20-01-2022 дата публикации
Номер: US20220016729A1
Принадлежит:
Provided is a femtosecond laser system for processing a micro-hole array, comprising: a femtosecond laser, a half-wave plate, a polarizer, a concave lens, a convex lens, a diaphragm, a mechanical shutter, a phase-type spatial light modulator, a first plano-convex lens, a reflecting mirror, a second plano-convex lens, a dichroic mirror, a camera, a processing objective lens, a six-axis translation stage and a transmissive white light source. 1. A femtosecond laser system for processing a micro-hole array , comprising: a femtosecond laser , a half-wave plate , a polarizer , a concave lens , a convex lens , a diaphragm , a mechanical shutter , a phase-type spatial light modulator , a first plano-convex lens , a reflecting mirror , a second plano-convex lens , a dichroic mirror , a camera , a processing objective lens , a six-axis translation stage and a transmissive white light source;wherein the femtosecond laser, the half-wave plate, the polarizer, the concave lens, the convex lens, the diaphragm and the mechanical shutter are sequentially arranged on a first optical axis;wherein the mechanical shutter is configured to control a femtosecond laser beam to be incident on the phase-type spatial light modulator to generate a spatially shaped femtosecond laser pulse;wherein the spatially shaped femtosecond laser pulse sequentially passes through the first plano-convex lens, the reflecting mirror, the second plano-convex lens and the dichroic mirror to reach the processing objective lens, and is focused by the processing objective lens to be irradiated on a sample to be processed on the six-axis translation stage to form the micro-hole array for the sample;wherein the half-wave plate and the polarizer together constitute an energy adjustment system for adjusting energy of the femtosecond laser and making a polarization direction of the emitted femtosecond laser beam horizontal;wherein the phase-type spatial light modulator is configured to perform phase modulation to the ...
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