APPARATUS FOR MANUFACTURING THERMOELECTRIC MODULE
The present invention refers to number bath device relates to thermoelectric module, more particularly structural stability and output stability can be thermoelectric module can be a high pressure liquid coolant bath device number number thermoelectric module are disclosed. As known, the at least one pair of the thermoelectric elements of the thermoelectric module, thermoelectric elements connected on top of the upper electrode, lower electrode and the amplifier to thermoelectric elements, an upper electrode supported an upper substrate, a lower electrode consists of lower substrate can be supported. An upper substrate of the thermoelectric module number trillion methods upper substrate is arranged between at least one pair of a thermoelectric element, the lower end of the upper electrode to the lower electrode of thermoelectric semiconductor thermoelectric elements such as bonding material in brazing pillar through the top, through the high pressure liquid coolant by high temperature heating furnace (furnace) number thermoelectric module in the semiconductor layer. However, thermoelectric module number of processed solid to a liquid at a temperature of melting point brazing pillar is bonded trillion methods to prevent slipping in situ phase change system is stably maintaining a thermoelectric elements, thereby to discharge the hot air as well as the connection between the thermoelectric elements electrodes will not pour solid lubricant is formed between the thermoelectric elements of the thermoelectric module and quality defect in the rear at the memory. In addition, thermoelectric module number of the thermoelectric elements as well as substrate and/or bonding of the trillion methods between thermoelectric element itself and/or thermoelectric substrate by heat-fusible material is used for calculating a bendability and cracks, the dielectric part selected from the group consisting of a thermoelectric module output stability. And, thermoelectric module number of furnace (furnace) trillion methods in a thermoelement to an elevated temperature, this high temperature oxide film between the electrodes of the thermoelectric elements as well as solid dielectric part lowering the performance output of a thermoelectric module. The present invention refers to said prior art development to overcome the various disadvantages such as that, the position of the lower and upper electrodes to precisely ALIGN thermoelectric elements as well as stably maintaining alignment position can be, in addition formed between the solid lubricant by thermoelectric elements which greatly improves the structural stability and output stability can be improved thermoelectric module of a thermoelectric module to a high pressure liquid coolant bath device number number number [...] pin is. The lower one aspect of the present invention for such as said frame is arranged in electrode on one side made of thermoelectric elements between thermoelectric module number number bath device thermoelectric module as a tank provided therebetween, Said lower block number 1 for supporting a substrate; Said number 1 which is arranged to be vertically movable block, said upper block number 2 for supporting a substrate; and Said upper and said lower electrode with respect to said thermoelectric element alignment (positioning) by maintaining its alignment jig (jig) to (retaining); can be a. Said jig is characterized as having at least one slot in order to receive thermoelectric elements. A lower jig said stacked 2 or more jig, Said 2 or more of the jig on the basis of the slots so that the slots are at an angle to a characterized as having a mutually overlapping area. Said block is characterized as having a lower substrate having said number 1 to the fixing groove. Said block is seated said number 1 position of the jig to guide the guide portion having a groove in the vicinity of said characterized. Said upper substrate to the fixing groove having said number 2 block is characterized. Said number 1 block heating section is installed is number 1, the lower end of said lower electrode interposed between said heating said number 1 thermoelectric elements being disposed to applying heat bonding material characterized. Said number 2 is block number 2 heating section is installed, said thermoelectric elements interposed between said upper end of said number 2 heating the upper electrode being disposed to applying heat bonding material characterized. Said number 1 block and said number 2 block between said number 2 block guide structure is installed vertical movements, Least said number 1 block extends upward from said at least one hydraulic motor, characterized in that said number 2 block having one or more guide hole. According to one aspect of the present invention other lower substrate, the lower electrode, a thermoelectric element, an upper electrode, a thermoelectric module of the thermoelectric module number as number bath device comprising an upper tank, Said lower block number 1 for supporting a substrate; Rods are disposed on top of said number 1 block, said block number 2 as the upper portion said lower substrate side; A thermoelectric element by said alignment (positioning) blocks said number 1 block and said number 2 in its aligned maintain the jig (jig); Said number 1 block number 1 is disposed within the heating section; and Block number 2 heating unit installed in said number 2; can be a. Said jig is provided with a slot number 1 jig and extending along the direction number 1 number 1, number 2 direction extending along number 2 with a slot number 2 jig, Said number 1 jig and said number 2 stacked on the basis of the slot jig said number 1 characterized said number 2 slot angle. The both ends of the jig said number 1 number 2 (edge) edge of the jig fitted into a pair of number 1 characterized winds round the. The both ends of said number 2 number 1 (edge) edge of the jig fitted into a pair of jig winds round the number 2 characterized. According to the present invention, thermoelectric elements to precisely ALIGN the position of the lower and upper electrodes as well as, a thermoelectric element lower electrode and an upper bonding position can be stably maintaining a thermoelectric elements aligned during, in particular by improving the electrode removed one of the thermoelectric elements which greatly improves the structural stability and output stability can be...copyright 2001. Figure 1 shows a cross-section of the present invention illustrates the number one in the embodiment according to the thermoelectric module bath device also are disclosed. Figure 2 shows a magnified portion of Figure 1 shown in the arrow A also are disclosed. Figure 3 shows a thermoelectric module of the present invention also by number bath device shown jig sensors mounted thereon are disclosed. Figure 4 shows a thermoelectric module of the present invention device shown by number 1 block number tank sensors mounted thereon also are disclosed. Figure 5 shows a thermoelectric module of the present invention also by number bath device number 1 block lower electrode attachment to lower substrate surface seated with the state that the upper electrode are disclosed. Figure 6 shows a thermoelectric module in the present invention also by number supported by upper substrate electrode bath device number 1 block shown in the state in which the thermoelectric elements are aligned are disclosed. Figure 7 shows a thermoelectric module of the present invention also by number bath device number 1 by a jig side ordered state that the thermoelectric elements are disclosed. Figure 8 shows a thermoelectric module in the present invention also by end portions of the thermoelectric elements by a jig of a laminated number 1 jig and number 2 number bath device ordered state that surface are disclosed. Figure 9 shows a thermoelectric module in the present invention also by device number tank upper electrode attachment to its top surface is made to rest on the top of the thermoelectric elements shown the process are disclosed. Figure 10 shows a thermoelectric module provided by the present invention also shown in block number 2 the maximum number bath device are disclosed sensors mounted thereon. Figure 11 shows a cross-section of the present invention illustrates the other thermoelectric module number bath device in the embodiment according to also are disclosed. Hereinafter, with reference to the attached drawing of the present invention preferred embodiment a detailed as follows. With reference, describing the present invention in addition to the size of the components used are shown in the drawing, line thickness or the like is somewhat exaggerated [...] understanding of the expression thereof can. Also, the description of the invention the terms used in the present invention considering user defined function since, operator intended, such as can be depending on said scale. Thus, the result is stored in the tanks is reducing stores content specification definition based on the two sequences. In the embodiment according to the device of the present invention various thermoelectric module number tank, structural stability and output stability improved thermoelectric module (1) can be configured to be a high pressure liquid coolant number. The thermoelectric module is also 1 general (1) one form of which is illustrated, thermoelectric module (1) lower substrate (2) and, lower substrate (2) provided on the upper surface of a lower electrode (3) and, upper substrate (4) and, upper substrate (4) is provided with a bottom surface of the upper electrode (5) and, lower electrode (3) and an upper electrode (5) alternately connected between at least one pair of thermoelectric elements (6, 7) can be a. At least one pair of thermoelectric elements (6, 7) and opposite in polarity from each other N type semiconductor and P-type semiconductor can be made. The reference also 1, in the embodiment according to the thermoelectric module of the present invention various bath device number, number 1 block (10) and, number 1 block (10) so that it is vertically movably relative to number 2 block (20) and, lower electrode (3) and an upper electrode (5) with respect to thermoelectric elements (6, 7) by aligning its aligned maintain a jig (jig, 31, 32) can be. Number 1 block (10) lower substrate (2) can be configured to support an upper direction. In particular, number 1 block (10) is also 1 and also as shown in 4, placed on a top surface thereof (11) may have a, 5 such as also the number 1 block (10) to the fitting groove of (11) to the lower substrate (2) by the outer case to lower substrate (2) is number 1 block (10) in water can be supported. The, lower substrate (2) on the upper surface of lower electrode (3) is bonded to a like number according to be combined with the lower substrate (2) on a top surface thereof is lower electrode (3) can be configured to integrally provided. Alternatively, number 1 block (10) to the fitting groove of (11) lower substrate (2) after the outer lower substrate (2) the upper surface of the lower electrode (3) is bonded to a like number linked through the disapproval. The lower substrate (2) is number 1 block (10) to the fitting groove of (11) by combining the lower substrate (2) is number 1 block (10) supported by a, lower substrate (2) lower electrode (3) to thermoelectric elements (6, 7) properly alignment (positioning) to each other. The, lower electrode (3) and thermoelectric element (6, 7) between the lower end of the bonding material formed on the substrate. Then, upper electrode (5) is to the common upper substrate (4) obtained from position and, the upper electrode (5) and thermoelectric element (6, 7) joints between the upper end of the material formed on the substrate. The, lower electrode (3) an upper electrode (5) between at least one pair of thermoelectric elements (6, 7) can be moves in the proper location. The, upper electrode (5) comprises a substrate (4) pre-be combined with the upper substrate (4) bottom is upper electrode (5) to the common structure is disapproval. On the other hand, lower electrode (3) thermal (6, 7) at the lower end of corresponding shaped groove (3a) is formed, at such lower electrode (3) of groove (3a) to thermoelectric elements (6, 7) the lower end of the can be fitted. Upper electrode (5) thermal (6, 7) on the top of the corresponding shaped groove (5a) is formed, the upper electrode (5) of groove (5a) to thermoelectric elements (6, 7) can be fitted in the upper end of the. At such lower electrode (3) of groove (3a) and an upper electrode (5) of groove (5a) by thermoelectric elements (6, 7) than the alignment of can be carried out effectively. And, lower electrode (3) of groove (3a) and an upper electrode (5) of groove (5a) is brazing filler such as can be pre-applied bonding material is, these bonding material by thermoelectric elements (6, 7) and an upper end the lower end of the upper electrode (3) of groove (3a) and an upper electrode (5) of groove (5a) can be bonded to the. Number 2 block (20) is number 1 block (10) installed vertically movably at the top of the upper substrate (4) can be configured to support a lower direction. Number 2 block (20) of the inner case as shown in also 1, bottom and supports (21) may have a, the number 2 such as also 1 block (20) to the fitting groove of (21) a lower substrate (4) by the outer case to upper substrate (4) and an upper electrode (5) is number 2 block (20) in water can be supported. In particular, block number 2 (20) the number 1 block (10) to move toward the lower number 2 block (20) includes an upper substrate (4) bottom substrate (2) can be configured to urge the side. According to one in the embodiment, number 2 block (20) by applying force block number 2 (20) the upper substrate (4) configured to pressurize disapproval. For example, block number 2 (20) on the upper surface of a certain weight of weight for (25) and is elevated, this weight (25) by the weight of the number 2 block (20) includes an upper substrate (4) bottom substrate (2) by pressing the side thermoelectric elements (6, 7) and at the upper part through an electrode bonding material (5) and the lower electrode (3) can be bonded to , the thermoelectric module (1) can be the structural stability and output stability. According to another in the embodiment, number 2 without separate weight block (20) own weight of upper substrate (4) bottom substrate (2) side pressing degree may be made from an innoculation. On the other hand, number 1 block (10) to block number 2 (20) capable of stably guide the vertical movements of guide structure (17, 27) be built may be filled. Guide structure (17, 27) is number 1 block (10) at least one side thereof extends upward from (17) and, number 2 block (20) one or more formed a guide hole (27) may have a. The, number 2 block (20) is number 1 block (10) when vertical movement number 2 block (20) of a guide hole (27) is number 1 block (10) side thereof of (17) sliding along the guide along Chinese stably and thus may be guided by the disclosed. Thermoelectric elements (6, 7) the lower end of the lower electrode (3) between, thermoelectric elements (6, 7) the upper end of the upper electrode (5) can be interposed between the brazing filler such as bonding material, these bonding material thermally fix the material molten by heating thermoelectric elements (6, 7) the lower end of the lower electrode (3) joined up the thermoelectric elements (6, 7) the upper end of the upper electrode (5) can be joined. Number 1 block (10) number 1 pair of heating unit (13) is installed, number 1 heating part (13) at the bottom substrate (2) has a seating unit number 1 block (10) mounted adjacent the upper surface of the lower substrate by (2) a lower electrode (3) and thermoelectric element (6, 7) is interposed between the lower end of the bonding material can be configured to applying heat. The number 1 heating part (13) at the bottom substrate (2) lower electrode (3) and thermoelectric element (6, 7) is interposed between the lower end of the intensive heating subject matter junction thermoelectric elements (6, 7) the lower end of the lower electrode (3) is provided to improve the solid lubricant between, for the remainder other high temperature can minimize oxidation. Number 2 block (20) pair of number 2 heating unit (23) is installed, number 2 heating unit (23) includes a top substrate (4) mounted adjacent upper substrate by the support portion on the bottom surface (4) of the upper electrode (5) and thermoelectric element (6, 7) is interposed between the upper end of the bonding material can be configured to applying heat. The number 2 heating unit (23) includes a top substrate (4) of the upper electrode (5) and thermoelectric element (6, 7) is interposed between the upper end of the conductive bonding material heating thermoelectric elements (6, 7) the upper end of the upper electrode (5) is provided to improve the solid lubricant between, for the remainder other high temperature can minimize oxidation. Jig (31, 32) is number 1 block (10) and number 2 block (20) between thermoelectric elements (6, 7) by aligning its alignment (positioning) maintaining (retaining) can be configured. And, jig (31, 32) is made of ceramic such as isolation material can be. In the embodiment of the present invention according to various, jig (31, 32) comprises a thermoelectric element (6, 7) for holding and aligning the at least one slot (31a, 32a) may have a. This slot (31a, 32a) is at least one pair of thermoelectric elements (6, 7) may have a width and a length suitable to accept. Slot (31a, 32a) can be comprised of one end of the other end thereof is opened and closed construction may be filled. Thermoelectric elements (6, 7) are jig (31, 32) of slots (31a, 32a) is contained in the alignment to can be maintained. This jig (31, 32) of on-alignment and by, thermoelectric elements (6, 7) a top upper electrode (5) bonded to up to thermoelectric elements (6, 7) the lower end of the lower electrode (3) bonded to by the thermoelectric elements (6, 7) an upper electrode (5) and the lower electrode (3) can be stably connected. According to various in the embodiment, jig (31, 32) is 2 or more jig (31, 32) is vertically so that an can be made. Each jig (31, 32) of slots (31a, 32a) extending along a direction can be different. The 2 or more jig (31, 32) of slots (31a, 32a) are sequentially one another at an angle on the basis of the overclad jig (31, 32) of slot (31a, 32a) include at their part may have overlapping region. Each of these slots (31a, 32a) of mutually overlapping a region of thermoelectric elements (6, 7) by inserting the thermoelectric elements (6, 7) can be stably control of alignment and maintenance. According to one in the embodiment, jig (31, 32) is also 3 as shown in, number 1 (X1) direction extending along slot number 1 (31a) with number 1 jig (31) extending along the direction (X2) and number 2 number 2 slot (32a) with number 2 jig (32) can be a. Number 1 jig (31) and number 2 jig (32) includes a slot number 1 (31a) and number 2 slot (32a) on the basis of the angle by the thermoelectric elements (6, 7) are very stable maintenance of alignment and can be output. Number 1 jig (31) of number 1 slot (31a) number 2 on jig (32) of number 2 slot (32a) thermoelectric (6, 7) according to the shape and can be used for a variety of array interval change. For example, such as slot number 1 also 3 (31a) and number 2 slot (32a) is composed of circuits structure, number 1 and number 2 (X1) (X2) direction orthogonally intersecting a direction if, number 1 jig (31) of number 1 slot (31a) and number 2 jig (32) of number 2 slot (32a) can be orthogonally intersecting, number 1 through slot (31a) and number 2 slot (32a) is formed in the rectangular parallelepiped structure made of overlapping rectangular thermoelectric elements (6, 7) can be received and dimensionally stable. On the other hand, number 1 jig (31) both ends of the number 2 jig (32) fitted into a pair of number 1 (edge) edge of only the chin (33) can be formed, number 1 jig (31) only the chin of number 1 (33) are number 2 jig (32) embedded to the rim of the jig according to number 1 (31) number 2 on jig (32) has a curved vibrates up and rigidly meal bud combination 1308. This number 1 jig (31) number 2 on jig (32) in meal bud combination of number 1 by slot (31a) and number 2 slot (32a) more stable can be formation that the area of mutually overlapping, through thermoelectric elements (6, 7) maintenance of alignment can be stably implemented. In addition, number 2 jig (32) both ends of the number 1 jig (31) fitted into a pair of number 2 (edge) edge of only the chin (34) can be formed, number 2 jig (32) only the chin of number 2 (34) are number 1 jig (31) embedded to the rim of the jig according to number 2 (32) number 1 on jig (31) rigidly meal bud combination has a curved vibrates up and can be disclosed. This number 1 jig (31) number 2 on jig (32) in meal bud combination of number 1 by slot (31a) and number 2 slot (32a) more stable can be formation that the area of mutually overlapping, through thermoelectric elements (6, 7) of alignment can be implemented inside of the maintenance. In particular, number 1 jig (31) number 1 to both ends of only the chin (33) is formed on the inner jig with number 2 (32) number 2 to both ends of only the chin (34) can be formed, only the chin number 1 (33) only the chin and number 2 (34) is arranged in the direction which intersect can be. Number 1 through jig (31) number 2 on jig (32) has a curved vibrates up and number 1 jig (31) only the chin of number 1 (33) is number 2 jig (32) as well as the rim of the embedded, number 2 jig (32) only the chin of number 2 (34) is number 1 jig (31) fitted by the rim of the jig by number 1 (31) number 2 on jig (32) has a curved vibrates up and forcedly inserted 1308. meal bud combination. The, slot number 1 (31a) and number 2 slot (32a) of mutually overlapping that the area inside of the formed to securely hold its shape as well as a narrow slit, inserted into a region overlapping elements (6, 7) for alignment and for aligning the same can be implemented more stable retention of water. As shown also in addition 7, number 1 block (10) to the fitting groove of (11) in the periphery of the guide section (18) and is protruded with respect to the, guide (18) number 1 by jig (31) and/or number 2 jig (32) is number 1 block (10) to be guided to its mounting position for hereinafter as well as stably maintain the position can be mounted. These guide part (18) by number 1 jig (31) and/or number 2 jig (32) through positioning of, thermoelectric elements (6, 7) of more stable alignment and retention of alignment can be made. The present invention also to Figure 10 shows a thermoelectric module of a thermoelectric module 4 also by using the number shown [...] number bath device are disclosed. Also with reference to 4 to 10 also, thermoelectric module of a thermoelectric module of the present invention device number bath using the SFC [...] number provided as follows. First, as shown in also 4 and also 5, number 1 block (10) to the fitting groove of (11) lower substrate (2) loaded substrate. Lower substrate (2) lower electrode (3) may be previously bonded, lower substrate (2) the outer groove (11) to be joined to a seated after innoculation. Then, such as lower substrate also 6 (2) lower electrode (3) a plurality of thermoelectric elements (6, 7) appropriately arranged each other. The lower electrode (3) and thermoelectric element (6, 7) interposed between the lower end of the brazing filler material such as bonding reaction chamber. Then, such as jig 7 also number 1 (31) a plurality of thermoelectric elements (6, 7) is adapted to after, such as jig 8 also number 1 (31) number 2 on jig (32) a laminated. The number 1 jig (31) of number 1 slot (31a) and number 2 jig (32) of number 2 slot (32a) to cross a predetermined angle by placing number 1 jig (31) and number 2 jig (32) by thermoelectric elements (6, 7) can be maintaining alignment of. Alternatively, slot number 1 (31a) and number 2 slot (32a) to each other through a number 1 jig (31) number 2 on jig (32) is formed on an opening slot number 1 (31a) and number 2 slot (32a) of mutually overlapping the region overlapping the after a plurality of thermoelectric elements (6, 7) by inserting a thermoelectric elements (6, 7) for maintaining alignment and aligned implementing of disapproval. The block number 1 (10) the lower substrate (2) is supported in thermoelectric elements (6, 7) are arranged after the jig which will listen (31, 32), 9 also such as upper electrode (5) with upper substrate (4) a thermoelectric element (6, 7) on the upper end of polished. Then, block number 2 (20) a number 1 block (10) after installed on the upper side of block number 2 (20) a number 1 block (10) and which is urged to each other. In this state thermoelectric elements (6, 7) the lower end of the lower electrode (3) interposed between the junction chloroethane, thermoelectric elements (6, 7) the upper end of the upper electrode (5) bonding material interposed between the heating part number 1 (13) and number 2 heating part (23) by individually heating by thermoelectric elements (6, 7) polyurethane (3) an upper electrode (5) can be bonding between. The thermoelectric module (1) number of trillion processes exposed to high temperatures by thermoelectric elements (6, 7), upper electrode (5), lower electrode (3), upper substrate (4), lower substrate (2) can be a high temperature oxidation and the like. , the present invention refers to a high temperature oxidation prevention for preventing high temperature oxidation (40) further include a disapproval. According to one in the embodiment, a high temperature oxidation prevention (40) as shown in the 1 also, hydrogen (H2 ), Nitrogen (N2 ), Anti-oxidation gas such as argon (Ar) number 1 module (10) and number 2 module (20) into the space between the anti-oxidant gas injector portion (45) can be a. Anti-oxidation gas injector portion (45) traffic there is tube (42) may be connected, communication tube (42) is number 1 module (10) and number 2 module (20) are configured to communicating with the void between the oxidation-resistant gas injector portion (45) from anti-oxidation gas connection (42) number 1 through module (10) and number 2 module (20) can be injected into the space on. In addition, anti-oxidation gas leak to the outside for preventing, shielding wall (41) the number 1 module (10) and number 2 module (20) can be installed at an outer side of disapproval. The, shielding wall (41) is number 2 module (20) are moved unimpeded will preferably up-and-down movement. According to another in the embodiment, a high temperature oxidation prevention (40) as shown in the 11 also, number 1 module (10) and number 2 module (20) formed with a cleaning space between atmosphere and a vacuum atmosphere (46) can be a. A vacuum absorption part (46) traffic there is tube (42) may be connected, communication tube (42) is number 1 module (10) and number 2 module (20) are configured to communicating with the void between the vacuum suction part (46) by number 1 module (10) and number 2 module (20) from the space between the communication tube (42) by sucking air through the atmosphere and a vacuum atmosphere can like composition. In addition, effective and the vacuum pump for, shielding wall (41) the number 1 module (10) and number 2 module (20) can be installed at an outer side of disapproval. The, shielding wall (41) is number 2 module (20) are moved unimpeded will preferably up-and-down movement. Or more, in the embodiment of the present invention specific described but, in the embodiment to the present invention refers to the disclosure of the present invention defined by the appended specification and drawing does not technical idea can be prepared by one skilled within the range which exerts no out deformed. 10: number 1 block 11: supports 13: heating part number 1 18: guide 20: number 2 block 21: supports 23: number 2 heating unit 25: weight 31: number 1 jig 32: number 2 jig 31a: number 1 slot 32a: number 2 slot The present invention relates to an apparatus for manufacturing a thermoelectric module in which a thermoelectric element is interposed between a lower substrate with a lower electrode and an upper substrate with an upper electrode. The apparatus for manufacturing a thermoelectric module according to the present invention includes a first block supporting the lower substrate; a second block which is installed to be vertically movable with respect to the first block and supports the upper substrate; and a jig for positioning the thermoelectric element with respect to the upper electrode and the lower electrode. Accordingly, the present invention can remarkably improve structural stability and output stability. COPYRIGHT KIPO 2017 Lower on one side arranged in electrode made of thermoelectric elements between thermoelectric module number number bath device thermoelectric module as a tank provided therebetween, said lower block number 1 for supporting a substrate; said number 1 which is arranged to be vertically movable block, said upper block number 2 for supporting a substrate; and said upper and said lower electrode with respect to said thermoelectric element alignment (positioning) of the jig (jig); number bath device including a thermoelectric module. According to Claim 1, said jig elements in order to receive at least one slot has a number bath device characterized by a thermoelectric module. According to Claim 2, said jig is provided vertically stacked 2 or more jig, said 2 or more of the jig on the basis of the overlapping angle slots so that the slots are characterized number bath device having a region with a thermoelectric module. According to Claim 1, characterized in that said number 1 block is said lower substrate to the fixing grove thermoelectric module number bath device. According to Claim 4, said block is seated in the vicinity of said groove said number 1 position of the jig to guide the guide portion having a thermoelectric module number bath device characterized. According to Claim 1, said number 2 block is characterized in that said upper substrate to the fixing grove thermoelectric module number bath device. According to Claim 6, said number 1 block heating section is installed is number 1, the lower end of said lower electrode interposed between said heating said number 1 thermoelectric elements disposed to applying heat bonding material number bath device characterized by a thermoelectric module. According to Claim 1, said number 2 is block number 2 heating section is installed, said thermoelectric elements interposed between said upper end of said number 2 heating the upper electrode disposed to applying heat bonding material number bath device characterized by a thermoelectric module. According to Claim 1, said number 1 block and said number 2 block between said number 2 block guide structure is installed vertical movements, least said number 1 block extends upward from said at least one hydraulic motor, said number 2 block in one or more guides hole characterized bath device having thermoelectric module number. Lower substrate, the lower electrode, a thermoelectric element, an upper electrode, a thermoelectric module of the thermoelectric module number as number bath device comprising an upper tank, said lower block for supporting a substrate number 1; rods are disposed on top of said number 1 block, said upper portion said lower substrate side as the number 2 block; said thermoelectric element alignment (positioning) blocks said number 1 block and said number 2 in its aligned by maintain the jig (jig); said number 1 block number 1 is disposed within the heating section; and said number 2 heating unit installed in block number 2; number bath device including a thermoelectric module. According to Claim 10, said jig is provided with a slot number 1 jig and extending along the direction number 1 number 1, number 2 direction extending along number 2 with a slot number 2 jig, said number 1 jig and said number 2 jig said number 1 on the basis of the slot at an angle to said number 2 slot number bath device characterized by a thermoelectric module. According to Claim 11, both ends of the jig said number 1 number 2 (edge) edge of the jig fitted into a pair of number 1 prominence on which the thermoelectric module number bath device characterized. According to Claim 11, said number 2 jig (edge) which fits a pair of number 2 number 1 both ends of the edge of the jig winds round thermoelectric module number bath device characterized.
