18-09-2014 дата публикации
Номер: US20140265013A1
Принадлежит:
Some embodiments of the invention provide methods that can create large area complex patterns for nanoimprint molds without or with very litter of the use of the charged beam or photon beam direct-writing of nanostructures. Some embodiments of the invention use (i) Fourier nanoimprint patterning (FNP), (ii) edge-guided nanopatterning (EGN), and (iii) nanostructure self-perfection, and their combinations. 1(a) obtaining a nanoimprint mold having a pattern that is one of the Fourier components of the complex nanopattern;(b) imprint a daughter mold substrate by transferring the pattern to create the Fourier component on the daughter mold;(c) obtaining another nanoimprint mold having a pattern that is a second Fourier component of the complex nanopattern; and(d) repeating steps (b) and (c), until the final pattern on the daughter mold is substantially similar to the complex nanopattern;thereby creating the complex periodic nanopattern.. A method for creating a complex periodic nanopattern, comprising: This application claims the benefit of: provisional application Ser. No. 61/801,424, filed Mar. 15, 2013 (NSNR-004PRV), provisional application Ser. No. 61/801,096, filed Mar. 15, 2013 (NSNR-005PRV), provisional application Ser. No. 61/800,915, filed Mar. 15, 2013 (NSNR-006PRV), provisional application Ser. No. 61/793,092, filed Mar. 15, 2013 (NSNR-008PRV), provisional Application Ser. No. 61/801,933, filed Mar. 15, 2013 (NSNR-009PRV), provisional Application Ser. No. 61/794,317, filed Mar. 15, 2013 (NSNR-010PRV), provisional application Ser. No. 61/802,020, filed Mar. 15, 2013 (NSNR-011 PRV) and provisional application Ser. No. 61/802,223, filed Mar. 15, 2013 (NSNR-012PRV), all of which applications are incorporated by reference herein for all purposes.One of the most critical obstacles in developing large-area nanosystems is lack of the ability to nanomanufacture over large areas. Today we have the tools and technologies to make nanostructures in small area (e.g. ...
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