X-ray tube and X-ray analyzing apparatus
Technical Field The invention relates to an X-ray tube and X-ray analysis device, such as for energy dispersion fluorescent X-ray analysis device, more preferably used for small size and light weight portable and support the fluorescent X-ray analysis device. Background Art The fluorescent X-ray analysis to the sample irradiation from the X-ray source emitting primary X-ray and X-ray detector detects fluorescence emitted from the sample from the X-ray to the energy of the fluorescent X-ray spectrum is obtained, so as to sample of qualitative analysis or quantitative analysis. The non-destructive and rapid analysis of the sample, the fluorescent X-ray analysis is extensively used for the step-by-step/quality control. As fluorescent X-ray analysis of the analysis method, measuring X-ray wavelength and intensity of the wavelength dispersion, in pulse height analyzer to dispersion fluorescent X-ray and measuring the X-ray energy and intensity under condition through the semiconductor detection element to detect a fluorescent X-ray can be Amount of dispersion. In the related art (for example, Patent reference literature 1 (JP-A-8-115694)) in, in order to improve the sensitivity of the fluorescence X-rays, to try to the X-ray tube through the extraction of the window to make the X-ray tube and X-ray analyzer close to the sample, wherein the taking-out window for taking through its interior and to the outside of the fluorescent X-ray. Furthermore, such as in Patent reference literature 2 (Japanese Patent No. 3062685) in, portable energy dispersion fluorescent X-ray analysis device has been in the form of small size of the X-ray tube and X-ray analyzer is generally used. According to the above-mentioned related art, the following problems still exist. For example, according to Patent reference literature 1 in the X-ray analysis device, despite the adoption of the X-ray tube and X-ray detector to the sample of the remarkable effect of improving the detection sensitivity, however, X-ray tube and X-ray detector each having a limited and constant or more size, therefore, the X-ray tube and X-ray detector close to the constraints of the sample. Furthermore, according to the related art portable of energy dispersion fluorescent X-ray analysis device, despite the small size requirements and of light weight in the form of form, but as the structure of the device, X-ray tube and X-ray detector occupy most of the volume and quality, according to the related art is therefore, in realizing a small-size form and light weight form of constraints. Furthermore, for analysis by the gas-tight in the closed state in the inside of the sample chamber in the environment of the sample containing the primary X-ray directly irradiating the sample to form an open type of portable, and therefore in view of the safety of the X-rays, the X-ray tube to produce X-ray amount, and therefore must be more effectively detect fluorescence from sample of X-ray. Content of the invention This invention is in view of the above-mentioned problem of under the situation, and its purpose is to offer a kind of X-ray tube and X-ray analysis device, it is able to realize the form of a small size in the form of and light weight, and can more effectively detect the fluorescent X-ray to improve the sensitivity. In order to solve the above-mentioned problem, the invention adopts the following structure. That is, X-ray tube of the present invention comprises: a vacuum chamber, is in a vacuum state inside thereof, and it comprises a formed by the X-ray transmission film of the window part, through the X-ray transmission film can be transmission X-ray; the electron beam source within the vacuum chamber, for emitting electron beam; target, for the irradiated with an electron beam and producing the primary X-ray, and is mounted on the inside of the vacuum chamber, through the part of the window in order to be able the primary X-ray is transmitted to the external sample; and X-ray detection element, which is arranged in a vacuum chamber inside in order to capable of detecting emission from the sample and from the window portion of the incident fluorescent X-ray and scattering X-ray, is used for output comprises a fluorescent X-ray and scattering X-ray energy of the signal of the message. According to the X-ray tube, X-ray detector elements of a the X-ray detecting element is arranged in the inside of the vacuum chamber, in order to be able to detect from the window portion of the incident fluorescent X-ray and scattering X-ray, the X-ray detecting element of which constitute the X-ray tube components are wholly target same place electronic beam source and contained in the interior of the vacuum chamber, in order to be able to further promote the device overall small size and light weight form. Furthermore, X-ray detection element is disposed in the inside of the vacuum chamber, and can be detected for generating the primary X-ray target same place close to the sample, therefore, can be very effectively for excitation and detection. Furthermore, when applied to the open type of the support, the detection can be effectively, therefore, even when the further restriction when the amount of X-ray, can also be detected with high sensitivity, and the advantages of high safety can be realized. Furthermore, according to the invention, the X-ray tube, part of the window at the target has been arranged to be close to or in contact with the part of the window, and X-ray detection element is disposed a light-receiving face of the periphery of the target. That is, according to the X-ray tube, X-ray detection element is disposed a light-receiving face of the periphery of the target, therefore, when the window portion is close to the sample to analyze the state of the under, the targets (that is, the vicinity of the part of the window) of the X-ray detecting element can effectively detect comes from the target of the primary X-rays through the X-ray fluorescence generated from the sample, and so on. Furthermore, according to the invention, the X-ray tube, the X-ray detecting element includes a transmission hole, the transmission hole is disposed in the electron beam at the area between the source and target, and through the transmission holes can be transmission electron beam. That is, according to the X-ray analysis device, is disposed between the electron beam source and target of the X-ray detecting element of the electron beam used to irradiate the mask, therefore, the electron beam is narrowed through the transmission hole can be the target of the electron beam irradiation. Furthermore, according to the invention, the X-ray tube, in the part of the window of the target and at least one is set up as the ground potential or the positive potential. That is, according to the X-ray tube, in the part of the window of the target and at least one is set up as the ground potential or the positive potential, therefore, by the electric field through the sub-electronic target back to the target or the part of the window, can inhibit the sub-electronic incident in the X-ray detector element. Furthermore, according to the invention, the X-ray tube, is arranged between the source and target of the electron beam to the electron beam path can be extended and retracted from the path of the electron beam the optical shutter (shutter). That is, according to the X-ray tube, the electron beam source and is arranged in the tube interior to the electron beam can be set up using the path of the electron beam can be extended and retracted from the path of the optical shutter, therefore, the primary X-ray path is compared with the case of the shutter, can further make the X-ray generating point (target) and the sample is more close to each other. Furthermore, through causes the shutter is in the closed state, until the from the electron beam source of a thermionic electron beam is steady, stable and the shutter is opened after the electron beam, the electron beam can be measured through a stable. Furthermore, according to the invention, the X-ray tube, the electron beam source and X-ray detection element for shielding disposed between the radiant heat from the electron beam source the shielding part. That is, according to the X-ray tube, the shield member is disposed over the electron-beam source and between the X-ray detecting element, so the shielding from the heat-generating electronic beam source of radiant heat, and can inhibit the cooling X-rays by the radiant heat of the adverse effects of the detection element. The invention of the X-ray analysis device includes: the above-mentioned of the X-ray tube of the present invention and is used for analyzing the signal analyzer, for display and analysis results of the analyzer of the display section. That is, according to the X-ray analysis device, to provide X-ray tube of this invention, therefore, can reduce the overall size of the device. Furthermore, according to the invention, the X-ray analysis device, is arranged in the vacuum analyzer and a display part so as to form a portable. That is, according to the X-ray analysis device, the device through the analyzer and a display part is integrally mounted to the vacuum chamber in a portable, therefore, the X-ray analysis device can be formed by the support, which may be through the analyzer and a display part to confirm the results of the analysis, and the size is small and weight is light. According to the present invention, achieving the following effect. That is, according to the invention, the X-ray tube and X-ray analysis device, X-ray detection element is disposed in the inside of the vacuum chamber, in order to be able to detect from the window portion of the incident fluorescent X-ray and scattering X-ray, therefore, can further reduce the overall size of the device and reduces weight, and can be further effectively for excitation and detection. In particular, when the invention is applied to the open support when the X-ray analysis device, even if the X-ray amount is further inhibited can be generated with high sensitivity detection of the amount of X-rays, and the advantages of high safety can be realized. Description of drawings Figure 1 is the appearance of the overall structure diagram according to the present invention is shown the X-ray analysis device of an embodiment of the X-ray analysis device; Figure 2 is a front view of showing the embodiment of the target according to the X-ray detecting element of the position relationship between the main part; Figure 3 is a front view of the according to this embodiment is shown another example 1 target of the X-ray detecting element of the position relationship between the main part; and Figure 4 is a front view of the according to this embodiment is shown another example 2 target and X-ray detecting element of the position relationship between the main part of. Mode of execution Following the reference Figure 1 and Figure 2 to explain according to the invention, the X-ray tube and X-ray analysis of an embodiment of an apparatus. Furthermore, in the following explanation of the use of in in each Figure, in order to in accordance with an identification or easy to identify the size of each part a, the appropriate scale change. The embodiment of the X-ray analysis device is portable (portable) energy dispersion fluorescent X-ray analysis device, and including: a vacuum chamber 2, a part of the interior thereof is in a vacuum state, and the vacuum chamber 2 which is formed by the X-ray transmission film of the window part 1, through the X-ray transmission film can be transmission X-ray; mounting the vacuum chamber 2 of the electron beam source 3, used for emitting the electron beam e; target T, the irradiation electron beam, producing the primary X-ray X1, and is installed in the vacuum chamber 2 of internal, in order to be able to the primary X-ray X1 through the window part 1 is transmitted to the is located on the outside of the same sample S; X-ray detecting element 4, which is arranged in the vacuum chamber 2 from the inside of the sample in order to be able to detect from the part of the window and S 1 incident fluorescent X-ray and scattering X-ray X2, for transmitting comprises a fluorescent X-ray and scattering X-ray X2 energy information of the signal; the signal for the analysis of the analyzer 5 ; and as shown in Figure 1 for the display of the analyzer 5 the results of the analysis of the display part 6. Furthermore, by the vacuum chamber 2, the electron beam source 3, target T and X-ray detection element 4 to form the main structure, to form the X-ray tube. Vacuum chamber 2 is in a vacuum state by its inside of the former include some 2a, and comprising part of the 2b form, wherein the back comprises a part 2b and the front includes the part 2a through the wall 2c spaced, and its inside is in the atmospheric pressure state. The part of the window 1 is used as, for example, of the X-ray transmission film Be (beryllium) foil form. Furthermore, the part of the window 1 can be accreted with the front surface of the primary filter, the primary filter according to sample the selected S cu (copper), Zr (zirconium), Mo and the like of the metal thin film or metal sheet. Furthermore, the part of the window 1 and target T is set up as the ground potential or the positive potential, in order to on the target T by the incident electron beam e and target T, and resulting from the interaction of the secondary electronic drawing. Furthermore, sub-electronic normally only has about several eV energy, therefore the ground potential or the positive potential is set up to form a is equal to or higher than the energy of the electric field. Electron beam source 3 comprises a current/voltage control part 8, for controlling a cathode filament 7 and form an anode (tube current) target T e the voltage between the electron beam and the current (tube current). Electron beam source 3 through the applied to the filament 7 and form an anode target to accelerate between T and the voltage of the cathode filament 7 from a hot electron is generated T hits the target (electron beam) to produce the X-ray, in order to as a primary X-ray. Furthermore, not only the filament 7 and the carbon nano-tube can be used for the cathode. For example, W (tungsten), Mo (molybdenum), Cr (chromium), Rh (rhodium) is used for target t. such as Target T is arranged to close to or contact the part of the window 1. X-ray detecting element 4 constitutes a pin diode structure such as Si (silicon) semiconductor detection element of the elements and the like. According to the X-ray detecting element 4, when a sheet of X-ray photons incident to the, corresponding to a generated current pulse of X-ray photons. The instantaneous current value of the current pulse with the incident fluorescent X-ray energy of proportion. As shown in Figure 1 and Figure 2, X-ray detection element 4 includes imperforate 4a, the imperforate 4a is arranged in the electron beam source 3 the filament 7 and the area between the target at T, and e can be transmitting the electron beam. Furthermore, target T is arranged in the imperforate 4a below and close to the imperforate 4a, and X-ray detection element 4 is arranged in the light receiving surface of the periphery of the target T. Furthermore, X-ray detection element 4 is set up into through the not shown cooling mechanism (such as by the liquefied nitrogen constitutes a refrigerant cooling mechanism or use the cooling mechanism of the Peltier element) and kept at a constant temperature. Furthermore, X-ray detecting element 4 can be passed is cooled to about -30 degrees to -100 degrees to ensure that the inherent function. Furthermore, X-ray detection element 4 of the imperforate 4a by the periphery of the protection of the sheet metal or the like, so that the primary X-ray X1 or electron beam e will not be incident on the light-receiving surface. Furthermore, metal protective member 10 is set up in the target T and X-ray detection element 4 between, the primary X-ray X1, sub-electronic or electronic reflected from the target T does not enter the X-ray detecting element 4. Metal protective member 10 through a not shown support member is fixed to the vacuum chamber 2 is, and is formed on both ends of the electron beam e imperforate, in order to be able to e transmitting the electron beam. Furthermore, metal protective member 10 is set up as the ground potential or the positive potential, the window part 1 and target T similar. Furthermore, the X-ray detecting element 4 is set to negative potential, can inhibit the hot electron (electron beam e) incident in the X-ray detecting element 4 is. Furthermore, the shutter 11 is set up in the electron beam source 3 the filament 7 and target between T, e so as to be projected to the path of the electron beam from the electron beam e/can retract the path of. The shutter 11 is regarded as the material of the electron beam can be used for shielding of e Ta, W, cu form, small size and can be connected to the driving mechanism of the electric motor 12, a solenoid and the like. The driving mechanism 12 is connected to the CPU9, and is controlled to make the electron beam e to escape the path of the shutter 11, and electron beam e only the measuring time T is being irradiated on the target. Furthermore, CPU 9 is controlled, so that the shutter 11 is in the closed state, until such a from the electron beam source 3 the filament 7 of the thermionic electron beam e is steady, stable electron beam and the shutter is opened after e 11. Furthermore, shielding member 13 is disposed through the electron beam source 3 and X-ray detection element 4 between a vacuum chamber 2 to support the, wherein the shielding member 13 has in both ends of the transmission electron beam e. Shielding member 13 cu with high thermal conductivity through the metal plate, forming the sheet metal and the like, in order to be used for shielding from the electron beam source 3 of the radiant heat, so that the heat is discharged to the vacuum chamber 2, thereby preventing the X-ray detecting element 4 adversely affect the cooling of the. Filament 7, target T, X-ray detection element 4, metal protective member 10, the shutter 11, the driving mechanism 12 and shielding member 13 is disposed in a vacuum chamber 2 containing part of the 2a internal. Analyzer 5 is a X-ray signal processing part, and is a pulse height analyzer (multi-channel pulse height analyzer), is used for the X-ray detecting element 4 current pulse generated at conversion and amplification to the voltage pulse so as to form a signal, from the signal and provide the voltage pulses in order to produce the pulse height spectrum. Furthermore, current/voltage control part 8 and the analyzer 5 is connected to the CPU9, in order to pass and set up to conduct various kinds of control. The display part 6 is, for example, is connected to the CPU9 of the liquid crystal display device, in order to not only can display the results of the analysis of the spectrum, and the like, and is able to display a variety of screen according to the set. Furthermore, analyzer 5, current/voltage control part 8 and the CPU9 is set up in a vacuum chamber 2 containing part of the 2b internal, and the display part 6 comprising part through the 2b of the outer surface of the display surface is arranged. That is, analyzer 5 and a display part 6 are integrally set up with the vacuum chamber 2 is. Furthermore, the power supply and the supply of the electric potential of the above-mentioned each structure is connected to the power supply part (not shown). In this way, according to this embodiment, X-ray detection element 4 is arranged in the vacuum chamber 2 of internal, from the part of the window in order to be able to detect 1 incident fluorescent X-ray and scattered X-ray X2, therefore X-ray detecting element 4 with the electron beam source 3 and target T are integrally together contained in the vacuum chamber 2 of internal, and can further reduce the overall size of the device and reducing its weight. Furthermore, X-ray detection element 4 is arranged in the vacuum chamber 2 of internal, through the and can be used for producing the primary X-ray X1 together with the target T to S detected close to the sample, therefore, can be very effectively for excitation and detection. In particular, the support can be applied to the open type of effective detection, therefore, by further suppressing the occurrence of the amount of X-rays can be detected with a high sensitivity, and the advantages of high safety can be realized. Furthermore, X-ray detection element 4 is arranged in the light receiving surface of the periphery of the target T, therefore, when the window portion S close to the sample 1 to be analysed under the state of, the periphery of the target T through (that is, the part of the window 1 in the vicinity of) the X-ray detecting element is 4, can effectively detect from a target T through the primary X-ray X1 S the sample fluorescence generated from the X-ray and the like. Furthermore, the electron beam source 3 is disposed between T and target of the X-ray detecting element 4 of the imperforate 4a the target irradiation of the electron beam e, therefore, by the imperforate 4a is narrowed, the electron beam can be irradiated to the target T on e. Furthermore, metal protective member 10 is set up in the X-ray detecting element 4 between and target T, therefore, is generated at the target T the secondary electron shield and prevent incident to the X-ray detecting element 4 is. Furthermore, metal protective member 10 shielding comes from the target the radiant heat of the peripheral portion of the, the cooling and can inhibit the X-ray detecting element 4 of the adverse effects. Furthermore, metal protective member 10 is set up as the ground potential or the positive potential, therefore, from a target T through the electric field of the secondary electronic drawn onto the metal protective member 10, a high shielding effect can be realized. Furthermore, target T and the window portion 1 is set up as the ground potential or the positive potential, therefore, the sub-electronic target through the electric field back to the T T and the part of the window at the target 1, can inhibit the sub-electronic incident to the X-ray detecting element 4 is. Furthermore, the path of the electron beam e to the extension of the path of the electron beam e may be retracted from the shutter 11 is set up the filament 7 and is arranged in the tube between the interior of the target T, therefore, the primary X-ray path is compared with the case of the shutter, can make the X-ray generating point (target T) and sample S more close to each other. Furthermore, the shutter 11 is in the closed state, until the filament 7 from a thermionic electron beam e of the steady, stable electron beam and the shutter is opened after e 11, therefore through the stable electron beam e can be measured. Furthermore, this invention is made up of the analyzer 5 and a display part 6 is integrally mounted to the vacuum chamber 2 on a portable, the invention can be formed by the support, the analyzer can be through the above-mentioned the same 5 and a display part 6 to confirm the results of the analysis, and the size is small and weight is light. Furthermore, the technological range of the present invention is not limited to the above embodiment, and can be without deviating from the scope of the essential points of the invention in order to carry out the modification. For example, although according to the above-mentioned embodiments use the mask is formed at the center 4a of the single X-ray detection element 4, but as another example 1, as shown in Figure 3, can be constructed wherein the plurality of X-ray detecting element 14 is disposed in the periphery of the T the structure of the target. Furthermore, as another example 2, as shown in Figure 4, can be constructed wherein only one X-ray detecting element 14 is disposed in the periphery of the T the structure of the target. Furthermore, although the above-mentioned embodiment is the energy dispersion fluorescent X-ray analysis device, but the present invention can be applied to other types of analysis, such as wavelength dispersion fluorescent X-ray analysis device. Furthermore, the invention can be made of a reflection type with, for the same from the annular to the columnar target illumination the filament of the electron beam and producing the primary X-ray, wherein the filament is disposed the periphery of the target, such as in Patent reference literature 1 in the as in the X-ray tube. Furthermore, although the present invention is preferably used for portable X-ray analysis device, such as, in the above-mentioned examples, but the invention can also be applied to the fixed X-ray analysis device. For example, this can be a fixed X-ray analysis device, the X-ray tube is provided separately from the analyzer and 5, control system and a display part 6 to form such as, for example, from the X-ray tube vacuum chamber 2, the electron beam source 3, target T and X-ray detection element 4 to form. The patent refers to the field of 'electric discharge tubes or discharge lamps'. To be able to achieve further small-sized formation and light-weighted formation and to promote a sensitivity an X-ray tube and an X-ray analyzing apparatus are disclosed, there are provided a vacuum cabinet (2) inside of which is brought into a vacuum state and which includes a window portion formed by an X-ray transmitting film through which an X-ray can be transmitted, an electron beam source (3) installed at inside of the vacuum cabinet (2) for emitting an electron beam e, a target T generating a primary X-ray X1 by being irradiated with the electron beam e and installed at inside of the vacuum cabinet 2 to be able to emit the primary X-ray X1 to an outside sample S by way of the window portion (1) , and an X-ray detecting element (4) arranged at inside of the vacuum cabinet (2) to be able to detect a fluorescent X-ray and a scattered X-ray X2 emitted from the sample S and incident from the window portion (1) for outputting a signal including energy information of the fluorescent X-ray and the scattered X-ray X2. 1, a kind of X-ray tube, including: Vacuum chamber, its inside is in a vacuum state, and it includes the X-ray transmission film forming of the window part, through the X-ray transmission film can be transmission X-ray; The inside of the vacuum chamber of the electron beam source, for emitting the electron beam; Target, for the irradiated with an electron beam and producing the primary X-ray, and is mounted on the inside of the vacuum chamber, through the part of the window in order to be able the primary X-ray is transmitted to the external sample; and X-ray detecting element, which is arranged in the inside of the vacuum chamber in order to be able to detect emission from the sample and from the window portion of the incident fluorescent X-ray and scattering X-ray, is used for output comprises a fluorescent X-ray and scattering X-ray energy of the signal of the message. 2, X-ray tube according to Claim 1, is arranged to be close to the window target part of or in contact with the part of the window; and Wherein the X-ray detection element is disposed a light-receiving face of the periphery of the target. 3, X-ray tube according to Claim 1, wherein the X-ray detecting element includes a transmission hole, the transmission hole is disposed in the electron beam at the area between the source and target, and through the transmission holes can be transmission electron beam. 4, X-ray tube according to Claim 1, wherein the target at least one of the part of the window is set up as the ground potential or the positive potential. 5, X-ray tube according to Claim 1, wherein the electron beam to the electron beam is set between source and target the path of the electron beam can be extended and retracted from the path of the optical shutter. 6, X-ray tube according to Claim 1, wherein, the electron beam source and X-ray detection element are arranged between the shielding member, in order to be used for shielding from the radiant heat of the electron beam. 7, an X-ray analysis device, comprising: According to claim 1 to 6 a in any of the X-ray tube; The analyzer for analyzing signal; and For displaying analysis results of the analyzer of the display section. 8, X-ray analysis device according to Claim 7, wherein the analyzer and a display part is set up in the vacuum chamber so as to form a portable.