23-07-2020 дата публикации
Номер: US20200231610A1
Принадлежит:
A tin compound, a tin precursor compound for forming a tin-containing layer, and a method of forming a thin layer, the tin compound being represented by Formula 1: 2. The tin compound as claimed in claim 1 , wherein:{'sub': 1', '7, 'Rand Rare the same, and'}{'sub': 1', '7, 'Rand Rare hydrogen, methyl, ethyl, n-propyl, isopropyl, n-butyl, s-butyl, t-butyl, or isobutyl.'}3. The tin compound as claimed in claim 1 , wherein:{'sub': 2', '6, 'Rand Rare the same, and'}{'sub': 2', '6, 'Rand Rare hydrogen, methyl, ethyl, n-propyl, isopropyl, n-butyl, s-butyl, t-butyl, or isobutyl.'}4. The tin compound as claimed in claim 1 , wherein:{'sub': 3', '5, 'Rand Rare the same, and'}{'sub': 3', '5, 'Rand Rare hydrogen, methyl, ethyl, n-propyl, isopropyl, n-butyl, s-butyl, t-butyl, or isobutyl.'}5. The tin compound as claimed in claim 1 , wherein:{'sub': 2', '3, 'Rand Rare the same, and'}{'sub': 2', '3, 'Rand Rare hydrogen, methyl, ethyl, n-propyl, isopropyl, n-butyl, s-butyl, t-butyl, or isobutyl.'}6. The tin compound as claimed in claim 1 , wherein:{'sub': 5', '6, 'Rand Rare the same, and'}{'sub': 5', '6, 'Rand Rare hydrogen, methyl, ethyl, n-propyl, isopropyl, n-butyl, s-butyl, t-butyl, and isobutyl.'}7. The tin compound as claimed in claim 1 , wherein:{'sub': 2', '3', '5', '6, 'R, R, R, and Rare the same, and'}{'sub': 2', '3', '5', '6, 'R, R, R, and Rare hydrogen, methyl, ethyl, n-propyl, isopropyl, n-butyl, s-butyl, t-butyl, and isobutyl.'}8. (canceled)10. The tin precursor compound as claimed in claim 9 , wherein:{'sub': 1', '7, 'Rand Rare the same, and'}{'sub': 1', '7, 'Rand Rare hydrogen, methyl, ethyl, n-propyl, isopropyl, n-butyl, s-butyl, t-butyl, or isobutyl.'}11. The tin precursor compound as claimed in claim 9 , wherein:{'sub': 2', '3', '5', '6, 'at least two of R, R, R, and Rare the same, and'}{'sub': 2', '3', '5', '6, 'the at least two of R, R, R, and Rare hydrogen, methyl, ethyl, n-propyl, isopropyl, n-butyl, s-butyl, t-butyl, and isobutyl.'}12. The tin precursor ...
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