Quartz guard ring

01-05-2008 дата публикации

Номер:

US2008099448A1

Автор: LARSON DEAN J, BROWN DANIEL, ULLAL SAURABH J, LARSON DEAN J., ULLAL SAURABH J.

Принадлежит:

Контакты:

Номер заявки: 07-30-7014

Дата заявки: 02-02-2007

An electrode assembly for a plasma reaction chamber used in semiconductor substrate processing. The assembly includes an upper electrode, a backing member attachable to an upper surface of the upper electrode, and an outer ring. The outer ring surrounds an outer surface of the backing member and is located above the upper surface of the upper electrode.

CPC - классификация

H H0 H01 H01J H01J3 H01J37 H01J37/H01J37/3 H01J37/32 H01J37/320 H01J37/3200 H01J37/32009 H01J37/325 H01J37/3255 H01J37/3256 H01J37/32568 H01L H01L2 H01L21 H01L21/H01L21/2 H01L21/20 H01L21/205 H01L21/3 H01L21/30 H01L21/306 H01L21/3065

IPC - классификация

B B2 B23 B23K B23K9 B23K9/B23K9/0 B23K9/00