Group management apparatus, substrate processing system and method of managing files of substrate processing apparatus

26-07-2016 дата публикации

Номер:

US09400794B2

Автор: Hiroyuki Iwakura, Kazuhide Asai, Osamu Ueda

Принадлежит: HITACHI KOKUSAI ELECTRIC INC

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

G G0 G05 G05B G05B1 G05B19 G05B19/G05B19/4 G05B19/41 G05B19/418 G05B19/4186 G05B19/41865 G05B2 G05B22 G05B221 G05B2219 G05B2219/G05B2219/3 G05B2219/32 G05B2219/320 G05B2219/3209 G05B2219/32096 G05B2219/4 G05B2219/45 G05B2219/450 G05B2219/4503 G05B2219/45031 G06 G06F G06F1 G06F16 G06F16/G06F16/1 G06F16/13 G06F16/9 G06F16/95 G06F16/951 G06F17 G06F17/G06F17/3 G06F17/30 G06F17/300 G06F17/3009 G06F17/30091 G06F17/308 G06F17/3086 G06F17/30864 H H0 H01 H01L H01L2 H01L21 H01L21/H01L21/0 H01L21/00 H01L21/02 Y Y0 Y02 Y02P Y02P9 Y02P90 Y02P90/Y02P90/0 Y02P90/02 Y02P90/2 Y02P90/20

IPC - классификация

C C3 C30 C30B C30B3 C30B31 C30B31/C30B31/0 C30B31/04 C30B9 C30B9/C30B9/1 C30B9/14 G G0 G05 G05B G05B1 G05B19 G05B19/G05B19/4 G05B19/41

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