12-07-2018 дата публикации
Номер: US20180195853A1
An optical interferometer includes a branching-combining unit, a first optical system, a second optical system, and a drive unit, which can be MEMS-based components. The branching-combining unit includes a branching surface, an incident surface, an output surface, and a combining surface on an interface between the interior and the exterior of a transparent member. The branching-combining unit, on the branching surface, partially reflects incident light and outputs as first branched light, and transmits the rest of the incident light into the interior as second branched light. The branching-combining unit, on the combining surface, outputs the first branched light to the outside, reflects the second branched light, and combines the light beams to be output to the outside as combined light. 1. An optical interferometer comprising a branching-combining unit; a first optical system; a second optical system; and a drive unit , which are MEMS-based components , whereinthe branching-combining unit includes a branching surface, an incident surface, an output surface, and a combining surface on an interface between the interior and the exterior of a transparent member,the branching surface and the combining surface are provided separately,the branching surface partially reflects incident light entering from the outside and outputs as first branched light, and transmits the rest of the incident light into the interior as second branched light,the incident surface transmits the first branched light entering from the branching surface via the first optical system into the interior,the output surface outputs the second branched light reaching from the branching surface through the interior to the outside,the combining surface outputs the first branched light reaching from the incident surface through the interior to the outside, reflects the second branched light entering from the output surface via the second optical system, and combines the first branched light and the second ...
Подробнее