07-03-2019 дата публикации
Номер: US20190072228A1
Принадлежит:
A vacuum adapter for feeding-through vacuum-insulated coolant lines from the surrounding atmosphere into a vacuum processing installation has an intermediate volume which is connected firstly to at least one insulation intermediate space of the vacuum-insulated feed lines and secondly to a vacuum pump. The pump capacity is available at least temporarily for evacuating the insulation intermediate space around the coolant lines. 11111222233031. Vacuum assembly structured to be connected to a vacuum room () and to coolant lines ( , , , ) in vacuum-insulated feed lines ( , ) , the vacuum assembly comprising:{'b': 4', '2', '2', '32', '33', '30', '31, 'an adapter () with an enclosure defining an intermediate volume (), the intermediate volume () being configured to fluidly connect to an insulation intermediate space (, ) of the vacuum-insulated feed lines (, ),'}{'b': 13', '14', '13', '14', '2', '1', '13', '14', '11', '12', '13', '14, 'sealing devices (, ) disposed at openings in a wall of the enclosure, the sealing devices (, ) being adapted to fluidly isolate the intermediate volume () from the vacuum room (), wherein the sealing devices (, ) are configured to allow the coolant lines (, ) to extend through the sealing devices (, ), and'}{'b': 5', '2', '40, 'a pump neck () formed in the wall of the enclosure and configured to fluidly communicate with the intermediate volume (), the pump neck being adapted to be connected with a vacuum pump ().'}2131112. Vacuum assembly according to claim 1 , wherein at least one of the sealing devices is a disc () made of a material that hinders heat conduction between the coolant lines ( claim 1 , ) and the wall.323233. Vacuum assembly according to claim 1 , wherein the enclosure includes a pressure sensor in the intermediate volume () that displays a drop in a pressure of the insulation intermediate space ( claim 1 , ).4141112. Vacuum assembly according to claim 1 , wherein at least one of the sealing devices is a bushing () made of a ...
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