10-10-2019 дата публикации
Номер: US20190309422A1
Described herein are the depositions of conductive metallic films on a surface which contains topography. The deposition uses a metallic precursor comprises a neutral (uncharged) metal compound in which the metal atom is in the zerovalent state and stabilized by ligands which are stable as uncharged, volatile species. 1. A method to deposit a conductive metallic film onto a substrate comprising:a. providing the substrate with a surface containing topography; [ the metal is selected from the group consisting of Fe, Co, Ni, Ru, Ir, Rh, Pd, Pt, Cu, Ag, Au, Os, and combinations thereof;', 'the at least one neutral stabilizing ligand is selected from the group consisting of', {'sub': 2', '2', '2', '2', '4', '4', '18', '4', '18', '6', '18', '8', '18', '1', '12', '1', '12', '1', '12', '1', '12', '1', '12', '1', '2', '1', '2', '1', '12, 'carbon monoxide (CO); nitric oxide (NO); dinitrogen (N); acetylene (CH); ethylene (CH); C-Cdiene or C-Ccyclic diene; C-Ctriene; C-Ctetraene; organo isocyanide RNC, wherein R is selected from the group consisting of Cto Clinear or branched hydrocarbyl or halocarbyl radical; organic nitrile RCN wherein R is selected from the group consisting of Cto Chydrocarbyl or halocarbyl radical; organophosphine PR′3 wherein R′ is selected from the group consisting of H, Cl, F, Br, and a Cto Chydrocarbyl or halocarbyl radical; amine NRaRbRc, wherein Ra, Rb and Rc may be connected to each other and each is independently selected from H or a Cto Chydrocarbyl or halocarbyl radical; organic ether R*OR**, wherein R* and R** can be connected to each other and each is selected independently from Cto Chydrocarbyl or halocarbyl radicals; and terminal or internal alkyne with general formula RCCR, where Rand Rcan be independently selected from the group consisting of H, Cto Clinear, branched, cyclic or aromatic halocarbyl or hydrocarbyl radical, silyl or organosilyl radical, stannyl or organostannyl radical, and combinations thereof;'}, 'the neutral (uncharged) ...
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