Synthesis of fluoroalkyl tin precursors
Номер патента: EP4402147A1
Опубликовано: 24-07-2024
Автор(ы): David KUIPER
Принадлежит: Entegris Inc
Опубликовано: 24-07-2024
Автор(ы): David KUIPER
Принадлежит: Entegris Inc
Реферат: The invention provides certain fluorinated alkyl tin compounds which are believed to be useful in the vapor deposition of tin-containing films onto the surface of microelectronic device substrates. Also provided are processes for the preparation of the precursor compounds and processes for the use of such compounds in the deposition of tin-containing films onto microelectronic device substrates.
Methods of synthesis of isotopically enriched borohydride and methods of synthesis of isotopically enriched boranes
Номер патента: WO2005074531A2. Автор: Kevin Cook,Bernard Spielvogel. Владелец: Semequip Inc.. Дата публикации: 2005-08-18.