toxin having high specific activity. This botulinum toxin producing method includes: (A) a step in which a botulinum toxin is produced from botulinum toxin-producing bacteria in a medium, and a mixture a is obtained which contains a botulinum toxin, a bacterial component, and a nucleic acid component derived from the botulinum toxin; (B) a step in which the mixture a is subjected to the removal of the bacterial component, and a mixture b is obtained which contains a nucleic acid component and a botulinum toxin; (C) a step in which an endonuclease is added to the mixture b and a mixture c is obtained which contains a nucleic acid degradation product and a botulinum toxin; and (D) a step in which the mixture c is subjected to removal of the nucleic acid degradation product, and an isolated botulinum toxin liquid d is obtained.

貫通孔の封止構造及び封止方法、並びに、貫通孔を封止するための転写基板

【課題】貫通孔を有する封止空間を気密封止するための封止構造について、封止空間内の汚染を防止し、かつ、低温で実施可能な封止構造を提供する。【解決手段】封止空間を形成する一組の基材と、少なくとも一つの基材に形成され封止空間と連通する貫通孔と、貫通孔を封止する封止部材とを含む封止構造に関する。本発明では、貫通孔が形成される基材の表面上に、金等のバルク状金属からなる下地金属膜を備える。そして、封止部材は、下地金属膜に接合しつつ前記貫通孔を封止しており、下地金属膜に接合される、純度９９．９質量％以上の金等の金属粉末の圧縮体からなる封止材料と、封止材料に接合される金等のバルク状金属からなる蓋状金属膜とからなる。更に、封止材料は、下地金属膜と接する外周側の緻密化領域と、貫通孔に接する中心側の多孔質領域とからなっており、この緻密化領域は任意断面における空隙率が面積率で１０％以下となっている。【選択図】図４

回路形成基板の洗浄方法および洗浄装置

【課題】回路形成基板上の微粒子（ゴミ）を効率よく除去でき、しかも水を介した異種金属間での電池形成による腐食を抑制できる回路形成基板の洗浄方法および装置を提供する。【解決手段】回路形成基板を、純水もしくは超純水のｐＨを８．５以上、９．５未満に調整し、水素ガスを溶解させたアルカリ水素水を用いて超音波等の物理的作用を加えながら洗浄する。或いは、水素ガスと、純水もしくは超純水のｐＨを８．５以上９．５未満に調整したアルカリ水との二流体ジェット洗浄を行う。【選択図】図１

悪性リンパ腫の処置用の医薬組成物

【課題】本発明の課題は、悪性リンパ腫の処置用の医薬組成物および当該医薬組成物を使用する悪性リンパ腫の処置方法を提供することである。本発明の課題は、また、当該医薬組成物または処置方法の使用のためのコンパニオン診断方法およびそのためのキットを提供することである。【解決手段】悪性リンパ腫を処置するための、ＥＲαアンタゴニストを含む医薬組成物を提供する。また、悪性リンパ腫の処置を必要としている対象にＥＲαアンタゴニストを投与することを含む、悪性リンパ腫の処置方法を提供する。さらに、対象のリンパ系腫瘍細胞におけるエストロゲン受容体αの発現レベルを測定することを含む、当該医薬組成物または処置方法の使用のためのコンパニオン診断方法およびそのためのキットを提供する。【選択図】図４

HERMETIC-SEALING PACKAGE MEMBER, PRODUCTION METHOD THEREFOR, AND 
HERMETICALLY-SEALED PACKAGE PRODUCTION METHOD USING THIS HERMETIC-SEALING 
PACKAGE MEMBER

Method for manufacturing glass container

懸垂型インジェクタの支持構造及びこれを用いた基板処理装置

【課題】本発明は、懸垂型インジェクタの落下を防止することができる懸垂型インジェクタの支持構造及びこれを用いた基板処理装置を提供することを目的とする。 【解決手段】鉛直方向に延びる管状の鉛直部を有する懸垂型インジェクタと、 該鉛直部の上端付近の外周面を面取りして形成された１つ以上の面取り部と、 該面取り部と係合する平坦面を各々内周面に有し、前記懸垂型インジェクタの前記鉛直部を両側から挟み込んで係合保持可能な一対の保持部材と、 該一対の保持部材を固定支持し、前記懸垂型インジェクタを懸垂支持可能な支持構造部と、を有する。 【選択図】図３

Ｔｏｃ処理装置及び処理方法

【課題】目標ＴＯＣ水質の処理水を安定して製造することができるＴＯＣ処理装置及び処理方法を提供する。【解決手段】被処理水に紫外線を照射してＴＯＣ成分を分解する紫外線酸化装置２と、脱イオン装置４とを備えてなるＴＯＣ処理装置において、該紫外線酸化装置２の流量を計測する流量計と、脱イオン装置４の流出水のＴＯＣ濃度を計測するＴＯＣ計６と、該流量計の計測値と該ＴＯＣ計の計測値が入力され、これらの計測値に基づいて、前記紫外線酸化装置の紫外線照射量を制御する制御装置７とを備えることを特徴とするＴＯＣ処理装置。【選択図】図１

ディップコーティングに好適な金ペースト及び該金ペーストを用いるディップコーティング方法

【課題】ディップコーティングにおける塗布特性が良好であり、引き上げ時の被コーティング部材の角立ち・膜厚不均一やディップ槽の金属ペーストの表面荒れを抑制することが可能な金ペーストを提供する。【解決手段】本発明は、純度９９．９質量％以上で平均粒径０．１μｍ以上０．５μｍ以下の金粉末と有機溶剤とからなる金ペーストに関する。本発明に係る金ペーストでは、有機溶剤として、金粉末に対するハンセン溶解度パラメータの距離Ｒａが７．０ＭＰａ１／２以上であると共に、回転粘度計により温度２５℃でシェアレート４／ｓで測定される固有粘度値が、１．５ｍＰａ・ｓ以上６．５ｍＰａ・ｓ以下である有機溶剤を適用することを特徴としている。本発明に係る金ペーストは、適宜の被コーティング部材に金膜をディップコートする際に有用であり、塗膜の角立ち等が生じ難く塗布特性が良好である。【選択図】図３

Structure and method for sealing through-hole, and transfer substrate for sealing through-hole

A sealing structure with a surface of a base material with a through-hole, an underlying metal film, and a sealing member bonded to the underlying metal film to seal the through-hole. The sealing member includes a compressed product of a metal powder including gold having a purity of 99.9% by mass or more and a lid-like metal film including a bulk-like metal including gold and having a thickness of not less than 0.01 μm and not more than 5 μm. The sealing material includes an outer periphery-side densified region in contact with an underlying metal film and a center-side porous region in contact with the through-hole. The shape of pores in the densified region is specified, and the horizontal length (l) of a pore in the radial direction at any cross-section of the densified region and the width (W) of the densified region satisfy the relationship of l≤0.1W.

Sealing structure and sealing method of through hole, and transfer substrate for sealing through hole

Package production method and package produced by same method

手拭き機能付き食品収容袋およびその製造方法

【課題】 食品収容袋に備えられた手拭きをより効率的に使い易くするとともに、樹脂製フィルム材の製袋工程において手拭きを一緒に溶着固定することにより手拭きの封入工程の簡易化と製造コストの抑制を図ることのできる手拭き機能付き食品収容袋およびその製造方法を提供する。【解決手段】 二枚の樹脂製フィルム材５が外縁に沿って熱溶着されて食品を封入可能な袋状に形成されてなる食品収容袋であって、食品を収容する食品収容部２と、この食品収容部２と空間的に隔てられているとともにシート状の手拭きシート材６を収容する手拭き収容部３とを有し、前記手拭きシート材６の端部が、前記二枚の樹脂製フィルム材５の熱溶着部４間に挟まれた状態で溶着固定されている。【選択図】 図１

Through-hole sealing structure and sealing method, and transfer substrate for sealing through-hole

基板反り監視装置及びこれを用いた基板処理装置、並びに基板反り監視方法

【課題】本発明は、回転テーブル回転中の基板の反りを監視でき、基板の脱離を予測できる基板反り監視装置及びこれを用いた基板処理装置、並びに基板反り監視方法を提供することを目的とする。 【解決手段】回転テーブル上に周方向に沿って設けられた基板載置領域に載置された基板の前記回転テーブル回転中における反りを監視する基板反り監視装置であって、 前記回転テーブルの上方から前記回転テーブル上の所定位置に光を照射して前記回転テーブルを回転させ、前記所定位置を通過する前記回転テーブル及び前記基板からの反射光を受光して前記基板の表面プロファイルを計測可能な光学式変位計と、 前記光を所定の参照面に照射したときの計測値を参照値として記憶する記憶手段と、 前記光学式変位計が計測した前記基板の表面プロファイルと、前記記憶手段に記憶された参照値とに基づいて、前記基板の反り量を算出する演算手段と、を有する。 【選択図】図１

Hermetic-sealing package member, production method therefor, and hermetically-sealed package production method using this hermetic-sealing package member

The present invention is to provide an hermetic-sealing package member including a substrate and at least one frame-like sealing material for defining a sealing region formed on the substrate, in which the sealing material is formed of a sintered body obtained by sintering at least one metal powder selected from gold, silver, palladium, or platinum having a purity of 99.9 wt % or greater and an average particle size of 0.005 μm to 1.0 μm, and with respect to an arbitrary cross-section toward an outside from the sealing region, a length of an upper end of the sealing material is shorter than a length of a lower end. Examples of a cross-sectional shape of the sealing material may include one formed to have a base portion having a certain height and at least one mountain portion protruding from the base portion or one formed to have a mountain portion having substantially a triangular shape in which the length of the lower end of the sealing material is a bottom. By use of the hermetic-sealing package member of the present invention, a load is reduced at the time of hermetic-sealing and a sufficient sealing effect can be obtained.