Selective purification of mono-terpenes for removal of oxygen containing species

The present invention is a method for preparing mono terpenes as porogens for porous silicon oxide dielectric film depositions in electronic devices by separating oxygen-containing impurity compounds from mono terpenes, comprising; providing a neat mono terpene containing oxygen-containing impurity compounds; providing an activated silica gel preparative chromatographic column; contacting the neat mono terpene containing oxygen-containing impurity compounds with the column; retaining the oxygen-containing impurity compounds on the column; and recovering neat mono terpenes depleted of oxygen-containing impurity compounds from the column.