03-02-2022 дата публикации
Номер: US20220033255A1
A monolithically integrated multi-sensor (MIMS) is disclosed. A MIMs integrated circuit comprises a plurality of sensors. For example, the integrated circuit can comprise three or more sensors where each sensor measures a different parameter. The three or more sensors can share one or more layers to form each sensor structure. In one embodiment, the three or more sensors can comprise MEMs sensor structures. Examples of the sensors that can be formed on a MIMs integrated circuit are an inertial sensor, a pressure sensor, a tactile sensor, a humidity sensor, a temperature sensor, a microphone, a force sensor, a load sensor, a magnetic sensor, a flow sensor, a light sensor, an electric field sensor, an electrical impedance sensor, a galvanic skin response sensor, a chemical sensor, a gas sensor, a liquid sensor, a solids sensor, and a biological sensor. 1. A monolithically integrated multi-sensor (MIMS) having three or more sensors the MIMS comprising:a first MEMS sensor configured to measure a first parameter;a second MEMS sensor configured to measure a second parameter;a third sensor configured to measure a third parameter wherein the first, second, and third parameters are different, wherein the first, second, and third sensors are formed on or in a single semiconductor substrate using a monolithic semiconductor process, and wherein the a layer of the monolithic semiconductor process is common to the first, second, and third sensors.2. The MIMS of wherein the layer forms a static structural component in at least one of the first claim 1 , second claim 1 , or third sensors and wherein the layer forms a dynamic structural component in at least one of the first claim 1 , second claim 1 , or third sensors.3. The MIMS of wherein the layer is configured to form one or more pillars or one or more walls to support the static structural components for improved mechanical strength.4. The MIMS of wherein the dynamic structural component is a proof mass or a suspension spring.5 ...
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