04-04-2019 дата публикации
Номер: US20190100007A1
Принадлежит:
An amorphous thin metal film can include a combination of metals or metalloids including: 5 at % to 74 at % of a metalloid selected from the group of carbon, silicon, and boron; 5 at % to 74 at % of a first metal; 5 at % to 74 at % of a second metal; and 5 at % to 70 at % of a dopant. The first and second metals can be independently selected from the group of titanium, vanadium, chromium, iron, cobalt, nickel, zirconium, niobium, molybdenum, ruthenium, rhodium, palladium, hafnium, tantalum, tungsten, osmium, iridium, or platinum, wherein the first metal and the second metal can be different metals. The dopant can be selected from the group of oxygen, nitrogen, or combinations thereof. The metalloid, first metal, second metal, and dopant can account for at least 70 at % of the amorphous thin metal film. 1. An amorphous thin metal film , comprising:5 at % to 74 at % of a metalloid, wherein the metalloid is carbon, silicon, or boron;5 at % to 74 at % of a first metal, wherein the first metal is titanium, vanadium, chromium, iron, cobalt, nickel, zirconium, niobium, molybdenum, ruthenium, rhodium, palladium, hafnium, tantalum, tungsten, osmium, iridium, or platinum;5 at % to 74 at % of a second metal, wherein the second metal is titanium, vanadium, chromium, iron, cobalt, nickel, zirconium, niobium, molybdenum, ruthenium, rhodium, palladium, hafnium, tantalum, tungsten, osmium, iridium, or platinum, wherein the second metal is different than the first metal; and16 at % to 70 at % of a dopant of nitrogen, oxygen, or mixture thereof,wherein the metalloid, the first metal, the second metal, and the dopant account for at least 70 at % of the amorphous thin metal film.2. The amorphous thin metal film of claim 1 , wherein the amorphous thin metal film has a thickness ranging from 10 angstroms to 100 microns.3. The amorphous thin metal film of claim 1 , wherein the amorphous thin metal film is devoid of aluminum claim 1 , silver claim 1 , and gold.4. The amorphous thin metal ...
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