DEVICE AND PROCEDURE FOR THE SORT

The invention refers to a device for the admission as well as for fixing and promoting essentially flat articles, so that these can be controlled from a pile and isolated damage-free. Furthermore the invention refers to a procedure for the sort of such articles using the device according to invention.

The technical area of the invention concerns the treatment and/or handling of thin, break-sensitive and disk-shaped articles, as they are present for example in the semiconductor and solar technology in form so-called wafer.

With one of the well-known manufacturing processes for such substrates silicon ingots or silicon columns (available substrate blocks called) will be used, those into thin, break-sensitive disks (available substrates called) will be sawed. In this way manufactured substrates exhibit typically thicknesses from some 10 to 300 µm and are trained usually squarely or rectangular. They have then prefer a respective edge length up to 210 mm.

The substrate blocks are usually glued on for sawing a retaining mechanism. This retaining mechanism consists typically of a metal base, on which again a glass plate is applied as intermediate members, whereby the substrate block which can be worked on is glued on on the glass plate. Alternatively for this also different materials for the training of the retaining mechanism can be intended after the state of the art.

For the production of the substrates specified before it is necessary to through-cut the substrate block to form disk-like completely so that the sawing cut is enough beyond the substrate block into the glass plate. After sawing everyone of in this way manufactured substrates sticks to an edge with its over a splicing tape further to the glass plate, whereby a comblike thing develops, which is held together over the retaining mechanism.

Before the individual substrates, which exhibit now disk-shaped training, from which retaining mechanism are replaced and afterwards to the actual cleaning supplied, a prepurifying usually takes place, at the one part of the mixture of sawing, connection and cooling agent as well as abrasion (the so-called Slurry), developed when sawing, which between the individual substrates is or them is supported, one out-washes.

A problem of conventional techniques consists of the fact that the substrates drying-fall during the treatment, whereby the Slurrybestandteile on the substrate surfaces solidifies itself and no more cannot be removed. Therefore it must be guaranteed that the substrates drying-fall after sawing at no more time. This is reached according to invention by the fact that all working on steps take place after sawing up to the sort taken place in and/or different liquids.

A further problem concerns the training of adhesive powers by a laminar contact of two neighbouring substrates. These Kraft, which is still strengthened in case of the presence by Slurryrückständen on the substrate surface, a substantial risk must be overcome regarding the desired soundness of the individual substrates with the sort in each case and means. These adhesive powers also arise, if the substrates are in a liquid medium, what are intended according to invention.

Subsequently, a mostly mechanical separation of the substrates from the retaining mechanism takes place, so that a pile of substrates develops, with which the substrates are appropriate laminar for up and/or together and are present in a loose pile group.

In a further step the substrates are finally from each other isolated, taken out thus of the loose pile group, so that each substrate can or separately be processed. An example of a such step which can be accomplished at isolated substrates is a final purification of the substrates by means of ultrasonic.

The steps of the separation and Vereinzelns are to that extent of large importance, that during inappropriate handling very easily damage to the substrates can occur, like for example break, detention marks by drying and scratches by friction. For this reason different devices and procedures are well-known from the state of the art, which have as careful a handling of the substrates as possible as a goal.

In where the 01/28745 A1 procedures and mechanisms for the separation and/or replacement from disk-shaped substrates from a substrate block are described. A robot-like mechanism seizes the substrate which can be replaced over suction mechanisms, whereby the substrate is loosened by a reciprocating movement of the mechanism from the retaining mechanism. Reciprocating movements are intended into different directions. Seizing the substrate which can be isolated effected with over the surface of the substrate arranged and at the mechanism a fastened suction mechanism. For the release of the substrate within the suction mechanism a certain positive pressure is produced, so that the replaced substrate is removable by the mechanism again.

From the DE 199 00 671 A1 are procedures and devices for the replacement from disk-shaped substrates as in particular from Wafern well-known. It is suggested holding those immediately after the sawing procedure together responsible substrates, which are fastened to the retaining mechanism with their an edge still, by a purposeful fluid beam from each other in the distance. A wedge mechanism ensures for the fact that a separation of the substrate which can be replaced takes place from the retaining mechanism. At the same time the isolated substrate is taken by means of suction mechanisms an exhibiting grab arm-similar mechanism out of the retaining mechanism.

From the DE 199 04 834 A1 a device is well-known for the replacement from individual thin, break-sensitive and disk-like substrates. The substrate block with the substrates already sawed is in a container filled with a fluid. Contrary to the described state of the art the retaining mechanism as well as still at the retaining mechanism fixed the substrates is perpendicularly aligned, so that the substrate which can be isolated is arranged parallel to the fluid surface. A wedge mechanism ensures for the fact that a separation between the glass plate and the substrate which can be isolated takes place. A conveyor arranged in direct proximity to the substrate ensures for the fact that the replaced and floating substrates are removed. A sliding mechanism plans that the retaining mechanism is brought again and again into the same position and driven horizontal against the wedge mechanism to the replacement of the respective substrate. On the other side of the conveyor a mechanism is intended, with which the isolated substrates are inserted automatically into a stand. A goal of the replacement is it that the separated, disk-like trained substrates are stacked after their distance of the retaining mechanism and inserted into pre-determined mechanisms or superimposed directly flat.

For the separation and isolating thus movements are necessary, which require complex mechanisms, if one would like to do without a drive-pregnant manual operation. Since it concerns with the substrates however very break-sensitive and thin, plate-like out-arranged articles, these cannot be taken up without risk over conventional grab arm-similar systems. For this it is necessary to plan very precise and sensitive mechanisms so that a damage of the substrates is if possible avoided. Altogether forces like in particular the adhesive powers mentioned above and forces, the developing the affecting the substrate, when using mechanical parting agents and/or grip arms should be so small both with the separation of the substrate from the retaining mechanism and when isolating the substrate that a damage of the substrate is at any time impossible.

The above procedures of the state of the art require however the use from suction mechanisms to separating and/or isolating individual substrates or make the sequenzielle sort possible of an entire sawed substrate block to ensure however without that the substrates are held to each other during the treatment in a defined distance. Furthermore the application of these procedures leads to it that the substrates high mechanical loads are suspended.

A by hand accomplished sort saves the danger that the very thin and break-sensitive as well as disk-shaped trained substrates break in particular due to the increased adhesive powers.

A further disadvantage of conventional techniques consists of the fact that mostly only longer cycle times can be realized.

There is from there need at the supply of a device, with which a sawed substrate block can be isolated carefully and fast into individual substrates, without adhesive powers between the substrates to be overcome to have.

The task is solved by supply of the device in accordance with requirement 1 and the procedure in accordance with requirement 8. Particularly preferential execution forms are indicated in the respective Unteransprüchen.

The device according to invention serves the admission of essentially flat articles, in the following also substrates designation, in perpendicularly standing positioning, as well as fixing and promoting the same in a defined distance to each other. The device covers at least two parallel to each other arranged volumes, whereby the distance between the volumes is larger than the width of the flat articles and whereby the volumes are propelable moving in opposite directions. Furthermore the device according to invention means covers at least two parallel to each other arranged volumes to propelling the volumes, and means to the change of the distance that. These respective means can be in or several times intended.

The device according to invention makes from there the treatment of substrates possible in each case while maintaining one between two substrates of given distance. This distance arises either from the sawing process or as a result of use of a suitable means as comb and/or brush-like device, which is brought preferably only temporarily into the substrate block and to the desired Beabstandung leads. Alternatively or additionally the device according to invention a suitable means can to be e.g. covered in form of a flow mechanism as a Düsenleiste, be brought in over the fluid by at least one side into the substrate block can.

The specialist is clear that the teachings according to invention can be already implemented with a device, which only two arranged volumes exhibits parallel to each other. Of course the function of these volumes can be expenditure-practiced also by a majority the same, if these are propelable with same feed speed.

Alternatively or additionally the surface of the volume coming with the substrates into contact can be not smoothly, but controlled unevenly arranged, as for example by supply of a suitable burl or groove sample, whereby the latter is trained preferentially perpendicularly, thus toward the substrate edges and prefers at most a groove distance exhibits, which straight the distance of the sawing cuts of the substrate pile corresponds. A further preferential execution form of the volume covers brush-like structures on that the substrates turned volume side, whereby brush-like structures are particularly preferential in form of a burl or a groove sample.

The width of a volume or several volumes, which fulfills the function of this a volume as group of volumes, must be so limited that safe fixing and promoting of the substrates are ensured. Preferring way corresponds this width to one third at least and at the most four fifth of the substrate height. At most preferentially those is width such that still another sufficient large free space remains remaining in particular in the range of the retaining mechanism, by which for example for the purpose of the cleaning fluid can be brought in and/or again withdraws.

The volumes must be in such a manner positionable in purchase to the substrate block that safe fixing of the substrates is ensured. This means that the static friction necessary for fixing and promoting can be expenditure-practiced by the volume and/or the volumes on the lateral substrate edges.

Preferably the device according to invention furthermore a baseplate, up, covers that or the means at or under which for propelling the volumes and/or that or the means to their spacer change is arranged.

After a particularly preferred execution form the baseplate is out-arranged two-piece, whereby at least in each case one volume or a group of volumes is assigned to each part. It can be favourable to lock the gap between the halves of a divided baseplate by means of a suitable cover in order to avoid for example parts of broken substrates of a penetration into the area between the halves of the baseplate.

In principle it is sufficient, if that or the volumes of a side is propelable by individual means and/or is. Since the volumes become strained over at least two band control assistance however, these band control assistance themselves can be propelable out-arranged, whereby both active, turning, and passive, driving remarks to realize itself to be able. Alternatively band control assistance also being certain can be intended, if at least one of the assistance is propelable out-arranged. These band control assistance are according to invention positioned perpendicularly or can proceed and become fixing the articles into the Senkrechte from suitable engines transferred in rotation around their longitudinal axes, if it concerns an active execution.

In order, that have must propel a volume or a group of volumes and/or the means for propelling by means of a suitable device as for example a transmission with at least one (actively or passively) of the swivelling band control assistance to be so connected that a transmission of the movement takes place on the swivelling band control assistance and thus on the inside of the volume in the contact with the substrate edges. After a preferential execution form the volumes of both sides of the device according to invention from only one means are propelled to propelling the volumes, whereby again a suitable transmission, which distributes the movement on both volumes, should be used. Alternatively naturally each volume side and/or each band control assistance can be assigned to a separate means for propelling, if this is wished. After a particularly preferred execution form the means is integrated for propelling the volume completely into the band control assistance, as for example an electric motor with its stator at the baseplate is firmly fixed, and the volume is put around the exterior of the rotor and propelled in such a way.

The specialist it is clear that the drive-producing element does not have to be necessarily a component of the device according to invention. It is to be only guaranteed that for propelling the volumes for this necessary movement is supplied to the means, which can being e.g. realized over suitable devices to the transmission like snails, waves, threaded rods etc. In the framework the movement producing element of the device according to invention would be functionally assigned to this execution form as external component. It can be at the preferably internal wall of the surrounding basin or also outside of the same arranged and/or made available. Therefore the device according to invention covers furthermore prefers appropriate hydraulic, pneumatic, and/or mechanical interfaces, over which the drive-producing element can be coupled with that or the means for propelling the volumes, whereby this coupling takes place for example during immersing the device into a bath, preferably with help of autocentering elements.

Independently of the fact whether the device according to invention exhibits the above baseplate or not, is that or the means trained as the change of the distance of the volumes preferably as pneumatic cylinders. Alternatively however also all equivalent means can be used, as for example electric motors, hydraulic cylinders and/or mechanical drives. In case of the presence of a baseplate these means preferably are up, at and/or under the same arranged. With the alternatively preferred execution form of a device according to invention without baseplate these means are arranged either at the preferably internal wall of the surrounding basin or made available however as components arranged outside of the basin, so that this no components of the device according to invention form, but you are functionally assigned.

After a preferential execution form the adjustment of the articles takes place via a change of the distance of the two halves and thus the distance of the volumes such that the parallelism of its surfaces remains at any time essentially. This execution form concerns thereby a device, with which the volumes are always perpendicularly positioned.

After an alternative execution form the volumes are in resting position in horizontal or diagonal position. The angle stretched between you can amount to from there between 0° and 180°, whereby an angle between 15° and 30° is particularly preferential.

Fixing the articles takes place always according to invention via the fact that they are kept lateral by the volumes in upright position with sufficient pressure. For this both sides can be driven near at the same time or successively to the block. Alternatively a volume side is being certain trained. In this case fixing takes place via driving near the other volume side.

One points out that in place of a split and movable baseplate also according to invention different mechanisms, which serve the parallel or angular position change of the volumes can be used. For example attached rails can do this on the baseplate, on which the means are relocatable stored for change in distance, or swivel joints its, around which these means can tilt.

The propellants and/or band control assistance are preferentially designed and in such a way arranged as roles or rollers that one volume and/or a volume side each of at least two of these roles or rollers becomes strained.

After a preferential execution form the device according to invention furthermore means covers for the stabilization of the volume and/or the volumes. This means for stabilization ensures for the fact that the static friction necessary for fixing and promoting will transfer if possible over the entire length of the volume and/or the volumes effectively and as homogeneously as possible to the lateral substrate edges. This means is formed preferentially by an essentially form-stable supporting structure, which is arranged between the band control assistance.

An advantage of this execution form consists of the fact that the contact pressure needed for the development of the necessary static friction can be made available also independently of the tape tension. Particularly preferentially the means is fastened for volume stabilization to the band control assistance, so that it follows the movements of these assistance at any time with the change of the band gap.

After an alternative execution form the means is additionally fastened to the same for volume stabilization to the baseplate and/or.

In this way the means can at the same time take over for volume stabilization the function of the means for the change of the band gap, if the baseplate is two-piece and movably out-arranged and/or rails or exhibits equivalent means, over which the means for volume stabilization will proceed can.

Although the means is preferably one-piece out-arranged with a continuous contact area for volume stabilization, there can be also multipart trained and exhibit breaking through.

After a preferential execution form the device according to invention can cover a means for the production of a Beabstandung of the flat articles, if a continuous Beabstandung is to be still manufactured and not by a preceding process step was already manufactured. This means knows particularly prefers a flow mechanism as for example a Düsenleiste being, with which fluid can be brought as for example water, glycol and/or Reinigungsflüssigkeit by all sides, preferably however laterally into the substrate pile or the substrate block, whereby fanning out the substrates is caused or supported. In a further variant of the device according to invention this means can be comb and/or brush-like structure, which is brought for the production of an even distance at least partly and preferably only temporarily into the gaps of the substrate block given by the sawing process and/or the flow mechanism and to the desired Beabstandung leads. For this it can be necessary that the means will proceed in accordance with its introduction to the substrate pile parallel to the lateral substrate edges.

After a further preferential execution form a means can be intended for catching the isolated substrates. This can be particularly preferentially funnel-like out-arranged, so that the just now isolated substrate slides into the funnel and is steered by this in a direction given by the adjustment of the funnel. This direction can point for example to a subordinate conveyor. Alternatively this direction can point also into a magazine (“carrier”), which is suitable for at the same time taking up a multiplicity of substrates. The task comes to the trichterförmigen aid to lead the substrate in such a way that it arrives at the next free space in the magazine, without with one into the magazine entered substrate to collide before. After one to most preferential execution form takes place the positioning of the magazine and/or the trichterförmigen aid by means of a suitable feed feature. Alternatively or supplementing the determination of the place, at which the straight isolated substrate arrives, can happen by means of dumps of the trichterförmigen aid.

Finally the device according to invention can cover a means after a particularly preferred execution form also for the evacuation of an isolated substrate.

The means for the evacuation of the substrate knows a conveyor, a roller race after a preferential execution form, or particularly a system consisting of at least two parallel running belts prefers being, whereby the respective isolated substrate can be taken up and removed laminar. Alternatively these means can be arranged rather horizontal or however to the evacuation in an angle to horizontals.

After a preferential execution form the device can cover also a means for removing the retaining mechanism. Particularly preferentially this means under or at the baseplate and/or can be fastened to that or the guidance assistance. Alternatively the means can be arranged and for example for removing the retaining mechanism also outside of the device according to invention a component of the surrounding treatment basin, so that it is functionally assigned to the device according to invention.

After a further preferential execution form the device according to invention furthermore an adjustment assistance covers existing retaining mechanism for contacting the flat articles working on with a majority. This adjustment assistance is arranged as at least on one side solvable liaison vehicle constructionally between the retaining mechanism and that or the guidance assistance and serves a coupling the same. The preferably two-piece adjustment assistance can be either directly to the guidance assistance and/or fastened to the baseplate. Substantial it is only that a closed force river between retaining mechanism, adjustment assistance and guidance assistance is manufactured.

Particularly preferred the adjustment assistance is made available by extended guidance assistance, whereby the position is unerändert maintained or the volumes.

This adjustment assistance guarantees according to invention that retaining mechanism and guidance assistance, and thus the volumes, in a to each other fixed position are, which does not change in particular also if the device according to invention as well as the retaining mechanism is moved, in order to transport these for example from a treatment station to the next. Thus it is guaranteed that the break-sensitive substrates, as soon as they hold themselves in contact with the volumes to rule and by you are damaged not by the generally high weight of the retaining mechanism, which would rest without the adjustment assistance on them. This weight instead taken up over the adjustment assistance, so that a damage of the substrates also with jerky movements, as is almost excluded e.g. with taking up or setting the substrate pile off held.

Remark examples of the adjustment assistance concern constructions from bars and/or plates, which exhibit a sufficient length, in order from the retaining mechanism to the guidance assistance and/or baseplate to be enough, whereby a coupling of the bars and/or plates with the retaining mechanism for example by drillings, screwing, wedging, with or without bolting device mechanisms can be made, whereby those variants are to be preferred, which make a safe coupling possible on the one hand and a fast and simple uncoupling on the other hand.

After an alternative execution form the discharge of the substrates can take place from one still with them connected retaining mechanism such that by means of according to invention planned the guidance assistance and the associated volumes at least additionally to the substrates also a wedging of the retaining mechanism takes place. Either the guidance assistance and/or the retaining mechanism are to be adapted then that with approximating the volumes a sufficiently stable wedging is made possible also for the retaining mechanism with the same. This can be achieved for example by positive connections we projections/leads, recesses, pin connections as well as appropriate photographs etc. Simultaneous it is to be guaranteed that after dissolving the adhesive layer between substrates and retaining mechanism simple removing of the retaining mechanism can take place, without a loss of the static friction between volumes and substrates arises. For this are prefer additional means planning, which make a separate on and uncoupling for the retaining mechanism possible, like e.g. displaceable locking and such a thing.

Particularly preferentially the adjustment assistance is in such a manner out-arranged that she can likewise exercise the function of the means for removing the retaining mechanism. For this the if necessary two-piece adjustment assistance must be displaceable out-arranged, so that the distance between that or the elements of the adjustment assistance, who contacting serve the retaining mechanism, and which or the fastening spots of the adjustment assistance (guidance assistance and/or baseplate) change can. In the preferential case of a linear movement which can be implemented at the same time by both parts of the adjustment assistance the change in distance can for example by means of more suitably, parallel to the axle center the guidance assistance (n) of pointing rails, or by means of a telescope-like arrangement to be caused.

In the context of a particularly preferred execution form, with which the adjustment assistance is made available by the extended guidance assistance, the change of the distance and thus the distance of the retaining mechanism take place via telescope-like driving of the adjustment assistance out integrated into the guidance assistance. Although both parts of a two-piece adjustment assistance will usually proceed evenly, it is just as conceivable the fact that only one side proceeds and the other side dumps to the retaining mechanism on one side taken off of the substrate upper edges permits.

Wishing case can be assigned the device still another means for the evacuation of the retaining mechanism. This means serves the production of a larger distance between replaced retaining mechanism and substrate pile than the minimum distance necessary for promoting, since this is under certain Vorraussetzungen favourable or necessary. After a further execution form this means is in such a manner out-arranged that with it not only the retaining mechanism, but also the adjustment assistance present with it in contact can be removed, if the latter is solvable fastened.

The procedure according to invention for the sort of several perpendicularly positioned flat articles takes place using a device, with which essentially flat articles can be fixed and promoted in perpendicularly standing positioning taken up as well as in a defined distance to each other. This device covers (1) of at least two parallel to each other arranged volumes, whereby the distance between the volumes is larger than the width of the flat articles and whereby the volumes are propelable moving in opposite directions, (2) means to propelling the volumes, as well as (3) means parallel to the change of the distance that at least two to each other arranged volumes. With the procedure according to invention become the following steps accomplishes:

• Load the device with the articles;
• Fix the articles by decrease of the distance to that at least two parallel to each other arranged volumes;
• Promote the fixed articles to the direction given by propelable the moving in opposite directions volumes;
• Isolate the articles by promotion the same from the range of the adjustment, so that an article isolating in each case is released by the adjustment.

Below the individual phases are described more in detail.

By loading the device the substrate pile is positioned between the volumes. This procedure of loading can take place manually or automated, whereby for this necessary movement is implemented by the substrate pile and/or the volumes. This means that the substrate pile OR block is brought into the essentially which is certain device, or that the device is positioned around the essentially which is certain substrate pile OR block. After a third variant the movement needed for the loading is accomplished both by the substrate pile and/or - block and by the device. In each case the substrates are positioned in such a way in the area between the two volumes or groups of volumes of the device according to invention that the volumes are laterally in each case and in approximately same distance from the substrates.

The time of loading can directly after sawing, after which for generally following prepurifying, or only after the replacement are appropriate themselves for the retaining mechanism. Accordingly the place of loading can lie within a device in the range of sawing, the replacement, prepurifying or the Vereinzelns. Preferred it can lie thereby in the range of a device, which unites some or all, managing specified process steps in itself, necessary for the en and processing of the substrate pile.

Manufacturing a distance between in each case two neighbouring substrates can take place also with help of further devices, how for example comb and/or brush-like structure, which intervenes preferably only temporarily from at least a free side in the gaps of the substrates and up to the adjustment in defined distance holds these to each other.

Like already before in the framework the detailed description of the device according to invention implemented, fixing the substrates is caused according to invention by continuous reducing of the distance of the volumes. This procedure persists so for a long time, until the volumes at both sides of the substrate pile lie close and Kraft affect the whole of the lateral substrate edges with a certain. With a suitable choice of materials of the volume, which preferentially from flexible material as for example rubber or similar synthetic material can be constituted, and a suitable dosage over the distance influenceable Kraft between volume and substrate edge of the static friction one produces, which is larger than the Gewichtskraft of a substrate, so that this is kept safe between the two volumes and is promotable. A substantial characteristic of the invention lies in the fact that the static friction works not only vertically toward the force of gravity, but also horizontal toward the volume.

Before fixing between the surfaces of sequential substrates existing distance, how it is present typically after sawing and before the replacement from the retaining mechanism, remains thus. This Verfahrenssteuerung makes a handling possible of the substrates, without unfavorable forces of the kind described before are expenditure-practiced on the surfaces the same.

In order to avoid a weight-strength-conditioned damage of the break-sensitive substrates during transport as well as the often heavy retaining mechanism, an appropriate lock washer ride can be inserted. In addition the device can according to invention cover an adjustment assistance, with whom the retaining mechanism before the step of promoting, existing with a majority working on flat articles, is contacted. This adjustment assistance can be used at any time before promoting the flat articles and creates a stable connection between the retaining mechanism and the guidance assistance and/or the baseplate. Although the adjustment assistance can be already used before the first transport of the sawed substrate pile, it is particularly preferential that it is used with or directly before fixing the substrates, thus with approximating the volumes to the substrate edges. In this way the retaining mechanism becomes against a relative motion regarding the substrates secured, whereby the danger of breaking the substrate edges off from the session layer of the retaining mechanism manufactured by means of adhesives is eliminated to a large extent. Releasing the adjustment assistance can take place according to invention at any time after coupling the same with the guidance assistance and/or the baseplate. Preferred this decoupling takes place however only then if the glue layer is on or were dissolved and removing the retaining mechanism is imminent.

For the particularly preferred case, with which the adjustment assistance can exercise the function of the means at the same time for removing the retaining mechanism, removing the retaining mechanism is reached by a suitable procedure movement of those parts of the adjustment assistance, which stand directly with the retaining mechanism in connection, whereby this procedure movement should take place preferentially evenly from the upper edges of the flat articles opened now away, in order to prevent a damage by dumps. Alternatively removing can also take place, as a combination of one-sided driving out and a rotatorischen, laterally hinging away movement is implemented.

After the particularly preferred execution form, with which the adjustment assistance has at the same time a possibility for the distance of the retaining mechanism, manufacturing the minimum distance at least necessary for promoting is already caused by the adjustment assistance, so that a promotion of the flat articles is made possible and further for the retaining mechanism by a separate means is not necessary.

If yet does not happen, at the latest at this time, thus at the latest before the sort, a complete separation of the substrates must take place directly from the retaining mechanism, what preferably using the means described before happens. Since according to invention procedures completely accomplished in liquid medium, is thus to make certain that at least the medium, in which the substrate block before the sort is with suitable chemical additives is enriched, is dissolved by their effect the remaining glue layer between the substrates and the glass plate at least on or preferentially.

The complete separation according to invention aimed at requires a minimum Beabstandung of the retaining mechanism of the upper edges of the substrates, not however the removal of any remaining sticking threads. A at least minimum Beabstanden is necessary, since it can come otherwise to a hook of unevenness of the sawed glass plate with the replaced substrate edges. Such unevenness can have been present with it in the glass plate already from the outset or have developed only by the preceding sawing process on this and have been present e.g. in the form of burrs. This minimum distance between the substrate edges and the retaining mechanism amounts to two millimeters. In such a manner replaced retaining mechanism is to be removed then in such a way from the fixed substrate pile to that no damage the same takes place through edges e.g. breaking off in the connecting zone for retaining mechanism. This can take place preferentially automated by means of a suitable decrease mechanism. Particularly preferentially this decrease takes place by means of the above-mentioned adjustment mechanism with simultaneous function of the means for removing the retaining mechanism. Particularly preferentially the decrease process can being supported by means of suitable Rüttelbewegungen like e.g. by means of ultrasonic.

For promoting the fixed substrates now the volumes are such propelled in the procedure according to invention that both volumes or groups of volumes with same speed, however moving in opposite directions to move. Due to the static friction existing between volumes and substrates the articles with the volumes are moved in feed unit direction.

Isolating from the retaining mechanism separated, but with the device according to invention the fixed substrates is done via promoting the individual substrates from the range of the adjustment out. It therefore exists one point of release, which is formed by the fact that the distance of the two volumes increases, where their parallelism ends due to the rounded off form of the band control assistance again according to invention, so that the friction forces between volume and substrate any longer to be sufficient and the substrate is not released toward the force of gravity. In case of round and/or walzenförmiger band control assistance the point of release straight is on the level, which goes through the two axles furthest downstream of the arranged band control assistance.

After a preferential execution form of the procedure according to invention the substrate leaves the device by a funnel-like substrate guidance assistance. After a particularly preferred execution form the substrate is transferred by means of the funnel-like substrate guidance assistance into a suitable magazine.

After a further particularly preferential execution form of the procedure according to invention the substrate leaves the device in such a manner that it prefer-proves small beabstandetes means for example in controlled way on for the evacuation of the isolated substrate is transferred. Such a means knows for example a conveyor, a roller race, or particularly a system consisting of at least two parallel running belts prefers being, on which the substrate in a pre-determined angle falls.

After a further preferential execution form of the procedure according to invention catching can take place also in such a way that the isolated substrate is transferred into a magazine, which holds the next free space ready in such a way particularly preferentially by means of suitable mechanics that the isolated substrate can reach these on a direct way and without unnecessary surface contact with the environment. The magazine according to invention can contain further also suitable means to the Beabstandung of the substrates, so that mutual affecting of the substrate surfaces is avoided also here. A such means to the Beabstandung can be achieved for example by comblike structures at the side panels of the magazine according to invention.

After a further preferential execution form the device according to invention is brought after loading and fixing the substrates from the first horizontal situation by means of swivelling into a vertical situation, so that the articles are horizontal over and/or among themselves positioned. The end of the device, by which the release is made, can point upward or down. This means that a substrate which can be released in each case leaves the device upward or downward.

The procedure according to invention can cover an additional step of the evacuation of the isolated flat articles. For this the means stated before can be used. The evacuation, horizontal of the articles floating released upward on the fluid can take place preferentially by means of suitable flow assistance.

The invention is more near described in the following on the basis the designs.

The figure 1 shows the device according to invention 1 in a three-dimensional opinion without a substrate block inserted into the area between the volumes 7. On two opposite sides of a divided baseplate 2 is one volume each 3, whereby only the rear is represented here. Each volume 3 is strained between in each case two guidance assistance 4. Further means are intended for propelling the volumes 5 and means for the change of the distance of the volumes 6. In the represented execution form are these means 5 and 6 on the lower surface of the baseplate 2. the means 6 permit a parallel moving of the volumes 3 one on the other too and/or from each other away, as the appropriate movements are implemented by both halves of the baseplate 2. In addition represented in each case a means is for the stabilization of the volume 15, which between the guidance assistance 4 on the baseplate 2 is fastened.

The figure 2 shows schematically the course of motion of the device represented in figure 1 when parallel fixing a substrate block. In the area 7 between the volumes 3 is a substrate block 10, which consists of the actual substrates 11 and the retaining mechanism 12. By parallel moving of the two halves of the baseplate in direction of arrow 14 the distance of the volumes is changed, since they are firmly connected by the guidance assistance 4 with the baseplate 2.

The figure 3 shows the course of motion on use of a variant of the basic configuration, with whichthe baseplate 2 is not divided, described in the figures 1 and 2, but one-piece trained, and with which the guidance assistance 4 are stored on the baseplate for stretching the volume 3 mobile.

Preferably for this rails can be used, which make an appropriate linear procedure movement possible (not represented). Here it is insignificant whether each guidance assistance 4 is assigned to its own means for the change of the distance 6, or whether for example those are induced in each case to a volume 3 due means 4 with a common means 6.

The figure 4 shows the course of motion of a further variant of the basic configuration of the device 1. after this execution form the change in distance by bending the band control assistance 4 toward 15 is reached. The tilting motion takes place around a fulcrum 8, which lies preferentially parallel to the longitudinal axis of the baseplate 2. The final position of the volumes 3 must be for the step of the adjustment in such a manner that the volumes can exercise the static friction necessary for safe fixing and promoting on the substrates.

The figure 5 shows the course of motion of a variant of the configuration described in figure 4. Here the baseplate 2 is not divided, but one-piece trained, and respective bending of the guidance assistance 4 takes place via a swivelling around a swivel joint 9 attached at their foot, how is suggested by the arrow 15. Alternatively the swivel joint 9 can be also because of another place, whereby it must be only guaranteed that at no time parts of the band control assistance 4 into the area 7 project, since otherwise a handicap would be with loading the substrate block 10 the result.

The figure 6 shows the device according to invention 1 together with two variants of the adjustment assistance 13, whereby the device 1 is only hälftig represented in each case. After one in figure 6 on the left of first variant shown the adjustment assistance 13 makes a connection between the retaining mechanism 12 and the guidance assistance 4, so that after interference of the adjustment assistance 13 into the retaining mechanism 12 by means of procedures toward 14 a relative motion between the retaining mechanism 12 and the guidance assistance 3 is prevented at any time. The variant represented here is suitable in particular in combination with separately 2 guidance assistance 4. displaceable on the baseplate.

Aids to the mechanical coupling of the adjustment assistance 13 represented with the guidance assistance 3 are not and/or the retaining mechanism 12. The figure 6 shows on the right of an alternative execution form, with which the adjustment assistance 13 to a divided baseplate 2 is fastened. Here manufacturing an interference takes place via the movement of the baseplate halves one on the other too. In further, not explained variants the adjustment assistance 13 independently of the guidance assistance 4 is or the baseplate 2 movable in direction of arrow 14, so that the interference of the adjustment assistance 13 does not have to take place zwangläufig at the same time with the fixing of the substrates 11. This represents in particular regarding simple decoupling of the adjustment assistance directly before the decrease of the retaining mechanism 12 replaced then a particularly preferred execution form of the invention. After an not explained further preferential variant the adjustment assistance 13 also removing the retaining mechanism 12 from the substrates 11 serves the device according to invention. This is possible for example with a procedure of the adjustment assistance 13 in axial direction of the guidance assistance 4, standing with the retaining mechanism 12 in the interference, so that a distance between the upper edges of the substrates 11 and the retaining mechanism 12 is produced. It is clear that this removing can take place only after an on or a dissolution of the adhesive. After removing of the retaining mechanism 12 can be taken over this from a likewise not represented means to the evacuation of the retaining mechanism and be removed from the range of the device.

The figure 7 shows a further execution form of the device according to invention, which causes similarly the approach represented in figure 6 a protection of the retaining mechanism 12 together with the substrates 11. For this the guidance assistance 4 are such trained that they project over those the retaining mechanism 12 turned upper edges of the substrates 11 outside and into the range of the sides of the retaining mechanism 12. As exemplarily represented, then a wedging and/or a release takes place both the substrates 11 and the retaining mechanism 12 from the volumes 3 by a movement of the guidance assistance toward 14.

The figure 8 points the device according to invention 1 with a means to the evacuation single feeder of substrates 20, whereby its photograph surface 21 with the substrate surface preferably forms an angle of 0°<α <90° and 30°<α <60°. The substrates 11 fall accordingly a small way isolated by according to invention fixed the substrate block 10 toward the force of gravity, before they remain meeting on the photograph surface 21 and being there.

The figure 9 points the device according to invention 1 in senkrechten an arrangement, together with a means to the evacuation of 20 single feeders of substrates 11. The means 20 is essentially arranged underneath the device 1. The photograph surface 21 of the means 20 is aligned essentially parallel to the substrate surface. The isolated substrates 11 fall also here toward the force of gravity, before they remain being on the photograph surface 21 and by appropriate transport motion are removed.

The figure 10 points the device according to invention 1 with a means to catching 22, which is arranged like that under the place of the substrate sort that the isolated substrates 11 slide or fall automatically or with help of a for example trichterförmigen guidance 23 into the means for catching 22. In order to prevent a Aufeinanderfallen of the isolated substrates, can the means for catching 22 linear in direction of motion 24 adjustable be, so that independently of the rate of admission can be always ensured that no collision of the substrates arises with one another.

1

Device

2

Baseplate

3

Volume

4

Guidance assistance

5

Means for propelling the volume

6

Means for the change of the distance of the volumes

7

Area between the volumes

8

Fulcrum

9

Swivel joint

10

Substrate block

11

Substrate, flat article

12

Retaining mechanism

13

Adjustment assistance

14

Direction with parallel movement

15

Direction with angular movement

16

Means for volume stabilization

20

Means to the evacuation single feeder of substrates

21

Photograph surface

22

Means for catching

23

Guidance

24

Direction of motion