19-01-2017 дата публикации
Номер: US20170016766A1
Принадлежит:
A spectroscopic analysis device for analysis of a sample comprising: a photonic integrated circuit (PIC) comprising: an input (DEF) for receiving light from the sample; and a demultiplexer (DEMUX) arranged to distribute the received light into at least a first optical chain (C) and a second optical chain (C); wherein each optical chain (C C) of the photonic integrated circuit C(PIC) further comprises a tunable bandpass filter (TBF TBF) and a variable attenuator (ATT ATT) and a photodetector (PD PD) arranged respectively to filter and to attenuate and to detect the light distributed into its corresponding optical chain (C C). 1. A spectroscopic analysis device for analysis of a sample of a substrate , the device comprising:a photonic integrated circuit (PIC) comprising:an input (DEF) for receiving light from the sample;a demultiplexer (DEMUX),{'b': 1', '2, 'at least a first optical chain (C) and a second optical chain (C),'}{'b': 1', '2, 'wherein the demultiplexer (DEMUX) is arranged to distribute the received light into the first optical chain (C) and a second optical chain (C);'}{'b': 1', '2', '1', '2', '1', '2', '1', '2', '1', '2, 'wherein each optical chain (C, C) of the photonic integrated circuit (PIC) further comprises a tunable bandpass filter (TBF, TBF) and a variable attenuator (ATT, ATT) and a photodetector (PD, PD) arranged respectively to filter and to attenuate and to detect the light distributed into its corresponding optical chain (C, C),'}wherein the spectroscope analysis device further comprises: [{'b': 1', '2, 'to control the two or more tunable bandpass filters (TFB, TFB),'}, {'b': 1', '2, 'to control the two or more variable attenuators (ATT, ATT),'}, {'b': 1', '2, 'to receive photodetector results obtained from the two or more photodetectors (PD, PD), and'}, 'to provide spectroscope analysis results based on the received photodetector results,, 'a controller (MC) arranged,'}{'b': 1', '2', '1', '2', '1', '2', '1', '2', '1', '2, 'wherein the ...
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