28-03-2013 дата публикации
Номер: US20130078389A1
Принадлежит:
The present invention aims to provide a pattern formation method capable of shortening processing time by accelerating a decomposition reaction of a silane coupling agent. The present invention comprises a step for arranging a silane coupling agent () on a substrate () and having a photocatalyst () present for the silane coupling agent (), and a step for irradiating the silane coupling agent () and the photocatalyst () with light L containing light having absorption wavelengths of the silane coupling agent () and the photocatalyst (). 1. A pattern formation method for forming a desired pattern on surface to be treated of a target , comprising: [{'br': None, '[Chemical Formula 1]'}, {'br': None, 'sup': 1', '2', '1', '2', '3, 'R—R—SiXXX\u2003\u2003(1)'}], 'arranging a silane coupling agent represented by general formula (1){'sup': 1', '2', '1', '1', '1', '2', '3', '1', '2', '3, '(wherein, Rrepresents a photoreactive protecting group that is eliminated by irradiating with light, Rrepresents an organic group that generates a functional group that has lyophilicity-lyophobicity differing from that of Ras a result of elimination of R, Xrepresents an alkoxy group or halogen atom, Xand Xrepresent a substituent selected from a hydrogen atom, alkyl group, alkenyl group, alkoxy group and halogen atom, and X, Xand Xmay be the same or different), on the surface to be treated and having a photocatalyst present for the silane coupling agent on the surface to be treated; and,'}irradiating the silane coupling agent and the photocatalyst with light containing light having absorption wavelengths of the silane coupling agent and the photocatalyst.2. The pattern formation method according to claim 1 , wherein Rin general formula (1) has a fluorine-substituted alkyl group.3. The pattern formation method according to claim 1 , further comprising:{'sup': 2', '1', '1, 'modifying a functional group generated on Rin general formula (1) by eliminating Rin general formula (1) with a substituent ...
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