RECOVERY OF ELECTRICAL PROPERTIES AND OXIDATION STABILITY IMPROVEMENT METHOD FOR TWO-DIMENSIONAL MATERIALS

. The present invention will be described with reference to the accompanying drawings; however, the present invention is not limited to the embodiments described herein; parts irrelevant to the description are omitted to clearly describe the present invention, and like parts throughout the specification, denote like parts .

When it is assumed that the, and " parts are connected (, and, and, and)" are connected to each other, is a connection ": " and, and " is the same as ". FIGS. The method may further include the step of " coupling " parts by interposing another member between.

The terms used in the present specification are merely used to describe specific embodiments, and . and the terms, ", ", etc, are used to describe specific embodiments " and are not intended to limit the present invention, and the terms are used in, the context " numeral, steps, and, respectively. It should be understood that the presence or addition of, or more other features or the number, steps, or, components, or a combination thereof does not exclude the possibility in advance.

, Will be described in detail with reference to the accompanying drawings.

1 Is a graph showing an 2 electrical property recovery and oxidation stability improvement method of- D 2 materials according to an embodiment 2 of the present invention, and FIG. is a graph showing the electrical, property 3 recovery and oxidation stability improving 2 method of a three-dimensional material according to an embodiment of the present invention. FIGS. and, are graphs 4 illustrating electrical 2 properties recovery and oxidation stability improvement methods according to an embodiment of the present, 5 invention; is a 2 graph illustrating an electrical characteristic recovery and oxidation stability improvement method of a, three-dimensional 6 material according to 2 an example embodiment of the present invention; FIGS. © KIPO & WIPO & WIPO & WO2. FIG. shows a surface resistivity ratio according to 7, an embodiment of the present invention with reference. 2 is a graph showing a surface resistivity ratio according, 8 2 to an embodiment of the present invention; and FIGS. sub, is a graph illustrating an oxidation stability improvement method according to an example embodiment of the present invention; and the, present invention. 9 is a graph illustrating an oxidation 2 stability, improvement method 10 according to an embodiment of the present invention 2; FIGS.] .sub .5 is a graph showing a surface resistance, ratio according to an embodiment of the present invention; FIGS.sup. 11. sup. 2 - sup. sup. sup. sup. sup.sup.

1 Through 11, the method of improving the electrical properties of,dimensional material and improving oxidation stability 2 according to the present invention comprises preparing a beer solution composed of a (a)-two-dimensional transition metal carbide and a transition metal carbonitride, and forming the prepared beer solution into a film-like composite material, (b) .

(c) Is a, (d)-sectional view of a method of manufacturing a beer film according to an embodiment of the present invention, wherein the step, (e) includes the step of storing the Maccin film at room temperature (f) and then injecting hydrogen, gas into a vacuum equipment where the Maccin film is disposed.

, 2 Is a flowchart illustrating a method for recovering electrical properties of (S110)-dimensional material and improving oxidation stability of a three-dimensional material according to an embodiment of the present invention, comprising the steps.

More specifically, beer solution 2-dimensional. Since a layered structure of, atoms is laminated to form a multilayer structure in . a new 2-dimensional multilayer structure has a light weight, a low density, a, electrical conductivity, and can easily separate from, and can be used as a radio wave absorber in various fields.

(S120) Is a cross-sectional view of the transition metal carbonitride of the two-dimensional structure and the transition metal carbonitride as a film- like composite material.

More specifically, The above-prepared beer solution is manufactured in a film form through a spin coating (Spin coating), drop cast (Drop cast), pressure filtration (Vacuum filtration) method, and a malformed film is manufactured by various methods such as spin coating, drop cast and pressure filtration method, described above, thereby effectively producing the beer film according to, manufacturing conditions and conditions.

In addition, step, includes storing (S130) maladily films at room temperature.

In detail, the beer film may be stored at room temperature when not in use, and the beer film is exposed to air and moisture to cause oxidation reactions to decrease surface resistance and electrical characteristics.

In addition, step (S140) includes placing the oxidized wort film in vacuum equipment through a three-room temperature storage.

More specifically, ] In order to restore, the interior of the vacuum equipment, is placed in a vacuum state in a vacuum state.

In addition, step (S150) is performed to inject hydrogen gas into a vacuum apparatus in which a primary film is disposed.

In detail, the maladily film is exposed to hydrogen gas to reduce the oxidized wort film, so that, oxidized maladifilms can be restored to the state before oxidation of the electrical properties and sheet resistance through the reduction process.

In other words, the hydrogen gas is stored at room temperature and hydrogen gas is combined with oxygen in the oxidized wort film, to perform a reduction process of the pulsing film.

, Hydrogen gas can reduce the oxidation degree of the maldistribution film and restore electrical properties.

Further, Step, includes annealing the Macca film to recover electrical characteristics of the Mca film exposed to (S160)-injected hydrogen gas.

In detail, the malfting film, is heated to a high temperature in a state in which, vacuum equipment is exposed to hydrogen gas, thereby recovering the intrinsic electrical characteristics through the reduction process in an oxidized state through,room temperature compensation .

The, beer film is then annealed at step (S160) for, predetermined temperature and time.

In particular, the predetermined temperature and time may be annealed at a temperature between, and, for a time between, 800 °C and 1000 °C, but is not particularly limited as long as the maldistribution film can recover the intrinsic electrical properties. 20 . 40.

At temperatures less than 800 °C or less than 20 minute the electrical properties cannot be recovered by, original levels and annealed for more than, 1000 °C temperatures or for 40 minutes, resulting in an increased working time and reduced electrical properties of.

In step, of annealing (S160) pulcino film, a sheet resistance value of the Mca film annealed at a predetermined temperature and for a predetermined period of time is.

[, ] In detail, ] The Maccin film is stored at room temperature to reduce electrical characteristics by being oxidized due to oxygen and moisture, thereby reducing the electrical characteristics thereof, and thus, 40 a ratio of the surface resistance value of the Macca film formed through, (f), steps 0.9 is 800 °C, (b) and 1000 °C, thereby increasing the surface resistance value of the McMubicin film at. 1.2 a temperature of 20.

In addition, various functional groups such as -O,OH,F and the ratio of fluorine bonded to the surface through, oxidation are reduced.

In addition, the beer solution was Ti.₂ C, Ti₃ C₂ . V₂ C, Nb₂ C, (Ti_0.5 , Nb_0.5 )₂ CT_x , Ti₃ CN, (V_0.5 , Cr_0.5 )₃ C₂ , Ta₄ C₃ And Nb₄ C₃ . Can be composed of any one of the following.

In addition, the beer solution was M._n +₁ X_n And, wherein M is hydrogen._n +₁ X_n Wherein M is a transition metal (early transition metal) and, X includes at least one of carbon and nitrogen and, n may be an integer 1 and 4.

, Is a cross-sectional view of a body part, according to an embodiment of the present invention, wherein the hydrogen gas is supplied from the gas supply part, to a lower end of the body part so that the hydrogen gas is exposed to the hydrogen gas.

The body part, is formed in a hollow cylindrical shape.

The body part, may be formed in a cylindrical shape, and the body part may be formed hollow so as to be disposed inside the body part.

The body part, is formed with a quartz tube.

The quartz tube, is arranged such that the body portion is not deformed even when the body portion is heated at a high temperature.

, Is installed at a lower end of body part to supply hydrogen gas.

, Is a cross-sectional view of a hydrogen gas supply unit of.

,] The malted film is contacted with a hydrogen gas supplied through the gas supply unit, to perform a reduction process.

, Parts of body part are equipped with a gas discharge. part.

, Is a cross sectional view of the body unit, according to an embodiment of the present invention.

, The hydrogen gas from, passes through the pulsing film, and is discharged to the gas discharge part.

, Is a diagram illustrating a method of manufacturing a Macca film according to the present invention, wherein . is an annealing portion for heating, the body portion at a high temperature so as to, heat the body portion at a higher temperature so as to anneal the body portion.

In addition, 2-D . Is a flowchart illustrating a method of improving the electrical property recovery and oxidation stability of a material.

To FIG. 3, the method for recovering electrical properties of 2-D materials according to the present invention was performed 100 °C - 900 °C-minute annealing at a temperature 30, and the surface resistivity ratio, of the beer film before the oxidation is (R.₀ After oxidation of) and after oxidation, the sheet resistance ratio (Rs) was increased to 3.19 after oxidation and was reduced to 0.93 through the annealing process.

Hence, oxidized maladifilms are more effective at, high temperatures because the sheet resistance ratio decreases as the annealing process of high temperature is performed.

To FIG. 4, the method of recovering electrical properties of 2-D materials according to the present invention has been performed with 500 °C minutes or 30 months at a temperature 60, and, ˜, 500 °C annealing at a temperature 60 for 500 °C minutes is more effectively performed. 30.

, As the, annealing time increases, the surface resistivity becomes high, resulting in a reduction in efficiency.

To FIG. 5, the method for recovering electrical properties of 2-D material according to the present invention has a large difference in recovery rate according to oxidation degree, rather than, temperature in the graph showing the recovery rate of sheet resistance according to oxidation.

In other words, and 500 °C at a temperature of 900 °C, the higher the degree of oxidation during the annealing process 30, the higher the recovery rate of the sheet resistance due to annealing and the lower the recovery rate of the sheet resistance due to annealing at, low oxidation.

To FIG. 6, the method of recovering electrical properties of 2-D materials according to the present invention has performed 500 °C-minute annealing at a temperature of 900 °C and 30, and a recovery rate according to, oxidation is different.

For example, when annealing is performed under the same conditions in the case of a high oxidation-degree Mcat film and a low-degree of oxidation, the surface resistivity ratio of the high oxidation pulsation film becomes higher than the sheet resistance ratio.

To FIG. 7, the method for recovering electrical properties of 2-D materials according to the present invention was performed at a temperature of 500 °C for 30 minutes or 900 °C times to 10 minutes, but, times the initial oxidized wort film had a reduced sheet resistance ratio.

As a consequence, referring to FIG. 8, in which the experimental data is combined, times of annealing time and repeated annealing can reduce electrical characteristics and increase, sheet resistance,and, 800 °C times to 1000 °C times for a time between 20 ˜3 hours to reduce 40, sheet resistance ratio. 1.

To FIG. 9, at, temperature of the beer film, a number of functional groups such as -O,OH,F may be bonded to a surface of the beer film, 2 a surface of (-F)-dimensional material may be bonded to a surface of the beer film, thereby reducing the ratio of fluorine, to the surface.

In the case of fluorination, the fluorine bonded to (LiF, HF) beer surface has, 5eV weight work function with a functional group bonded to one surface during acid treatment for exfoliation of the beer. When used as an electrode such as an electrode . injection of electrons may be restricted.

, Is a flowchart illustrating a method of manufacturing (-O,OH,F pulsasine film according to an embodiment of the present invention, wherein at least one of the functional groups), and, is formed of a, pulsasine film.

As shown in FIG. 10, 70 hydrogen annealing was performed at a temperature of, and oxidation of the beer film was performed in (times a graph comparing the oxidation degree of the non-applied Macca film) to an environment in which oxidation is promoted, although oxidation hardly occurs even when exposed to an environment in which oxidation is accelerated, but 900 °C hydrogen anneal was not applied. 30. sup.) wand. (.

In other words, hydrogen annealing is performed to prevent the oxidation of oxygen and moisture, 60, which prevents the oxidation of oxygen and moisture, which prevents the oxidation of oxygen and moisture, 60 which means that oxygen and moisture are prevented from permeating into 1126, times, which means that oxidation has been rapidly progressed.

To FIG. 11, hydrogen annealing was applied and non-applied Maccin was enlarged to a scanning electron microscope (SEM: Scanning Electron Microscope), and the degree of oxidation was compared.

Although the Macca film (upper) to which hydrogen annealing is applied has a solid network formed on the surface thereof, the Mcat film, bottom (applied with) hydrogen annealing is porous due to surface oxidation . and thus, oxidation is prevented by oxidation of oxygen, through, hydrogen annealing.

12 Is 2 of titanium dioxide by high temperature annealing of Counts/s-D materials according to one embodiment of the present invention and Binding Energy of titanium dioxide by high temperature annealing of the method. Graph showing the relationship.

As shown in 6, when annealing is performed in the case of the oxidized beer film, the peak ratio of titanium dioxide is restored by high-temperature annealing, before the, heat treatment process and 12 (b) after the heat treatment process, and, is restored by the reduction of the titanium dioxide. (a).

In other words, titanium dioxide is generated through the oxidation process of the Macca film, and the resultant titanium dioxide is reduced by high temperature annealing with hydrogen to restore.

13 Is a graph illustrating a relationship between temperature and time and sheet resistance through annealing of oxidized maldistribution films of a 2-D material according to an embodiment of the present invention.

To FIG. 13, when the,minute annealing is performed at 70 °C nd humidity 100%, when annealing is performed in (nd /), 300 °C and 30 minute annealing is performed, the sheet resistance ratio is increased to increase the sheet resistance ratio in (nd color), 500 °C) when heat treatment is performed . 30 or (×), 900 °C, ˜ 30-minute annealing when annealing is carried out at a, temperature of (˜0.5.5.5.5.5.5.5.5.5.5.5.

14 Is a graph showing a relationship between electrical property recovery of 2-dimensional material and oxidation stability improving method according to an embodiment of the present invention.

FIG. 14. [, ] In the case of a beer film having a contact angle with moisture (a, b) and (c, d), a contact angle with water is lowered to 100% and a contact angle with moisture is measured at 1 times when (b, d) 10 minutes are passed, and the contact, 900 °C angle with the water droplets is maintained, 1 after 44 minutes are passed 42 into the beer. film.

By performing the annealing together with, hydrogen so as, a strong network is formed on the surface of the Macca film, and pores are formed in the porous structure before annealing, thereby preventing infiltration of, moisture and oxygen therein.

15 Is a graph showing a difference between electrical properties of 2-D materials and oxidation stability of a three-dimensional material in accordance with an embodiment of the present invention.

To FIG. 15, when the film, is oxidized in (a), hydrogen atmosphere and (b) hydrogen atmosphere, (c) is decreased, and the electrical characteristics and heater characteristics are restored in the case of the Maccino Film (b) where the film- is oxidized to 900 °C hydrogen atmosphere, and the annealing is again performed. (c).

, Electrical characteristics and heater characteristics can be restored by performing the annealing in a hydrogen atmosphere of the maloxidized malsine film.

16 Is a graph showing heater characteristics of the 2-D material in accordance with an embodiment of the present invention.

To FIG. 16, in the case where the malfting film oxidized, is oxidized, the heater characteristics are changed according to the voltages (10V, 15V, 20V and 25V).

When the,oxidized malsine film is annealed at 900 °C in a hydrogen atmosphere, the heater characteristics increase again.

17 Is a graph illustrating a relationship between an electrical property recovery of 2-dimensional material and oxidation stability of a three-dimensional material in accordance with an embodiment of the present invention.

To FIG. 17, a surface resistivity ratio, of the unoxidized maladia film is 65.3ohm/sq and the surface resistivity is increased to 95.5ohm/sq.

When the,oxidized malsine film is annealed in a hydrogen atmosphere, the sheet resistance ratio is reduced to 68.5ohm/sq and the, heater characteristic is increased.

Also, when the,oxidized malsine film is oxidized to a high value to increase the sheet resistance ratio to 990.1ohm/sq, oxidized malsine film is annealed in a hydrogen atmosphere to reduce the surface resistivity to a certain portion and the heater characteristics may also be restored .

, Oxidized malsine film can recover, sheet resistance ratio and heater characteristics by performing annealing in a hydrogen atmosphere.

18 Is a graph showing the relationship between the electrical properties of 2-dimensional materials according to an embodiment of the present invention and heater characteristics.

To FIG. 18, an,layer unoxidized beer film and 900 °C are not oxidized. . Is a flowchart illustrating a method of performing annealing in a hydrogen atmosphere according to an embodiment of the present invention.

19 Is a graph illustrating a relationship between sheet resistance of 2-D material and surface resistance and heater characteristics of a Mca film in which annealing is not performed, according to an embodiment of the present invention.

As shown in FIG. 19, the Mcneven film, where (a, b) annealing was not performed (c, d) was exposed to the environment of 70 °C and humidity 100% for 24 times, and the Macca Film (b, d) having not undergone, annealing was significantly reduced in sheet resistance (b) and (d) was not subjected to annealing, but the Macca Film (d), (b) having undergone annealing, was not significantly reduced in heater characteristics.

When the color change according to, temperature is changed, the color change film, having no (a, b) annealing is exposed to the environment of 70 °C and humidity 100% for 24 times, but the color 100% was changed according to a decrease in temperature, but the color change performed, during 24 (c, d) annealing is not large. 70 °C.

, Is a flowchart illustrating a process of performing annealing in a hydrogen atmosphere, at a hydrogen atmosphere to maintain, sheet resistance and heater characteristics in a hydrogen atmosphere, to restore, sheet resistance and heater characteristics to a certain level.

20 Is a graph illustrating a surface resistance of a beer film according to a hydrogen atmosphere of a method of improving electrical properties of 2-D materials and improving oxidation stability.

To FIG. 20, when annealing is performed in a hydrogen atmosphere or a hydrogen-free condition, the Maccin film is oxidized in, hydrogen atmosphere when annealing is performed in a hydrogen atmosphere or hydrogen-free condition, so that the surface resistance recovery effect becomes more significant when the . pulse is oxidized.

When annealing is performed under a hydrogen atmosphere or a hydrogen-free condition, annealing may be performed under conditions where, hydrogen is absent; however, annealing may be performed in, hydrogen atmosphere to maintain lower sheet resistance.

, Annealing is performed to form a predetermined oxidation resistance, and annealing may be performed in a hydrogen atmosphere to obtain a higher oxidation resistance.

, It will be understood by those skilled in the art, that the above-described embodiments are exemplary and are not to be construed as limiting the technical spirit or essential features of the present invention . and thus the embodiments described above may be implemented in a distributed manner . The method according to the present invention may be implemented in a distributed manner.

It should be understood that all modifications or modified forms derived from the meaning and scope of, claims and their equivalents are included in the scope of the present invention.