18-06-2020 дата публикации
Номер: US20200188870A1
A subject of the invention is a fluidized-bed reactor for producing granular polycrystalline silicon. The fluidized-bed reactor comprises a segmented reactor tube, which is disposed between a reactor top and a reactor bottom, a heating facility, at least one nozzle for supplying fluidizing gas, at least one nozzle for supplying reaction gas, a facility for supplying silicon seed particles, a product removal line, and an offgas removal line. The segmented reactor tube comprises a base segment and at least one spacer segment, there being disposed, between base segment and spacer segment, a flat seal made from a carbon-containing material, the spacer segment consisting of a material which, within a temperature range from to ° C., has a thermal conductivity of <2 W/mK. 115-. (canceled)16. A granular polycrystalline silicon fluidized-bed reactor , comprising:a segmented reactor tube disposed between a reactor top and a reactor bottom, one or more heaters, at least one nozzle for supplying fluidizing gas, at least one nozzle for supplying silicon-containing reaction gas, a silicon seed particle feed, a product removal line, and an off gas removal line, wherein the reactor tube comprises a base segment and at least one spacer segment, there being disposed, between base segment and spacer segment, a flat seal of a carbon-containing material, the spacer segment constructed of a material which, within a temperature range from 100 to 950° C., has a thermal conductivity of <2 W/mK.17. The fluidized-bed reactor of claim 16 , wherein the material of the spacer segment comprises fused silica.18. The fluidized-bed reactor of claim 16 , wherein the base segment consists of a material which claim 16 , within a temperature range from 500 to 1400° C. claim 16 , has a thermal conductivity of between 20 and 100 W/mK.1915. The fluidized-bed reactor of claim claim 16 , wherein at least one material of the base segment is selected from the group consisting of silicon claim 16 , silicon ...
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