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Космические корабли и станции, автоматические КА и методы их проектирования, бортовые комплексы управления, системы и средства жизнеобеспечения, особенности технологии производства ракетно-космических систем

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Применить Всего найдено 37008. Отображено 100.

05-01-2012 дата публикации

Charged particle apparatus, scanning electron microscope, and sample inspection method

Номер: US20120004879A1

Автор: Atsuko Fukada, Muneyuki Fukuda, Noritsugu Takahashi, Tomoyasu Shojo

Принадлежит: Hitachi High Technologies Corp

An object of the invention is to be able to select easily and quickly inspection recipes which are appropriate to samples from any number of inspection recipes. A calculating device displays a plurality of inspection recipes on the GUI. An inspection recipe includes settings for controlling charged particle columns which irradiate charged particles on samples with a plurality of characteristics. Plural inspection recipes are arranged and displayed on a coordinate system which is specified by a plurality of axes having characteristic values (robustness variable of charge up, throughput of defect inspection, and accuracy of defect inspection) which have mutually trade-off relationships.

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Номер записи: 1

10-04-2016 дата публикации

Устройство для контрастного анализа элементного состава вещества с помощью рентгеновского излучения

Номер: RU0000161079U1

Автор: Александр Сергеевич Кубанкин, Андрей Николаевич Олейник, Рамазан Магомедшапиевич Нажмудинов

Принадлежит: Федеральное государственное автономное образовательное учреждение высшего профессионального образования "Белгородский государственный национальный исследовательский университет" (НИУ "БелГУ")

Устройство для анализа элементного состава вещества с помощью рентгеновского излучения, включающее источник излучения, образец с механизмом крепления и его перемещения, два детектора рентгеновского излучения для регистрации спектра излучения, прошедшего через образец, отличающееся тем, что устройство содержит вторичный излучатель в виде мозаичного кристалла, жестко закрепленного в подставке с возможностью ее перемещения, кроме того, детекторы рентгеновского излучения расположены симметрично под одним и тем же углом относительно направления брэгговского отражения от мозаичного кристалла. РОССИЙСКАЯ ФЕДЕРАЦИЯ (19) RU (11) (51) МПК G01N 23/223 (13) 161 079 U1 (2006.01) ФЕДЕРАЛЬНАЯ СЛУЖБА ПО ИНТЕЛЛЕКТУАЛЬНОЙ СОБСТВЕННОСТИ (12) ТИТУЛЬНЫЙ (21)(22) Заявка: ЛИСТ ОПИСАНИЯ ПОЛЕЗНОЙ МОДЕЛИ К ПАТЕНТУ 2015132833/28, 06.08.2015 (24) Дата начала отсчета срока действия патента: 06.08.2015 (45) Опубликовано: 10.04.2016 Бюл. № 10 1 6 1 0 7 9 R U (57) Формула полезной модели Устройство для анализа элементного состава вещества с помощью рентгеновского излучения, включающее источник излучения, образец с механизмом крепления и его перемещения, два детектора рентгеновского излучения для регистрации спектра излучения, прошедшего через образец, отличающееся тем, что устройство содержит вторичный излучатель в виде мозаичного кристалла, жестко закрепленного в подставке с возможностью ее перемещения, кроме того, детекторы рентгеновского излучения расположены симметрично под одним и тем же углом относительно направления брэгговского отражения от мозаичного кристалла. Стр.: 1 U 1 U 1 (54) УСТРОЙСТВО ДЛЯ КОНТРАСТНОГО АНАЛИЗА ЭЛЕМЕНТНОГО СОСТАВА ВЕЩЕСТВА С ПОМОЩЬЮ РЕНТГЕНОВСКОГО ИЗЛУЧЕНИЯ 1 6 1 0 7 9 Адрес для переписки: 308015, Белгородская обл., г. Белгород, ул. Победы, 85, ОИС НИУ "БелГУ", Цурикова Н.Д. (73) Патентообладатель(и): Федеральное государственное автономное образовательное учреждение высшего профессионального образования "Белгородский государственный национальный исследовательский ...

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Номер записи: 2

19-04-2018 дата публикации

Ячейка многопуансонного аппарата высокого давления и температуры для исследования веществ с использованием синхротронного излучения

Номер: RU0000178805U1

Автор: Антон Фарисович Шацкий, Константин Дмитриевич Литасов

Принадлежит: Федеральное государственное бюджетное учреждение науки Институт геологии и минералогии им. В.С. Соболева Сибирского отделения Российской академии наук (Институт геологии и минералогии СО РАН, ИГМ СО РАН)

Полезная модель относится к области изучения P-V-T уравнений состояния вещества при давлениях до 10 ГПа и температурах до 2000°С с использованием синхротронного излучения для применения в области наук о Земле и материаловедения. Ячейка многопуансонного аппарата высокого давления и температуры выполнена в виде пятисегментного октаэдра с усеченными ребрами и вершинами из керамического тугоплавкого материала с низкой теплопроводностью, содержит соосно установленные в трех центральных сегментах октаэдра вертикальный цилиндрический нагреватель с размещенными по краям токовводными пластинами и изолированную от нагревателя кассету с исследуемыми веществами, размещенную в выполненном из рентгенопрозрачной керамики центральном сегменте ячейки. Кассета состоит из двух или четырех, запираемых крышками, вертикально расположенных друг над другом цилиндров, в каждом из которых выполнены три вертикальных отверстия для заполнения исследуемыми веществами, при этом плоскость, проходящая через центр всех отверстий цилиндров, расположена перпендикулярно направлению прохождения рентгеновского луча. В нижней части центрального сегмента ячейки и нагревателя выполнено сквозное горизонтальное отверстие для размещения изолированных от нагревателя термоэлектродов термопары, спай которой расположен по оси нагревателя под кассетой с исследуемыми веществами. Техническим результатом является создание возможности одновременного исследования фазовых диаграмм и уравнений состояния от шести до двенадцати различных веществ с использованием синхротронного излучения при давлениях до 10 ГПа и температурах до 2000°С, что позволяет сократить время эксперимента и затраты на изготовление ячеек в шесть-двенадцать раз, а также получение качественных дифрактограмм исследуемых веществ. РОССИЙСКАЯ ФЕДЕРАЦИЯ (19) RU (11) (13) 178 805 U1 (51) МПК B01J 3/06 (2006.01) ФЕДЕРАЛЬНАЯ СЛУЖБА ПО ИНТЕЛЛЕКТУАЛЬНОЙ СОБСТВЕННОСТИ (12) ОПИСАНИЕ ПОЛЕЗНОЙ МОДЕЛИ К ПАТЕНТУ (52) СПК B01J 3/06 (2018.01) (21)(22) Заявка: 2017135029, ...

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Номер записи: 3

25-06-2019 дата публикации

Устройство для фиксации молочной железы при неинвазивном способе её исследования и/или лечения

Номер: RU0000190306U1

Автор: Александр Ефимович Беркович, Екатерина Александровна Бусько, Людмила Михайловна Удалова, Эрнст Иванович Деникин

Принадлежит: федеральное государственное автономное образовательное учреждение высшего образования "Санкт-Петербургский политехнический университет Петра Великого" (ФГАОУ ВО "СПбПУ")

Полезная модель относится к области медицины, а точнее, к техническим средствам (медицинская техника), предназначенным для обнаружения, диагностики и лечения опухолей в маммологии путем применения различных видов излучений, в том числе и ультразвукового. Сущность полезной модели заключается в том, что устройство для фиксации молочной железы при неинвазивном способе её исследования и/или лечения включает компрессионный блок, содержащий пару параллельно расположенных друг над другом прямоугольных пластин, верхняя из которых установлена подвижно относительно нижней пластины, в свою очередь, смонтированной на платформе, установленной с возможностью вертикального перемещения на стойке, которая закреплена на основании. Каждая из пары боковых сторон верхней пластины связана с соответствующими сторонами нижней пластины посредством пары ломающихся рычагов, концы которых шарнирно соединены со сторонами пластин, а собственно шарнир каждого ломающегося рычага снабжен зажимом, обеспечивающим, при необходимости, неподвижность его рычагов относительно друг друга, при этом нижняя пластина имеет разъёмную связь с платформой, а стойка выполнена в виде силового цилиндра, закреплённого на основании, и представляющего собой электроцилиндр. Технический результат полезной модели состоит в устранении механического привода перемещения верхней пластины в компрессионном блоке и трансформации последнего в малогабаритную конструкцию с ручным приводом. В результате устройство для фиксации молочной железы легко подстраивается под сидящую на стуле пациентку, что делает проводимые процедуры более комфортными. Кроме того, пространство над устройством дает больше возможностей при манипулировании активной частью прибора HIFU. РОССИЙСКАЯ ФЕДЕРАЦИЯ (19) RU (11) (13) 190 306 U1 (51) МПК A61B 6/00 (2006.01) ФЕДЕРАЛЬНАЯ СЛУЖБА ПО ИНТЕЛЛЕКТУАЛЬНОЙ СОБСТВЕННОСТИ (12) ОПИСАНИЕ ПОЛЕЗНОЙ МОДЕЛИ К ПАТЕНТУ (52) СПК A61B 6/00 (2019.02); A61B 6/502 (2019.02); A61B 6/4417 (2019.02); A61B 5/4312 (2019.02) (21)(22) ...

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Номер записи: 4

13-07-2021 дата публикации

Пиролизованный объектив для рентгеновского излучения

Номер: RU0000205417U1

Автор: Александр Кириллович Петров, Андрей Анатольевич Федянин, Владимир Олегович Бессонов, Ксения Александровна Абрашитова, Маргарита Ильгизовна Шарипова, Тигран Григорьевич Балуян

Принадлежит: Федеральное государственное бюджетное образовательное учреждение высшего образования "Московский государственный университет имени М.В.Ломоносова" (МГУ)

Полезная модель относится к области рентгеновской оптики, а именно к устройствам фокусировки рентгеновского излучения на основе рентгеновской оптики. Технический результат, достигаемый при использовании заявляемой полезной модели, заключается в уменьшении фокусного расстояния и радиуса кривизны объектива (СПРЛ) в результате использования метода двухфотонной полимеризации с субмикронным разрешением и постобработки (пиролиза), позволяющего добиться кратного (преимущественно, пятикратного) уменьшения линейных размеров изготовленных структур. Заявляемый технический результат достигается тем, что объектив для рентгеновского излучения, включающий по меньшей мере две единичные линзы на одной плоской подложке, расположенные на общей оптической оси, выполненные из фоторезиста и имеющие параболический профиль по меньшей мере одной рабочей поверхности, согласно техническому решению, представляет собой пиролизованную структуру и имеет радиус кривизны каждой линзы в вершине параболоида до 0,1 мкм. Техническим преимуществом заявляемой полезной модели является также повышение устойчивости объектива к рентгеновскому излучению за счет изменения химического состава материала для изготовления линз. 7 з.п. ф-лы, 5 ил. РОССИЙСКАЯ ФЕДЕРАЦИЯ (19) RU (11) (13) 205 417 U1 (51) МПК G21K 1/06 (2006.01) G02B 3/00 (2006.01) ФЕДЕРАЛЬНАЯ СЛУЖБА ПО ИНТЕЛЛЕКТУАЛЬНОЙ СОБСТВЕННОСТИ (12) ОПИСАНИЕ ПОЛЕЗНОЙ МОДЕЛИ К ПАТЕНТУ (52) СПК G21K 1/06 (2021.02); G02B 3/00 (2021.02) (21)(22) Заявка: 2020144233, 31.12.2020 (24) Дата начала отсчета срока действия патента: Дата регистрации: 13.07.2021 (45) Опубликовано: 13.07.2021 Бюл. № 20 2 0 5 4 1 7 R U (56) Список документов, цитированных в отчете о поиске: RU 2692405 C2, 24.06.2019. RU 2366015 C1, 27.08.2009. RU 2297681 C2, 20.04.2007. RU 2298852 C1, 10.05.2007. CN 2784948 Y, 31.05.2006. CN 202034080 U, 09.11.2011. (54) ПИРОЛИЗОВАННЫЙ ОБЪЕКТИВ ДЛЯ РЕНТГЕНОВСКОГО ИЗЛУЧЕНИЯ (57) Реферат: Полезная модель относится к области включающий по меньшей мере две единичные ...

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Номер записи: 5

18-01-2022 дата публикации

Встроенное устройство удаленного контроля аккумуляторной батареи

Номер: RU0000208863U1

Автор: Алексей Андреевич Баранов, Владимир Юрьевич Попов, Сергей Витальевич Нелюбов

Принадлежит: Общество с ограниченной ответственностью "ФОРВАРД РИСЕРЧ ЭНД ДЕВЕЛОПМЕНТ" (ООО "ФОРВАРД РИСЕРЧ ЭНД ДЕВЕЛОПМЕНТ")

Полезная модель относится к системам контроля и диагностики параметров аккумуляторных батарей, а именно тяговых и стартерных аккумуляторов, и предназначена для накопления и передачи данных об аккумуляторах производителю или потребителю. Технический результат заключается в повышении эффективности передачи данных об их состоянии после производства производителем или потребителем. Встроенное устройство удаленного контроля аккумуляторной батареи, выполненное с возможностью размещения в крышке стартерных и тяговых аккумуляторных батарей, включающее микропроцессор, измеритель напряжения, датчик температуры, схему питания, отличающееся тем, что дополнительно содержит акселерометр, аналого-цифровой преобразователь, приемопередатчик BLUETOOTH, выполненный с возможностью считывания, приемопередающий тракт канала BLUETOOTH трансивера, крышку, маркированную QR-кодом и штрих-кодом, при этом микропроцессор выполнен с возможностью передачи данных от измерителя напряжения, температурного датчика и акселерометра через приемопередающий тракт канала BLUETOOTH трансивера и через интернет-канал на сервер сбора данных. РОССИЙСКАЯ ФЕДЕРАЦИЯ (19) RU (11) (13) 208 863 U1 (51) МПК G01R 31/36 (2006.01) H01M 10/48 (2006.01) ФЕДЕРАЛЬНАЯ СЛУЖБА ПО ИНТЕЛЛЕКТУАЛЬНОЙ СОБСТВЕННОСТИ (12) ОПИСАНИЕ ПОЛЕЗНОЙ МОДЕЛИ К ПАТЕНТУ (52) СПК G01R 31/36 (2021.08); H01M 10/48 (2021.08) (21)(22) Заявка: 2021128905, 04.10.2021 (24) Дата начала отсчета срока действия патента: Дата регистрации: Приоритет(ы): (22) Дата подачи заявки: 04.10.2021 (45) Опубликовано: 18.01.2022 Бюл. № 2 (54) ВСТРОЕННОЕ УСТРОЙСТВО УДАЛЕННОГО КОНТРОЛЯ АККУМУЛЯТОРНОЙ БАТАРЕИ (57) Реферат: Полезная модель относится к системам напряжения, датчик температуры, схему питания, контроля и диагностики параметров отличающееся тем, что дополнительно содержит аккумуляторных батарей, а именно тяговых и акселерометр, аналого-цифровой стартерных аккумуляторов, и предназначена для преобразователь, приемопередатчик накопления и передачи данных об ...

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Номер записи: 6

02-02-2012 дата публикации

Cryogenic specimen holder

Номер: US20120024086A1

Автор: Alan C. Robins, Christine M. Thomas, Halina Stabacinskiene, Jeffrey J. Gronsky, Paul E. Fischione, Pushkarraj V. Deshmukh

Принадлежит: Fischione E A Instruments Inc

An improved cryogenic specimen holder for imaging and analysis facilitates imaging at very high tilt angles with a large field of view. A retractable specimen holder tip protects the specimen during transport. An optimized Dewar design is positioned at a fixed, tilted angle with respect to the axis of the holder, providing a means of continuously cooling the specimen irrespective of the high tilt angle and the amount of liquid nitrogen present in the vessel. The Dewar neck design reduces the entrapment of nitrogen gas bubbles and its shape prevents the spilling of liquid nitrogen at high tilt angles. The specimen holder has a retractable tip that completely encapsulates the specimen within a shielded environment internal to the specimen holder body. The cooling and specimen transfer mechanisms reduce thermal drift and the detrimental effects of vibrations generated by both the evaporation of liquid nitrogen present in the Dewar as well as other environmental effects.

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Номер записи: 7

02-02-2012 дата публикации

Charged particle beam system

Номер: US20120025094A1

Автор: Gerd Benner, Harald Niebel

Принадлежит: Carl Zeiss NTS GmbH

A charged particle beam system for performing precession diffraction includes a lens 11 for focusing a beam 5 in an object plane 9, and an objective lens 13 having a diffraction plane 27. A doublet 53 of lenses 35, 63 images the diffraction plane 27 into an intermediate diffraction plane 69 where a multipole 55 is located. A doublet 57 of lenses 65, 93 images the intermediate diffraction plane 69 into an intermediate diffraction plane 71 where a multipole 59 is located. A first deflection system 15 upstream of the object plane 9 can tilt to change an angle of incidence of the beam on the object plane. A second deflection system 37 between lenses 35 and 63 tilts the beam such that the change of the angle of incidence of the charged particle beam on the object plane is compensated.

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Номер записи: 8

16-02-2012 дата публикации

Performance evaluation method with x-ray and its usage

Номер: US20120037800A1

Автор: Nobuyuki Tadokoro, Supaporn PANNAKARN, Sureerat KUNCHOO, Veraphat PARNICH

Принадлежит: Hoya Corp, Hoya Lens Thailand Ltd

An aspect of the present invention relates to a method of evaluating performance of a film-forming material for forming a functional film on an eyeglass lens substrate or a functional film formed by the use of the film-forming material. The performance to be evaluated is selected from the group consisting of a sliding sensation of a surface of the functional film and an adhesion of the functional film, and the evaluation is conducted based on a change over time in a quantity of photoelectrons generated by irradiating with an X-ray the film-forming material or the functional film.

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Номер записи: 9

01-03-2012 дата публикации

X-ray fluorescence analyzer and x-ray fluorescence analysis method

Номер: US20120051507A1

Автор: Hideki Takiguchi, Kiyoshi Hasegawa, Yutaka Ikku

Принадлежит: SII NanoTechnology Inc

The X-ray fluorescence analyzer ( 100 ) includes: an enclosure ( 10 ); a door ( 20 ) for putting the sample into and out of the enclosure; a height measurement mechanism ( 7 ) capable of measuring a height at the irradiation point; a moving mechanism control unit ( 9 ) for adjusting a distance between the sample and the radiation source as well as the X-ray detector based on the measured height at the irradiation point; a laser unit ( 7 ) for irradiating the irradiation point with a visible light laser beam; a laser start control unit ( 9 ) for irradiating the visible light laser beam by the laser unit ( 7 ) when the door is open state; and a height measurement mechanism start control unit ( 9 ) for starting the height measurement mechanism to measure the height at the irradiation point when the door is opened.

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Номер записи: 10

01-03-2012 дата публикации

Method of Processing Radiation Spectra Diffused Through a Material in Order to Obtain a Primary Diffuse Radiation Spectrum Through Said Material, Associated Device and Computer Program

Номер: US20120051517A1

Автор: Caroline Paulus, Jean Rinkle, Joachim Tabary

Принадлежит: Commissariat a lEnergie Atomique et aux Energies Alternatives CEA

A method and device for obtaining a first radiation spectrum diffused through a material, in which the material is exposed to an incident irradiation beam emitted by a radiation source. A first radiation spectrum diffused through the material is measured by means of a main detector, arranged so that its observation field intersects the irradiation beam inside the material. At least one secondary radiation spectrum diffused through the material is measured by means of at least one secondary detector and a measurements matrix (X) is constructed starting from previously measured spectra. The measurements matrix is decomposed in two non-negative matrices, a weights matrix (A) and a spectra matrix (S), where the spectra matrix includes an estimated multiple diffuse radiation spectrum and an estimated primary diffuse radiation spectrum. The device includes a microprocessor and computer program. A computer program product for implementing the method is also provided.

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Номер записи: 11

01-03-2012 дата публикации

X-ray scattering measurement device and x-ray scattering measurement method

Номер: US20120051518A1

Автор: Boris Verman, Kazuhiko Omote, Licai Jiang

Принадлежит: Rigaku Corp

A X-ray scattering measurement device and measurement method can measure, with high resolution, the intensity of X-rays which have undergone small-angle scattering and diffraction with reflection geometry and can easily and accurately measure a microstructure on the surface of a sample. The X-ray scattering measurement device is suitable for microstructural measurement on the surface of a sample includes an X-ray source that generates an X-ray; a first mirror and a second mirror that continuously reflect the generated X-ray; a sample stage that supports the sample; and a two-dimensional detector that detects the X-ray scattered on the surface of the sample. The first mirror focuses the generated X-ray onto the two-dimensional detector within a plane parallel to the surface of the sample, and the second mirror focuses the X-ray reflected by the first mirror onto the surface of the sample within a plane perpendicular to the surface of the sample.

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Номер записи: 12

01-03-2012 дата публикации

X-ray imaging apparatus

Номер: US20120051519A1

Автор: Masahiro Abe

Принадлежит: Canon Inc

An X-ray imaging apparatus that performs X-ray imaging while switching a plurality of wireless sensors according to an imaging condition of an object includes: an acquisition unit that acquires examination information indicating the imaging condition of the object; a management unit that manages, as sensor information, remaining battery levels of the plurality of wireless sensors that have been registered; a control unit that assigns a priority order of wireless sensor candidates usable for performing the X-ray imaging according to the imaging condition indicated in the acquired examination information to the plurality of wireless sensors, in descending order of the remaining battery levels; and an imaging unit that performs the X-ray imaging of the object using wireless sensors sequentially consisting of those in descending order of the priority order assigned by the control unit up to a wireless sensor having a preset order number, as determined according to the imaging condition.

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Номер записи: 13

08-03-2012 дата публикации

Scan method

Номер: US20120057015A1

Автор: Billy W. Ward

Принадлежит: Carl Zeiss NTS LLC

In general, in one aspect, the disclosure features a method and system for imaging of samples, for example, imaging samples with charged particles.

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Номер записи: 14

22-03-2012 дата публикации

Method for through-casing 3-phase saturation determination

Номер: US20120068060A1

Автор: David M. Chace, Elton Frost, Jr., Feyzi Inanc, Rafay Z. Ansari, W. Allen Gilchrist, Jr.

Принадлежит: Baker Hughes Inc

A method for estimating a parameter of interest of an earth formation having a fluid contained in pores of the earth formation, the method includes: conveying a carrier through a borehole penetrating the earth formation; irradiating the earth formation with neutrons from a neutron source disposed at the carrier; measuring radiation emitted from the earth formation resulting from the irradiating using at least one detector; calculating or determining a mathematical parameter from radiation measured by the at least one detector; predicting values of the mathematical parameter over a range of values of an earth formation property; and comparing the mathematical parameter to the predicted values to estimate the parameter of interest.

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Номер записи: 15

22-03-2012 дата публикации

System and method for x-ray inspection

Номер: US20120069964A1

Автор: Axel Scholling

Принадлежит: SMITHS HEIMANN GMBH

Methods and systems for x-ray inspection are provided. The system can include a source of radiant energy configured so that the radiant energy traverses a scanning volume. The system can further include a filter between the source and the scanning volume, a conveying apparatus configured to impart relative motion between an exposure-limited subject and the scanning volume, a conveyance monitor configured to generate conveyance data reflecting a conveyance state of the exposure-limited subject, a radiant energy sensing apparatus configured to sense radiant energy from the source and to generate source radiant energy data, and a dose controller configured to acquire conveyance data, source radiant energy data, and a signal related to subject dose data, and to generate a measure that a portion of the exposure-limited subject has acquired a dose of radiant energy above a dose threshold.

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Номер записи: 16

05-04-2012 дата публикации

System and method for removing organic residue from a charged particle beam system

Номер: US20120080056A1

Автор: HONG Xiao

Принадлежит: Hermes Microvision Inc

A system and method for removing an organic residue from a charged particle beam system includes a conduit that is coupled to the column and is for adding oxygen to the column. A heater is coupled to the column and is for increasing the temperature in the column. A pump is coupled to the column and is for removing a gas from the chamber, wherein the gas is a byproduct of a chemical reaction of the organic residue and the oxygen.

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Номер записи: 17

12-04-2012 дата публикации

Multi-Modal Medical Imaging and Type Detection

Номер: US20120089005A1

Автор: Ghobad Heidari-Bateni, Rahim Bagheri

Принадлежит: WiLinx Corp

A multi-modal medical imaging and type detection have been described have been disclosed. By combining a broadband radio imaging system and one or more other modalities of image processing an enhanced image and/or tissue classification can be produced.

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Номер записи: 18

26-04-2012 дата публикации

Scanning electron microscope device and pattern dimension measuring method using same

Номер: US20120098953A1

Автор: Atsushi Miyamoto, Go Kotaki, Ryoichi Matsuoka

Принадлежит: Hitachi High Technologies Corp

In a panoramic image construction technology of dividing a wide-range imaging area (EP) of semiconductor patterns into a plurality of imaging areas (SEP), and joining a group of images, which are obtained by imaging the SEPs using an SEM, through image processing, a fact that although a pattern serving as a key to joining is not contained in an overlap area between some of the SEPs, all the images can be joined in some cases is noted so that: although the number of patterns serving as keys to joining is small, SEPs whose images are all joined can be determined; or even if such SEPs cannot be determined, SEPs satisfying user's request items as many as possible can be determined. The cases are extracted by optimizing an SEP arrangement, whereby the number of cases in which SEPs whose images are all joined can be determined is increased.

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Номер записи: 19

03-05-2012 дата публикации

Apparatus and method for multi-modal imaging using multiple x-ray sources

Номер: US20120106702A1

Автор: Gilbert D. Feke

Принадлежит: Carestream Health Inc

An imaging system for imaging at least a first and a second subject has a support stage to support the subjects. An imaging system has an ionizing radiation imaging section with at least a first ionizing radiation source for directing ionizing radiation within a first zone that includes the first subject and a second ionizing radiation source for directing ionizing radiation within a second zone that lies substantially outside the first zone and that includes the second subject. At least one imaging receiver forms an image of the subject within each zone. A camera system obtains at least one image of the at least first and second subjects. A computer is in signal communication with the imaging system and energizable to form a combined image from two or more images of the same subjects.

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Номер записи: 20

03-05-2012 дата публикации

Method for predicting weight gain associated with a pharmaceutical therapy

Номер: US20120108947A1

Автор: Jennifer Kay Leohr

Принадлежит: Eli Lilly and Co

Methods for using TRL V6 as a biomarker for the risk of weight gain associated with treatment of a patient with a pharmaceutical agent, as for example, olanzapine.

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Номер записи: 21

17-05-2012 дата публикации

Method and Apparatus for Rapid Preparation of Multiple Specimens for Transmission Electron Microscopy

Номер: US20120119084A1

Автор: Frederick F. Shaapur, Roger J. Graham

Принадлежит: NANOTEM Inc

A method and apparatus for in-situ lift-out rapid preparation of TEM samples. The invention uses adhesives and/or spring-loaded locking-clips in order to place multiple TEM-ready sample membranes on a single TEM support grid and eliminates the use of standard FIB-assisted metal deposition as a bonding scheme. Therefore, the invention circumvents the problem of sputtering from metal deposition steps and also increases overall productivity by allowing for multiple samples to be produced without opening the FIB/SEM vacuum chamber.

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Номер записи: 22

31-05-2012 дата публикации

Mass Spectrometer

Номер: US20120132799A1

Автор: Kazuteru Takahashi, Kiyoshi Ogawa, Mitsutoshi Setou

Принадлежит: Shimadzu Corp

A samples stage ( 2 ) on which a sample ( 4 ) is placed can reciprocally move along a guide ( 5 ) by a driving mechanism. An image taken by an imaging unit ( 7 ) when the sample stage ( 2 ) is at an observation position (A) is processed by an image processor ( 34 ) and is displayed on a window of a display unit ( 38 ). When an analysis operator specifies a measurement area by an operation unit ( 37 ), a controller ( 3 ) moves, through a stage driver ( 33 ), the stage ( 2 ) to a sample operation position (B) and a matrix is applied to the specified measurement area by an ejector ( 9 ). After that, the stage ( 2 ) is moved to an analysis position (C) and a laser light is delivered onto the measurement area on the sample ( 4 ) to which the matrix was applied, and the ionization by the MALDI method is performed. This eliminates the need to take out the sample from the apparatus to apply the matrix after the measurement point or measurement area is determined based on a microscopic observation of the sample. Accordingly, the efficiency of the measurement can be increased, and since no positional error of the sample occurs, it is possible to perform an imaging mass analysis for a measurement area of interest with high positional accuracy.

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Номер записи: 23

31-05-2012 дата публикации

Method and system for deriving molecular interference functions from xrd profiles

Номер: US20120133516A1

Автор: Geoffrey Harding

Принадлежит: Morpho Detection LLC

A method for identifying a substance includes determining a first molecular interference function (MIF) for a first substance. The method also includes determining a second MIF for a second substance. The method further includes generating a residual MIF at least partially based on a comparison of the second MIF to the first MIF. The method also includes identifying the type of substance based on the residual MIF.

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Номер записи: 24

07-06-2012 дата публикации

Signal Processing Method for Charged Particle Beam Device, and Signal Processing Device

Номер: US20120138796A1

Автор: Fumihiro Sasajima, Katsumi Setoguchi

Принадлежит: Hitachi High Technologies Corp

Provided is a signal processing method for a charged particle beam, and a signal processing device, wherein the amount of beam radiation per unit area is restricted, while maintaining the magnifications in the X and Y directions constant. Proposed, in order to achieve the above-mentioned purpose, is a signal processing method and a signal processing device wherein a plurality of images taken at different places are added up, and an image is formed. Proposed as a specific example is a signal processing method and a signal processing device that obtains a repeating pattern formed on a sample and having the same shape or similar shapes, by moving the field of view, and that forms an image (or a signal waveform) by adding up the obtained signal, and conducts measurements using this image.

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Номер записи: 25

07-06-2012 дата публикации

Particle beam device with deflection system

Номер: US20120138814A1

Автор: Armin Heinz Hayn, Dirk Preikszas

Принадлежит: Carl Zeiss Microscopy Ltd, Carl Zeiss NTS GmbH

A particle beam device includes a particle beam generator, an objective lens, and first and second deflection systems for deflecting the particle beam in an object plane defined by the objective lens. In a first operating mode, the first deflection system generates a first deflection field and the second deflection system generates a second deflection field. In a second operating mode, the first deflection system generates a third deflection field and the second deflection system generates a fourth deflection field.

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Номер записи: 26

21-06-2012 дата публикации

Detecting forgery of Art, Bonds and Other Valuables by Neutron Activation and Method Thereof

Номер: US20120155593A1

Автор: Ioan G. Crihan

Принадлежит: Individual

Apparatus and method for detecting forgery by neutron activation of art objects or other valuables such as bonds, wills, etc. comprising of a device applying neutron irradiation to a reference spot sufficient to produce radiation including gamma rays; immediately thereafter, a device and method of the invention determines and records the rate of emission as a function of time that results from the application of the thermal neutron irradiation to the reference spot and produces ‘initial’ data thereof; at one or several selected subsequent intervals thereafter, the device and method determines and records the quantitative measures of the radiation emission in the gamma ranges of energy emanating from the reference spot taken at time intervals after activation and produces ‘subsequent’ data, and a device and method compares ‘initial’ data with ‘subsequent’ data.

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Номер записи: 27

05-07-2012 дата публикации

Nuclear gauges and methods of configuration and calibration of nuclear gauges

Номер: US20120169456A1

Автор: Dirk M. Steckmann, Donald E. Weger, Robert E. Troxler

Принадлежит: Individual

Nuclear gauges and method of configuration and methods of calibrations of the nuclear gauges are provided. The nuclear gauges are used in measuring the density and/or moisture of construction-related materials. The nuclear gauge can include a gauge housing having a vertical cavity therethrough and at least one radiation detector located within the housing. The nuclear gauge can include a vertically moveable source rod and a radiation source operatively positioned within a distal end of the source rod.

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Номер записи: 28

19-07-2012 дата публикации

High-Vacuum Variable Aperture Mechanism And Method Of Using Same

Номер: US20120181444A1

Автор: Mohammed Tahmassebpur

Принадлежит: KLA Tencor Corp

A novel technique is disclosed for varying a size of an aperture within a vacuum chamber. A drive mechanism within the vacuum chamber is used to adjust a partial horizontal overlap between at least two blades, wherein a perimeter of the aperture opening is defined by edges of said blades. In one embodiment, a variable aperture mechanism includes first and second blades attached to a first support, and third and fourth blades attached to a second support. The first blade is spaced vertically above the second blade on the first support; a second support, and the fourth blade is spaced vertically above the third blade on the second support. There is a partial horizontal overlap between the first and third blades and between the fourth and second blades, and the aperture opening has a perimeter defined by edges of the four blades. Other embodiments are also disclosed.

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Номер записи: 29

16-08-2012 дата публикации

Multiple-pole electrostatic deflector for improving throughput of focused electron beam instruments

Номер: US20120205537A1

Автор: Xinrong Jiang

Принадлежит: KLA Tencor Corp

One embodiment relates to a focused electron beam imaging apparatus. The apparatus includes an electron beam column, an electron source, a gun lens, a pre-scanning deflector, a main scanning deflector, an objective lens, and a detector. The pre-scanning deflector comprises a 12-pole electrostatic deflector which is configured to controllably deflect the electron beam away from the optical axis of the electron beam column. Another embodiment relates to a method of scanning an electron beam over a target substrate in a focused electron beam imaging instrument. The electron beam is controllably deflected, without third-order deflection aberrations, away from an optical axis of an electron beam column using a pre-scanning deflector. The electron beam is then controllably deflected back towards the optical axis using a main scanning deflector so that the electron beam passes through a center of an objective electron lens. Other embodiments, aspects and features are also disclosed.

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Номер записи: 30

30-08-2012 дата публикации

An x-ray detector system for assessing the integrity and performance of radiation protective garments

Номер: US20120219113A1

Автор: Thomas J. Beck

Принадлежит: Beck Thomas J

A method for quantitatively testing a radiation shielding garment to determine its radiation shielding integrity, utilizing a fluoroscopic system, the method comprising measuring the amount of radiation passing through the garment at a particular location believed to be possibly damaged; measuring the amount of radiation at one or more locations of the garment believed to be intact; determining the average undamaged transmission if more than one location is tested; and comparing the two values of transmitted radiation to determine whether the first location was damaged beyond an acceptable degree.

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Номер записи: 31

06-09-2012 дата публикации

Adaptive scanning of materials using nuclear resonance fluorescence imaging

Номер: US20120224669A1

Автор: Robert J. Ledoux, William Bertozzi

Принадлежит: Passport Systems Inc

A method for detecting nuclear species in a sample by adaptive scanning using nuclear resonance fluorescence may comprise illuminating the target sample with photons from a source; detecting a signal in an energy channel; determining a scan evaluation parameter using the signal detected; determining whether the scan evaluation parameter meets a detection efficiency criterion; adjusting one or more system parameters such that the scan evaluation parameter meets the detection efficiency criterion; and comparing the signal in an energy channel to a predetermined species detection criterion to identify a species detection event. In another embodiment, detecting a signal in an energy channel may further comprise detecting photons scattered from the target sample. In another embodiment, detecting a signal in an energy channel may further comprise detecting photons transmitted through the target sample and scattered from at least one reference scatterer.

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Номер записи: 32

20-09-2012 дата публикации

Power distribution system for building and protection method for main line thereof

Номер: US20120236455A1

Автор: Hiroaki Koshin, Yoshikazu Shikata

Принадлежит: Panasonic Corp

A power distribution system for a building includes an electric current sensor for detecting a value of a current flowing from a commercial AC power source through a main line in a building and a storage battery installed in the building. When the current value detected by the electric current sensor reaches a predetermined value, a supply of an electric power to the building from the storage battery is initiated. The power distribution system further includes an overcurrent protection unit. The building includes sections individually equipped with electric power supply systems, and the overcurrent protection unit protects the main line of the building from an overcurrent by initiating the supply of the electric power from the storage battery to the building when the current value detected by the electric current sensor becomes equal to or greater than a predetermined current value for the initiation of main line protection.

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Номер записи: 33

27-09-2012 дата публикации

Mask inspection apparatus and mask inspection method

Номер: US20120241645A1

Автор: Hiroyuki Kashiwagi, Masamitsu Itoh, Masato Naka, Shinji Yamaguchi

Принадлежит: Individual

According to one embodiment, a mask inspection apparatus includes a decompression chamber, a holder, a light irradiation unit, a detection unit, an electrode, and a control unit. The holder is provided in the decompression chamber and holds a mask. The light irradiation unit irradiates a major surface of the mask held by the holder with a light. The detection unit is provided in the decompression chamber to detect electrons generated when the major surface of the mask is irradiated with the light. The electrode is provided between the holder and the detection unit and guides the electrons in a direction from the holder toward the detection unit. The control unit compares a detection result of the electrons detected by the detection unit with a reference value.

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Номер записи: 34

11-10-2012 дата публикации

Charged particle beam analyzer and analysis method

Номер: US20120257720A1

Автор: Masanari Koguchi, Yoshihiro Anan

Принадлежит: HITACHI LTD

In a charged particle beam analyzer irradiating a charged particle beam to a sample in a vacuum container and detecting an X-ray generated from the sample to analyze the sample, two or more X-ray lenses configured in different manners are provided in the vacuum container. This no longer requires air opening in the vacuum container following X-ray lens replacement and also no longer requires vacuuming, making it possible to perform analysis with high efficiency and high sensitivity.

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Номер записи: 35

18-10-2012 дата публикации

Transmission electron microscope micro-grid

Номер: US20120261588A1

Автор: Shou-Shan Fan, Yang Wei

Принадлежит: Hon Hai Precision Industry Co Ltd, TSINGHUA UNIVERSITY

A transmission electron microscope (TEM) micro-grid includes a grid and a carbon nanotube composite film covered thereon. The carbon nanotube composite film includes a carbon nanotube film and a layer of nano-materials coated thereon. The carbon nanotube composite film covers a surface of the grid. The nano-material layer is coated on a surface of each of the plurality of carbon nanotubes.

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Номер записи: 36

18-10-2012 дата публикации

System and method for correcting x-ray diffraction profiles

Номер: US20120263275A1

Автор: Gabriel Zienert, Geoffrey Harding

Принадлежит: Morpho Detection LLC

A method for correcting an X-ray diffraction (XRD) profile measured by an X-ray diffraction imaging (XDi) system is provided. The XDi system includes an anode, a detector, and a control system. The method includes obtaining an emission spectrum of the anode using the control system. The emission spectrum includes spectral structures. The method further includes calculating a piecewise spectral-correction function using the spectral structures in the emission spectrum, obtaining a measured spectrum of an object, and applying the spectral-correction function to the measured spectrum to generate a spectrally-corrected measured spectrum.

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Номер записи: 37

18-10-2012 дата публикации

Protection device for x-ray instrumentation

Номер: US20120263278A1

Автор: Monte J. Solazzi

Принадлежит: Solazzi Monte J

An accessory, method, and system is provided for protecting the lower chamber of X-ray spectroscopic instrumentation during analysis, the instrumentation including an upper chamber, a lower chamber, and a dividing plate, the lower chamber including an X-ray detector and an excitation source, the accessory including: a frame with a centrally-located aperture extending from one side of the frame to an opposite side of the frame; an adhesive layer disposed on each side of the frame; a thin film of polymeric material disposed on one side of the frame; and a removably attached release sheet on the adhesive layer disposed on the opposite side of the frame, where the accessory is disposed on a surface of the dividing plate to protect the lower chamber of the instrumentation from damage.

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Номер записи: 38

25-10-2012 дата публикации

Versatile X-Ray Beam Scanner

Номер: US20120269319A1

Автор: Jeffrey R. Schubert, Lee Grodzins, Omar Al-Kofahi, Peter J. Rothschild

Принадлежит: American Science and Engineering Inc

Apparatus for interrupting and/or scanning a beam of penetrating radiation, such as for purposes of inspecting contents of a container. A source, such as an x-ray tube, generates a fan beam of radiation effectively emanating from a source axis, with the width of the fan beam collimated by a width collimator, such as a clamshell collimator. An angular collimator, stationary during the course of scanning, limits the extent of the scan, and a multi-aperture unit, such as a hoop, or a nested pair of hoops, is rotated about a central axis, and structured in such a manner that the total beam fluence incident on a target is conserved for different fields of view of the beam on the target. The central axis of hoop rotation need not coincide with the source axis.

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Номер записи: 39

01-11-2012 дата публикации

Method for making low stress pdc

Номер: US20120272582A1

Автор: Robert Frushour

Принадлежит: Individual

A method for making PDC with excellent abrasion resistance at high pressure in a single HPHT step without introducing high residual internal stress. In one aspect of the method, the diamond mass is subjected to an initial high pressure to compact the mass. The initial pressure is then lowered to a second pressure prior to the application of heat to the reaction cell. In another aspect, the diamond mass is subjected to an initial pressure to compact the mass, followed by raising the temperature to melt the sintering aid. The initial pressure is then lowered to a second pressure prior to lowering the temperature below the melting point of the sintering aid.

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Номер записи: 40

15-11-2012 дата публикации

Charged particle beam microscope and method of measurement employing same

Номер: US20120287258A1

Автор: Hideki Kikuchi, Ruriko Tsuneta

Принадлежит: Hitachi High Technologies Corp

The electric charged particle beam microscope includes an electric charged particle source; a condenser lens converging electric charged particles emitted from the electric charged particle source on a specimen; a deflector scanning the converged electric charged particles over the specimen; a control unit of the deflector; a specimen stage on which the specimen is mounted; a detector detecting the electric charged particles; a computer forming an image from a control signal from the deflector and an output signal from the detector; and a display part connected with the computer. The control unit of the deflector can change the scan rate of the electric charged particles. A first rate scan image is obtained at a first rate and a second rate scan image is obtained at a second rate slower than the first rate.

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Номер записи: 41

29-11-2012 дата публикации

Method of Extracting Contour Lines of Image Data Obtained By Means of Charged Particle Beam Device, and Contour Line Extraction Device

Номер: US20120300054A1

Автор: Hiroaki Mito, Ryoichi Matsuoka

Принадлежит: Hitachi High Technologies Corp

The present invention is intended to provide a contour extraction method and a contour extraction device with an objective of either suppression of unnecessary contouring processings or selective contouring of necessary portions. To attain the objective, provided are a contour extraction method, and a device, with which contours of pattern edges on an image formed based on charged particles emitted from a sample are extracted and, when contouring of a pattern located in an overlapping region provided in connecting images of plural image-capturing regions to form a synthesized image is performed, either areas of the pattern in the plurality of image-capturing regions, or a pre-set measurement portion is found, and selective contour extraction of the pattern with respect to an image of an image-capturing region is carried out either on a side where the area is large, or on a side where a measurement portion regarding the pattern is located.

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Номер записи: 42

29-11-2012 дата публикации

Observation method and observation device

Номер: US20120300056A1

Автор: Kenji Obara, Naoma Ban

Принадлежит: Hitachi High Technologies Corp

With respect to a charged particle beam device, the step size of focal point measure for executing autofocusing is optimized to a value that is optimal with respect to the spread of an approximation curve for a focal point measure distribution. The step size of focal point measure for executing autofocusing is corrected using an image feature obtained based on a layout image derived from an image obtained at a first magnification or from design data. Autofocusing is executed based on the obtained step size to carry out observation, measurement, or to image the sample under inspection.

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Номер записи: 43

20-12-2012 дата публикации

Solid material characterization with x-ray spectra in both transmission and fluoresence modes

Номер: US20120321039A1

Автор: Nan Greenlay, Shelly D. Kelly, Simon Russell Bare, Wharton Sinkler

Принадлежит: UOP LLC

Methods are disclosed utilizing synchrotron X-ray microscopy including x-ray fluorescence and x-ray absorption spectra to probe elemental distribution and elemental speciation within a material, and particularly a solid that may have one or more elements distributed on a solid substrate. Representative materials are relatively homogeneous in composition on the macroscale but relatively heterogeneous on the microscale. The analysis of such materials, particularly on a macroscale at which their heterogeneous nature can be observed, provides valuable insights into the relationships or correlations between localized concentrations of elements and/or their species, and concentrations of other components of the materials. Sample preparation methods, involving the use of a reinforcing agent, which are advantageously used in such methods are also disclosed.

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Номер записи: 44

20-12-2012 дата публикации

Patient alignment system with external measurement and object coordination for radiation therapy system

Номер: US20120323516A1

Автор: Chieh C. Cheng, Daniel C. Anderson, Daniel W. Miller, David A. Lesyna, Michael A. Baumann, Michael F. Moyers, Nickolas S. Rigney

Принадлежит: LOMA LINDA UNIVERSITY

A patient alignment system for a radiation therapy system. The alignment system includes multiple external measurement devices which obtain position measurements of components of the radiation therapy system which are movable and/or are subject to flex or other positional variations. The alignment system employs the external measurements to provide corrective positioning feedback to more precisely register the patient and align them with a radiation beam. The alignment system can be provided as an integral part of a radiation therapy system or can be added as an upgrade to existing radiation therapy systems.

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Номер записи: 45

03-01-2013 дата публикации

Neutral Particle Microscope

Номер: US20130001413A1

Автор: Philip James Witham

Принадлежит: Individual

The invention includes a source stream of neutral particles (neutral atoms and neutral molecules, but not neutrons) in free molecular flow, a beam forming element disposed within the source stream having at least one small aperture located proximal to the sample allowing part of the source stream to pass through the aperture as a beam of neutral particles directed at the sample for revealing the sample, a control positioner for scanning the beam of neutral particles over or through portions of said sample surface, optionally one or more detector nozzles having an inlet positioned to collect neutral particles proceeding from or through the sample surface in free molecular flow, at least one detector, the detector arranged to sense neutral particles proceeding from the sample, and a processor connected to the detector and control positioner for generating an image of said sample.

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Номер записи: 46

03-01-2013 дата публикации

Adjustable-Jaw Collimator

Номер: US20130003936A1

Автор: Jeffrey R. Schubert, Lee Grodzins, Omar Al-Kofahi, Peter J. Rothschild

Принадлежит: American Science and Engineering Inc

An adjustable collimator for shaping a beam of particles, such as for purposes of inspecting contents of a container. The adjustable collimator has an obscuring element substantially opaque to passage of the particles in a propagation direction that is radial with respect to the axis of rotation of a ring of apertures. A gap in the obscuring element may be characterized by a length taken along a long dimension and a jaw spacing taken along narrow dimension, and at least one of the length of the gap and the jaw spacing is subject to adjustment, either manual or automatic. The adjustable collimator may be disposed either inside or outside the ring of apertures, and, in some embodiments, the jaw spacing may be a function of distance along the long dimension relative to an edge of the gap.

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Номер записи: 47

03-01-2013 дата публикации

Control method and apparatus for positioning a stage

Номер: US20130004283A1

Автор: MING Chen, Mingwu Bai

Принадлежит: Individual

Four laser positioning units are used to position and control an X-Y stage which is movable in X and Y directions. For each laser positioning unit, a mirror constantly reflects laser beam to an optical position sensor, where the mirror is integrally mounted on a rotation unit which is integrally mounted on the one side of platform of X-Y stage, where the laser diode is mounted on another rotation unit which is stationary, the optical position sensor is also stationary. Each rotation unit includes a fine rotation stage and a coarse rotation stage, the fine rotation stage has very high resolution but short rotation range, and the coarse rotation stage has a large rotation range but low resolution. When moving the X-Y stage, four fine stages constantly rotate mirror or/and laser to reflect the laser beam onto the optical position sensor, the amount of rotations and geometry of position of laser and mirror gives precisely the position of moving stage. After fine rotation stages nearly reach their rotation limit, the fine stages return to its starting position gradually when the coarse rotation stage moves to keep the laser constantly reflected onto the optical position sensor. The fine stages and coarse stages in different laser positioning units work alternatively to position the stage. In z-positioning unit, a fine rotation stage is used to rotate precisely a spring cantilever so that a stylus tip on an open end of spring cantilever can touch a surface downwardly with preset cantilever deformation which is measured by the capacitance between a capacitive sensor under a piezoelectric stacks and a capacitive film sensor on the top of spring cantilever.

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Номер записи: 48

10-01-2013 дата публикации

Specimen box for electron microscope

Номер: US20130009071A1

Автор: Chih Chen, King-Ning Tu

Принадлежит: Individual

The present invention relates to a specimen box for an electron microscope, comprising a first substrate, a second substrate, one or more photoelectric elements, and a metal adhesion layer. The first substrate has a first surface, a second surface, a first concave, and one or more first through holes, wherein the first through holes penetrate through the first substrate. The second substrate has a third surface, a forth surface, and a second concave. The photoelectric element is disposed between the first substrate and the second substrate. In addition, the metal adhesion layer is disposed between the first substrate and the second substrate to form a space for a specimen contained therein. Besides, the present specimen box further comprises one or more plugs. When the plugs are assembled into the first through holes to seal the specimen box, the in-situ observation can be accomplished by using the electron microscope.

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Номер записи: 49

10-01-2013 дата публикации

Image generating method and device using scanning charged particle microscope, sample observation method, and observing device

Номер: US20130010100A1

Автор: Atsushi Miyamoto, Go Kotaki, Kenji Nakahira, Takashi Hiroi

Принадлежит: Hitachi High Technologies Corp

In a process of acquiring an image of semiconductor patterns by using a scanning electron microscope (SEM), this invention provides an image generating method and device that allows a high-resolution SEM image to be produced while suppressing damages caused by SEM imaging to a sample as a result of irradiation of an electron beam. A plurality of areas having similarly shaped patterns (similar areas) are extracted from a low-resolution SEM image which has been imaged while suppressing the irradiation energy of electron beam. From the image data of the extracted areas a single high resolution image of the patterns is generated by image restoration processing. Further, the method of this invention also uses design data in determining the similar areas and the SEM imaging position and imaging range for performing the image restoration processing.

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Номер записи: 50

31-01-2013 дата публикации

Methods, systems, and computer program products for measuring the density of material including an electromagnetic moisture property detector

Номер: US20130026354A1

Автор: Robert E. Troxler

Принадлежит: Troxler Electronic Laboratories Inc

The subject matter described herein includes methods, systems, and computer program products for measuring the density of a material. According to one aspect, a material property gauge includes a nuclear density gauge for measuring the density of a material. A radiation source adapted to emit radiation into a material and a radiation detector operable to produce a signal representing the detected radiation. A first material property calculation function may calculate a value associated with the density of the material based upon the signal produced by the radiation detector. The material property gauge includes an electromagnetic moisture property gauge that determines a moisture property of the material. An electromagnetic field generator may generate an electromagnetic field where the electromagnetic field sweeps through one or more frequencies and penetrates into the material. An electromagnetic sensor may determine a frequency response of the material to the electromagnetic field across the several frequencies.

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Номер записи: 51

14-02-2013 дата публикации

Charged-particle microscope providing depth-resolved imagery

Номер: US20130037715A1

Автор: Berend Helmerus Lich, Cornelis Sander Kooijman, Faysal Boughorbel, Pavel Potocek

Принадлежит: FEI Co

A method of examining a sample using a charged-particle microscope, comprising the following steps: Mounting the sample on a sample holder; Using a particle-optical column to direct at least one beam of particulate radiation onto a surface S of the sample, thereby producing an interaction that causes emitted radiation to emanate from the sample; Using a detector arrangement to detect at least a portion of said emitted radiation, which method comprises the following steps: Recording an output O n of said detector arrangement as a function of emergence angle θ n of said emitted radiation, measured relative to an axis normal to S, thus compiling a measurement set M={(O n , θ n )} for a plurality of values of θ n ; Using computer processing apparatus to automatically deconvolve the measurement set M and spatially resolve it into a result set R={(V k , L k )}, in which a spatial variable V demonstrates a value V k at an associated discrete depth level L k referenced to the surface S, whereby n and k are members of an integer sequence, and spatial variable V represents a physical property of the sample as a function of position in its bulk.

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Номер записи: 52

28-02-2013 дата публикации

Method of observing cross-section of cosmetic material

Номер: US20130050431A1

Автор: Kaori Ikuta, Norinobu Yoshikawa

Принадлежит: Shiseido Co Ltd

A method of observing a cross-section of a cosmetic material includes a sample forming step of forming a sample by providing a cosmetic material on a sample holder; a freezing step of freezing the sample; a cutting step of forming a cut surface on the sample by processing the frozen sample by a focused ion beam; and a cut surface image processing step of obtaining a cut surface image of the cut surface using a scanning electron microscope.

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Номер записи: 53

28-02-2013 дата публикации

Method and apparatus for material analysis by a focused electron beam using characteristic x-rays and back-scattered electrons

Номер: US20130054153A1

Автор: David MOTL, Vojtech FILIP

Принадлежит: Tescan AS

A material analysis method by a focused electron beam and an equipment for performing such an analysis where an electron map B is created describing the intensity of emitted back-scattered electrons at various points on a sample, and a spectral map S is created describing the intensity of emitted X-rays at points on the sample depending on the radiation energy. For selected chemical elements, X-ray maps M i are created representing the intensity of X-rays characteristic for such elements. The X-ray maps M i and the electron map B are converted into differential X-ray maps D i , which are subsequently merged into a final differential X-ray map D. The final differential X-ray map D is then used to search particles. Subsequently, a cumulative X-ray spectrum X j is calculated for each particle and subsequently the classification of particles based on the peak intensities and the intensity of back-scattered electron is performed.

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Номер записи: 54

07-03-2013 дата публикации

Xy-coordinate compensation apparatus and method in sample pattern inspection apparatus

Номер: US20130056635A1

Автор: Keisuke Mizuuchi, Toshifumi Kimba

Принадлежит: Individual

Stage orthogonal error and position errors caused by mirror distortion are reduced. A CPU calculates a coordinate error (Δx,Δy) between a measured XY coordinate (x,y) of each of arbitrary reference points on a wafer W 0 loaded on a XY stage which is measured by a laser interferometer and a calculated ideal position XY coordinate of the reference point, calculates an orthogonal error of the XY coordinates on the bases of the calculated coordinate errors (Δx,Δy) and an error due to mirror distortion, and stores them in a storage device. When a wafer W is actually inspected, the CPU corrects the measured position coordinates (x,y) from the laser interferometer on the basis of the calculated orthogonal error, and corrects beam deflector for deflection on the basis of the calculated error due to mirror distortion.

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Номер записи: 55

21-03-2013 дата публикации

POLYCRYSTALLINE DIAMOND MATERIALS HAVING IMPROVED ABRASION RESISTANCE, THERMAL STABILITY AND IMPACT RESISTANCE

Номер: US20130067827A1

Автор: Griffo Anthony, Janssen Michael, Keshavan Madapusi K., Shen Yuelin, Zhang Youhe

Принадлежит: Smith International, Inc.

PCD materials comprise a diamond body having bonded diamond crystals and interstitial regions disposed among the crystals. The diamond body is formed from diamond grains and a catalyst material at high pressure/high temperature conditions. The diamond grains have an average particle size of about 0.03 mm or greater. At least a portion of the diamond body has a high diamond volume content of greater than about 93 percent by volume. The entire diamond body can comprise high volume content diamond or a region of the diamond body can comprise the high volume content diamond. The diamond body includes a working surface, a first region substantially free of the catalyst material, and a second region that includes the catalyst material. At least a portion of the first region extends from the working surface to depth of from about 0.01 to about 0.1 mm 1. A method for making a diamond construction comprising the steps of:heating a volume of diamond grains to form graphite;subjecting the volume of diamond grains to a high pressure/high temperature condition in the presence of a catalyst material to form a fully-sintered polycrystalline diamond body; andtreating at least a first region of the diamond body extending from a working surface to render the first region substantially free of the catalyst material while allowing the catalyst material to remain in an untreated second region of the diamond body.2. The method as recited in wherein the step of heating takes place at a temperature in the range of from about 1 claim 1 ,200 to 1 claim 1 ,500° C.3. The method as recited in wherein the step of heating takes place in a vacuum environment.4. The method as recited in wherein the step of heating takes place in a vacuum environment.5. The method as recited in wherein the diamond body has a diamond content that is at least about 93 percent by volume.6. The method as recited in wherein the first region extends a depth of from about 0.01 to 0.08 mm7. The method as recited in wherein ...

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Номер записи: 56

21-03-2013 дата публикации

Adjustable cathodoluminescence detection system and microscope employing such a system

Номер: US20130068966A1

Автор: Luiz Fernando Zagonel, Marcel Tence, Mathieu Kociak, Stefano Mazzucco

Принадлежит: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS

Cathodoluminescence detection system comprising a collecting optic ( 112 ), for collecting light radiation coming from a specimen illuminated by a beam of charged particles and reflecting said light radiation onto analysis means, characterized in that it comprises means ( 606,614 - 618 ) for positioning said collecting optic ( 112 ) along at least one dimension.

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Номер записи: 57

28-03-2013 дата публикации

SAMPLE PRETREATMENT APPARATUS AND MASS SPECTROMETER PROVIDED WITH THE SAME

Номер: US20130075603A1

Автор: Kanda Katsuhiro, Nogami Makoto, Waki Izumi

Принадлежит: HITACHI HIGH-TECHNOLOGIES CORPORATION

The present invention relates to a pretreatment apparatus that performs concentration and separation of a sample, and in particular, in order to provide a sample pretreatment apparatus using a solid-phase extraction column, and a mass spectrometer using the same, which is particularly suitable for clinical analysis in which qualitative/quantitative analysis of a biological sample such as blood is performed, according to each operational step for a solid-phase extraction treatment, for example, a collection device serving as flow passages or containers for collection of waste liquid or extracted matter is installed on a bottom face of the solid-phase extraction column, and the extracted matter is separately collected without being mixed with waste liquid by switching the positions of the collection device. 1. A biological sample pretreatment apparatus comprising:a cartridge capable of holding an extraction agent for solid-phase extraction;a solid-phase extraction cartridge holding unit capable of holding a plurality of the cartridges;a first tray mechanism that receives a sample extracted from one of the cartridges at a predetermined first position on the holding unit, wherethe first tray mechanism is composed of a plurality of sections, and a section switching mechanism that switches the sections to receive the sample extracted from the cartridge is provided; anda second tray mechanism that receives extraction or sample liquids from a cartridge that is at a second position different from the first position on the holding unit, wherein the sections of the first tray mechanism can be switched independently of the second tray mechanism extraction operation.2. The biological sample pretreatment apparatus according to claim 1 , wherein the section switching mechanism is a mechanism that switches flow passages.3. The biological sample pretreatment apparatus according to claim 1 , wherein the section switching mechanism is a mechanism that moves a tray.4. The biological ...

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Номер записи: 58

28-03-2013 дата публикации

Analysis method for x-ray diffraction measurement data

Номер: US20130077754A1

Автор: Akihiro Himeda, Akito Sasaki, Hiroki Yoshida, Keiichi Morikawa

Принадлежит: Rigaku Corp

Peak positions and integrated intensities of diffraction X-ray are determined on the basis of X-ray diffraction measurement data output from an X-ray diffractometer, the number of determined peaks of the diffraction X-ray is counted, and analysis processing is started when the counted number of peaks reaches a preset peak number. The analysis processing is repetitively executed on the basis of X-ray diffraction measurement data. The peak positions and the integrated intensities of the diffraction X-ray are determined from the X-ray diffraction measurement data obtained from the start of the measurement till the analysis processing concerned, and qualitative analysis of collating the determined peak positions and integrated intensities with standard peak card data whose data base is made in advance and searching materials contained in a measurement sample, and quantitative analysis of determining the quantities of the materials contained in the measurement sample are executed.

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Номер записи: 59

28-03-2013 дата публикации

System for analyzing a granulate for producing a pharmaceutical product

Номер: US20130077755A1

Автор: Hodzic Aden, Laggnee Peter, Tritthart Walter

Принадлежит:

An apparatus for analyzing a granulate for producing a pharmaceutical product has a data receiving unit adapted for receiving X-ray diffraction data indicative of a scattering of X-rays irradiated onto the granulate, a processor unit adapted for processing the X-ray diffraction data to derive information indicative of a compressibility and/or a dissolution characteristic of the granulate, and a control unit adapted for controlling a process of producing a pharmaceutical product based on the derived information. 118-. (canceled)19. An apparatus for analyzing a granulate for producing a pharmaceutical product , the apparatus comprising:a data receiving unit structured for receiving X-ray diffraction data indicative of a scattering of X-rays irradiated onto the granulate, the X-ray diffraction data resulting from Small Angle X-Ray Scattering;a processor unit structured for processing the X-ray diffraction data to derive information indicative of at least one of a compressibility and a dissolution characteristic of the granulate, the processor unit thereby being structured to derive at least one of a second momentum integral of a measurement spectrum and a Porod constant; anda control unit structured for controlling a process of producing a pharmaceutical product based on the derived information.20. The apparatus of claim 19 , wherein the processor unit is structured for processing the X-ray diffraction data to derive information regarding different components of a granulate consisting essentially of multiple solid components.21. The apparatus of claim 19 , wherein the data receiving unit is also structured for receiving X-ray diffraction data resulting from Wide Angle X-Ray Scattering.22. The apparatus of claim 21 , wherein the processor unit is structured for processing the Wide Angle X-Ray Scattering data to derive information indicative of a quality-related property of a physiologically active substance of the granulate claim 21 , a property indicative of a ...

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Номер записи: 60

28-03-2013 дата публикации

MATERIAL SORTING TECHNOLOGY

Номер: US20130079918A1

Автор: Conley R. Lynn, Hill Richard E., JR. Edward J., Reti Aldo M., Sommer, Spencer David B., Webster Jeffrey J.

Принадлежит: SPECTRAMET, LLC

Systems for sorting materials, such as those made of metal, are described. The systems may operate by irradiating the materials with x-rays and then detecting fluoresced x-rays, transmitted x-rays, or both. Detection of the fluoresced x-rays may be performed using an x-ray fluorescence detector array. The systems may be configured to provide high throughput sorting of small pieces of materials. 1. A material sorting system , comprising:a conveyor configured to convey pieces of material;an x-ray source configured to irradiate the pieces of material with incident x-rays as they are conveyed by the conveyor to generate fluoresced x-rays from the pieces of material and transmitted x-rays transmitted through the pieces of material;an x-ray fluorescence detector array configured to detect the fluoresced x-rays and produce x-ray fluorescence data; andan x-ray transmission detector configured to detect the transmitted x-rays and produce x-ray transmission data.2. The material sorting system of claim 1 , further comprising a processor configured to:receive the x-ray fluorescence data and the x-ray transmission data;determine thickness data for one or more of the pieces based at least in part on the x-ray transmission data; andcombine the thickness data with the x-ray fluorescence data to determine at least a partial composition of one or more of the pieces of material.3. The material sorting system of claim 2 , wherein the x-ray transmission data comprises data about two or more energy levels claim 2 , and wherein the processor is configured to determine the thickness data at least in part by comparison of the x-ray transmission data of the two or more energy levels.4. The material sorting system of claim 1 , wherein the x-ray fluorescence detector array comprises an array of x-ray fluorescence detectors configured to detect fluoresced x-rays from pieces of material disposed on different parts of the conveyor.5. The material sorting system of claim 4 , wherein the array of x ...

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Номер записи: 61

04-04-2013 дата публикации

METHOD AND PARTICLE BEAM DEVICE FOR PRODUCING AN IMAGE OF AN OBJECT

Номер: US20130082175A1

Автор: Jaksch Heiner

Принадлежит:

A system for producing an image of an object using a particle beam device is provided. A particle source is used to generate primary particles, in which the primary particles have a primary energy. The primary particles are delivered to an object, in which the primary particles form a particle beam. Interaction particles which are scattered back by the object in the direction of the particle source are detected with at least one energy-resolving detector. Detection signals, which are obtained through the detection, are evaluated in terms of an energy which the detected interaction particles have. The detection signals which stem from the detected interaction particles whose energy deviates by less than 500 eV from the primary energy are selected. An image of the object is produced, in which only the selected detection signals are used to produce the image. 1. A method for producing an image of an object using a particle beam device , comprising:generating primary particles using a particle source, wherein the primary particles have a primary energy;delivering the primary particles to an object, wherein the primary particles form a particle beam;detecting, using at least one energy-resolving detector, interaction particles which are scattered back by the object in the direction of the particle source;evaluating detection signals, which are obtained through the detection, in terms of an energy of the detected interaction particles;selecting the detection signals which stem from the detected interaction particles whose energy deviates by less than 500 eV from the primary energy; andproducing an image of the object, wherein only the selected detection signals are used to produce the image.2. The method according to claim 1 , wherein only those detection signals which stem from the detected interaction particles whose energy deviates by less than 100 eV from the primary energy are selected.3. The method according to claim 1 , wherein the detection takes place using a ...

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Номер записи: 62

04-04-2013 дата публикации

CIRCUIT PATTERN INSPECTION APPARATUS AND CIRCUIT PATTERN INSPECTION METHOD

Номер: US20130082177A1

Автор: Hiroi Takashi, Nojiri Masaaki, Nozoe Mari, Okamura Mitsuru, Yamamoto Takuma

Принадлежит: HITACHI HIGH-TECHNOLOGIES CORPORATION

High-speed inspection is performed with appropriate sensitivity according to the pattern density and pattern characteristic of a device. 1. A circuit pattern inspection apparatus that detects secondary electrons or reflected , back scattered electrons produced when a primary charged particle beam irradiates a sample substrate on which a circuit pattern is formed and uses an image produced from the detected secondary electrons or reflected electrons to determine whether or not a defect is present on the sample substrate , the circuit pattern inspection apparatus comprising:a sample stage on which the sample substrate is placed and which moves the sample substrate in a predetermined direction;a charged particle column having a function of scanning the primary charged particle beam over the sample substrate in a direction that intersects the direction in which the sample stage moves, detecting the secondary electrons or the reflected electrons, and outputting the detected electrons as a secondary particle signal; andcontrol means for controlling the charged particle column and the sample stage, andinspection is performed with a pixel dimension changed in accordance with the position on the sample substrate by acquiring the image with the pixel dimension changed in a single sequence of the inspection of the sample substrate.2. The circuit pattern inspection apparatus according to claim 1 , whereinthe pixel dimension is changed in a scan stripe formed by scanning the primary charged particle beam and moving the sample stage.3. The circuit pattern inspection apparatus according to claim 2 , whereinthe pixel dimension is changed by changing the speed at which the primary charged particle beam is scanned.4. The circuit pattern inspection apparatus according to claim 2 , whereinthe pixel dimension is changed by changing the speed at which the sample stage is moved.5. The circuit pattern inspection apparatus according to claim 1 , whereinthe circuit pattern inspection ...

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Номер записи: 63

04-04-2013 дата публикации

Stage apparatus

Номер: US20130082190A1

Автор: Kaname Takahashi, Koichiro Tekeuchi, Shigeru Haneda, Yasuyuki Momoi

Принадлежит: Hitachi High Technologies Corp

Fluctuation in speed when a stage with a sample mounted thereon is moved at low speed is reduced such that an image to be observed is moved at constant speed when performing high-magnification observation using a scanning electron microscope. A control amount is obtained by compensation means from the deviation between position information obtained from position information detected by position detection means through a first low-pass filter and a command value obtained by integrating a speed command value input from stage operation input means and through a second low-pass filter having the same frequency characteristic as the first low-pass filter, and a driving signal to be output to driving means is generated from the added value of the control amount and the speed command value by waveform output means.

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Номер записи: 64

11-04-2013 дата публикации

METHOD FOR DETERMINING NUMBER OF LAYERS OF TWO-DIMENSIONAL THIN FILM ATOMIC STRUCTURE AND DEVICE FOR DETERMINING NUMBER OF LAYERS OF TWO-DIMENSIONAL THIN FILM ATOMIC STRUCTURE

Номер: US20130087705A1

Автор: Hiura Hidefumi, Miyazaki Hisao, Tsukagoshi Kazuhito

Принадлежит:

Provided is a versatile method of determining the number of layers of a two-dimensional atomic layer thin film as compared with conventional methods. An electron beam is radiated to a two-dimensional thin film atomic structure having an unknown number of layers to determine the number of layers based on an intensity of reflected electrons or secondary electrons generated thereby. In particular, this method is effective for determining the number of layers of graphene. 116-. (canceled)17. A method of determining a number of layers of a two-dimensional thin film atomic structure , the method comprising:(a) acquiring an electron image of reflected electrons or secondary electrons generated by radiating an electron beam to a two-dimensional atomic layer thin film having an unknown number of layers and a substrate supporting the two-dimensional atomic layer thin film;(b) obtaining a relative intensity ratio of the electron image of the two-dimensional atomic layer thin film to an electron image of the substrate; and(c) determining the number of layers of the two-dimensional atomic layer thin film based on the relative intensity ratio.18. A method of determining a number of layers of a two-dimensional thin film atomic structure according to claim 17 , wherein the (c) comprises using a calibration curve indicating a relationship between the relative intensity ratio and the number of layers to determine the number of layers corresponding to the relative intensity ratio obtained in the (b) on the calibration curve as the number of layers of the two-dimensional atomic layer thin film having the unknown number of layers.19. A method of determining a number of layers of a two-dimensional thin film atomic structure according to claim 17 , further comprising:(d) acquiring electronic images of the reflected electrons or the secondary electrons generated by radiating the electronic beam to a plurality of two-dimensional atomic layer thin films having different numbers of layers and ...

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Номер записи: 65

11-04-2013 дата публикации

FLEXIBLE CATHODOLUMINESCENCE DETECTION SYSTEM AND MICROSCOPE EMPLOYING SUCH A SYSTEM

Номер: US20130087706A1

Автор: Kociak Mathieu, Mazzucco Stefano, Tence Marcel, Zagonel Luiz Fernando

Принадлежит: Centre National De La Recherche Scientifique

The invention relates to a cathodoluminescence detection system comprising: a collecting optic () collecting light radiation () from a sample illuminated by a beam of charged particles and reflecting said radiation () onto analysis means, said collecting optic () being placed in a chamber, called a vacuum chamber, wherein the pressure is below atmospheric pressure; and means () for adapting the light radiation, placed downstream of the collecting optic () and designed to adapt said light radiation () at the inlet of the analysis means. Said system is characterized in that all or part of the adapting means () is placed in an environment where the pressure is higher than the pressure in said vacuum chamber. 2310312606112114316302108. System according to claim 1 , characterised in that it comprises sealing means ( claim 1 , claim 1 , ) arranged between said collection optic () and the adjustment means ( claim 1 , ) and capable of ensuring the leaktightness of said vacuum chamber () while permitting the light radiation () to pass through.3316116108116. System according to any one of the previous claims claim 1 , characterised in that the adjustment means comprise at least one lens () arranged upstream of an optical fibre () and capable of sending the light radiation () into said optical fibre ().4112202. System according to any one of the previous claims claim 1 , characterised in that the collection optic comprises a parabolic mirror ( claim 1 , ).5. System according to any one of to claim 1 , characterised in that the collection optic comprises a plane mirror or an elliptical mirror associated with at least one optical lens.6314306602306602. System according to any one of the previous claims claim 1 , characterised in that the inner cylinder () is mounted removably in the outer cylinder ( claim 1 , ) and can rotate freely relative to said outer cylinder ( claim 1 , ).7316108116. System according to any one of the previous claims claim 1 , characterised in that the ...

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Номер записи: 66

11-04-2013 дата публикации

X-RAY CT APPARATUS

Номер: US20130089176A1

Автор: NABATAME Takeo

Принадлежит:

According to one embodiment, an X-ray CT apparatus includes a body thickness information acquiring unit, a threshold determining unit and an image generating unit. The body thickness information acquiring unit acquires information of a body thickness of an object. The threshold determining unit determines a threshold of an exposure dose according to the body thickness of the object. The image generating unit generates an image indicating a relationship between the body thickness of the object and the threshold and displays a generated image on a display unit. 1. An X-ray CT apparatus comprising:a body thickness information acquiring unit configured to acquire information of a body thickness of an object;a threshold determining unit configured to determine a threshold of an exposure dose according to the body thickness of the object; andan image generating unit configured to generate an image indicating a relationship between the body thickness of the object and the threshold and display a generated image on a display unit.2. The X-ray CT apparatus according to claim 1 , further comprisinga scanogram generating unit configured to generate a scanogram of the object,wherein the body thickness information acquiring unit acquires a relationship between an area on a couch top and the body thickness of the object based on a scanogram of the object,wherein the threshold determining unit determines the threshold of the exposure dose according to the body thickness of the object and determines a relationship between the area on the couch top and the threshold according to the body thickness of the object, andwherein the image generating unit superimposes an image indicating the relationship between the area of the couch top and the threshold on the scanogram and displays the scanogram on the display unit.3. The X-ray CT apparatus according to claim 2 , further comprising:a plan acquiring unit configured to acquire information of a scan plan in which at least a relationship ...

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Номер записи: 67

11-04-2013 дата публикации

Evaluation System and Evaluation Method of Plastic Strain

Номер: US20130089182A1

Автор: Junya Kaneda, Masato Koshiishi, Ryo Ishibashi, Yun Wang, Yusaku Maruno

Принадлежит: HITACHI LTD

An evaluation system for plastic strain includes an X-ray diffraction device for irradiating the surface of a measurement object; and an image analyzing device that generates diffraction intensity curves from X-ray diffraction angle and intensity with an implanted database, which can be obtained in advance from test specimens made of the same material of the measurement object, establishing at least one of the relations between the full width at half maximum of the diffraction intensity curve and plastic strain, and between the integral intensity angular breadth of diffraction intensity curve and plastic strain. The image analyzing device obtains plastic strain of the measurement object based on at least one of the diffraction parameters of the full width at half maximum and the integral intensity angular breadth of a diffraction intensity curve corresponding to the implanted database indicative of the relation between the diffraction parameter and plastic strain.

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Номер записи: 68

11-04-2013 дата публикации

ATOMIC-SCALED ELECTRONIC SPECTRUM INFORMATION PURIFICATION

Номер: US20130090865A1

Автор: Sun Changqing

Принадлежит: NANYANG TECHNOLOGICAL UNIVERSITY

Disclosed is a method for electronic residual spectroscopy for atomic-scaled surface and sub-surface information purification. The method comprises collecting at least one reference spectrum and a plurality of spectra under various conditions. The background of all the plurality of spectra is then subtracted and the plurality of spectra are normalized. Subtracting the reference spectrum from the normalized plurality of spectra will give atomic-scaled, meaningful information at selected zones. 18.-. (canceled)9. A method for electronic residual spectroscopy information purification for obtaining atomic-scaled , meaningful information of a surface and sub-surface of a sample , the method comprising:collecting at least one reference spectrum, wherein the at least one reference spectrum is from a clean and as close to perfect surface as possible;collecting a plurality of spectra from the surface of the sample under varied conditions;subtracting the background of all the plurality of spectra;normalizing the plurality of spectra; andsubtracting the reference spectrum from the normalized plurality of spectra to give the meaningful information.10. A method as claimed in claim 12 , wherein the background is subtracted using the standard linear or Shirley methodology.11. A method as claimed in claim 12 , wherein the normalizing of the plurality of spectra is based on a constraint of spectra area conservation to minimize effect of surface scattering.12. A method as claimed in claim 12 , further comprising calibrating and specifying residual spectra based on physical and chemical knowledge of the sample.13. A method as claimed in claim 12 , wherein the varied conditions comprise experimental conditions claim 12 , the experimental conditions comprising at least one selected from the group consisting of: emission angle claim 12 , beam energy claim 12 , crystal orientation claim 12 , and temperature.14. A method as claimed in claim 16 , wherein the emission angle is in the range 0 ...

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Номер записи: 69

18-04-2013 дата публикации

Mass distribution measuring method and mass distribution measuring apparatus

Номер: US20130092831A1

Автор: Koichi Tanji, Masafumi Kyogaku

Принадлежит: Canon Inc

To provide a method that reduces an influence of dependence of an ionizing beam in an incident direction or uneven irradiation to a sample on a result of mass spectrometry, and can measure mass distribution with high reliability. A mass distribution measuring method according to the present invention includes: changing a direction of irradiating the ionizing beam to a sample surface; acquiring a plurality of mass distribution images in a plurality of incident directions; performing image transform of the mass distribution images according to an angle formed by an incident direction of the ionizing beam and a substrate surface; synthesizing the plurality of transformed images; and outputting the synthesized mass distribution images.

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Номер записи: 70

18-04-2013 дата публикации

X RAY SOURCE GRATING STEPPING IMAGING SYSTEM AND IMAGE METHOD

Номер: US20130094625A1

Автор: Chen Zhiqiang, Ding Fei, Huang Zhifeng, Li Liang, Li Yuanjing, Xiao Yongshun, Xing Yuxiang, Zhang Li, Zhao Ziran

Принадлежит:

An X-ray imaging system comprising: an X-ray source, a source grating, a fixed grating module and an X-ray detector, which are successively positioned in the propagation direction of X-ray; an object to be detected is positioned between the source grating and the fixed gating module; said source grating can perform stepping movement in a direction perpendicular to the optical path and grating stripes; wherein the system further comprises a computer workstation for controlling said X-ray source, source grating and X-ray detector so as to perform the following processes: the source grating performs stepping movement in at least one period thereof; at each stepping step, the X-ray source emits X-ray to the object to be detected, and the detector receives the X-ray at the same time; wherein after at least one period of stepping and data acquisition, the light intensity of X-ray at each pixel point on the detector is represented as a light intensity curve; the light intensity curve at each pixel point on the detector is compared with a light intensity curve in the absence of the object to be detected, a pixel value of each pixel point is calculated from change in said light intensity curve; an image of the detected object is reconstructed according to the calculated pixel value. 10. An X-ray imaging system for imaging an object using X-ray , said system comprises: an X-ray source (S) , a source grating (G) , a fixed grating module (P) and an X-ray detector (T) , which are successively positioned in the propagation direction of the X-ray; an object to be detected is positioned between the source grating and the fixed grating module;said source grating can perform stepping movement in a direction perpendicular to the optical path direction and grating stripes;wherein said system further comprises a computer workstation for controlling said X-ray source, source grating, and X-ray detector to accomplish the following processes:said source grating performs stepping movement ...

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Номер записи: 71

18-04-2013 дата публикации

X-RAY CT APPARATUS AND CONTROL METHOD THEREOF

Номер: US20130094739A1

Автор: Okabe Masakazu

Принадлежит: HITACHI MEDICAL CORPORATION

In order to generate an X-ray CT image with optimal quality for each part and each region of an object when scanning the object across a plurality of parts using a plane detector, there is provided an X-ray CT apparatus including smoothing means and filtering means for generating a convolution filter on the basis of feature amounts of projection data output from the X-ray detector and superimposing the convolution filter on the projection data, reconstruction means for generating an X-ray CT image of the object by performing a reconstruction operation on the projection data on which the convolution filter is superimposed, and image display means for displaying the image generated by the reconstruction means 1. An X-ray CT apparatus comprising:an X-ray source that generates X-rays;an X-ray detector that is disposed opposite the X-ray source and detects the X-ray transmitted through an object to output projection data of the object;rotation means configured to rotate the X-ray source and the X-ray detector in a state where the X-ray source and the X-ray detector are disposed opposite each other;filter generation means configured to generate an image processing filter that changes according to feature amounts of a pixel value included in the projection data;reconstruction means configured to generate an X-ray CT image of the object by performing a reconstruction operation on the projection data using the generated image processing filter; andimage display means configured to display the X-ray CT image.2. The X-ray CT apparatus according to claim 1 ,wherein the filter generation means generates a convolution filter for each point of the projection data as the image processing filter corresponding to feature amounts of a pixel value of the point, andthe reconstruction means includes convolution means configured to superimpose the convolution filter for each point.3. The X-ray CT apparatus according to claim 2 , further comprising:first input means configured to input ...

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Номер записи: 72

25-04-2013 дата публикации

Sample stage device

Номер: US20130098274A1

Автор: Takashi Kobayashi

Принадлежит: Hitachi High Technologies Corp

A sample stage device ( 10 ) is so configured as to calculate ideal position information xtg(i), tg(i) per predetermined period that is unaffected by drive conditions relating to gaps ( 25, 26 ), etc., and to determine, per predetermined cycle and in real time, deviations dx(i), dy(i) between real-time measured positions x(i), y(i) by position detectors comprising laser interferometers ( 33, 34 ), etc., and ideal position information xtg(i), tg(i). In addition, it calculates, based on deviations dx(i), dy(i) thus determined, such speed command values vx(i), vy(i) for motors ( 27, 28 ) that measured values x(i), y(i) would follow ideal position information xtg(i), tg(i), and performs stable and high-speed positioning control for a sample table ( 11 ) through feedback control that controls speed in real time. Thus, with respect to a sample stage device, it is possible to provide a stable and high-speed positioning control method for a sample table, which is capable of suppressing noise caused by thermal drift and vibration, without being affected by drive conditions, such as the initial states of gaps, etc.

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Номер записи: 73

25-04-2013 дата публикации

X-RAY DIFFRACTION CONTRAST TOMOGRAPHY (DCT) SYSTEM, AND X-RAY DIFFRACTION CONTRAST TOMOGRAPHY (DCT) METHOD

Номер: US20130101078A1

Автор: Lauridsen Erik Mejdal, POULSEN Henning Friis

Принадлежит: DANMARKS TEKNISKE UNIVERSITET

An X-ray diffraction contrast tomography system (DCT) comprising a laboratory X-ray source (), a staging device () rotating a polycrystalline material sample in the direct path of the X-ray beam, a first X-ray detector () detecting the direct X-ray beam being transmitted through the crystalline material sample, a second X-ray detector () positioned between the staging device and the first X-ray detector for detecting diffracted X-ray beams, and a processing device () for analysing detected values. The crystallographic grain orientation of the individual grain in the polycrystalline sample is determined based on the two-dimensional position of extinction spots and the associated angular position of the sample for a set of extinction spots pertaining to the individual grain. 1. An X-ray diffraction contrast tomography method of determining a multi-dimensional representation of grain structures in a polycrystalline material sample having grains , wherean X-ray source provides an X-ray beam in a direct path,a staging device positions and rotates the polycrystalline material sample in the direct path of the X-ray beam,an X-ray detector detects diffraction spots from diffracted X-ray beams leaving the crystalline material sample,a processing device analyses values received from the X-ray detector and representing diffraction spots;wherein the processing device based on the values received from said X-ray detector determines at least one of the following characteristics: a) the crystal structure of one or more individual crystalline phases present in the sample, and b) strain in grains in the polycrystalline material sample, andwherein said X-ray source is a laboratory X-ray source having a target piece of metal, which X-ray source provides a continuous output spectrum of X-rays with sharp peaks in intensity at certain energies depending on the metal of the target piece.2. An X-ray diffraction contrast tomography method according to claim 1 , wherein an X-ray detector ...

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Номер записи: 74

25-04-2013 дата публикации

X-RAY DIAGNOSTIC APPARATUS

Номер: US20130101084A1

Автор: SHIMIZU Yoshinori

Принадлежит:

According to one embodiment, an image generation unit generates a first image during a large aperture period and a second image during a small aperture period. An image combining unit generates a composite image based on the latest second image and the specific first image. A display unit displays the composite image in real time. A determination unit determines whether to update the first image based on an index associated with the anatomical positional shift between the first image and the second image. A driving control unit enlarges a aperture to the large aperture, when the determination unit determines to update, and maintains the aperture at the small aperture, when the determination unit determines not to update. 1. An X-ray diagnostic apparatus comprising:an X-ray tube configured to generate X-rays;an X-ray detector configured to detect X-rays generated from the X-ray tube and transmitted through a subject;an aperture-variable collimator mechanism configured to limit a radiation field of X-rays from the X-ray tube;an image generation unit configured to repeatedly generate a first X-ray image based on an output from the X-ray detector during a period in which an aperture of the collimator mechanism is a first aperture and to repeatedly generate a second X-ray image based on an output from the X-ray detector during a period in which the aperture is a second aperture smaller than the first aperture;a combining unit configured to repeatedly generate a composite image based on a latest second X-ray image of the repeatedly generated second X-ray images and a specific first X-ray image of the repeatedly generated first X-ray images for the second X-ray image is generated;a display unit configured to display the repeatedly generated composite image as a dynamic image in real time;a determination unit configured to determine whether to update the first X-ray image in the composite image, based on an index associated with an anatomical positional shift between the ...

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Номер записи: 75

25-04-2013 дата публикации

X-RAY FLUORESCENCE SPECTROMETER AND X-RAY FLUORESCENCE ANALYZING METHOD

Номер: US20130101085A1

Автор: Kita Hiroaki, Kobayashi Hiroshi

Принадлежит: RIGAKU CORPORATION

The X-ray fluorescence spectrometer of the present invention includes a sample table () for a sample (S) having a crystalline structure, an X-ray source (), a detecting unit () for detecting secondary X-rays () from the sample (S), a rotating unit () for rotating the sample table (), a parallel translating unit () for causing the sample table () to undergo a parallel translational movement, a selecting unit () for selecting three of circumvent angles, at which diffracted X-rays can be circumvented, based on a diffraction profile obtained from the angle of rotation of the sample (S) and the intensity of secondary X-rays (), the interval between the neighboring circumvent angles being smaller than 180°, and a control unit () for controlling the rotating unit () so as to set the sample (S) at the circumvent angle at which the sample table () will not interfere with any other structures. 1. An X-ray fluorescence spectrometer which comprises:a sample table on which a sample having a crystalline structure is placed;an X-ray source for irradiating the sample with primary X-rays;a detecting unit for detecting secondary X-rays emitted from the sample;a rotating unit for rotating the sample table about an axis vertical to a sample measuring surface;a parallel translating unit for parallel translating the sample table to allow the primary X-rays to be directed to an arbitrarily chosen position of a half portion of the sample measuring surface while the rotating unit is halted;a control unit for storing a diffraction profile, in which the intensity of the secondary X-rays, emitted from the sample and incident on the detecting unit, and an angle of rotation of the sample are correlated with each other, by radiating the primary X-rays from the X-ray source, while the sample is rotated by the rotating unit an angle of 360 degrees about a predetermined point of the sample, and then displaying the diffraction profile by means of a display unit; anda selecting unit for allowing an ...

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Номер записи: 76

25-04-2013 дата публикации

Methods to Perform Backscatter Inspection of Complex Targets in Confined Spaces

Номер: US20130101090A1

Автор: Baukus William J., Handy John P., McElroy Terry Lee, Schubert Jeffrey R., Schueller Richard L., Walazek David C.

Принадлежит: AMERICAN SCIENCE AND ENGINEERING, INC.

Embodiments of backscatter inspection systems include features to enable inspection of irregular surfaces, tight spacer, and other hard-to-reach places. Some embodiments include arms that maneuver a scan head with at least three degrees of freedom, and some embodiments include arms that maneuver a scan head with at least seven degrees of freedom. Some embodiments include proximity detectors on a scan head or base, detect contact with an object being inspected, and to slow or stop the motion of the system accordingly. Some compact embodiments scan the interior of an object from within, and include a rotating, low-energy source of penetrating radiation, and at least one backscatter detector, which may be stationary, or may rotate with the source. 1. A nimbly positionable backscatter inspection system , the system comprising:a base;an arm coupled to the base, the arm comprising a first segment, a second segment, and a third segment, as well as a first movable joint coupling the first segment to the second segment, and a second movable joint coupling the second segment to the third segment; a source of penetrating radiation for generating a pencil beam of penetrating radiation, the pencil beam characterized by a beam axis, and', 'a primary detector configured to detect scattered penetrating radiation;, 'a scan head coupled to the third segment, the scan head comprising'}wherein the scan head is movable in at least 3 to 7 degrees of freedom with respect to the base, and the system is capable of capturing backscatter radiation in a plurality of orientations by moving the scan head while the first segment remains stationary with respect to the base.2. The nimbly positionable backscatter inspection system of claim 1 , wherein at least one of the first and second segments is extendable.3. The nimbly positionable backscatter inspection system of claim 1 , wherein the third segment has an axis along its length claim 1 , and scan head is rotatable around the axis.4. The nimbly ...

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Номер записи: 77

25-04-2013 дата публикации

Sealed Detector Array for the Collection of Both Wide Angle and Small Angle X-Ray Scattering

Номер: US20130101091A1

Автор: Damento Michael A., Garvey Hugh F.

Принадлежит: RIGAKU INNOVATIVE TECHNOLOGIES, INC.

A detector system for capturing and resolving WAXS and SAXS beams is provided along with a device for determining structural information of a material incorporating said detector system and a method for examining the structure of a material using said detector system. The detector system generally comprises a sample capable of interacting with the incident x-ray beam, a primary detector and a secondary detector. Upon interaction with a sample of the material, the incident x-ray beam is scattered into wide angle x-ray scattering (WAXS) beams and small angle x-ray scattering (SAXS) beams that are captured by the primary or secondary detectors. 1. A detector system for capturing and resolving an incident x-ray beam , the system comprising:a sample capable of interacting with the incident x-ray beam to form wide angle x-ray scattering (WAXS) beams and small angle x-ray scattering (SAXS) beams;a primary detector for capturing and resolving the WAXS beams, the primary detector including a fiber-optically coupled array, the array having an input window and a tapered passageway along its central axis to allow the passage of the SAXS beams,a primary detector for capturing and resolving the WAXS beams; anda secondary detector placed at a greater distance from the sample than the primary detector; the secondary detector capable of capturing and resolving the SAXS beams;wherein the tapered passageway is sealed within an enclosure to form an evacuated chamber within the detection system through which the SAX beams pass;the evacuated chamber capable of being placed under a vacuum.2. The detector system of claim 1 , wherein the tapered passageway is conical in shape in order to minimize the loss of imaging area on the primary detector.3. The detector system of claim 1 , wherein the detector system further includes an output window claim 1 , the output window located in the path of the SAXS beams prior to the secondary detector.4. The detector system of claim 3 , wherein the input ...

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Номер записи: 78

02-05-2013 дата публикации

CHARGED PARTICLE ENERGY ANALYSERS AND METHODS OF OPERATING CHARGED PARTICLE ENERGY ANALYSERS

Номер: US20130105687A1

Автор: Cubric Dane

Принадлежит: SHIMADZU CORPORATION

A charged particle energy analyser () includes inner and outer cylindrically symmetric electrodes () arranged coaxially on a longitudinal axis (z-z) of the analyser. A position-sensitive detector () has a particle-receiving detection surface located off-axis, at a radial spacing from the longitudinal axis (z-z) less than the radius of the inner electrode (). Methods of operating the charged particle energy analyser in first and second order focussing modes are described. A position-sensitive detector () suitable for use in “parallel analysers” is described (FIGS. and ). 1. A charged particle energy analyser for simultaneous detection of charged particles within a range of energies , the analyser comprising:{'b': '1', 'inner and outer cylindrically symmetric electrodes arranged coaxially on a longitudinal axis, the inner cylindrically symmetric electrode having a circumference of radius R,'}biasing means for supplying voltage to the inner and outer cylindrically symmetric electrodes to create an electrostatic focussing field between the electrodes,a charged particle source for introducing charged particles into the electrostatic focussing field for analysis, anda detector for detecting charged particles focussed by the electrostatic focussing field,wherein the detector has a charged particle-receiving detection surface located off-axis, at a radial spacing from the longitudinal axis less than said radius RI.2. An analyser as claimed in wherein said inner cylindrically symmetric electrode has a truncated configuration and said charged particle-receiving surface of the detector is located at a truncation plane of the inner electrode.3. An analyser as claimed in wherein a segment of the inner cylindrically symmetric electrode is missing defining a gap between exposed claim 1 , longitudinally-extending edges of the electrode claim 1 , and said detector is mounted in said gap.4. An analyser as claimed in wherein said inner cylindrically symmetric electrode includes ...

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Номер записи: 79

02-05-2013 дата публикации

Method of Characterizing a Crystalline Specimen by Ion or Atom Scattering

Номер: US20130105688A1

Автор: Jalabert Denis

Принадлежит: Commissariat A L'Energie Atomique Et Aux Energies Alternatives

Method of characterizing a crystalline specimen (E), characterized in that it comprises the steps consisting in: a) directing a substantially mono-energetic beam (F) of projectiles chosen from atoms and ions onto a surface, called the top surface, of said specimen, the direction of propagation of said beam being characterized by an angle of incidence (θ) and by what is called an azimuthal angle (φ) measured in the plane of said surface, the energy of said projectiles being equal to or greater than 50 keV; b) the projectiles scattered by the specimen are filtered in terms of energy, those of said projectiles that are scattered with a defined energy are detected and their scattering angle (θ), defined in a plane perpendicular to said top surface of the specimen, is measured; c) steps a) and b) are repeated for a number of different values of said azimuthal angle; and d) an image representative of the number of detected projectiles as a function of the scattering angle and of said azimuthal angle is constructed. Computer program product specifically designed for implementing such a method. 1. A method of characterizing a crystalline specimen comprising:{'sub': 'i', 'a. directing a substantially mono-energetic beam of projectiles chosen from atoms and ions onto a surface, called the top surface, of said specimen, the direction of propagation of said beam being characterized by an angle of incidence (θ) and by a azimuthal angle (φ) measured in the plane of said surface, the energy of said projectiles being equal to or greater than 50 keV;'}{'sub': 'd', 'b. energy filtering the projectiles scattered by the specimen, detecting those of said projectiles that are scattered with a defined energy and measuring their scattering angle (θ), defined in a plane perpendicular to said top surface of the specimen;'}c. repeating steps a and b for a plurality of different values of said azimuthal angle; andd. constructing an image representative of the number of detected projectiles as ...

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Номер записи: 80

02-05-2013 дата публикации

CHARGED PARTICLE BEAM APPARATUS

Номер: US20130105690A1

Автор: KATOU Tatsuichi, Takada Satoshi

Принадлежит: HITACHI HIGH-TECHNOLOGIES CORPORATION

In recent years, in association with the miniaturization and high integration of semiconductor manufacturing processes, there have been arising many cases where observation target portions are densely located. In such a case, if observation is performed using a conventional pre-charge technology, scanning with an electron beam in pre-charging are repeatedly executed, therefore the charge potential on the surface of a specimen exceeds the dielectric breakdown voltage. As a result, dielectric breakdown arises in areas where scanning with an electron beam are repeatedly executed. An object of the present invention is to provide a defect observation method that can reduce the risk of dielectric breakdown, and a charged particle beam apparatus that utilizes the method. In the present invention, when a specimen is observed with the use of a technology relevant to pre-charging, after executing a piece of control processing, plural images are photographed. In addition, by grouping observation target portions, which plural pre-charge scanning areas overlap, into a group where charge control is executed all together on all the observation target portions, and by executing charge control processing on each group, the risk of dielectric breakdown is reduced. 1. A charged particle beam apparatus that obtains a plurality of images of an observation target portion on a specimen , comprising:a charged particle optical system that irradiates a charged particle beam to the specimen;a detector that detects a signal generated by irradiating the charged particle beam to the specimen; andan image processing unit that generates an image of the specimen on the basis of the output of the detector, whereinthe image processing unit generates a plurality of images of the observation target portion on the basis of a piece of charge control processing executed on the observation target portion.2. A charged particle beam apparatus comprising:a specimen stage that transfers a specimen;a charged ...

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Номер записи: 81

02-05-2013 дата публикации

Double Tilt Transmission Electron Microscope Sample Holder for In-Situ Measurement of Microstructures

Номер: US20130105706A1

Автор: Han Xiaodong, Liu Pan, Wang Xiaodong, Yue Yonghai, Zhang Yuefei, Zhang Ze, Zheng Kun

Принадлежит: BEIJING UNIVERSITY OF TECHNOLOGY

A double tilt sample holder for in-situ measuring mechanical and electrical properties of microstructures in transmission electron microscope (TEM) is provided. The sample holder includes a home-made hollow sample holder body, a sensor for measuring mechanical/electrical properties, a pressing piece, a sample holder head, a sensor carrier. The sensor for measuring mechanical/electrical properties is fixed on the sensor carrier on the sample holder head by the pressing piece, while the sensor carrier is connected to the sample holder head through a pair of supporting shafts located on sides of the sample holder head. The sensor carrier can tilt within the plane perpendicular to the ample holder head by revolving around the supporting shafts (i.e. tilting along Y axis at an angle of ±30°). The sample holder also allows obtaining mechanical/electrical parameters concurrently. 1. A double tilt sample holder for in-situ measuring mechanical and electrical properties in a transmission electron microscope (TEM) , comprising:a handle having an electrode interface connecting to external equipment of the TEM;a sample holder body having conductor wires connecting to the electrode interface; a pair of supporting shafts located on sides of the sample holder head,', 'a first electrode array having two rows of electrodes symmetrically disposed along sides of the sample holder head with the supporting shafts as the centerline and connecting to the conductor wires,', 'a Y-axis tilting actuator, and', a through groove having a peripheral supporting edge at a bottom of the through groove with the supporting shafts as the centerline, and', 'a first through hole located at a position away from the supporting shafts and closer to the Y-axis tilting actuator;, 'a sensor carrier fixed on the front end of the sample holder head by the supporting shafts, the sensor carrier comprising], 'a sample holder head located at a front end of the sample holder, comprising a second electrode array ...

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Номер записи: 82

02-05-2013 дата публикации

Current detection apparatus

Номер: US20130106425A1

Автор: Takuya OOHATA

Принадлежит: Denso Corp

A current detection apparatus for detecting a current from a battery flowing through a harness. The apparatus includes a resistor having first and second fixed portions secured and electrically connected to a battery-side wiring and the harness, respectively, a circuit board provided with a current detection circuit for detecting a current flowing through the resistor on the basis of a potential difference between two positions along a current carrying path between the first and second fixed portions of the resistor, and a casing for housing the resistor and the circuit board. The resistor includes a current carrying member that provides the current carrying path and a lead member electrically connecting the current carrying member and the circuit board. The first and second fixed portions, and the current carrying member are disposed on the top surface of the battery, and the circuit board is disposed on a side of the battery.

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Номер записи: 83

02-05-2013 дата публикации

Battery Rating Method

Номер: US20130106427A1

Автор: John Harold Miller, Layna Lanier Mendlinger, Travis Zachary Torrey

Принадлежит: Exide Technologies LLC

A method of rating a battery includes providing a plurality of numerical values by removing units from standardized ratings or tests for the battery; assigning a pre-calculated unit scaling factor to each numerical value of the plurality of numerical values; and calculating a total rating by multiplying each pre-calculated unit scaling factor by each corresponding numerical value of the plurality of numerical values to obtain a normalized value for each numerical value of the plurality of numerical values, and adding each normalized value.

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Номер записи: 84

02-05-2013 дата публикации

X-RAY CT DEVICE

Номер: US20130108009A1

Автор: Kojima Shinichi, Konno Yasutaka, Tsubota Yushi, Ueki Hironori, Watanabe Fumito

Принадлежит: HITACHI MEDICAL CORPORATION

An X-ray CT apparatus includes: an X-ray generating unit configured to generate an X ray; an X-ray detecting unit including a plurality of X-ray detectors, each configured to detect the X ray generated from the X-ray generating unit and transmitted through an object; and an image generating unit configured to correct and reconstruct signals acquired by the X-ray detecting unit. While crosstalk correction of a plurality of the X-ray detectors is performed at the image generating unit, correction of a locally attenuating component is previously performed and correction of a whole component of the crosstalk is performed when the image is reconstructed. 1. An X-ray CT apparatus , comprising:an X-ray generating unit configured to generate an X ray;an X-ray detecting unit including a plurality of X-ray detectors, each configured to detect the X ray generated from the X-ray generating unit and transmitted through an object; andan image generating unit configured to correct a signal acquired by the X-ray detecting unit and reconstruct an image,wherein while crosstalk correction of a plurality of the X-ray detectors is performed at the image generating unit, correction of a locally attenuating component is previously performed and correction of a whole component of crosstalk is performed when the image is reconstructed.2. The X-ray CT apparatus as claimed in claim 1 , wherein the image generating unit corrects the locally attenuating component such that a correction quantity of the whole component of the crosstalk is equalized to a total of quantities leaked from one of a plurality of the X-ray detectors and to a total of quantities detected at another of the X-ray detectors.3. The X-ray CT apparatus as claimed in claim 1 , wherein in a measurement regarding the crosstalk correction claim 1 , the locally attenuating component and the whole component of the crosstalk are measured using a shielding body.4. The X-ray CT apparatus as claimed in claim 2 , wherein in a measurement ...

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Номер записи: 85

02-05-2013 дата публикации

X-RAY SOURCE, X-RAY IMAGING APPARATUS, AND X-RAY COMPUTED TOMOGRAPHY IMAGING SYSTEM

Номер: US20130108012A1

Автор: Sato Genta

Принадлежит: CANON KABUSHIKI KAISHA

An X-ray imaging apparatus includes: an X-ray source including an electron source and a target, the target having a plurality of projections, each having an emitting surface; a diffraction grating configured to diffract X rays emitted from the X-ray source; and a detector configured to detect the X rays diffracted by the diffraction grating. Electron beams output from the electron source are incident on the emitting surfaces so that X rays are emitted from the emitting surfaces and are output to the diffraction grating. The X rays emitted from the emitting surfaces are diffracted by the diffraction grating so as to form a plurality of interference patterns. The projections are arranged such that bright portions of the interference patterns overlap each other and such that dark portions thereof overlap each other. Distances from the emitting surfaces to the diffraction grating are equal to each other. 1. An X-ray imaging apparatus comprising:an X-ray source including an electron source and a target, the target having a plurality of projections, each of the plurality of projections having an emitting surface;a diffraction grating configured to diffract X rays emitted from the X-ray source; anda detector configured to detect the X rays diffracted by the diffraction grating,wherein electron beams output from the electron source are incident on the emitting surfaces of the plurality of projections so that X rays are emitted from the emitting surfaces and are output to the diffraction grating, the X rays emitted from the emitting surfaces are diffracted by the diffraction grating so as to form a plurality of interference patterns, the plurality of projections are arranged such that bright portions of the plurality of interference patterns overlap each other and such that dark portions of the plurality of interference patterns overlap each other, and distances from the plurality of emitting surfaces to the diffraction grating are equal to each other.2. The X-ray imaging ...

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Номер записи: 86

02-05-2013 дата публикации

X-RAY APPARATUS AND X-RAY MEASURING METHOD

Номер: US20130108020A1

Автор: Mukaide Taihei

Принадлежит:

An apparatus for deriving X-ray absorbing and phase information comprises; a splitting element for splitting spatially an X-ray, a detector for detecting intensities of the X-rays transmitted through an object, the intensity of the X-rays changing according to X-ray phase and also position changes, and an calculating unit for calculating an X-ray transmittance image, and an X-ray differential phase contrast or phase sift contrast image as the phase information. The X-ray is split into two or more X-rays having different widths, and emitted onto the detector unit. And, the calculating unit calculates the X-ray absorbing and phase information based on a difference, between the two or more X-rays, in correlation between the changing of the phase of the X-ray and the changing the intensity of the X-ray in the detector unit. 1. An X-ray apparatus for deriving X-ray absorbing information and X-ray phase information of an object to be detected comprising:a splitting element for splitting spatially an X-ray generated by an X-ray generator;a detector unit for detecting intensities of the X-rays or a light, based on the X-rays split by the splitting element and transmitted through the object, the intensity of the X-rays or the light changing according to an X-ray phase shift during the transmitting through the object, and also changing according to an X-ray position change; andan calculating unit for calculating an X-ray transmittance image as the X-ray absorbing information, and an X-ray differential phase contrast image or an X-ray phase sift contrast image as the X-ray phase information by using the intensities of the X-rays or the light, whereinthe splitting element splits the X-ray into two or more the X-rays having different widths, and emitting the X-rays onto the detector unit, andthe calculating unit calculates the X-ray absorbing information and the X-ray phase information based on a difference, between the two or more X-rays, in correlation between the changing of ...

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Номер записи: 87

02-05-2013 дата публикации

Device analysis

Номер: US20130110421A1

Автор: Kay Lederer

Принадлежит: Plastic Logic Ltd

Performing an analysis of an electronic device sample by measuring a property at a plurality of points of said electronic device sample, and in advance of said analysis subjecting said plurality of points to at least one treatment that increases the difference in said property between at least two elements of said electronic device sample.

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Номер записи: 88

09-05-2013 дата публикации

SCANNING TRANSMISSION ELECTRON MICROSCOPE AND AXIAL ADJUSTMENT METHOD THEREOF

Номер: US20130112875A1

Автор: Inada Hiromi, Nakamura Kuniyasu

Принадлежит: HITACHI HIGH-TECHNOLOGIES CORPORATION

A scanning transmission electron microscope equipped with an aberration corrector is capable of automatically aligning the position of a convergence aperture with the center of an optical axis irrespective of skill and experience of an operator. The scanning transmission electron microscope system includes an electron source; a condenser lens configured to converge an electron beam emitted from the electron source; a deflector configured to cause the electron beam to perform scanning on a sample; an aberration correction device configured to correct an aberration of the electron beam; a convergence aperture configured to determine a convergent angle of the electron beam; and a detector configured to detect electrons passing through or diffracted by the sample. The system acquires information on contrast of a Ronchigram formed by the electron beam passing through the sample, and determines a position of the convergence aperture on the basis of the information. 1. A scanning transmission electron microscope system , comprising:an electron source;a condenser lens configured to converge an electron beam emitted from the electron source;a deflector configured to cause the electron beam to perform scanning on a sample;an aberration correction device configured to correct an aberration of the electron beam;a convergence aperture configured to determine a convergent angle of the electron beam; anda detector configured to detect electrons passing through or diffracted by the sample, whereinthe system acquires information on contrast of a Ronchigram formed by the electron beam passing through the sample, and determines a position of the convergence aperture on the basis of the information.2. The scanning transmission electron microscope system according to claim 1 , the system further comprisingan operating unit configured to create a histogram of the Ronchigram, whereinthe position of the convergence aperture is determined on the basis of the histogram.3. The scanning ...

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Номер записи: 89

16-05-2013 дата публикации

DEFECT INSPECTION METHOD, AND DEVICE THEREOF

Номер: US20130119250A1

Автор: Hiroi Takashi, Honda Toshifumi, Hosoya Naoki

Принадлежит:

A conventional pattern inspection, which compares an image to be inspected with a reference image and subjects the resulting difference value to the defect detection using the threshold of defect determination, has difficulty in highly-sensitive inspection. Because defects occur only in specific circuit pattern sections, false reports occur in the conventional pattern inspections which are not based on the position. Disclosed are a defect inspection method and a device thereof which perform a pattern inspection by acquiring a GP image in advance, designating a place to be inspected and a threshold map to the GP image on the GUI, setting the identification reference of the defects, next acquiring the image to be inspected, applying the identification reference to the image to be inspected, and identifying the defects with the identification reference, thereby enabling the highly-sensitive inspection. 1. A method for inspecting defects on a sample surface using an image acquired with a scanning electron microscope (SEM) , the method comprising the steps of:creating a GP image from the SEM-acquired image;setting defect discrimination criteria on a screen;acquiring an inspection image using the SEM;conducting a comparative inspection between the obtained GP image and inspection image using the screen-set defect discrimination criteria; anddisplaying results of the comparative inspection.2. The defect inspection method according to claim 1 , wherein claim 1 , in the step of creating the GP image claim 1 , the SEM images an onscreen-specified region on the sample to be inspected claim 1 , and creates the GP image using an image obtained by the imaging.3. The defect inspection method according to claim 1 ,wherein, in the step of creating the GP image, the SEM images an onscreen-specified region on the sample to be inspected, and creates the GP image using an image obtained by averaging a plurality of images obtained by the imaging.4. The defect inspection method according ...

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Номер записи: 90

16-05-2013 дата публикации

X-RAY STRESS MEASURING APPARATUS

Номер: US20130121470A1

Автор: Munekawa Shigeru, Toraya Hideo

Принадлежит:

An X-ray stress measuring apparatus, for measuring stress on a sample, comprises: a pair of X-ray generating means (′) for irradiating X-ray beams, determining an angle defined between the X-ray beams, mutually, at an arbitrary fixed angle, on a plane inclining by an angle desired with respect to a surface of the sample to be measured stress thereon; an X-ray sensor portion () for detecting plural numbers of Debye rings (C, C′), which are generated by incident X-ray beams from said pair of X-ray generating means; and a battery () for supplying necessary electricity to each of parts of the apparatus, wherein said X-ray sensor portion is made up with only one (1) piece of a 2-dimensional X-ray detector () or a 1-dimensional X-ray detector (′), and is disposed in a position where the plural numbers of Debye rings generated by the incident X-ray beams from the at least one pair of X-ray generating means are adjacent to each other, or intersect with each other, thereby detecting the plural numbers of the Debye rings caused due to the X-ray and the X′-ray in common with. 1. An X-ray stress measuring apparatus , for measuring stress on a sample , comprising , at least:a pair of X-ray generating means for irradiating X-ray beams, determining an angle defined between the X-ray beams, mutually, at an arbitrary fixed angle, on a plane inclining by an angle desired with respect to a surface of the sample to be measured stress thereon;an X-ray sensor portion for detecting plural numbers of Debye rings, which are generated by incident X-ray beams from said pair of X-ray generating means; anda battery means for supplying electricity to said pair of X-ray generating means and said X-ray sensor portion, whereinsaid X-ray sensor portion is made up with one (1) piece of a 2-dimensional X-ray detector or a 1-dimensional X-ray detector, and is disposed in a position where the plural numbers of Debye rings generated by the incident X-ray beams from said at least one pair of X-ray ...

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Номер записи: 91

23-05-2013 дата публикации

METHOD FOR DETERMINING THE PERFORMANCE OF A PHOTOLITHOGRAPHIC MASK

Номер: US20130126728A1

Автор: Beyer Dirk, Budach Michael, Scherübl Thomas, Waiblinger Markus

Принадлежит: Carl Zeiss SMS GmbH

The invention relates to a method for determining a performance of a photolithographic mask at an exposure wavelength with the steps of scanning at least one electron beam across at least one portion of the photolithographic mask, measuring signals generated by the at least one electron beam interacting with the at least one portion of the photolithographic mask, and determining the performance of the at least one portion of the photolithographic mask at the exposure wavelength based on the measured signals. 1. A method for determining a performance of a photolithographic mask at an exposure wavelength , comprising:a. scanning at least one electron beam across at least one portion of the photolithographic mask;b. measuring signals generated by the at least one electron beam interacting with the at least one portion of the photolithographic mask; andc. determining the performance of the at least one portion of the photolithographic mask at the exposure wavelength based on the measured signals.2. The method according to claim 1 , further comprising scanning the at least one electron beam with multiple beam energies.3. The method according to claim 1 , wherein the photolithographic mask comprises a reflective photolithographic mask.4. The method according to claim 1 , wherein the photolithographic mask comprises a photolithographic mask for an extreme ultraviolet (EUV) exposure wavelength claim 1 , in particular for a wavelength around 13.5 nm.5. The method according to claim 1 , wherein measuring signals comprises measuring of electrons claim 1 , in particular measuring backscattered electrons and wherein measuring backscattered electrons comprises measuring a yield of backscattered electrons and/or measuring an energy distribution of backscattered electrons.6. The method according to claim 1 , wherein measuring signals comprises measuring photons claim 1 , in particular measuring photons using the energy dispersive x-ray spectroscopy (EDX).7. The method according to ...

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Номер записи: 92

23-05-2013 дата публикации

CHARGED PARTICLE DEVICE

Номер: US20130126750A1

Автор: Enomoto Hirohisa, Kitayama Shinya, SUZUKI Wataru

Принадлежит:

A charged particle device that can prevent an effect of a vibration and suppress relative displacement between a charged particle generator and a specimen stage without reducing a movement range of the specimen stage is achieved. The charged particle device () has a long cylindrical column () at its upper portion and a hollow specimen chamber () arranged under the column (). The specimen chamber () is divided into a specimen chamber upper portion () and a specimen chamber bottom portion (). A vertical vibration of the specimen chamber upper portion () is larger than a horizontal vibration of the specimen chamber upper portion (). A horizontal vibration of the specimen chamber bottom portion () is large. The column () has a charged particle gun and a detector. The column () and a specimen stage supporter () are held by the specimen chamber upper portion (), while the specimen stage supporter () holds the specimen stage (). A central axis of the column () and a central axis of the specimen stage supporter () match each other or are parallel to each other. Even if an environmental sound is added to the column () or the specimen chamber (), the column () and the specimen stage () are fixed to the specimen chamber upper portion () and vibrate in an integrated manner. Thus, relative displacement hardly occurs between the charged particle generator and a specimen. 1. A charged particle device comprising:{'b': '2', 'a long cylindrical column () that has charged particle generating means;'}{'b': 3', '2, 'a specimen chamber () that has a column fixing surface to which an end of the column () is fixed;'}{'b': 4', '3, 'a specimen stage supporter () that is arranged within the specimen chamber () and fixed to the column fixing surface; and'}{'b': '4', 'a specimen stage that is held by the specimen stage supporter () and holds a specimen that is irradiated with charged particles emitted by the charged particle generating means.'}2. The charged particle device according to claim 1 ...

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Номер записи: 93

23-05-2013 дата публикации

SECONDARY CELL AND METHOD FOR TESTING SECONDARY CELL

Номер: US20130127473A1

Автор: Ikeda Mitsuhiro

Принадлежит: Panasonic Corporation

The present invention provides a secondary cell, wherein an area having generated therein a phenomenon due to an internal short-circuit can be freely changed, a change in the secondary cell due to the generation of the internal short-circuit is correctly grasped, and safety of the secondary cell can be accurately evaluated when the internal short-circuit is generated. An internal short-circuit test method for the secondary cell is also provided. In the present invention, the secondary cell is configured by disposing: an electrode group, which is formed by winding or laminating a positive electrode plate, a negative electrode plate, and an insulating layer disposed between the positive electrode plate and the negative electrode plate; and a heat generating body, which is disposed between the positive electrode plate and the insulating layer or between the negative electrode plate and the insulating layer. 1. A secondary cell comprising:an electrode group that is formed by winding or laminating a positive electrode plate, a negative electrode plate, and an insulating layer that is disposed between the positive electrode plate and the negative electrode plate; anda heat generating body that is disposed between the positive electrode plate and the insulating layer or between the negative electrode plate and the insulating layer, the heat generating body heating a local portion of the electrode group.2. The secondary cell according to claim 1 ,wherein the heat generating body further includes a conductive wire that connects the heat generating body to an external power supply device.3. The secondary cell according to claim 2 ,wherein the heat generating body includes a linear heat generating material having a spiral shape, and an insulating layer that is interposed between parts of the heat generating material, the parts of the heat generating material being adjacent to each other in an axial direction of a spiral.4. The secondary cell according to claim 2 ,wherein the ...

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Номер записи: 94

23-05-2013 дата публикации

X-RAY CT APPARATUS AND IMAGE PROCESSING APPARATUS

Номер: US20130129037A1

Автор: NAKANISHI Satoru

Принадлежит:

According to one embodiment, an X-ray CT apparatus includes an generation unit, detection unit, processing unit, and reconstruction unit. The generation unit irradiates an object with X-rays. The detection unit includes detection elements corresponding to a plurality of channels, which output detection signals upon detecting X-rays. The processing unit smoothes projection data constituted by numerical values corresponding to signals output from the elements so as to more strongly smooth a portion exhibiting a larger amount of change in the numerical value. The reconstruction unit reconstructs an image by using a plurality of projection data smoothed by the image processing unit. 1. An X-ray CT apparatus comprising:an X-ray generation unit configured to irradiate an object with X-rays;an X-ray detection unit including X-ray detection elements corresponding to a plurality of channels, which are arrayed in a predetermined direction to output detection signals upon detecting X-rays transmitted through the object;an image processing unit configured to smooth projection data constituted by numerical values corresponding to detection signals output from the X-ray detection elements corresponding to the plurality of channels so as to more strongly smooth a portion exhibiting a larger amount of change in the numerical value; anda reconstruction unit configured to reconstruct an image by using a plurality of projection data smoothed by the image processing unit.2. The X-ray CT apparatus of claim 1 , wherein the image processing unit smoothes the projection data by applying a Gaussian filter to the projection data while increasing a variance value for a portion exhibiting a larger amount of change in the numerical value.3. The X-ray CT apparatus of claim 1 , wherein the image processing unit smoothes the projection data by obtaining data by uniformly smoothing the projection data and adding the data and corresponding numerical values included in the projection data while ...

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Номер записи: 95

23-05-2013 дата публикации

X-RAY DIFFRACTION METHOD AND PORTABLE X-RAY DIFFRACTION APPARATUS USING SAME

Номер: US20130129051A1

Автор: Nakano Asao, Ueji Yoshinori

Принадлежит:

A portable X-ray diffraction apparatus is provided which can be held by a person and on which an image of a spot to be measured can be viewed. The portable X-ray diffraction apparatus includes: X-ray irradiation means that irradiates a sample with collimated X-rays; diffracted X-ray detection means that detects a collimated portion of diffracted X-rays among X-rays diffracted from the sample by the irradiation of the X-rays with the X-ray irradiation means; and signal processing means that processes a signal outputted from the diffracted X-ray detection means. An X-ray diffraction method is used which includes: irradiating a sample with collimated continuous-wavelength X-rays; extracting a collimated portion of diffracted X-rays diffracted from the sample irradiated with the X-rays and condensing the extracted collimated portion of the diffracted X-rays; detecting, using an energy dispersive detection element, the condensed diffracted X-rays; and processing a signal detected by the detection element. 1. A portable X-ray diffraction apparatus comprising:X-ray irradiation means that irradiates a sample with collimated X-rays;diffracted X-ray detection means that detects a collimated portion of diffracted X-rays among X-rays diffracted from the sample by the irradiation of the X-rays with the X-ray irradiation means; andsignal processing means that processes a signal outputted from the diffracted X-ray detection means.2. The portable X-ray diffraction apparatus according to claim 1 , further comprising imaging means that images a spot on the sample to be irradiated with the X-rays and display means that displays an image imaged by the imaging means.3. The portable X-ray diffraction apparatus according to claim 1 , wherein the X-ray irradiation means includes:an X-ray tube for generating continuous wavelength X-rays;shutter means that opens and closes an optical path for X-rays generated by the X-ray tube;irradiation optical means that collimates X-rays generated by the ...

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Номер записи: 96

23-05-2013 дата публикации

METHOD AND ITS APPARATUS FOR X-RAY DIFFRACTION

Номер: US20130129052A1

Автор: Munekawa Shigeru, Toraya Hideo

Принадлежит:

In order to realize a compact and lightweight X-ray diffraction apparatus not requiring a goniometer, an apparatus for X-ray diffraction includes a first X-ray irradiating unit and a second X-ray irradiating unit that irradiate shaped X-rays on a same region of the surface of the sample from respective directions; an X-ray detecting unit that detects a first diffracted X-ray emanated from the region of the sample where the X-ray is irradiated by the first X-ray irradiating unit and a second diffracted X-ray emanated from the region of the sample where the X-ray is irradiated from the second X-ray irradiating unit; and an X-ray diffraction signal processing unit that processes a signal acquired by detecting the first diffracted X-ray and the second diffracted X-ray emanated from the same region of the sample with the X-ray detecting unit. 1. An X-ray diffraction apparatus comprising:a plurality of X-ray irradiating units that irradiate shaped X-rays from different directions onto a same surface of a sample;an X-ray detecting unit that detects a plurality of diffracted X-rays emanated from the sample through the irradiation of the X-rays in the same surface region of the sample by the plurality of X-ray irradiating units; andan X-ray diffraction signal processing unit that processes signals acquired by detecting the plurality of diffracted X-rays emanated from the same surface region of the sample by the X-ray detecting unitwherein a diffraction X-ray pattern caused by one of the plurality of the diffraction X-rays emanated from the sample through the irradiation of an X-ray from one of the plurality of X-ray irradiating units and detected by the X-ray detecting unit has a curvature the direction of which is opposite to a curvature of the other diffraction X-ray pattern caused by the other one of the plurality of the diffraction X-rays emanated from the sample through the irradiation of the other X-ray from the other one of the plurality of X-ray irradiating units and ...

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Номер записи: 97

30-05-2013 дата публикации

DROPLET MOVING DEVICE, DROPLET MOVING METHOD, PLASMA SEPARATION DEVICE, AND PLASMA SEPARATION METHOD

Номер: US20130134041A1

Автор: Tamura Akitake

Принадлежит: TOKYO ELECTRON LIMITED

A droplet can be moved along a surface of a moving surface forming member in a simple method. At both sides of the moving surface forming member configured to form a moving surface on which the droplet is moved and made of a nonmagnetic material, magnetic field forming members A and B configured to form a magnetic field gradient such that intensity of a magnetic field decreases as a distance from an area where the droplet is positioned on the surface of the moving surface forming member increases along the surface is provided. By relatively moving the moving surface forming member with respect to the magnetic field forming members A and B along the surface, the droplet is moved along the magnetic field gradient. 1. A droplet moving device comprising:a moving surface forming member configured to form a moving surface on which a droplet is moved and made of a nonmagnetic material;a droplet supply unit configured to supply the droplet to a surface of the moving surface forming member;a magnetic field forming member configured to form a magnetic field gradient such that intensity of a magnetic field decreases as a distance from an area where the droplet is positioned on the surface of the moving surface forming member increases along the surface; anda moving unit configured to relatively move the moving surface forming member with respect to the magnetic field forming member along the surface in order to move the droplet along the magnetic field gradient.2. The droplet moving device of claim 1 ,wherein the moving surface forming member has a plate shape, andthe magnetic field forming member is provided at both sides of the moving surface forming member with the moving surface forming member therebetween.3. The droplet moving device of claim 1 , further comprising:a controller configured to control the moving unit to move the droplet along a predetermined moving trajectory.4. The droplet moving device of claim 1 ,wherein the magnetic field forming member is configured to ...

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Номер записи: 98

30-05-2013 дата публикации

SAMPLE OBSERVATION APPARATUS AND METHOD OF MARKING

Номер: US20130134308A1

Автор: ENDO Fumiaki, YAESHIMA Kaori

Принадлежит: HITACHI HIGH-TECHNOLOGIES CORPORATION

If an indentation mark is put in the vicinity of a defect under constant conditions regardless of the film type of samples, surroundings of the mark become cracked or the mark may be too small to view, thus causing the problem of difficulty in viewing the mark or the defect. Another problem is that in a patterned wafer, an indentation mark is coincidentally put on a film not suited for marking. To solve such problems, an elemental analysis is conducted of a position to be marked and, on the basis of the analysis results, such indentation marking conditions as the pressing load, descending rate, and marking depth of an indenter are varied to perform marking suited for a film type. If the film type of the location to be marked cannot be concluded to be a registered film type, marking under wrong conditions is prevented by switching to manual setting. It is also possible to avoid putting marks on a material if the material is not suited for marking. 2. The sample observation apparatus according to claim 1 , wherein the marking conditions are determined by referring to the information on the basis of the elemental analysis results with respect to the surroundings of the defect position.3. The sample observation apparatus according to claim 2 , wherein the marking conditions include the pressing load of the indenter.4. The sample observation apparatus according to claim 1 , wherein the positions to be marked are changed on the basis of the elemental analysis results with respect to the surroundings of the defect position.5. The sample observation apparatus according to claim 1 , wherein the attachment of marks is stopped if the elemental analysis results with respect to the surroundings of the defect position do not correspond to any of pre-registered materials.6. The sample observation apparatus according to claim 1 , wherein if the elemental analysis results with respect to the surroundings of the defect position do not correspond to any of pre-registered materials ...

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Номер записи: 99

30-05-2013 дата публикации

X-RAY PHOTOGRAPHING DEVICE

Номер: US20130136226A1

Автор: Kakemoto Terumi, Tomoe Takeshi, Wagatsuma Takanori

Принадлежит: The Yoshida Dental Mfg. Co., Ltd.

An X-ray photographing device includes an X-ray irradiating unit () for irradiating an object () with an X-ray beam () having a slit shape from a source (), and an imaging member () provided with a surface () to receive the X-ray beam. A pivot drive unit causes the irradiating unit () and the imaging member () to pivot about a pivoting center line (La) around the object (), and a sub-drive unit () causes the imaging member () to have a local motion in a circumferential direction with a shift width (Mw). A width (W) of the surface () in the circumferential direction is smaller than the shift width (Mw) and the local motion is a local rotation motion made on the rotation center line (Lc). This configuration reduces the cost of the device, reduces vibrations of the imaging member (), and enhances operating efficiency. 1. An X-ray photographing device comprising: an X-ray irradiating unit configured to irradiate an object with an X-ray beam; an X-ray imaging member having a light-receiving surface configured to receive the X-ray beam transmitted through the object; a pivot drive unit configured to cause the X-ray irradiating unit and the X-ray imaging member to have a pivoting motion on a pivoting center line around the object; and a control unit configured to control the pivot drive unit , the X-ray photographing device further comprising a sub-drive unit , controlled by the control unit , configured to cause a driven member which is at least one of the X-ray irradiating unit and the X-ray imaging member to a local motion which is different from the pivoting motion with a shift width in a predetermined direction , whereina width of the light-receiving surface in the predetermined direction is smaller than the shift width, and whereinthe local motion is a motion made on the rotation center line.2. The X-ray photographing device as claimed in claim 1 , wherein the rotation center line is arranged such that the object is always positioned between the X-ray irradiating ...

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Номер записи: 100