Master oscillator-power amplifier drive laser with pre-pulse for EUV light source

18-02-2014 дата публикации

Номер:

US8654438B2

Автор: Daniel J. W. Brown, Igor V. Fomenkov, Kai-Chung Hou, Richard L. Sandstrom, William N. Partlo

Принадлежит: Cymer LLC

Контакты:

Номер заявки:

Дата заявки:

CPC - классификация

G G0 G03 G03F G03F7 G03F7/G03F7/7 G03F7/70 G03F7/700 G03F7/7003 G03F7/70033 G03F7/701 G03F7/7017 G03F7/70175 G03F7/709 G03F7/7090 G03F7/70908 G03F7/7093 G03F7/70933 H H0 H01 H01S H01S3 H01S3/H01S3/0 H01S3/00 H01S3/007 H01S3/0078 H01S3/07 H01S3/076 H01S3/1 H01S3/10 H01S3/105 H01S3/1055 H01S3/11 H01S3/117 H01S3/2 H01S3/22 H01S3/223 H01S3/2232 H05 H05G H05G2 H05G2/H05G2/0 H05G2/00 H05G2/008

IPC - классификация

H H0 H01 H01S H01S3 H01S3/H01S3/1 H01S3/10 H01S3/105 H01S3/1055 H01S3/11 H01S3/117 H05 H05G H05G2 H05G2/H05G2/0 H05G2/00 H05G2/008

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