GAS RESPONSE MATERIAL WITH HIGH SENSITIVITY AND HIGH SELECTIVITY TO METHYL BENZENE, AND MANUFACTURING METHOD THEREOF, AND GAS SENSOR CONTAINING GAS RESPONSE MATERIAL
The present invention refers to methyl benzene for detecting gas sensitive material, said gas sensor including a gas sensitive material and manufacturing method thereof are disclosed. The ozone gas harmful to the human body are known to be odorless and colorless gas at room temperature and volatile organic compounds present in existence since most gas makes a disclosed. Typically such toxic volatile organic compounds include benzene, toluene, xylene, alcohol, formaldehyde and the like and, most oxide semiconductor type gas sensor exhibits a high sensitivity for said gas sensitivity only alcohol or similar number door indicating pin is point. In addition, each volatile organic compounds as well as each the recommended concentration limit differ, and since an influence on individual gas hereinafter expressed on human disease capable of selective sensitive gas sensor to 10sup16. On the other hand, trace amounts of organic compounds such as methyl benzene toluene and xylene indoor present in the seal in order to selectively detect the degree number are solved gas sensor specific detail technology to the rising mirror substrate. A first time, the matter of recommendations as U.S. job safety food & sanitation bureau (Occupational Safety and Health Administration), methylbenzene 10 ppm concentration environment 10 minutes when, indoor contamination of a gas sensor to 10sup16. determines that can be severe. In particular, the human body when exposed for long periods of time reference said higher concentration and the methyl benzene faintness or vomiting, ocular disorders, resulting skin disease because, attached to even low concentrations of 10 ppm representing methylbenzene sensitive material than high sensitivity required disclosed. Second, cooking or direction number injection, like drinking alcohol gas is highly by comparison, a sensor for detecting indoor environmental pollution supplies essentially low sensitivity in order alcohol such substrate. In addition, existing inside indoor for automobiles that carbon monoxide, formaldehyde such as various malfunction of even gas sensor is lower interference gas such substrate. Thus, according to the indoor environment can be eliminated to prevent alcohol occurs continuously such that it gas, carbon monoxide, formaldehyde gas such as disturbance of the gas sensitive material are required for improving the selectivity of the methylbenzene contrast times. A chemical, to increase the sensitivity and selectivity of methyl benzene gas effectively sensitive material such as a structure having selecting synthetic method is important to ensure that disclosed. In particular, oxide or a two or more oxide catalyst substance and applying the interface to present when forming the silicon epitaxial layer adapted, oxidizing gaseous/decomposition catalysts sensitivity and selectivity can be an entire rotation methylbenzene, sensitive material through modulation of charge mover concentration change in the resistance cylindrical methylbenzene sensitive sensitivity and selectivity can be an entire. Utilizing this effect the method is provided with a vapor - liquid - typically used for synthesis sensitive material solid (vapor-a liquid-a solid), sputtering (sputtering), the - beam (e-a beam), liquid coating is provided to be used, each method are sensitive substance dog question is covered difficult to realize a, obtains even aspects even at high cost for to tame. In particular, the present invention Cr such as2 O3 /ZnCr2 O4 Two or more oxide nanocomposite catalytically active such as excellent mixing of sensitive material in order to pure Cr synthesizing hetero-junction structure2 O3 Single ZnCr on fine2 O4 Fine needs disclosed. However, a single phase ZnCr2 O4 In order to number Cr ZnO and fine particles of a high pressure liquid coolant2 O3 After a heat treatment of solid fine particles of polymethylmethacrylate (Solid State Reaction) 1100 °C the spirit. However, this procedure accounts for greater energy dissipation as well as additional process and many production time, during a heat treatment ZnCr2 O4 Larger particle size reduced surface to gas detection material number exists in the lower sensitivity as measured disclosed. The single phase ZnCr2 O4 A rotating speed that fine particles of the synthesized Cr2 O3 /ZnCr2 O4 A nanocomposite synthesizing LiNO3 installations and number are disclosed. Thus, it is required that a design cost and energy and time consumption of environmental pollution gas sensor is filled in, small particle size material excellent contact interface between the heterogeneous oxide synthesis method an effective detection are required. With regard to the, selective detection substances cookies for small gas sensitive material as well as an excellent catalyst activation number specific gas such as heterogeneous catalyst material added to and applying the noble metal oxidizing selective detection of oxide semiconductor in order to activate a [...] bar and many schemes have number (non-patent document 1 - 3), in addition particular filter gas sensor attached to the process layer after increasing selectivity not like number etc. (non-patent document 4 - 5). However, catalyst addition amount optimizing and quantifying said method are the reverse door number point which, uniformly mixed an additive force, single gas selectivity degree of inverted triangular screw, pin is disadvantages addition process additional items together. In particular, said method disturbance when gases through lattice, methylbenzene (xylene, toluene) and benzene such as benzene ring having molecular structure has similar selection between a rear fixed gas detecting pin is. The present invention refers to said prior art door number if the point is provided which, high sensitivity and selectivity of vinyl acetate methyl benzene belonging to indoor environment gas detectable gas sensitive material, its manufacturing method and said gas sensitive material including the number [...] intended for gas sensor. In the present invention said number and in order to solve, Cr2 O3 And ZnCr2 O4 As sensitive material including a nanocomposite of methylbenzene for detecting gas, said Cr2 O3 And ZnCr2 O4 During Cr Cr atom content and Zn atom content of atom content ratio of nanocomposite based on the sum of 67. 0 To 90 atomic %. 0 Atomic % in methylbenzene for detecting gas sensitive material number [...] substrate. In addition, the present invention refers to a number of steps including a gas sensitive material manufacturing method for detecting methylbenzene [...] substrate. A) Zn salts and sugar solution bath including the step number, B) said a) with respect to the spray pyrolysis reaction solution prepared by the number by performing operation from the hydrophobic shell is ZnO powder bath step number, C) said ZnO powder mixed with salt metathesis Cr Cr by performing after galvanic2 O3 And ZnCr2 O4 The step number bath of a nanocomposite. According to another embodiment of the present invention, said c) step a comprises the following steps can be galvanic said metathesis. I) xylene said ZnO powder after dissolving, heating temperature of 80 °C to 150 °C, Ii) said i) step is for adding malonic oleyl amine and agitating the heated solution, Iii) said ii) stirring solution mixed with galvanic metathesis step Cr salt is performed. According to another embodiment of the present invention, said c) Cr prepared by the number after2 O3 And ZnCr2 O4 Then cleaning and drying of a nanocomposite, 400 °C to 700 °C in 0. 2 Hr to 16 steps further comprise time may be filled. In addition, the present invention refers to a number of steps including a gas sensitive material manufacturing method for detecting methylbenzene [...] substrate. A) Zn salt powder and Cr salt powder by performing the step of preparing a mixture powder after ball - milling number bath, B) preparing a mixture powder in said 1100 °C to 1300 °C 6 hr to 8 hours by calcination step number bath fine solid mixture. In addition, the present invention refers to a number of steps including a gas sensitive material manufacturing method for detecting methylbenzene [...] substrate. A) Zn salts, salts and sugar solution bath including the step number Cr, B) said number to spray pyrolysis to yield Cr solutions prepared by the2 O3 And ZnCr2 O4 The step number bath of a nanocomposite. In addition, the present invention refers to said gas sensitive material to gas response layer including a gas sensor for determining methylbenzene including gas sensor for determining a number of steps and manufacturing method uses zeolite [...] substrate. A) said gas sensitive material paste by mixing deionized water with the step number bath, B) said a) step during a number prepared by the paste on the substrate, C) drying said powder and gas tank number response layer step. According to the present invention, other gas having high selectivity with respect to the contrast methylbenzene, in addition methylbenzene high detection sensitivity can be [...] gas sensitive material number, hereinafter for adjusting composition of gas sensitive material and in addition, a number of rapid synthesis at a low temperature can be [...] manufacturing method capable of gas sensitive material. Figure 1 shows a manufacturing method of implementation of the present invention also for coarse process according to methylbenzene for detecting gas sensitive material are disclosed. Also in the embodiment 1 and comparison example 1 to 3 to 3 Figure 2 shows a number according to the diffraction analysis data prepared by the gas sensitive material shown for X-a ray are disclosed. Figure 3 in the embodiment 1 and comparison example 1 to 3 to 3 for indicating the SEM photograph number prepared by the gas sensitive material according to secondary particle structure of 2000. Each 4a to 4c also in the embodiment 1, comparison example 1, shown for comparison example 3 TEM photograph gas sensitive material are disclosed. Also 5a to 5f in each 275 °C operating temperature in the embodiment 1, in the embodiment 2, in the embodiment 3, comparison example 1, example 2 and comparison example 3 comparison gas sensitive material concentration of 5 ppm of toluene, xylene, and ethanol are disclosed graph indicating dynamic gas sensitive. Figure 6 shows a also in the embodiment 1, in the embodiment 2, in the embodiment 3, comparison example 1, example 2 and comparison example 3 number prepared by the gas sensor operating temperature by comparing from toluene, xylene and ethanol for indicating gas feeling are disclosed. Figure 7 shows a gas sensor in the embodiment 1 of 275 °C also in operation on ethanol, xylene, toluene, benzene, HCHO, CO graph for gas sensitive properties are disclosed. A voice synthesizing method such as Figure 8 in the embodiment 1, a different composition of Cr added (ICP analysis as a result, / {[Cr] +}=78. 2 At. %) Cr United2 O3 /ZnCr2 O4 The compound X a-ray diffraction analysis result are disclosed. Figure 9 shows a graph of livestock products represented also in the embodiment 1 according to changes in xylene gas sensitive gas properties are disclosed. Figure 10 shows a gas sensitive material according to the present invention according to each concentration of xylene sensitivity study in comparison to timing graph existing also are disclosed. Figure 11 shows a gas sensitive material of the present invention according to in the embodiment 1 ethanol contrast existing xylene selectivity study in comparison to timing graph also are disclosed. Also the present invention according to in the embodiment 1 Figure 12 shows a relative humidity of 20%, 50%, 80% in xylene for 1 ppm sensivility measuring gas (gas sensor on: 275 °C) result graph are disclosed. According to Figure 13 of the present invention in the embodiment 4 for fabricating biomedical United through 68. 0 Atomic % of added Cr Cr2 O3 /ZnCr2 O4 Composite sensor 275 °C 5 ppm in gas properties graph are disclosed. Hereinafter, the present invention more detailed the on-sensors other. The present invention refers to seal material methyl benzene gas and main gas environment very high detection sensitivity for detecting methylbenzene having selectivity for resistance and excellent gas sensitive material, said gas sensor including a gas sensitive material and manufacturing method thereof are disclosed. The present invention according to the methyl benzene for detecting gas sensitive material, Cr2 O3 And ZnCr2 O4 Of nanocomposite which, in particular during Cr Cr atom content and Zn atom content ratio of atom content of such composite sum of reference 67. 0 To 90 atomic %. 0 Atomic % are disclosed. I.e., in the present invention according to methylbenzene for detecting gas sensitive substance, Cr2 O3 /ZnCr2 O4 During Cr nanocomposite2 O3 Content is a very important factor and tumors detection sensitivity and selectivity, the same value is outputted as important disclosed. In the embodiment as even number data to [...], Cr 78 of atom content ratio. 2 Atomic % less than other gas contrast detection sensitivity and selectivity is lowered if methylbenzene gas in electronics that door number point does not, 90. 0 Atomic % Cr is sensitive material generated in the entire region is exceeded2 O3 The ratio of the width is, the lowest gas sensitivity is also low Cr without overlay resistance electric2 O3 Methyl benzene gas so that the detection sensitivity is afforded through door number point supports in electronics that isn't very sharp. In addition, as in the embodiment 4 to result in mixing for fabricating biomedical 68. 0 Atomic % of added Cr Cr2 O3 /ZnCr2 O4 Synthesizing complex can be, in this case excellent sensitivity and selectivity can be identifying 68 methyl benzene. 0 Atomic % of Cr composition can be used as well as good methylbenzene into a gas sensor can be cylindrical. Thus, in the present invention according to methylbenzene for detecting gas sensitive substance, Cr2 O3 /ZnCr2 O4 During Cr nanocomposite2 O3 Content is 67. 0 To 90 atomic %. 0 Atomic % implementation being. In addition, a number of manufacturing method for detecting gas sensitive material in the present invention said methylbenzene [...] bar, said composition satisfying Cr2 O3 /ZnCr2 O4 The method number a nanocomposite of the present invention according to various high pressure liquid coolant bath can be used for detecting gas sensitive material number of methyl benzene. In particular, advantageous manufacturing method using a continuous composition control and galvanic substituted method, two or more uniform molecular complex number capable of oxide, enabling rapid synthesis at a low temperature and advantageous in bar, is shown according to method 1 of coarse standpoint was also galvanically substituted method. The reference also 1, characterized by the present invention according to one method comprises the steps of including a. A) Zn salts and sugar solution bath including the step number, B) said a) with respect to the spray pyrolysis reaction solution prepared by the number by performing operation from the hydrophobic shell is ZnO powder bath step number, C) said ZnO powder mixed with salt metathesis Cr Cr by performing after galvanic2 O3 And ZnCr2 O4 The step number bath of a nanocomposite. The method number when high pressure liquid coolant through, said nanocomposite Cr Cr atom content and Zn atom content of atom content ratio of sum of reference 78. 2 Atomic % to 90. 0 Atomic % are disclosed. Said a) step said Zn salt include ZnO, in addition said sugar include sucrose, glucose sugar selected from the group consisting of blends thereof can be used. On the other hand, said a) step a predetermined amount of nitric acid (HNO3 ) Can be added, the residual Zn Zn salt added through pH adjustment2+ In the form of ion is dissolved in a aqueous solution serves to assist to be coated. Then, Zn salts and sugar solution using a solution spray pyrolysis reactions including number after said high pressure liquid coolant is to be coated. Specifically, said b) step spray pyrolysis reaction is heated to 1000 °C 700 °C hole into said a) step can be performed by injector speed into a 20 L/min to 5 L/min of from solution. The, spray pyrolysis temperature if sugar is not less than 700 °C completely pyrolysis which internally door component number point which, very rapid volatilization of the solvent from a liquid droplet speed is exceeded 1000 °C is the hollow structure or collapse, or sheet of heavy gas sensitivity of releasing the door number point rate in electronics WIPO. In addition, when the first and the second pyrolysis time less than 5 L/min solution injector speed also hollow structure or collapse, or sheet of releasing the door inside of a number of heavy gas rate sensitivity, resulting in shorter pyrolysis time is exceeded 20 L/min per door component number point not fully pyrolysis which internally in electronics WIPO. Next, after said spray pyrolysis reaction, said ZnO prepared by the number Cr powder mixed with salt spray pyrolysis reaction by performing Cr after galvanic metathesis2 O3 And ZnCr2 O4 The high pressure liquid coolant is equal to or higher number of a nanocomposite. The, said galvanic metathesis comprises the following steps without using a tool. I) xylene said ZnO powder after dissolving, heating temperature of 80 °C to 150 °C, Ii) said i) step is for adding malonic oleyl amine and agitating the heated solution, Iii) said ii) stirring solution mixed with galvanic metathesis step Cr salt is performed. Said i) step of heating of the ZnO cation movable and in solution by supplying thermal energy for movement cation Cr for the disclosure of galvanic metathesis performed, the heating temperature is 80 °C sufficient thermal energy is below a concealing galvanic metathesis number does not take place inside of a door, xylene solvent used at an extremely high volatile amount exceeds 150 °C is reacted to form galvanic reaction proceed xylene solvent amount remaining within the sudden deceleration of the doors difficult in electronics point number isn't very sharp. On the other hand, said iii) CrCl Cr salt is added in2 Implementation being. Finally, in the present invention according to method, said iii) after Cr prepared by the number2 O3 And ZnCr2 O4 Then cleaning and drying of a nanocomposite, 400 °C to 600 °C in 0. 2 Hr to 16 time steps further comprise additionally may be filled. Said remaining number Cr heat trace amounts of carbon monoxide and volatile organic2 O3 /ZnCr2 O4 The formation of oxide interfacial performed, the heat treatment temperature is below 400 °C not decompose organic or Cr2 O3 /ZnCr2 O4 Oxide interface is not uniformly formed inside of a door such as number, exceeds 600 °C Cr2 O3 /ZnCr2 O4 By the reaction of secondary phases are formed as two other than between a depth stop interface on each orParticles such as number point supports door size gas detection sensitivity in electronics WIPO. The present invention according to methylbenzene for detecting gas sensitive material by a predetermined time interval lapses but these galvanic substituted method number tank, mixed powder of calcination at a moment by a tank through LiNO3 number, in this case, the present invention according to method comprises the following steps without using a tool. A) Zn salt powder and Cr salt powder by performing the step of preparing a mixture powder after ball - milling number bath, B) preparing a mixture powder in said 1100 °C to 1300 °C 4 hr to 6 hours by calcination step number bath fine solid mixture. The method number when tank through said a) in said Zn salt powder and Cr Cr Cr atom content and Zn atom content of atom content ratio salt powder is based on the sum of 78. 2 Atomic % to 90. 0 Atomic % mixed methyl benzene gas so high sensitivity and selectivity equal to or higher than can be achieved. In addition, likewise, ZnO and said Zn salt, said Cr Cr salt2 O3 Implementation being. Said b) step, i.e. mixed powder of calcination reaction is performed during the time 6 hr to 4 1100 °C to 1300 °C in bigger, when the calcination temperature is less than 1100 °C Cr2 O3 /ZnCr2 O4 Phases are formed as a number of inside of a door, is 1300 °C Cr is exceeded2 O3 /ZnCr2 O4 Other than or on secondary phases are formed as eachParticles such as number point supports door size gas detection sensitivity in electronics WIPO. The present invention according to aforementioned ratio atom content from said initial gas sensitive material for detecting methyl benzene focused by galvanic substituted method or a solid phase represents a number permitting tank but, represented as described when the even in the embodiment 3, having a composition different from ZnCr on2 O4 Nanocomposite and Cr2 O3 With respect to commercial fine by performing LiNO3, said atom content adjusting the ratio-made a predetermined time interval lapses disclosed. In addition, the present invention according to these galvanic substituted method for detecting methyl benzene gas sensitive material, mixed powder of calcination at which dielectric layer to form a spray pyrolysis method number through the LiNO3 pivotably oxide or even number. In this case, the present invention according to method comprises the following steps without using a tool. A) Zn salts, salts and sugar solution bath including the step number Cr, B) said number to spray pyrolysis to yield Cr solutions prepared by the2 O3 And ZnCr2 O4 The step number bath of a nanocomposite. Said a) step and said Zn salt is ZnO, said Cr salt CrCl2 And, said is a sucrose, glucose and mixture can be selected from the group consisting, said a) step a predetermined amount of nitric acid (HNO3 ) Can be added, the residual Zn Zn salt added through pH adjustment2 + In the form of ion is dissolved in a aqueous solution serves to assist to be coated. The above and then spray pyrolysis reaction performed as, for fabricating biomedical 68 mixing result. 0 Atomic % of added Cr Cr2 O3 /ZnCr2 O4 Synthesizing complex can be, in this case excellent sensitivity and selectivity can be identifying 68 methyl benzene. 0 Atomic % of Cr composition can be used as well as good methylbenzene into a gas sensor can be cylindrical. The tank is provided to increase the number two and an ion spray pyrogenic oxide and less variation in composition because droplets is passed into the second conversion in ([Cr] + /=68% Cr even2 O3 And ZnCr2 O4 Mixing different formed. On the other hand, the present invention refers to in addition said gas sensitive material including the gas response layer and a gas sensor for determining methylbenzene [...] number, specifically the present invention according to a gas sensor is number including the following steps can be high pressure liquid coolant. A) said gas sensitive material paste by mixing deionized water with the step number bath, B) said a) step during a number prepared by the paste on the substrate, C) drying said powder and gas tank number response layer step. The, Au electrode and said substrate is patterned alumina substrate, said coating process can be performed by various method such as drop - coating (drop-a coating) can be. In particular process conditions include, said c) step is carried out in the drying of 1 hr to 2 hours 70 °C to 90 °C, 0 in said heat treatment step 400 °C to 600 °C. 5 Hr to 24 can be performed during time. Hereinafter, the present invention is to describe a through more specifically in the embodiment, in the embodiment of the present invention is to for aiding understanding only, are not correct valve timing of the number range of the present invention. In the embodiment 1. The present invention according to methylbenzene for detecting gas sensitive substance and including number of bath gas sensor for determining methylbenzene (1) 1 Of the present invention in one embodiment is also same for gas sensor for detecting gas sensitive substance and including methylbenzene according to number was shown for [...] standpoint. The reference also 1, first, 980 ml deionized solution to 8. 32 G zinc oxide (ZnO, 99. 99%, Sigma non-Aldrich Co. Ltd), 34. 20 G of sucrose (C12 H22 O11 , 99. 5%, Sigma non-Aldrich Co. Ltd) and 20 ml of nitric acid (HNO3 , 60. 0%, Co. Samchun Chemical) mixing, stirring time-gate 1. In addition to an atomiser (nebulizer) stirring said solution composition made of the container and, by spray pyrolysis was container by a width. At this time, spray pyrolysis equipment installed Teflon collection network mounted lower particle collection chamber. Said solution 1 prepared in an air atmosphere. 7 MHz frequency was atomized into droplets through having oscillator. At this time, heated injector speed into a hole 700 °C heat decomposition reaction of 20 L/min into the matter. Reaction after particle collection chamber is mounted on a Teflon collection through the pure ZnO hollow structure are obtained. Said hollow structure synthesized ZnO 0. 03 G of a 15 ml xylene (C6 H4 (CH3 )2 , ACS reagent ≥ 98. 5%, Co. Sigma non-Aldrich) agitating the melts, heating up to 90 °C. Then, heated solution 0. 75 G of oleyl one amine (C18 H35 NH2 , 70%, Co. Sigma non-Aldrich) and 0. 14 G of oleyl tooth (C17 H33 COOH, 90%, Co. Sigma non-Aldrich) into the stirring is continued until a homogeneous solution and-gate. Next, an agitated solution 2 M Chromium (II) chloride (CrCl2 , 99. 99%, Co. Sigma non-Aldrich) aqueous solution 0. 37 Ml (ICP analysis as a result, / {[Cr] +}=81. 9 At. %) By whereupon, 2 galvanically over time metathesis of abortion. After cleaning and drying a solution reaction is completed, a heat treatment is performed in the embodiment 1 according to Cr 2 500 °C over time in2 O3 /ZnCr2 O4 A nanocomposite number was high pressure liquid coolant. (2) On the other hand, the Au electrode is mixed with deionized water a nanocomposite prepared by the number patterned drop - alumina coating, drying time in 90 °C 2, 400The present invention according to his time in a high pressure liquid coolant gas sensor for determining methylbenzene °C 2 by heat number. A gas detection chamber located inside said number it became work gas sensor quartz tube and pure air or mixed gas alternately implanting, between change in the resistance of the gas sensor embodiment were measured. According to into the MFC gas after concentration, 4 a-way valve injection gas detection chamber has been abruptly using gas concentrations. Gas detection chamber 200 sccm total flow rate is response to an antenna so as to output the gas temperature is maintained even an abrupt change of a gas concentration. In the embodiment 2. The present invention according to methylbenzene for detecting Gas sensitive material Number of tank and including gas sensor for determining methylbenzene (1) Commercial fine oxidation chromium powder (Cr2 O3 , Powder, ≥ 98% metals basis, Sigma provided aldrich Co.) and zinc oxide (ZnO, nanopowder,<100 nm 99. 9% Metals basis, Sigma provided aldrich Co.) was prepared. Then, in the embodiment 1 and same ratio to said fine (ICP analysis result, / {[Cr] +}=81. 9 At. %) To mix, number 24 - milling a mixture powder was ball-time through high pressure liquid coolant. Calcining said mixture powder in 4 hours to 1100 °C LiNO3 Cr (solid-a state reaction method)2 O3 /ZnCr2 O4 Commercial fine solid mixture number was high pressure liquid coolant. (2) Said deionized water is mixed with fine particles of Au electrode patterned alumina coating drop -, 90 °C 2 in drying time, high pressure liquid coolant gas sensor by heat number was 400 °C 2 in time. Then, number prepared by the gas sensor in the embodiment 1 were measured by the same method gas sensitive degree. In the embodiment 3. The present invention according to methylbenzene for detecting gas sensitive substance and including number of bath gas sensor for determining methylbenzene (1) First, in the embodiment 1 through hydrophobic ZnO number makes his high pressure liquid coolant. A hollow structure ZnO prepared by the number 0. 03 G of a 15 ml xylene (C6 H4 (CH3 )2 , ACS reagent ≥ 98. 5%, Co. Sigma non-Aldrich) agitating the melts, 90 °C heated up. Then, heated solution 0. 75 G of oleyl one amine (C18 H35 NH2 , 70%, Co. Sigma non-Aldrich) and 0. 14 G of oleyl tooth (C17 H33 COOH, 90%, Co. Sigma non-Aldrich) into the stirring is continued until a homogeneous solution and-gate. Next, an agitated solution chromium chloride (CrCl2 , 99. 99%, Co. Sigma non-Aldrich) aqueous solution 0. 18 Ml (ICP analysis result, / {[Cr] +}=77. 9 At. %) By whereupon, 2 galvanically over time metathesis of abortion. Then, solution reaction is completed after cleaning and drying, a heat treatment is performed in ZnCr 2 500 °C over time2 O4 (Comparison example 3) nanocomposite having number was a single phase high pressure liquid coolant. Next, said synthesized ZnCr2 O4 Single phase nano-composite by weight or commercial fine oxidation (Cr2 O3 , Powder, ≥ 98% metals basis, Sigma provided aldrich Co.) was prepared. Said fine particles prepared in the embodiment 1 to a ratio same (ICP analysis result, / {[Cr] +}=81. 9 At. %) After ball-milling through high pressure liquid coolant mixture was spray into 24 time - number. Calcining said mixture prepared in 4 hours to 1100 °C Cr LiNO3 (solid-a state reaction method)2 O3 /ZnCr2 O4 Commercial fine solid mixture number was high pressure liquid coolant. (2) Said deionized water is mixed with fine particles of Au electrode patterned alumina coating drop -, 90 °C 2 in drying time, high pressure liquid coolant gas sensor by heat number was 400 °C 2 in time. Conducting gas sensitive measurement is equal to the number prepared by the gas sensor in the embodiment 1. In the embodiment 4. The present invention according to methylbenzene for detecting Gas sensitive material Number of tank and including gas sensor for determining methylbenzene (1) First, preventing 980 ml of 2. 60 G zinc oxide (ZnO, 99. 99%, Sigma non-Aldrich Co. Ltd), 8. 36 G of Chromium (II) chloride (CrCl2 , 99. 99%, Co. Sigma non-Aldrich), 34. 20 G of sucrose (C12 H22 O11 , 99. 5%, Sigma non-Aldrich Co. Ltd) and 20 ml of nitric acid (HNO3 , 60. 0%, Co. Samchun Chemical) mixing, stirring time-gate 1. In addition to an atomiser (nebulizer) stirring said solution composition made of the container and, by spray pyrolysis was container by a width. At this time, spray pyrolysis equipment installed Teflon collection network mounted lower particle collection chamber. Said solution 1 prepared in an air atmosphere. 7 MHz frequency was atomized into droplets through having oscillator. At this time, heated injector speed into a hole 800 °C heat decomposition reaction of 20 L/min into the matter. After particle collection chamber is mounted on a Teflon collection through the Cr reaction2 O3 /ZnCr2 O4 ([Cr] + /=68. 0 At %) composite are obtained. The remaining organic phase and after every other number 2 600 °C over time in an air atmosphere to heat the matter. (2) Said deionized water is mixed with fine particles of Au electrode patterned alumina coating drop -, 90 °C 2 in drying time, high pressure liquid coolant gas sensor by heat number was 400 °C 2 in time. Conducting gas sensitive measurement is equal to the number prepared by the gas sensor in the embodiment 1. Comparison example 1. According to prior art for detecting methylbenzene Gas sensitive material (ZnO A hollow structure) electronic circuit package number bath (1) Described in the embodiment 1 during, ZnO has a hollow number until trillion processes performed in the high pressure liquid coolant gas sensitive material number (S1 to S3 also during 1) then methyl benzene for detecting, using a high pressure liquid coolant gas sensor for determining methylbenzene his number number prepared by the gas sensitive material. Specifically, high pressure liquid coolant to an ZnO number described in the embodiment 1 was hydrophobic. (2) Deionized water is mixed with fine particles of Au electrode number prepared by the ZnO coating patterned alumina drop -, 90 °C 2 in drying time, high pressure liquid coolant gas sensor by heat number was 400 °C 2 in time. Then, conducting gas sensitive measurement is equal to the number prepared by the gas sensor in the embodiment 1. Comparison example 2. According to prior art for detecting methylbenzene Gas sensitive material (Cr2O3 Powder) electronic circuit package number bath Commercial fine oxidation chromium (Cr2 O3 , Powder, ≥ 98% metals basis, Sigma provided aldrich Co.) was prepared. Said deionized water is mixed with fine particles of a patterned electrode prepared alumina drop - Au coating, 90 °C 2 in drying time, high pressure liquid coolant gas sensor by heat number was 400 °C 2 in time. Then, conducting gas sensitive measurement is equal to the number prepared by the gas sensor in the embodiment 1. Comparison example 3. According to prior art for detecting methylbenzene Gas sensitive material (ZnCr2O4Single phase Nanocomposite) electronic circuit package number bath (1) Number of 1 trillion processes shown in comparison example 3 according to gas sensitive substance and also during all process illustrated as a gas sensor comprising the S1 - S6. First, the process of hydrophobic number such as ZnO was high pressure liquid coolant in the embodiment 1. A hollow structure ZnO prepared by the number 0. 03 G of a 15 ml xylene (C6 H4 (CH3 )2 , ACS reagent ≥ 98. 5%, Co. Sigma non-Aldrich) agitating the melts, heating up to 90 °C. Then, heated solution 0. 75 G of oleyl one amine (C18 H35 NH2 , 70%, Co. Sigma non-Aldrich) and 0. 14 G of oleyl tooth (C17 H33 COOH, 90%, Co. Sigma non-Aldrich) stirring is continued until a homogeneous solution by adding-gate. Next, stirring solution 2 M said chromium chloride (CrCl2 , 99. 99%, Co. Sigma non-Aldrich) aqueous solution 0. 18 Ml (ICP analysis result, / {[Cr] +}=77. 9 At. %) By adding, 2 galvanically over time metathesis of abortion. Then, solution reaction is completed after cleaning and drying, in ceramic by ZnCr 2 500 °C over time2 O4 Single phase nano-composite number was high pressure liquid coolant. (2) Number prepared by the gas sensitive material is mixed with deionized water Au electrode patterned alumina coating drop -, 90 °C 2 in drying time, high pressure liquid coolant gas sensor by heat number was 400 °C 2 in time. Then, conducting gas sensitive measurement is equal to the number prepared by the gas sensor in the embodiment 1. Experiment example 1. In the embodiment 1 to 3 and comparison example 1 to 3 according to gas sensor via 250 °C, 275 °C, 300 °C, 325 °C and 350 °C, temperature in the range of total five have gas sensitive measurement, ozone gas prepared corresponding to ethanol, methylbenzene (xylene, toluene), benzene, HCHO, measure CO result, in the embodiment 1, in the embodiment 2, in the embodiment 3, comparison example 2, and comparison example 3 all reducing gas and resistance increasing p a-type oxide semiconductor type behavior and viscoelasticity. Alternatively, comparison example 1 according to a gas sensor is reducible gasses reduces resistance to n a-type oxide semiconductor type behavior and viscoelasticity. Thus, in the embodiment 1 and in the embodiment 2, comparison example 2, such as comparison example 3 p a-type oxide semiconductor type behaviour gas sensor of each, reducible gasses R sensitivity for gasg /Ra (Rg : Gas sensor resistance, Ra : Air sensor resistance) was defined. While, in the case of comparison example 1 n a-type oxide semiconductor type behaviour such as gas sensor, reducible gasses R sensitivity for gasa /Rg Was defined. Each gas sensors measured xylenes (SXylene ) Interference of gases that other sensitivity (SGas ) With non-(SXylene /SGas ) Xylene (methylbenzene) selectivity through the bill. When charges in air sensor state (Ra ) (Ethanol, xylene, toluene, benzene, HCHO, CO 5 ppm) the subject gas emitting for changing the atmosphere in the gas chamber, when in gas charges (Rg ), Air emitting while changing the atmosphere change in the resistance were measured. Experiment example 2. The present invention according to gas sensitive substance for X a-ray diffraction analysis Figure 2 in the embodiment 1 prepared by the number using a spray pyrolysis synthesis (Cr2 O3 /ZnCr2 O4 Nanocomposite), in the embodiment 2 (Cr2 O3 /ZnCr2 O4 Commercial fine solid mixture), in the embodiment 3 (Cr2 O3 /ZnCr2 O4 Commercial fine/nanocomposite solid mixture), comparison example 1 (ZnO hollow structure), comparison example 2 (Cr2 O3 Commercial fine) and comparison example 3 (ZnCr2 O4 Nanocomposite) X a-ray diffraction analysis result shown in each embodiment are disclosed. The reference 2 also, in the embodiment 1 is Cr2 O3 And ZnCr2 O4 Making sure that the nanocomposite is then subjected to protect the electric pattern of cream, likewise in the embodiment 2 Cr2 O3 And ZnCr2 O4 Making sure that the capable of mixing is in a predetermined ratio. In addition, the ZnCr comparison example 32 O4 As signal coinciding with the diffraction pattern characterized in that it has, comparison example 1 example 2 compared each ZnO, Cr2 O3 Diffraction patterns coinciding with the as signal peptides. Similarly, such as in the embodiment 3, ZnCr synthesized2 O4 Additional Cr2 O3 Increase mixing adding Cr to the solid-state2 O3 Verify there were. The result of the diffraction pattern, a metal salt of a hydrophobic Cr mixed conducting ZnCr displacing the ZnO2 O4 Making sure that the complex is formed and to selectively, the, in the case that metal salt in an amount sufficient to Cr Cr2 O3 /ZnCr2 O4 Nanocomposite molecules can be formed. Experiment example 3. The present invention according to gas sensitive material grain structure for secondary Figure 3 synthesized in the embodiment 1 to (Cr2 O3 /ZnCr2 O4 ) And in the embodiment 2 (Cr2 O3 /ZnCr2 O4 Commercial fine solid mixture), in the embodiment 3 (Cr2 O3 /ZnCr2 O4 Commercial fine/nanocomposite solid mixture), example 1 (ZnO) comparison, comparison example 2 (Cr2 O3 ), Comparison example 3 (ZnCr2 O4 ) SEM photograph indicating secondary grain structure are disclosed. The reference also 3, in the case of comparison example 1 hydrophobic ZnO can verify well maintained, this spray pyrolysis when the synthesis is present in solution in the kinase domain with five [su sucrose-injected through an injector sprayer packed with five [su sucrose in metal salt particles rapidly decomposed when electric furnace at high temperatures while maintaining the upper hollow structure to aid's oldest. Comparison example 1 in the embodiment 1 in the case of example 3 compared galvanically substituted made, hollow shape state without the oxide particles present in substituted collapse verify queue. In particular, in the case of Cr in the embodiment 12 O3 Secondary particles ZnCr2 O4 Secondary particles mixed nanocomposite that do has been confirmed. Thus, according to the present invention, synthesized in 4 hours the hot 1100 °C galvanic substituted deceptive ZnCr what had previously been possible solid mixing method2 O4 Even low temperature in a short time can be synthesized disclosed. Experiment example 4. For the present invention according to gas sensitive material TEM Image Also 4a to 4c are each in the embodiment 1, comparison example 1, example 3 comparison of TEM shown photographs are disclosed. The 4a also refers, in the embodiment 1 and the Image of the element analysis Cr Zn can be evenly distributed confirm, through Cr lattice Image analysis2 O3 And ZnCr2 O4 The mixed composite can be know. In addition, the hollow structure through a photograph of comparison example 1 ZnO maintain well confirm (also 4b) have, in the case of comparison example 3 ZnCr2 O4 There can be only molecules (4c also). Experiment example 5. Gas sensitive material of the present invention according to 5 Ppm Concentration of toluene, xylene and ethanol dynamic gas sensitive 5A to 5f 275 °C operating temperature in each also in the embodiment 1, in the embodiment 2, in the embodiment 3, comparison example 1, example 2 and comparison example 3 comparison of 5 ppm concentration of ethanol, toluene, xylene dynamic gas sensitive indicating graph are disclosed. Comparison example 1 is combined into a hollow structure against said gas n a-type gas behavior can be confirmed, a comparison example 1 [...] all the gas sensors p-a type number can be widened gas molecules. Experiment example 6. The present invention according to gas sensor By each operating temperature Toluene, xylene and ethanol sensitivity for gas Figure 6 shows a comparison in the embodiment example according to an angular offset of each of operation gas sensor prepared by the number from temperature ethanol, toluene, xylene for indicating gas feeling are disclosed. Comparison example 1 ZnO combined into a hollow structure by making sure that the gas sensitivity increases operating temperature increases and to selectively, in particular 350 °C to 5 ppm in ethanol gas 65. 4 Identifying sensitive X-queue. On the other hand, in the case of a galvanic metathesis number through high pressure liquid coolant in the embodiment 1, 275 °C in xylene, toluene, ethanol 5 ppm respect to the track 70. 7, 18. 9 And 2. 6 Can confirm the sensitivity of an X-value, this methylbenzene for big in that it exhibits high sensitivity. In particular, ethanol gas contrast xylene gas selectivity (SXylene /SEthanol ) Is 27. 2 Where the pressure gradient when the branch, the detection of the gas detecting sensor selective methylbenzene blade seal fully using possible are identified. On the other hand, in the embodiment 2, in the case of comparison example 2 and comparison example 3 both relatively low gas sensitivity value representing 10 hereinafter, methylbenzene detection with low selectivity in addition 3 hereinafter as signal peptides. In the embodiment 3 in the embodiment 1 in the embodiment 2 in the case of order sensitivity and low piece but compared, xylene sufficient selectivity for seal applications may be utilized number is judged to be other. While, in the case of comparison example 2 and comparison example 3 gas selectivity disappeared. 78 Therefrom. 2 At. % - 90. 0 At. % Cr Cr composition range regardless of synthesized within method2 O3 /ZnCr2 O4 Is xylene may have highly selective with respect to the known point can be, in particular sensitivity, selectivity can react more to increase galvanic substituted method can be efficacious is know. Experiment example 7. Gas sensor of the present invention in the embodiment 1 according to an operating temperature of 275 °C in ethanol, xylene, toluene, benzene, HCHO, CO gas sensitive characteristics for Gas sensor operating temperature of 275 °C also 7 in the embodiment 1 in ethanol, xylene, toluene, benzene, HCHO, CO gas sensitive for a mistletoe. The result of measuring the ethanol contrast preparation method of as well as in the embodiment 1, other indoor environment very good selectivity were making sure that even gas. This galvanic substituted United Cr via reaction2 O3 /ZnCr2 O4 Nanocomposite (ICP analysis as a result, / {[Cr] +}=81. 9 At. %) Methyl benzene detection is made of glass compositions can be revealing the high selectivity determines, galvanic substituted reaction Cr2 O3 And ZnCr2 O4 Of xylene, toluene for maximizing oxidation catalysis might be about identifying the method are disclosed. In addition, in the embodiment 1 and comparison example 3 compares a result of example 2 gas sensitive result when seen, Cr2 O3 Or ZnCr2 O4 Single phase high xylene selectivity and sensitivity cannot be obtained it may be confirmed that the composition of said composite second step again. Parts, comparison with the synthesized Cr to the solid-state synthesis in the embodiment 22 O3 /ZnCr2 O4 Methyl benzene synthesized through galvanic metathesis in the embodiment 1 as compared to the more advantageous detection can be confirmed. This galvanic substitution reaction Cr2 O3 /ZnCr2 O4 When synthesizing composite fine particles, fine particles of a substituted reaction homogeneous within the mixing screw, small particles of single phase ZnCr at a low temperature2 O4 Fine powder are combined and sensitive material is uniformly formed in the entire p-a p heterojunction electrically by sensitization sensitivity and selectivity as a result of n-type clad methylbenzene sensitive increase determined substrate. In the embodiment 3 can be the same content on a metal thin film, this ZnCr2 O4 The displayed less fine powder can be more uniformly formed based on indicating that the heterojunction p a-p are disclosed. Experiment example 8. The present inventionaccording to Cr2O3/ZnCr2O4The compound Cr Composition A voice synthesizing method such as for Figure 8 in the embodiment 1, a different composition of Cr added (ICP analysis as a result, / {[Cr] +}=78. 2 At. %) Cr United2 O3 /ZnCr2 O4 The compound X a-ray diffraction analysis result are disclosed. 8 Also through 78. 2 At. When compositions corresponding to the added amount of Cr Cr %2 O3 Diffraction difference of molecules can be identified, Cr2 O3 /ZnCr2 O4 In Cr nanocomposite composition 78. 2 At. % Or more as corresponding to, Cr2 O3 Catalyst effect can be cylindrical. The, Cr therefrom2 O3 /ZnCr2 O4 Determining Cr can be higher than a lower limit of the nanocomposite composition. Experiment example 9. Of the present invention In the embodiment 1 Xylene gas sensitive characteristics according to changes in concentration for gas sensor Figure 9 shows a xylene of livestock products represented as in the embodiment 1 according to changes in gas to gas sensitive characteristics also are disclosed. 1 275 °C 50, 100, 250, 500 ppb and 1 ppm concentration of ethanol gas operating temperature in each other. 7, 2. 0, 3. 0, 22. 2, 70. 7 Exhibits a high level of ethanol sensitivity can be confirmed. This is an excellent sensitivity of 250 ppb concentration levels of xylene in the embodiment 1 may also be measured by having gas sensor is shown and as a result, the purpose of the invention may be effectively adapted within 10 ppm in the detection of the indoor methylbenzene is shown result are disclosed. On the other hand, in the embodiment 1 according to each concentration of xylene selectivity study results compared with existing ethanol contrast sensitivity and xylene also shown to each 10 and 11 also. The reference also 11 10 and also, on the basis of the present invention is lower than the level of concentration of xylene existing been studies for high sensitivity and high selectivity can be sure that the cells. In addition, generally high methylbenzene sensitivity that are known to SnO2 , CO3 O4 Even if such as compared with the low concentration of xylene can be detected effectively has been confirmed. In addition through existing ZnCr or stability of irradiated reference document2 O4 A gas sensor and comparing the present invention when seen, existing research method are ethanol, Cl2 It became grudge number representing only gas and locked sensitivity, selectivity also high level view handful as cells. However, the present invention according to Cr prepared by the number deceptive galvanic substituted2 O3 /ZnCr2 O4 The nanocomposite is methylbenzene for standby shown sensitivity and selectivity. Thus, according to the present invention, high sensitivity, high linearity [...] number [thayk sincerity oxide semiconductor type methylbenzene gas sensor can be knowing the fact. Experiment example 10. Of the present invention In the embodiment 1 Humidity stability for gas sensor Figure 12 in the embodiment 1 to (Cr2 O3 /ZnCr2 O4 ([Cr] + /=81. 9 At %)) with respect to the drying atmosphere is not the relative humidity (Relative humidity) 20%, 50%, 80% in xylene for gas sensitivity measurement results (gas sensor temperature: 275 °C) graph 1 ppm are disclosed. The present invention according to in the embodiment 1 as well as the sensor of the drying atmosphere, humidity atmosphere, i.e. measuring the relative humidity of the atmosphere is increased (R. H. 20%, 50%, 80%) Sensitivity even when not model, as well as good humidity atmosphere present application into a gas sensor which uses zeolite can show, this superior results that is difficult to be achieved with existing oxide semiconductor type gas sensor are disclosed. This humidity atmosphere for gas sensitivity in xylene even shape, facial the sources can be used is shown by excellent gas sensor are disclosed. Experiment example 11. The present invention according to methylbenzene for detecting Gas sensitive material Complex CrComposition In the embodiment 3 according to the heterogeneous metal oxide through said in the embodiment 1 to galvanic substituted method since substituting complex forming method, the amount of the substitution amount of metallic salts added metallic salts can control signal, the control signal synthesized complex addition of ICP analysis results can amount very greatly in the kinase domain. Method of synthesizing ICP composition assay results 81 through galvanic substituted in the embodiment 1. 9 Atomic % (Cr Cr the additive2 O3 /ZnCr2 O4 Composite) pulse, a method of mixing a composition assay results 77 ICP galvanic substituted in the embodiment 3. 9 Atomic % (Cr ZnCr not added2 O4 Single phase composites) been. Said in the embodiment 4 of the present invention inventor are such as, for fabricating biomedical 68 mixing result. 0 Atomic % of added Cr Cr2 O3 /ZnCr2 O4 Composite synthetic cream, spray droplets is passed into the second heat decomposition buddhist priest's robe is converted overlay and an ion oxide since less variation in the composition onto in ([Cr] + /=68% Cr even2 O3 And ZnCr2 O4 Mixing different formed. In addition, United through to Figure 13 for fabricating biomedical 68. 0 Atomic % of added Cr Cr2 O3 /ZnCr2 O4 Composite sensor 275 °C properties (drying atmosphere) as gas 5 ppm, said powder 5 ppm of toluene, xylene, ethanol measured S a gas gas sensor propertiesToluene =8. 1, SXylene =18. 3, SEthonal =2. 7 Excellent methylbenzene sensitivity and selectivity (S=gas sensitivity) can be identifying 68. 0 Atomic % of Cr composition can be used as well as good methylbenzene into a gas sensor can be cylindrical. The present invention relates to a gas response material for detecting methyl benzene, a manufacturing method thereof, and a gas sensor containing the gas response material. More specifically, the gas response material for detecting methyl benzene includes a nanoscale composite of Cr_2O_3 and ZnCr_2O_4. An atomic content ratio of Cr of the nanoscale composite of Cr_2O_3 and ZnCr_2O_4 ranges 67.0-90.0 atom% on the basis of a total of Cr and Zn atomic contents. According to the present invention, provided are, a gas response material having high selectivity to methyl benzene, compared with other gas, and having high detection sensitivity to methyl benzene, and a manufacturing method of a gas response material for easily controlling a composition of the gas response material, and for rapid synthesis at low temperature. COPYRIGHT KIPO 2018 Cr2 O3 And ZnCr2 O4 As sensitive material including a nanocomposite of methylbenzene for detecting gas, said Cr2 O3 And ZnCr2 O4 During Cr Cr atom content and Zn atom content of atom content ratio of nanocomposite based on the sum of 67. 0 To 90 atomic %. 0 Atomic % for detecting gas sensitive material characterized in benzene methylation. A) Zn salts and sugar solution bath including the step number; b) said a) with respect to the spray pyrolysis reaction solution prepared by the number by performing operation from the ZnO powder hydrophobic shell is step number tank; and c) said ZnO powder mixed with salt metathesis Cr Cr by performing after galvanic2 O3 And ZnCr2 O4 The step number bath of a nanocomposite; of a manufacturing method for detecting gas sensitive material including methyl benzene. According to Claim 2, said a) step and said Zn salt is ZnO, said is a sucrose, glucose and mixtures thereof selected from the group consisting of manufacturing method characterized methylbenzene for detecting gas sensitive material. According to Claim 2, said a) in nitric acid (HNO3 ) Characterized by further adding manufacturing method for detecting gas sensitive substance of the UCC including methyl benzene. According to Claim 2, said b) step spray pyrolysis reaction is heated to 1000 °C 700 °C hole into said a) step from 20 L/min to 5 L/min which is perform by injector speed into a solution of methyl benzene of manufacturing method characterized for detecting gas sensitive material. According to Claim 2, said c) step said galvanic substituted reaction is, i) xylene said ZnO powder after dissolving, heating temperature of 80 °C to 150 °C; ii) said i) step is for adding malonic oleyl amine and agitating the heated solution; and iii) said ii) stirring solution step Cr salt mixed with galvanic substituted reaction including performing characterized benzene methylation of manufacturing method for detecting gas sensitive material. According to Claim 2, said Cr salt CrCl2 Characterized in benzene methylation of manufacturing method for detecting gas sensitive material. According to Claim 2, said c) Cr prepared by the number after2 O3 And ZnCr2 O4 Then cleaning and drying of a nanocomposite, 400 °C to 600 °C in 0. 2 Hr to 16 time characterized in further including steps of manufacturing method for detecting methylation benzene gas sensitive material. A) Zn salt powder and Cr salt powder by performing the step of preparing a mixture powder after ball - milling number bath; and b) said mixture powder 1100 °C to 1300 °C by calcination step number 4 hr to 6 hours in fine solid mixture tank; of a manufacturing method for detecting gas sensitive material including methyl benzene. According to Claim 9, ZnO and said Zn salt, said Cr Cr salt2 O3 Characterized in benzene methylation of manufacturing method for detecting gas sensitive material. A) Zn salts, including salts and sugar Cr step number bath solution; and b) said number to spray pyrolysis to yield Cr solutions prepared by the2 O3 And ZnCr2 O4 The step number bath of a nanocomposite; of a manufacturing method for detecting gas sensitive material including methyl benzene. According to Claim 11, said a) step and said Zn salt is ZnO, said Cr salt CrCl2 And, said is a sucrose, glucose and mixtures thereof selected from the group consisting of manufacturing method characterized methylbenzene for detecting gas sensitive material. According to Claim 11, said a) in nitric acid (HNO3 ) Characterized by further adding manufacturing method for detecting gas sensitive substance of the UCC including methyl benzene. According to Claim 11, said b) step spray pyrolysis reaction is heated to 1000 °C 700 °C hole into said a) step from 20 L/min to 5 L/min which is perform by injector speed into a solution of methyl benzene of manufacturing method characterized for detecting gas sensitive material. According to the gas sensor for determining methylbenzene including gas response layer number 1 anti gas sensitive material. A) according to the step number a paste by mixing deionized water with gas sensitive material number 1 anti tank; b) said a) step during a number prepared by the paste on the substrate; and c) said substrate drying and thermal response layer step number bath gas inlet; a gas sensor for determining of manufacturing method including methyl benzene. According to Claim 16, Au electrode and said substrate is patterned alumina substrate, said coating process is carried out by drop - coating (drop-a coating) method characterized methylbenzene gas sensor for determining of manufacturing method. According to Claim 16, said drying step is carried out in time 70 °C to 90 °C 1 hr to 2, 0 in said heat treatment step 400 °C to 600 °C. 5 Hr to 24 carried out time of gas sensor for determining methylbenzene characterized manufacturing method.
