Компенсационный акселерометр

Изобретение относится к измерительной технике. В компенсационный акселерометр введены с выхода датчика угла на один из входов компаратора последовательно соединенные по информационным входам фазовый детектор, пороговый элемент с зоной неоднозначности, нелинейный элемент с зоной нечувствительности, сумматор, причем один из входов порогового элемента с зоной неоднозначности соединен с одним из выходов фазового детектора, а выход порогового элемента с зоной неоднозначности соединен с одним из входов сумматора, кроме того, один из выходов генератора опорного напряжения соединен с одним из входов фазового детектора и один из входов сумматора соединен с выходом фазового детектора через нелинейный элемент с зоной нечувствительности, кроме того, один из входов порогового элемента с зоной неоднозначности соединен с выходом генератора вспомогательной частоты, кроме того, введен фильтр высоких частот, вход которого соединен с выходом схемы сравнения, а выход соединен с входом триггера и выход реверсивного ...

Способ обеспечения линейности масштабного коэффициента в маятниковых компенсационных акселерометрах с магнитоэлектрическим датчиком момента

Изобретение относится к области измерительной техники. Сущность изобретения заключается в том, что подбирают пары магнитных систем по минимальной разнице в воздействиях на выходные постоянные токи акселерометра-приспособления при двух положениях проверяемых магнитных систем, причем воздействия индуцируются переменным током сигнала в катушках датчика момента, подаваемого от внешнего генератора. Технический результат – обеспечение требуемой линейности масштабного коэффициента маятникового акселерометра компенсационного типа. 1 ил.

Компенсационный акселерометр

Изобретение относится к измерительной технике и предназначено для использования в приборах компенсационного типа в системах стабилизации, навигации, наведения и медицине. Сущность изобретения заключается в том, что в компенсационный акселерометр дополнительно введены местная отрицательная обратная связь с выхода усилителя на один из входов датчика момента через фильтр и последовательно соединенные по информационным входам с выхода усилителя на один из входов компаратора интегратор, два параллельно соединенных пороговых элемента, сумматор, и выход реверсивного двоичного счетчика является цифровым выходом компенсационного акселерометра. Технический результат – расширение полосы пропускания компенсационного акселерометра, повышение точности измерения. 1 ил.

Устройство для измерения ускорений

Изобретение относится к измерительной технике. Устройство для измерения ускорений дополнительно содержит аналоговый и цифровой каналы, причем аналоговый канал реализован с выхода датчика угла на один из входов датчика момента, через последовательно соединенные по информационным входам усилитель, пороговый элемент с зоной неоднозначности, интегратор, фильтр, триггер, в обратную связь которого включен фильтр третьего порядка, а цифровой канал реализован с выхода интегратора на вход датчика момента через последовательно соединенные по информационным входам первый дискретизатор, сумматор, второй дискретизатор, компаратор, асинхронный D-триггер, схему совпадения, реверсивный двоичный счетчик и итоговый регистр, выход которого соединен с входом датчика момента через электронный ключ, и выход итогового регистра является выходом цифрового кода. Технический результат – расширение полосы пропускания и повышение точности работы устройства для измерения ускорений. 1 ил.

Акселерометр компенсационного типа

Изобретение относится к точному приборостроению и может быть использовано преимущественно в прецизионных инерциальных системах управления движением, например, самолетов, ракет, подводных лодок и других объектов. Сущность изобретения заключается в пространственном разделении температурного поля акселерометра на две области, содержащие упругий подвес и аналого-цифровой преобразователь соответственно, в измерении температуры каждой области и в компенсации нулевых сигналов акселерометра по специальному алгоритму. Технический результат - повышение точности акселерометра. 1 з.п. ф-лы, 2 табл., 1 ил.

Акселерометр

Изобретение относится к измерительной технике. Сущность изобретения заключается в том, что в акселерометр дополнительно введены аналоговая отрицательная обратная связь с выхода датчика угла на вход датчика момента через усилитель с насыщением и низкочастотный фильтр, дискретная отрицательная обратная связь с выхода датчика угла на вход компаратора через последовательно соединенные по информационным входам усилитель с насыщением, высокочастотный фильтр, пороговый элемент с зоной неоднозначности, интегратор, кроме того, выход схемы сравнения соединен с входом электронного ключа через широкополосный фильтр и триггер, а один из выходов реверсивного двоичного счетчика соединен с одним из входов порогового элемента с зоной неоднозначности, и выход реверсивного двоичного счетчика является цифровым выходом акселерометра. Технический результат – повышение точности, расширение полосы пропускания акселерометра. 1 ил.

Компенсационный акселерометр

Изобретение относится к измерительной технике. Сущность изобретения заключается в том, что компенсационный акселерометр дополнительно содержит местную отрицательную обратную связь с выхода усилителя, через фильтр высоких частот, на один из входов датчика момента, релейный элемент, шунтируемый звеном запаздывания, с выхода интегратора на вход компаратора, а также триггер с выхода схемы сравнения на вход электронного ключа, выход которого соединен с одним из входов датчика момента, выход реверсивного двоичного счетчика является цифровым выходом компенсационного акселерометра. Технический результат – повышение точности измерения, расширение полосы пропускания. 1 ил.

Brems- und Beschleunigungsmesser

VELOCITY TRANSDUCER

... 1452854 Velocity transducers: moving coil meters SYSTRON-DONNER CORP 22 July 1974 [31 July 1973] 32353/74 Headings G1N and G1U [Also in Division G4] A transducer for measuring angular acceleration comprises two blades 50 Figs. 3 and 4 diametrically supported vertically by pivots 48, 49 adjacent one or more sensing coils 69, in a fluid 42, whereby an angular acceleration about the vertical axis produces displacement of the blades 50 relative to coil 69 and an output signal is obtained from coil 69 which is rectified and fed back to the rotor coil 51 of a motor 52 to restore the blades 50 to their normal position relative to coils 69. The output signal from the acceleration transducer 11 Fig. 6, constituted by the restoring current of motor 52, is integrated at 79 to provide a D.C. velocity signal which is dropped by transistor Q 1 to convert it to a corresponding A.C. in phase with the mains supply. A timer circuit 82 produces a pulse every two seconds which acts through circuit 83 to shortcircuit ...

Low stress die attachment

ACCELEROMETER TRANSDUCER USED FOR SEISMIC RECORDING

Method for operating and testing a sensor assembly (210). The sensor assembly (210) preferably includes accelerometers with axes of sensitivity orthogonal to each other. The method preferably includes determining sensor tilt angle, determining the position of the sensor, and synchronizing the operation of the sensor.

ELECTRONIC DITHER CIRCUIT FOR A MECHANICAL BEARING ASSEMBLY AND METHOD AND ACCELEROMETER G THE SAME

ELECTRONIC DITHER CIRCUIT FOR A MECHANICAL BEARING ASSEMBLY AND METHOD AND ACCELEROMETER G THE SAME

METHOD FOR HARMONISING TWO INERTIAL MEASUREMENT UNITS WITH ONE ANOTHER AND NAVIGATION SYSTEM IMPLEMENTING THIS METHOD

Procédé d'harmonisation d'une première unité de mesure inertielle et d'une deuxième unité de mesure inertielle l'une avec l'autre, comprenant les étapes de : - faire comparer par une unité de commande les vecteurs mesurés par les unités de mesure inertielle pour déterminer un écart de force spécifique et un écart de rotation en prenant en compte les bras de leviers entre ces deux unités de mesure; - faire déterminer par l'unité de commande une valeur d'harmonisation à partir de l'écart de force spécifique et de l'écart de rotation en prenant en compte les bras de leviers entre ces deux unités de mesure. Système de navigation pour la mise en uvre de ce procédé.

MOTION TRANSDUCER

A motion sensing transducer is disclosed that includes a case having an inner surface, a first cap that closes the case at a first end and a second cap that closes the case at a second end. The case inner surface, first cap and second cap define a space within the case. The apparatus further includes at least one inner plate member separating the space into at a first compartment and a second compartment within the case, a coil-magnet assembly that produces a signal when subjected to motion, the coil-magnet assembly disposed immediately within the case and in the first compartment, and an electronic circuit disposed within the second compartment that modifies the signal.

Beschleunigungsempfindliche Einrichtung

Beschleunigungsempfindliche Einrichtung

Beschleunigungsempfindliche Einrichtung

Beschleunigungsempfindliche Einrichtung

Appareil pour la mesure des vitesses selon un axe prédéterminé

DEVICE OF FLEXIBLE SUPPORT FOR TRANSDUCERS OF FORCE MEASUREMENT.

Apparatus for the measurement speeds

HYDROPHONE ASSEMBLY

L'invention porte sur un hydrophone (500) dont la réponse en fréquence (510), correspond à celle d'un accéléromètre. Dans l'exécution préférée, (500), la réponse en fréquence, voisine de celle d'un différenciateur (520), est combinée à une paire de décalages simples de fréquence (510), et à un système d'enregistrements séismiques (550).

Single proof mass based three-axis accelerometer

The present invention discloses a three-axis accelerometer. The three-axis accelerometer comprises: a substrate; at least one anchor block fixedly disposed on the substrate; a first X-axis electrode, a second X-axis electrode, a first Y-axis electrode, a second Y-axis electrode, a first Z-axis electrode and a second Z-axis electrode all fixedly disposed on the substrate; a framework suspended above the substrate and comprising a first beam column, a second beam column disposed opposite to the first beam column and at least one connecting beam connecting the first beam column and the second beam column; a proof mass suspended above the substrate; and at least one elastic connection component configured to elastically connect to the at least anchor block, the connecting beam, and the proof mass. The three-axis accelerometer can realize high-precision acceleration detection on three axes with only one proof mass, and in particular, can provide a fully differential detection signal for the ...

Sensor

A system for acquiring environnemental information measurements. The 5 system (100) utilizes a sensor, (205) a front-end circuit, (310) a loop filter (315), a switch controller (206), and a recuced-oder loop control circuit to provide reliable data measurements while providing robust system behavior. The system further includes a sensor simulator (330) for simulating the operation of the sensor (205) and testing the operation of the front-end circuit (310) nd the loop filter (315).

Data interface for closed-loop accelerometer

Устройство для измерения ускорений

Изобретение относится к измерительной технике. В устройство для измерения ускорений дополнительно введены аналоговая отрицательная обратная связь с выхода интегрирующего усилителя на один из входов датчика момента через низкочастотный фильтр и дискретная отрицательная обратная связь с выхода интегрирующего усилителя на вход компаратора через последовательно соединенные по информационным входам сумматор, нелинейный элемент с зоной нечувствительности, и один из выходов нелинейного элемента с зоной нечувствительности соединен с входом сумматора через высокочастотный фильтр, кроме того, интегрирующий усилитель соединен с выходом датчика угла, выход схемы сравнения соединен с электронным ключом через триггер и выход реверсивного двоичного счетчика является цифровым выходом. Технический результат – расширение полосы пропускания устройства для измерения ускорений и повышение точности измерения. 1 ил.

Компенсационный акселерометр

Method of and apparatus for measuring distances

... 448,051. Bearings. SIEMENS APPARATE UND MASCHINEN CES., 4, Askanischer Platz, Berlin.-(Assignees of Boykow, J. M. ; 2A, Fontanestrasse, Lichterfelde West, Berlin) Jan. 1, 1935, No. 96. Convention date, Jan. 10, 1934. [Class 12 (i)] [See also Groups XXXVIII and XX] In apparatus for measuring the distance covered by air, water or land craft, shaking-devices are provided for eliminating errors due to bearing friction. Shaking devices 162, 163, Fig. 14, comprise short circuit armatures 164 165 mounted onthe shaft 155, 156 and a twin-coil alternating field 166, 167, shaking being effected by commutating the alternating fields in cadence, the commutators themselves being displaced with respect to one another. A shaking device 55, Fig. 16, applied direct to the platform 37, comprises a flywheel 184 tethered by a spring 185 and mounted in bearings in supports 183 subjected to a certain amount of friction. The flywheel shaft carries armatures 188, 189 located in alternating fields 190, 191 with ...

Measurement of acceleration

INSTRUMENT WHICH IS SENSITIVE TO ACCELERATION AND INCLINATION

... 1508841 Accelerometers: inclinometers A J STOLTZ 17 March 1975 11071/75 Headings G1F and G1K [ Also in Division F3] An instrument 10 responsive to acceleration and inclination comprises a casing 12 containing a liquid such as oil, a totally-immersed float structure 36 mounted to be pivotable about a horizontal axis defined by a spindle 42 relative to the casing, the structure comprising two floats 84 one on each side of the axis and each having its centre of buoyancy above the axis, the float structure being balanced so that it does not turn due to its inertia when subjected to horizontal acceleration perpendicular to the axis, and means for converting relative pivotal movement between the float structure and the casing caused by acceleration and/or inclination of the casing into an output signal. As shown in Figs. 2 and 3 a sun gear 64 fixed relative to the casing and a planet gear 70 mounted on the float structure mesh to cause rotation of a pointer 28, when such relative movement occurs ...

Improvements in acceleration responsive devices

... 828,611. Electric indicating systems. GENERAL ELECTRIC CO. Dec. 9, 1955 [Dec. 29, 1954], No. 35444/55. Addition to 816,779. Class 40 (1). In an accelerometer of the type claimed in Claim 2 of the parent Specification wherein rotation of unbalanced drum 10 in response to accelerating forces is detected by a moving coil assembly 20 and wherein a counter torque to restore the drum is applied by an internal stator and rotor assembly 16, 17, at least part of the unbalance mass is mounted on a support which is resilient with respect to the direction of the acceleration to be detected. As shown, the unbalance mass 15 is mounted on a leaf spring 16 the other end of which is secured to a bracket 17. Attached below mass 15 is a coil 20 which changes position in response to acceleration in the manner shown in Fig. 4. The coil is associated with a magnetic circuit which is A.C. energized and produces an output signal in response to its displacement from alignment with this circuit. This signal is amplified ...

Improvements in acceleration responsive devices having limited response

... 828,610. Electric indicating systems. GENERAL ELECTRIC CO. Dec. 7, 1955 [Dec. 30, 1954], No. 35137/55. Addition to 816,779. Class 40 (1). In an accelerometer of the type described and claimed in the parent Specification wherein rotation of drum 10, the C. of G. of which is below its pivotal axis, in response to accelerating forces is detected by a moving-coil assembly and in which a counter torque to restore the drum is applied by an internal stator and rotor assembly 16, 17, a further device is provided for damping out unwanted oscillations. This device comprises an inertia disc 48 supported from the inner wall of the drum 10 by two pairs of leaf springs 40, 50 at right angles to each other and joined at their inner ends 55, 46 to the disc and at their outer 43, 53 to the drum. The natural frequency of the assembly is chosen to be the same as that of the unwanted vibrations which are thereby damped.

ACCELEROMETER WITH LIQUID HYDROSTATIC GIMBAL SUPPORT

... 1469376 Accelerometers BENDIX CORP 27 June 1975 [17 July 1974] 27333/75 Heading G1K An accelerometer 10 with a pulsed integrating pendulum has the pendulous mass 12 carried by a float 14 which is supported in a housing 15-17 by a liquid hydrostatic bearing system. The float 14 is a cylinder with its longitudinal axis along the axis XX, and supported by trunnions 20, 22 which engage with clearance in recesses 21, 23 in the housing end-plates 15, 17. The main housing portion 16 is cylindrical. A casing 25 encloses the housing 15-17 and has at one end a chamber 29 with expansion bellows 28 therein. A pump 36, e.g. of the spiral groove viscous shear type, mounted in the chamber 29 circulates a liquid, e.g. trichlorotrifluoroethane, through the bearing system. The liquid flows from a pump outlet 40 via a channel 42 and millipore filters 44, 46 to the annular space about the float 14, returning to the pump inlet 52, 54 via the recess 23 and via the recess 21 and channels 27, 50, 17'. The accelerometer ...

GYROSCOPE ACCELEROMETER WITH SWINGING PENDULUM

CALIBRATION OF SENSORS

A plurality of seismic sensors calibration method (100) includes: an assembling so that sensors are coupled with each sensor positioned with its axis of sensitivity in a different spatial direction calibration system step (105), a rotating sensors step (110), a measuring sensors output signals step (115), a sensor output signal processing step (120) and a storing calibration coefficient(s) step (125).

SENSOR DESIGN AND PROCESS

An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).

FORCE TRANSDUCER FLEXURE WITH CONDUCTORS ON SURFACES IN THE NEUTRAL BENDING PLANE

FORCE TRANSDUCER FLEXURE WITH CONDUCTORS ON SURFACES IN THE NEUTRAL BENDING PLANE A flexure in a force transducer, as an inertial guidance accelerometer, for securing a force sensitive element to a mounting base includes one or more flexure sections having one or more recessed surfaces which are substantially coincident with the neutral bending plane of the flexure. Electrically conductive coating on the recessed surfaces provide electrical connections to components located on the force sensitive element. The conductive coatings on or near the neutral bending plane of the flexure sections minimizes bending moments caused by stresses set up between the conductive coatings and the flexure which may in turn lead to bias errors. At the same time, the flexure configuration provides for the desired strength and spring rate for the force sensitive element.

ACCELEROMETER HAS SYSTEM OF HYDROSTATIC BEARING

DAMPING DEVICE

Device sensitive to acceleration

FLUERIC TRANSVERSE-IMPACT MODULATOR ACCELEROMETER

Pendulous oscillating gyroscopic and accelerometer multisensor and amplitude oscillating gyroscope

A pendulous oscillating gyroscope and accelerometer multisensor having an accelerometer input axis and a gyroscopic input axis, comprising: a fixed case; a servo driven member mounted to the case for sinusoidal oscillation about an accelerometer servo axis which is the same as the gyroscopic input axis; a torque summing member mounted to the servo driven member to allow rotational motion about an output axis transverse to the servo axis; a rotor driven member mounted to the torque summing member for sinusoidal oscillation about a reference axis transverse to both the output axis and the servo axis; and a pendulosity carried by at least one of the torque summing member and the rotor driven member to create a mass imbalance about an output axis, in which pendulosity torque due to acceleration along the accelerometer input axis causes a DC rotation of the torque summing member about the output axis. The rotor driven member is sinusoidally oscillated about the reference axis, and the servo ...

GRA MEMS accelerometer

A planar MEMS accelerometer that detects acceleration along an input axis that is orthogonal to the plane. There are spaced bonding pads coupled to a substrate. A generally planar Servo Member (SM) is flexibly coupled to the bonding pads by servo member flexures such that the SM is capable of oscillatory motion about a servo axis that is orthogonal to the plane. A generally planar plate Torque Summing Member (TSM) is located within, coplanar with, and flexibly coupled to the SM such that the TSM is capable of rotational motion about an output axis that is in the plane and orthogonal to the servo axis. The TSM is mass-imbalanced relative to the output axis. A generally planar plate rotor is located within, coplanar with, and flexibly coupled to the TSM such that it is capable of rotary oscillatory motion relative to the TSM about a rotor axis that is in the plane. Rotor drives directly oscillate the rotor about the rotor axis at a rotor oscillation frequency and amplitude. SM drives oscillate ...

КОМПЕНСАЦИОННЫЙ АКСЕЛЕРОМЕТР

Акселерометр предназначен для измерения ускорения объекта. В разъемном корпусе размещен на упругом подвесе чувствительный элемент, датчик угла, сервоусилитель и датчик момента. Лопасть чувствительного элемента, упругий подвес и рамка для крепления чувствительного элемента в корпусе (крепежная рамка) выполнены из единой пластины монокристалла кремния. Каждая половина разъемного корпуса, между которыми расположена крепежная рамка чувствительного элемента, выполнена в виде бруска и чашеобразного магнитопровода датчика момента. Брусок изготовлен из монокристалла кремния той же ориентации, что пластина чувствительного элемента. Катушки датчика момента укреплены на лопасти чувствительного элемента через переходные шайбы, изготовленные из монокристалла кремния той же ориентации, что и пластина чувствительного элемента. Датчик угла состоит из двух дифференциально включенных тороидальных катушек, каждая из которых укреплена на центральном стержне своего магнитопровода датчика момента. В датчик угла ...

Компенсационный акселерометр

Изобретение относится к измерительной технике и может быть использовано в акселерометрах с упругим подвесом чувствительного элемента. Компенсационный акселерометр содержит корпус, магнитоэлектрический датчик момента, катушка которого одновременно является маятником, соединенным с упругими элементами, являющимися токопроводами, соединяющими маятник с корпусом, содержит магнитные системы, в зазоре которых находится катушка датчика момента, расположенная вдоль оси подвеса. Технический результат - повышение точности компенсационного акселерометра. 1 ил.

Акселерометр

Акселерометр предназначен для применения в системах стабилизации и навигации. Сущность заявленного технического решения заключается в том, что в акселерометр, содержащий чувствительный элемент, генератор опорного напряжения, датчик угла, схему ИСКЛЮЧАЮЩЕЕ ИЛИ, пару логических элементов, датчик момента, отрицательную цифровую обратную связь, ждущие синхронные генераторы, RS-триггер, две пары схем совпадения, схему синхронизации, малоразрядный реверсивный двоичный счетчик, малоразрядный итоговый регистр, преобразователь цифровой информации в прямой код, двоичный умножитель, генератор пилообразного напряжения, введена единичная отрицательная обратная связь, с выхода схемы ИСКЛЮЧАЮЩЕЕ ИЛИ на вход датчика момента через второй сумматор, причем выход датчика угла через пропорциональное звено соединен с одним из входов первого сумматора, второй вход которого соединен с выходом интегрирующего усилителя переменного тока со стабильным коэффициентом усиления, выход которого соединен с входом схемы ...

Компенсационный акселерометр

Изобретение относится к измерительной технике и предназначено для использования в системах стабилизации, навигации, наведения и медицине. Сущность изобретения заключается в том, что в компенсационный акселерометр дополнительно введены с выхода датчика угла на один из входов компаратора последовательно соединенные по информационным входам интегрирующий усилитель, фазовый детектор, пороговый элемент с зоной неоднозначности, интегратор, первый и второй сумматоры, дискретизатор, один из входов которого соединен с одним из выходов фазового детектора, а выход соединен с одним из входов первого сумматора, кроме того, один из выходов генератора опорного напряжения соединен с одним из входов дискретизатора, а один из входов второго сумматора соединен с выходом генератора пилообразного напряжения, выход реверсивного двоичного счетчика является цифровым выходом компенсационного акселерометра. Технический результат – расширение полосы пропускания и повышение точности измерения. 1 ил.

Компенсационный акселерометр

Изобретение относится к измерительной технике. Сущность изобретения заключается в том, что компенсационный акселерометр дополнительно содержит последовательно по информационным входам, с выхода схемы исключающее "или" на вход преобразователя уровня, широкополосный фильтр второго порядка и элемент с зоной неоднозначности, и местная отрицательная обратная связь реализована с выхода элемента с зоной неоднозначности на вход широкополосного фильтра второго порядка через звено запаздывания, кроме того, преобразователь уровня соединен с входом магнитоэлектрического силового преобразователя, и выход реверсивного двоичного счетчика является цифровым выходом устройства. Технический результат – повышение точности измерения, расширение полосы пропускания. 1 ил.

Акселерометр

Изобретение относится к измерительной технике. Сущность изобретения заключается в том, что акселерометр дополнительно содержит последовательно по информационным входам с выхода схемы исключающее "или" на вход релейного элемента широкополосный фильтр второго порядка и элемент с зоной неоднозначности, фильтр и местная отрицательная обратная связь реализована с выхода элемента с зоной неоднозначности на вход широкополосного фильтра второго порядка через звено запаздывания, кроме того, вход преобразователя уровня соединен с выходом релейного элемента, и входы пары ждущих синхронных генераторов соединены с выходом преобразователя уровня, кроме того, вход магнитоэлектрического силового преобразователя соединен с выходом релейного элемента и выход реверсивного двоичного счетчика является цифровым выходом устройства. Технический результат – повышение точности измерения, расширение полосы пропускания. 1 ил.

Устройство для измерения ускорений

Изобретение относится к измерительной технике. В устройство для измерения ускорений введены аналоговая отрицательная обратная связь с выхода интегрирующего усилителя на один из входов датчика момента через первый высокочастотный фильтр и дискретная отрицательная обратная связь с выхода интегрирующего усилителя на вход интегратора через последовательно соединенные по информационным входам второй высокочастотный фильтр, сумматор, первый триггер, и один из выходов интегратора соединен с входом сумматора через третий высокочастотный фильтр, кроме того, интегрирующий усилитель соединен с выходом датчика угла, интегратор соединен с входом компаратора через четвертый высокочастотный фильтр, выход схемы сравнения соединен электронным ключом через второй триггер и выход реверсивного двоичного счетчика является цифровым выходом. Технический результат – повышение точности измерения ускорений, расширение полосы пропускания. 1 ил.

СПОСОБ ОБЕСПЕЧЕНИЯ ЛИНЕЙНОСТИ МАСШТАБНОГО КОЭФФИЦИЕНТА МАЯТНИКОВОГО АКСЕЛЕРОМЕТРА КОМПЕНСАЦИОННОГО ТИПА

Способ обеспечения линейности масштабного коэффициента маятникового акселерометра компенсационного типа относится к измерительной технике. Способ основан на использовании цифровой обратной связи, реализуемой микроконтроллером, в котором программным способом реализован ШИМ; ШИМ формирует последовательность рабочих импульсов, длительность которых равна τ(n⋅T), а таймер микроконтроллера формирует два равных по величине вспомогательных импульса длительностью τи две равные по величине паузы длительностью τ. В способе задается правило выбора длительности интервала рабочего импульса τ(n⋅T), длительности вспомогательных импульсов и пауз на «n»-м такте дискретизации, а также правило взаимного размещения на каждом «n»-м такте дискретизации рабочего, вспомогательных импульсов и пауз. В начале каждого «nТ»-го такта дискретизации размещают первый вспомогательный импульс тока; к этому вспомогательному импульсу тока присоединяют рабочий импульс; через определенный промежуток времени на интервале Тразмещают ...

Einrichtung zum Messen von Wegstrecken

Acoustically supported motion sensor

... 1,058,981. Bearings. HARVEST QUEEN MILL & ELEVATOR CO. Feb. 12, 1964, No. 5880/64. Heading F2A. [Also in Division G1] Motion sensing apparatus comprises means for suspending a body in a compressible medium by the time average of a vibratory field of force, such as an acoustic field, and means responsive to movement of the body. Visually read accelerometer.-A cylindrical piezo-electric transducer 214, Fig. 1A, fed from an oscillator 230 produces a radially divergent standing wave sound field, in the container 211. The field restrains a cylindrical mass 220 at a reference position, deviations from which produce restoring forces on the mass. Such deviations may be caused by accelerations of the container 211 and may be detected by the reflection of light from a lamp 221 on to scales 225, 226 calibrated in accelerations. The mass 220 may be so shaped, Fig. 1G (not shown), that the field exerts a circumferential force thereon, causing it to rotate, thus increasing its inertia. Accelerometer ...

PROCEDURE FOR THE ACCELERATION MEASUREMENT WITH SEVERAL OPERATINGS MODE

TENSION ARMS SEMICONDUCTOR CUBE ATTACHMENT

LOW STRESS DIE ATTACHMENT

A system for resiliently attaching a mass to a package includes a mass (104), a housing (102), resilient couplings (108) for resiliently attaching the mass to the housing.

SENSOR

A system for acquiring environmental information measurements. The 5 system (100) utilizes a sensor, (205) a front-end circuit, (310) a loop filter (315), a switch controller (206), and a reduced-order loop control circuit to provide reliable data measurements while providing robust system behavior. The system further includes a sensor simulator (330) for simulating the operation of the sensor (205) and testing the operation of the front-end circuit (310) and the loop filter (315).

MOTION TRANSDUCER

A motion sensing transducer is disclosed that includes a case having an i nner surface, a first cap that closes the case at a first end and a second c ap that closes the case at a second end. The case inner surface, first cap a nd second cap define a space within the case. The apparatus further includes at least one inner plate member separating the space into at a first compar tment and a second compartment within the case, a coil-magnet assembly that produces a signal when subjected to motion, the coil-magnet assembly dispose d immediately within the case and in the first compartment, and an electroni c circuit disposed within the second compartment that modifies the signal. ...

Time limited digital oscillator

A circuit for providing an oscillatory driving signal from the point in time when power is supplied to a predetermined point in time thereafter. A force balance transducer having a pick-off device with a stationary member and a moving member mechanically mounted for movement relative to the stationary member is disposed to sense a predetermined physical quantity and to produce an output relative thereto. A force producing device is coupled to the moving member for receiving the output and for driving the moving member to a predetermined neutral position. The transducer is actuated by a source of electrical power and contains a gating circuit, an astable multi-vibrator and a coupling circuit. The gating circuit is actuated by initial application of the electrical power to the transducer and actuates the astable multivibrator for a predetermined period of time. The coupling circuit couples the output from the astable multi-vibrator to the force producing device for initially driving the moving ...

Superconducting six-axis accelerometer

A superconducting six-axis accelerometer (SSA) for measuring the linear and angular acceleration of a superconducting proof mass in all six degrees of freedom at the same point in space time. The proof mass is formed of interlocking plates defining three mutually orthogonal planes and is confined and controlled by superconducting circuitry including superconducting levitation coils which suspend the proof mass against the pull of gravity. Detection of a displacement of the proof mass when an acceleration is applied is possible as the Meissner effect forces the inductance of superconducting sensing coils to change in proportion to the displacement of the proof mass. The sensing coils, which may be the same coils as the levitation coils or may be arranged concentrically with respect to separate levitation coils, are arranged in bridge circuits, each bridge circuit being driven by an independent oscillating current through a tank circuit, having a different carrier frequency. The output of ...

ACCELEROMETERS

A method for closed loop operation of a capacitive accelerometer uses a single current source and a single current sink to apply an in-phase drive signal V′ to a first set of fixed capacitive electrode fingers and a corresponding anti-phase drive signal V′ to a second set of fixed capacitive electrode fingers. This provides a net electrostatic restoring force on the proof mass for balancing the inertial force of the applied acceleration and maintains the proof mass at a null position. 1. A capacitive accelerometer comprising:a substantially planar proof mass mounted to a fixed substrate by flexible support legs so as to be linearly moveable in an in-plane sensing direction in response to an applied acceleration;first and second sets of moveable capacitive electrode fingers extending from the proof mass, substantially perpendicular to the sensing direction and spaced apart in the sensing direction;first and second sets of fixed capacitive electrode fingers extending substantially perpendicular to the sensing direction and spaced apart in the sensing direction;wherein the first set of fixed capacitive electrode fingers is arranged to interdigitate with the first set of moveable capacitive electrode fingers and the second set of fixed capacitive electrode fingers is arranged to interdigitate with the second set of moveable capacitive electrode fingers;a drive signal generator arranged to apply an in-phase drive signal to the first set of fixed capacitive electrode fingers and a corresponding anti-phase drive signal to the second set of fixed capacitive electrode fingers so as to provide a net electrostatic restoring force on the proof mass for balancing the inertial force of the applied acceleration and maintaining the proof mass at a null position; anda single current source and a single current sink connected to the drive signal generator to generate both the in-phase and anti-phase drive signals.2. The capacitive accelerometer of claim 1 , further comprisinga ...

Acceleration sensor, geophone, and seismic prospecting system

Provided are acceleration sensor, geophone and seismic prospecting system with high sensitivity and low power consumption. The acceleration sensor includes a mass body displaceable with respect to a rotation shaft. The acceleration sensor includes a first AC servo control facing a first symmetrical region of the first movable portion, a second AC servo control electrode facing a second symmetrical region of the second movable portion, and a DC servo control electrode facing an asymmetrical region of the second movable portion. A first AC servo capacitive element is formed by the first movable portion and the first AC servo control electrode, a second AC servo capacitive element is formed by the second movable portion and the second AC servo control electrode, and a DC servo capacitive element is formed by the second movable portion and the DC servo control electrode.

Hydrophone assembly

Hydrophone assembly

A hydrophone assembly, (500), is provided that has a frequency response, (510), that matches that of an accelerometer. In a preferred implementation, (500), the frequency response resembles that of a differentiator, (520), in combination with a pair of simple frequency lags, (510), and in combination with the seismic recording system, (550).

Компенсационный акселерометр

Изобретение относится к измерительной технике. В компенсационный акселерометр введены интегрирующий усилитель с выхода датчика угла на входы параллельного канала, выход которого соединен с входом сумматора по информационным входам через последовательно соединенные первый пороговый элемент с зоной неоднозначности и низкочастотный фильтр, а также последовательно соединенные второй пороговый элемент с зоной неоднозначности и высокочастотный фильтр, а также интегро-дифференцирующий фильтр, вход которого соединен с выходом схемы сравнения, а выход - с электронным ключом через третий пороговый элемент с зоной неоднозначности, выход сумматора соединен с входом компаратора, и выход реверсивного двоичного счетчика является цифровым выходом компенсационного акселерометра. Технический результат - расширение полосы пропускания компенсационного акселерометра и повышение точности измерения. 1 ил.

Компенсационный акселерометр

Изобретение относится к измерительной технике и может быть использовано в качестве элемента в системах стабилизации и навигации. Компенсационный акселерометр содержит чувствительный элемент, датчик угла, усилитель, датчик момента, отрицательную обратную связь, фазовый детектор отрицательной обратной связи, интегрирующий усилитель, пару ждущих синхронных генераторов, управляемый релейный элемент, преобразователь уровня, двоичный умножитель, реверсивный двоичный счетчик, преобразователь дополнительного кода в прямой, схему собирания, введены в дополнительную отрицательную обратную связь с выхода фазового детектора отрицательной обратной связи на один из входов сумматора через последовательно соединенные по информационным входам сглаживающий фильтр, блок управления динамической ошибкой, преобразователь напряжение-ток, и в отрицательную обратную связь с выхода фазового детектора на вход интегрирующего усилителя последовательно низкочастотный фильтр и звено запаздывания. Технический результат ...

Акселерометр

Изобретение относится к измерительной технике. Сущность изобретения заключается в том, что в акселерометр введены аналоговая отрицательная обратная связь с выхода датчика угла на вход датчика момента через усилитель с насыщением, первый низкочастотный фильтр, интегратор и второй низкочастотный фильтр, дискретная отрицательная обратная связь с выхода интегратора на вход компаратора, кроме того, выход схемы сравнения соединен с входом электронного ключа через высокочастотный фильтр и триггер и выход реверсивного двоичного счетчика является цифровым выходом акселерометра. Технический результат – расширение полосы пропускания акселерометра и повышение точности измерения. 1 ил.

Компенсационный акселерометр

Изобретение относится к измерительной технике и предназначено для использования в системах стабилизации, навигации, наведения и медицине. Сущность изобретения заключается в том, что компенсационный акселерометр дополнительно содержит положительную обратную связь с выхода усилителя на один из входов датчика момента через последовательно соединенные по информационным входам усилитель, интегратор, пороговый элемент и фильтр третьего порядка, пороговый элемент соединен с входом компаратора в отрицательной обратной связи, триггер с выхода схемы сравнения на вход электронного ключа, выход которого соединен с одним из входов датчика момента, выход реверсивного двоичного счетчика является цифровым выходом компенсационного акселерометра. Технический результат – расширение полосы пропускания и повышение точности измерения. 1 ил.

Компенсационный акселерометр

Изобретение, компенсационный акселерометр, предназначено для применения в качестве элемента в системах стабилизации и навигации. Изобретение может найти применение в приборах измерения механических величин компенсационного типа. Сущность заявленного решения заключается в том, что в компенсационный акселерометр, содержащий чувствительный элемент, датчик положения, выход которого соединен с одним из входов схемы исключающее "или" через усилитель и первый логический элемент, магнитоэлектрический силовой преобразователь, включенный в отрицательную обратную связь, генератор опорного напряжения, выходы которого соединены как с датчиком положения, так и с одним из входов схемы исключающее "или" через второй логический элемент, преобразователь уровня, соединенный с входом реверсивного двоичного счетчика через пару ждущих синхронных генераторов, схему синхронизации, интегратор, введены релейный элемент с зоной неоднозначности с выхода схемы исключающее "или" на вход преобразователя уровня и интегратор ...

DIGITAL OUTPUT INSTRUMENTS

Accelerometers

MEHRACHSIGE INTEGRATED SENSOR CIRCUIT AND SENSOR PACKING

FORCE SENSING TRANSDUCER

MICRO-MACHINED ACCELEROMETER WITH TILT COMPENSATION

Two-axis flexible pendulum accelerometer

ELECTRONIC DITHER CIRCUIT FOR A MECHANICAL BEARING ASSEMBLY AND METHOD AND ACCELEROMETER USING THE SAME

Device for the measurement of the way traversed by a vehicle, in ticulier by an aircraft

ACCELEROMETER HAS SYSTEM OF HYDROSTATIC BEARING

Velocity transducer

PENDULOUS OSCILLATING GYROSCOPIC ACCELEROMETER

A pendulous oscillating gyroscopic accelerometer (10) comprising an unbalanced pendulous mass (28), pivotable on an output axis, that is oscillated about a reference axis transverse to the output axis. The pendulous mass (28) is also oscillated about an input axis transverse to the reference axis using a control servo loop (40), and the acceleration force along the input axis is determined from at least one of those oscillations.

Motion transducer

A motion sensing transducer is disclosed that includes a case having an inner surface, a first cap that closes the case at a first end and a second cap that closes the case at a second end. The case inner surface, first cap and second cap define a space within the case. The apparatus further includes at least one inner plate member separating the space into at a first compartment and a second compartment within the case, a coil-magnet assembly that produces a signal when subjected to motion, the coil-magnet assembly disposed immediately within the case and in the first compartment, and an electronic circuit disposed within the second compartment that modifies the signal.

ACCELEROMETER

Accelerometer with flexible mounting structure

An accelerometer for sensing acceleration along a sensing axis, includes a flexure member (having a pendulum member pivotably connected to a support member via a hinge arrangement), a housing, and at least one mounting structure configured for clamping the support member to the housing in load bearing contact while concurrently allowing for differential movement between the support member and the housing. Embodiments also include a corresponding housing member for use with a flexure member of an accelerometer, and a flexure member for use with a housing of an accelerometer.

Inertial sensor for suspension and control of an inertial reference in a satellite

Abstract not available! Abstract of correspondent: US2002036251 An inertial sensor includes an inertial reference for determining the attitude and position of a satellite or satellite parts. A test mass is situated in a space which is essentially free of electric and magnetic fields and is enclosed by a housing, and optical measuring sections are set up between reference elements on the housing and on the test mass, for determining the attitude and/or position of the test mass relative to the reference elements on the housing. A measuring arrangement is situated outside the housing for the optical measuring sections. The optical measuring sections are constructed as optical interferometric measuring elements; and the attitude and position of the test mass can be adjusted by means of the pressures of light exerted on the optical interferometric measuring sections upon the test mass ...

Компенсационный акселерометр

Изобретение, компенсационный акселерометр, предназначено для применения в системах стабилизации и навигации. Компенсационный акселерометр дополнительно содержит интегрирующую отрицательную обратную связь, в которую введены низкочастотный фильтр, с выхода схемы ИСКЛЮЧАЮЩЕЕ ИЛИ на вход интегратора, и пороговый элемент с зоной неоднозначности, с выхода интегратора на один из входов магнитоэлектрического силового преобразователя через второй преобразователь напряжение-ток, кроме того, выход сглаживающего фильтра является аналоговым выходом, а выход с порогового элемента с зоной неоднозначности - дискретным выходом компенсационного акселерометра. Технический результат – повышение точности измерения и расширение полосы пропускания. 1 ил.

Устройство для измерения ускорений

Изобретение относится к устройству для измерения ускорений. Технический результат заключается в повышении точности измерения ускорения. Устройство содержит чувствительный элемент, датчик угла, отрицательную обратную связь, датчик момента, схему синхронизации, управляющий автомат и последовательно соединенные по информационным входам первый дискретизатор, третий сумматор, второй дискретизатор, компаратор, асинхронный D-триггер, схему совпадения, реверсивный двоичный счетчик и итоговый регистр, при этом в него введены в отрицательную обратную связь с выхода датчика угла на один из входов первого сумматора через последовательно соединенные по информационным входам интегрирующий усилитель, пороговый элемент с зоной неоднозначности, фазовый детектор отрицательной обратной связи, сглаживающий фильтр, а в положительную обратную связь с выхода датчика угла на один из входов первого сумматора через последовательно соединенные по информационным входам интегрирующий усилитель, пороговый элемент с ...

Устройство для измерения ускорений

Изобретение относится к измерительной технике. Устройство для измерения ускорений дополнительно содержит аналоговую отрицательную обратную связь с выхода усилителя на вход датчика момента через первый фильтр и дискретную отрицательную обратную связь с выхода усилителя на вход компаратора последовательно по информационным входам через интегрирующий усилитель с зоной нечувствительности, второй фильтр и интегратор, кроме того, выход схемы сравнения соединен с входом электронного ключа через триггер и выход реверсивного двоичного счетчика является дискретным выходом устройства. Технический результат - расширение полосы пропускания акселерометра и повышение точности измерения. 1 ил.

Компенсационный акселерометр

Изобретение предназначено для применения в системах стабилизации, навигации и в медицине. Технический результат - повышение точности и расширение полосы пропускания. Технический результат достигается тем, что в компенсационный акселерометр, содержащий чувствительный элемент, датчик угла, генератор опорного напряжения, усилитель, интегратор, соединенный с выходом усилителя, интегрирующую отрицательную обратную связь, выход компаратора соединен с входом схемы сравнения через последовательно соединенные преобразователь уровня, два ждущих синхронных генератора, реверсивный двоичный счетчик, электронный ключ, вход которого соединен с выходом генератора тока, а выход с одним из входов датчика момента, суммирующий двоичный счетчик, схему сравнения, генератор вспомогательной частоты, дополнительные входы компаратора, ждущих синхронных генераторов, реверсивного двоичного счетчика соединены с генератором вспомогательной частоты, введена местная отрицательная обратная связь с выхода усилителя, через ...

Компенсационный акселерометр

Изобретение относится к измерительной технике и предназначено для использования в системах стабилизации и навигации. Сущность изобретения заключается в том, что компенсационный акселерометр дополнительно содержит последовательно соединенные первый и второй фильтры с выхода фазового детектора отрицательной обратной связи на вход интегрирующего усилителя и звено запаздывания с выхода интегрирующего усилителя на его вход, один из выходов двоичного реверсивного счетчика является цифровым выходом компенсационного акселерометра. Технический результат – повышение точности и расширение полосы пропускания компенсационного акселерометра. 4 ил.

Beschleunigungsempfindliche Vorrichtung

DIGITAL OUTPUT INSTRUMENTS

A servoed accelerometer (10) is connected with an accumulator (21) to provide a binary digital output. The accumulator output is connected with a digital-to-analog converter (25) which provided an analog rebalance signal to the accelerometer.

Inertial sensors

Calibration of sensors

INTEGRATED SENSOR PACKAGING AND MULTI-AXIS SENSOR ASSEMBLY PACKAGING

A sensor apparatus (104) includes a plural different spatial direction axis of sensitivity positioned sensor package containing sensor module (305) supported by a planar surface (345) within a cavity (340) of a housing (205) coupled to a first end cap (210) by a PC-board connection (355). Housing (205) is further coupled to first end cap (210) by a first coupling member (315) and a second coupling member (320) and is also coupled to an opposite second end cap (215) by a third coupling member (320) and a fourth coupling member (325). Interface sealing members (330a, 330b, 330c, 330d) seal between housing (205) and first end cap (210). Interface sealing members (335a, 335b, 335c, 335d) seal between housing (205) and second end cap (215).

HYDROPHONE ASSEMBLY

... ²²²A hydrophone assembly, (500), is provided that has a frequency response, ²(510), that matches that of an accelerometer. In a preferred implementation, ²(500), the frequency response resembles that of a differentiator, (520), in ²combination with a pair of simple frequency lags, (510), and in combination ²with the seismic recording system, (550).² ...

SENSOR

A system for acquiring environmental information measurements. The 5 system (100) utilizes a sensor, (205) a front-end circuit, (310) a loop filter (315), a switch controller (206), and a reduced-order loop control circuit to provide reliable data measurements while providing robust system behavior. The system further includes a sensor simulator (330) for simulating the operation of the sensor (205) and testing the operation of the front-end circuit (310) and the loop filter (315).

Accelerometer systems and methods

An accelerometer system can include a sensor element comprising first and second proofmasses, the first proofmass accelerating in a first direction and the second proofmass accelerating in a second direction opposite the first direction in response to an external acceleration. A force rebalance controller applies control signals to at least one control element to provide a first force to accelerate the first proofmass toward a first null position and to at least one control element to provide a second force to accelerate the second proofmass toward a second null position. The force rebalance controller can also generate opposite polarity first and second output signals associated with respective displacements of the first and second proofmasses relative to the respective first and second null positions. An acceleration component calculates the external acceleration based on the first and second output signals.

Motion sensing apparatus and mobile terminal

The disclosure discloses a motion sensing apparatus and a mobile terminal. The apparatus includes a sensing module and a processing module, wherein the sensing module includes at least two outputs, the processing module includes at least two signal ports, each signal port of the processing module is connected with one of the outputs of the sensing module respectively, and the sensing module outputs sensing signals from different outputs according to sensed different motions, and the processing module performs corresponding processes according to the sensing signals received from different signal ports. The apparatus simplifies a hardware circuit to some extent, saves the cost, and reduces the consumption of electric energy. By using the apparatus, a mobile terminal with screen shaking function can be produced. Compared with the conventional mobile terminal, the mobile terminal simplifies the hardware circuit to some extent, reduces the production cost of the mobile terminal, and improves the endurance capability and the reliability of the mobile terminal.

Inertial sensor and method of manufacturing the same

Disclosed herein are an inertial sensor and a method of manufacturing the same. The inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110, a mass body 120 disposed under a central portion 113 of the membrane 110, a post 130 disposed under an edge 115 of the membrane 110 so as to support the membrane 110, and a bottom cap 150 of which the edge 153 is provided with the first cavity 155 into which an adhesive 140 is introduced, wherein the adhesive 140 bonds an edge 153 to a bottom surface of the post, whereby the edge 153 of the bottom cap 150 is provided with the first cavity 155 to introduce the adhesive 140 into the first cavity 155, thereby preventing the adhesive 140 from being permeated into the post 130.

Acceleration sensor and method for operating an acceleration sensor

An acceleration sensor has a substrate, a seismic mass and a detection unit. The seismic mass is configured to be deflected based on an external acceleration acting on the acceleration sensor, the deflection being in the form of a deflection motion with respect to the substrate along a deflection direction. The detection unit is configured to be deflected for the detection of a deflection of the seismic mass, the detection being in the form of a detection motion with respect to the substrate along a detection direction. The detection unit is connected to the seismic mass in such a way that the amplitude of the deflection motion along the deflection direction is greater than the amplitude of the detection motion along the detection direction.

Device for measuring force components, and method for its production

A device for measuring force components formed from a single crystal material, wherein the device comprises at least one cantilever beam inclined to a wafer plane normal and formed in one piece with a mass body, which mass body provides a mass of inertia. The mass body has a first and a second major surface which are substantially parallel with a wafer plane. A mass body cross section presents a portion which is substantially symmetrical along a centrally (in the thickness direction) located plane parallel with the wafer plane. Disclosed is also a method for its production and an accelerometer comprising at least one such device. The device allow for a more compact 3-axis accelerometer.

REDUCING HYSTERESIS EFFECTS IN AN ACCELEROMETER

In some examples, the disclosure describes an accelerometer having improved hysteresis effects, the accelerometer including a proof mass assembly including a proof mass, a support structure, and a flexure flexibly connecting the proof mass to the support structure to allow the proof mass to move about the plane defined by the support structure. Some examples may include at least one thin film lead including an electrically conductive material on the flexure, where the at least one thin film lead provides an electrical connection between an electrical component on the support structure and an electrical component on the proof mass, and where the at least one thin film lead comprises at least one of a yield strength greater than pure gold or a thermal expansion coefficient less than pure gold. 1. An accelerometer comprising a proof mass assembly comprising:a proof mass;a support structure;a flexure flexibly connecting the proof mass to the support structure, wherein the flexure allows the proof mass to move about a plane defined by the support structure; andat least one thin film lead comprising an electrically conductive material on the flexure, wherein the at least one thin film lead provides an electrical connection between an electrical component on the support structure and an electrical component on the proof mass, and wherein the at least one thin film lead comprises at least one of a yield strength greater than pure gold or a thermal expansion coefficient less than pure gold.2. The accelerometer of claim 1 , wherein the at least one thin film lead comprises at least one of titanium claim 1 , graphene claim 1 , molybdenum claim 1 , tungsten claim 1 , hafnium claim 1 , zirconium claim 1 , or an alloy of gold.3. The accelerometer of claim 1 , wherein the at least one thin film lead consists essentially of at least one of titanium claim 1 , graphene claim 1 , molybdenum claim 1 , hafnium claim 1 , zirconium claim 1 , tungsten claim 1 , or an alloy of gold.4. The ...

Stress reduction components for sensors

An accelerometer device for reducing stress on the sensor resulting from temperature extremes and multiple coefficients of thermal expansion. An exemplary accelerometer device includes upper and lower stators and a reed. The reed includes a support ring and a paddle that is flexibly connected to the support ring. The support ring includes a ring section and at least two mounting devices. The mounting devices are at least partially mechanically isolated from the ring section. The ring section flexibly receives the paddle. The mounting devices include a pad area and a neck area that connect the pad area to the ring section. The neck area includes a width dimension that is narrower than a diameter dimension of the pad area.

Reducing hysteresis effects in accelerometer

Techniques of manufacturing an accelerometer as disclosed herein include positioning an accelerometer between a first stator and a second stator, and the accelerometer comprises a plurality of features. In some examples, the plurality of features include a proof mass, a support structure defining a plane and configured to support the proof mass, a flexure configured to flexibly connect the proof mass to the support structure, and a plurality of raised pads, the plurality comprising at least one raised pad positioned between the flexure and an exterior of the support structure, wherein the at least one raised pad is configured to be isolatable. Techniques of manufacturing the accelerometer as disclosed herein further include compressing the first stator and the second stator onto the accelerometer, attaching a bellyband to the first stator and the second stator, and isolating the at least one raised pad.

ACCELERATION SENSOR

Provided is an acceleration sensor capable of realizing a simultaneous operation method of signal detection and servo control in place of a time-division processing method, by an MEMS process in which a manufacturing variation is large. 1. An MEMS capacitive acceleration sensor , comprising:a first MEMS capacitor pair for signal detection;a second MEMS capacitor pair for servo control in which one electrode of each capacitor is connected to one electrode of each capacitor in the first capacitor pair and to which a servo voltage to generate force in a direction reverse to a detection signal of acceleration by the first MEMS capacitor pair is applied;a charge amplifier which is connected to electrodes of the first MEMS capacitor pair and the second MEMS capacitor pair connected to each other and forming one weight and converts a charge change on the weight into a voltage change;an A/D converter which digitizes a voltage change signal of an output of the charge amplifier;a 1-bit quantizer which quantizes a servo value to generate force in a direction reverse to displacement of the weight by the acceleration, generated from an output of the A/D converter, with 1 bit;a 1-bit D/A converter which converts an output of the 1-bit quantizer into an analog servo voltage and applies the analog servo voltage to the second MEMS capacitor pair;a correlation detection unit which outputs a signal proportional to a mismatch ΔC of capacity values in the second MEMS capacitor pair, on the basis of the output of the A/D converter and the output of the 1-bit quantizer;a control unit which outputs a capacity control value to cancel an influence by the mismatch ΔC of the capacity values on an input node of the charge amplifier, on the basis of the output of the correlation detection unit; anda variable capacity unit which is inserted between an output node of a driver outputting the output of the 1-bit quantizer at voltage amplitude more suppressed than amplitude of the servo voltage and ...

ACCELEROMETER WITH BUILT-IN TEMPERATURE CORRECTION

Systems and methods are disclosed for generating temperature compensated acceleration data in analog and digital format from a torque balance accelerometer (TBA). During manufacture of the TBA, a calibration process is used for measuring a TBA scale factor and offset. After collecting scale and offset data, said data is loaded into the memory of the TBA. Field operation of the device includes: sensing a current temperature, retrieving the closest scale and offset correction factors from memory of the TBA, and performing linear interpolation to generate a temperature-compensated output for the TBA. 1. A method for internally generating temperature compensated acceleration analog and digital output data from a torque balance accelerometer (TBA) having at least one flexure arm , comprising:ablating one side of the flexure arm to detect acceleration;performing factory calibration of the TBA by collecting scale and offset correction factors at one or more temperatures and storing the scale and offset correction factors in a memory of the TBA;during field operation, sensing a current temperature, retrieving the scale and offset correction factors associated with a current temperature from the memory of the TBA, and performing linear interpolation to generate temperature-compensated analog and digital data outputs for the TBA.2. The method of claim 1 , comprising:receiving an analog output from the TBA;reading scale and offset correction factors from two calibrated temperatures one above and one below the current temperature;determining an adjusted scale and offset correction factor for the current temperature.3. The method of claim 2 , wherein the determining an adjusted scale and offset correction factor comprises linearly interpolating the factors.4. The method of claim 1 , comprising generating as an output a temperature calibrated analog voltage proportional to an acceleration.5. The method of claim 1 , wherein the TBA includes a flapper whose movement correlates with ...

PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, AND MOVING OBJECT

A fixed electrode part, a movable member supported by a support part above the fixed electrode part to which a principal surface thereof is opposed, and a stopper part provided to be opposed to at least a part of an outer edge of the movable member and regulating in-plane rotation displacement of the principal surface of the movable member are provided. 1. A physical quantity sensor comprising:a fixed electrode part;a movable member supported by a support part above the fixed electrode part to which a principal surface thereof is opposed; anda stopper part provided to be opposed to at least a part of an outer edge of the movable member and regulating in-plane rotation displacement of the principal surface of the movable member.2. The physical quantity sensor according to claim 1 , wherein the stopper part is provided to be opposed to a corner portion of the movable member.3. The physical quantity sensor according to claim 2 , wherein the stopper part is provided to be opposed to each of a first side and a second side forming an angle with the first side claim 2 , the sides forming the corner portion of the movable member.4. The physical quantity sensor according to claim 2 , wherein the stopper part is provided along the corner portion of the movable member.5. The physical quantity sensor according to claim 3 , wherein the stopper part is provided along the corner portion of the movable member.6. The physical quantity sensor according to claim 1 , wherein a hollow part is provided in the movable member claim 1 ,a fixing part is provided in the hollow part in a plan view of the movable member, andthe movable member is suspended by the support part extended from the fixing part.7. The physical quantity sensor according to claim 6 , wherein a projection is provided on at least one of an edge of the hollow part of the movable member and the fixing part.8. A physical quantity sensor comprising:a fixed electrode part;a movable member supported above the fixed electrode ...

Inertial force sensor

An inertial force sensor has a first sensor element, a second sensor element, a first signal processor, a second signal processor, and a power controller. The first sensor element converts a first inertial force to an electric signal, and the second sensor element converts a second inertial force to an electric signal. The first signal processor is connected to the first sensor element, and outputs a first inertial force value. The second signal processor is connected to the second sensor element, and outputs a second inertial force value. The power controller is connected to the first signal processor and the second signal processor, and changes power supplied to the second signal processor based on the first inertial force value.

ACCELEROMETER WITH BUILT-IN TEMPERATURE CORRECTION

Systems and methods are disclosed for generating temperature compensated acceleration data in both analog and digital format from a torque balance accelerometer (TBA). During manufacture of the TBA, a calibration process is used consisting of cooling and heating the TBA to discrete temperatures within a range and at each discrete temperature measuring the TBA scale factor and offset. After collecting scale and offset data, said data is loaded into the memory of the TBA. 1. A method for internally generating temperature compensated acceleration analog and digital output data from a TBA comprising:performing factory calibration of a torque balance accelerometer (TBA), wherein for each a plurality of temperature ranges, cooling and heating the TBA to a temperature, collecting scale and offset correction factors at the temperature and storing the scale and offset correction factors in a memory of the TBA;during field operation, sensing a current temperature, retrieving the scale and offset correction factors associated with the current temperature from the memory of the TBA, and performing linear interpolation to generate temperature-compensated analog and digital data outputs for the TBA.2. The method of claim 1 , comprising:receiving an analog output from the TBA;reading scale and offset correction factors from two calibrated temperatures one above and one below the current temperature;determining an adjusted scale and offset correction factor for the current temperature.3. The method of claim 2 , wherein the determining an adjusted scale and offset correction factor comprises linearly interpolating the factors.4. The method of claim 1 , comprising generating as an output a temperature calibrated analog voltage proportional to an acceleration.5. The method of claim 1 , wherein the TBA includes a flapper whose movement correlates with acceleration claim 1 , comprising laser trimming the flapper.6. The method of claim 5 , comprising:forming a flapper hingedly supported ...

Converting rotational motion to linear motion

System and methods are disclosed herein for converting rotational motion to linear motion. A system comprising a rotational drive can be connected to a proof mass by a first structure comprising a coupling spring. An anchor can be connected to the proof mass by a second structure comprising a drive spring. The coupling spring and the drive spring can be configured to cause the proof mass to move substantially along a first axis when the rotational drive rotates about a second axis.

SYSTEMS AND METHODS FOR DETECTING INERTIAL PARAMETERS USING A VIBRATORY ACCELEROMETER WITH MULTIPLE DEGREES OF FREEDOM

Systems and methods are described herein for determining an inertial parameter. In particular, the systems and methods relate to multiple degrees of freedom inertial sensors implementing time-domain sensing techniques. Within a multiple degrees of freedom inertial sensor system, sense masses may respond to actuation with more than one natural frequency mode, each corresponding to a characteristic motion. Measurement of the inertial parameter can be conducted in the differential natural frequency mode using differential sensing techniques to remove common mode error. The inertial parameter can be acceleration in the vertical dimension. The inertial parameter can be acceleration in the horizontal dimension. 1. An inertial device having multiple degrees of freedom for determining an inertial parameter , the inertial device comprising:a first sense mass with a first degree of freedom;a second sense mass mechanically coupled to the first sense mass and with a second degree of freedom;a first time domain switch coupled to the first sense mass, and a second time domain switch coupled to the second sense mass;a drive structure configured to oscillate the first sense mass and the second sense mass in a differential frequency mode, wherein the first time domain switch and the second time domain switch each produce an electrical signal in response to oscillations of the first sense mass and the second sense mass; anda processor in signal communication with the first time domain switch and the second time domain switch, and configured to determine an inertial parameter based in part on time intervals produced by the electrical signal.2. The inertial device of claim 1 , wherein as the first sense mass and the second sense mass oscillate in the differential frequency mode claim 1 , the first time domain switch and the second time domain switch produce a differential signal.3. The inertial device of claim 2 , the inertial device further comprising:coupling springs mechanically ...

OPTICALLY ENABLED MEMS INERTIAL SENSORS ON INTEGRATED PHOTONIC PLATFORMS

A method of forming a photonic inertial sensor includes providing a substrate having an insulation layer and a silicon layer on the insulation layer opposite the substrate; etching the silicon layer to form a silicon proof mass for the photonic inertial sensor; etching at least a portion of the insulation layer underneath the silicon proof mass to suspend the silicon proof mass; and depositing a high-density mass-increasing layer on the silicon proof mass to thereby increase the mass of the silicon proof mass. 1. A method of forming a photonic inertial sensor , the method comprising:providing a substrate having an insulation layer and a silicon layer on the insulation layer opposite the substrate;etching the silicon layer to form a silicon proof mass for the photonic inertial sensor;etching at least a portion of the insulation layer underneath the silicon proof mass to suspend the silicon proof mass; anddepositing a mass-increasing layer on the silicon proof mass to thereby increase the mass of the silicon proof mass.2. The method of claim 1 , wherein the mass-increasing layer comprises metal.3. The method of claim 2 , wherein the metal comprises aluminum.4. The method of claim 1 , wherein depositing a mass-increasing layer on the silicon proof mass comprises Focused Ion Beam (FIB)-assisted deposition.5. The method of claim 1 , wherein etching the silicon layer to form a silicon proof mass for the photonic inertial sensor comprises forming a silicon proof mass comprising voids therein.6. The method of claim 1 , further comprising forming support springs that support the silicon proof mass when the silicon proof mass is suspended.7. The method of claim 6 , wherein the support springs comprise silicon from the silicon layer and wherein etching the silicon layer to form a silicon proof mass further comprises etching the silicon layer to form the support springs.8. The method of claim 1 , further comprising forming one or more waveguides on the silicon layer claim 1 , ...

NEAR-ZERO POWER WAKEUP ELECTRO-MECHANICAL SYSTEM

A MEMS includes, in part, a parallel plate capacitor, a proofmass adapted to be displaced by a first distance from a rest state in response to a first voltage applied to the capacitor, and a piezoelectric material adapted to generate a second voltage in response to an external force applied to the MEMS. The second voltage causes the MEMS to transition from a standby mode to an active mode of operation. The proofmass is displaced by a second distance in response to the external force thereby causing the piezoelectric material to generate the second voltage. A spring couples the proofmass to the piezoelectric material, and a transistor turns on in response to the second voltage thereby causing the MEMS to transition to the active mode of operation. The proofmass returns to the rest state when the MEMS is in the active mode of operation. 1. A MEMS comprising:a capacitor;a proofmass adapted to be displaced by a first distance from a rest state in response to a first voltage applied to the capacitor; anda piezoelectric material adapted to generate a second voltage in response to an external force applied to the MEMS, said second voltage causing the MEMS to transition from a standby mode to an active mode of operation.2. The MEMS of wherein said proofmass is adapted to be displaced by a second distance in response to the external force thereby causing the piezoelectric material to generate the second voltage.3. The MEMS of further comprising:a spring coupling the proofmass to the piezoelectric material.4. The MEMS of further comprising:a transistor adapted to be turned on in response to the second voltage.5. The MEMS of wherein said transistor is adapted to generate a current when turned on to cause the MEMS to transition to the active mode of operation.6. The MEMS of wherein said first voltage causes a near-buckling condition of a beam that mechanically couples the proofmass to the spring.7. The MEMS of wherein said first voltage pushes a pinned beam that mechanically ...

DYNAMIC SELF-CALIBRATION OF AN ACCELEROMETER SYSTEM

One embodiment includes a method for dynamic self-calibration of an accelerometer system. The method includes forcing a proof-mass associated with a sensor of the accelerometer system in a first direction to a first predetermined position and obtaining a first measurement associated with the sensor in the first predetermined position via at least one force/detection element of the sensor. The method also includes forcing the proof-mass to a second predetermined position and obtaining a second measurement associated with the sensor in the second predetermined position via the at least one force/detection element of the sensor. The method further includes calibrating the accelerometer system based on the first and second measurements. 1. A method for dynamic self-calibration of an accelerometer system , the method comprising:forcing a first proof-mass associated with a sensor of the accelerometer system in a first direction from an electrostatic null position to a first predetermined position in response to a first perturbation of the electrical null;obtaining a first measurement associated with a second proof-mass of the sensor with the first proof-mass in the first predetermined position via at least one first force/detection element of the sensor, the second proof-mass being coupled to the first proof-mass via a set of flexures;forcing the first proof-mass in a second direction opposite the first direction from the electrostatic null position to a second predetermined position that is symmetrical with respect to the first predetermined position in response to a second perturbation of the electrical null, the first and second perturbations being approximately equal and opposite;obtaining a second measurement associated with the second proof-mass of the sensor with the first proof-mass in the second predetermined position via at least one second force/detection element of the sensor; andcalibrating the accelerometer system based on the first and second measurements.2 ...

PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND MOBILE BODY

A physical quantity sensor has a first movable section, a second movable section that has a rotational moment, which is generated when acceleration is applied, that is different from the first movable section, a movable section that is supported so as to be able to rock about an axis which is positioned between the first movable section and the second movable section, a first detection electrode which is arranged so as to oppose the first movable section, a second detection electrode which is arranged so as to oppose the second movable section, and a frame-form section which is arranged so as to surround at least a portion of the periphery of the movable section in planar view of the movable section and which has the same potential as the movable section. 1. A physical quantity sensor comprising:a movable electrode which includes a movable section that has a first movable section which is included at one side and a second movable section which is included at the other side that has a rotational moment, which is generated when acceleration is applied, that is different from the first movable section, and that is supported so as to be able to rock about an axis which is positioned between the first movable section and the second movable section;a first electrode which is arranged so as to oppose the first movable section;a second electrode which is arranged so as to oppose the second movable section; anda peripherally arranged section which is arranged so as to surround at least a portion of the periphery of the movable section in planar view of the movable section, and which has the same potential as the movable electrode.2. The physical quantity sensor according to claim 1 ,wherein the peripherally arranged section is electrically connected to the movable electrode.3. The physical quantity sensor according to claim 1 ,wherein the peripherally arranged section has a frame form which surrounds the whole of the movable section in planar view of the movable section.4. ...

LOW-NOISE MULTI AXIS MEMS ACCELEROMETER

The present invention provides a high-accuracy low-noise MEMS accelerometer by using a larger, single proof mass to measure acceleration along two orthogonal axes. A novel arrangement of electrodes passively prevents cross axis error in the acceleration measurements. Novel arrangements of springs and a novel proof mass layout provide further noise reduction. 1. A two-axis MEMS accelerometer , comprising:a substrate, which defines a substrate plane;a proof mass; andtwo or more comb capacitors comprising moveable comb electrodes extending from the proof mass and stationary comb electrodes anchored to the substrate; a first set of moveable comb teeth that extend away from the proof mass in a first direction along a capacitor axis of the comb capacitor, the capacitor axis being parallel to the substrate plane;', 'a second set of moveable comb teeth that extend away from the proof mass in a second direction, opposite the first direction, along the capacitor axis;', 'a first set of stationary comb teeth opposite to and interdigitated with the first set of moveable comb teeth, wherein the first set of stationary comb teeth extend towards the proof mass in the second direction; and', 'a second set of stationary comb teeth opposite to and interdigitated with the second set of moveable comb teeth, wherein the second set of stationary comb teeth extend towards the proof mass in the first direction;, 'wherein each comb capacitor compriseswherein movement of the proof mass in the first direction causes the first set of moveable comb teeth and first set of stationary comb teeth to move closer together and causes the second set of moveable comb teeth and second set of stationary teeth to move further apart, and wherein movement of the proof mass in the second direction causes the first set of moveable comb teeth and first set of stationary comb teeth to move further apart and the second set of moveable comb teeth and second set of stationary teeth to move closer together.2. The ...

Hung Mass Accelerometer With Differential Eddy Current Sensing

A new class of accelerometer uses a differential Eddy current sensor to sense the displacement of the proof mass. This accelerometer can provide improved performance in an open-loop configuration based on the thermal stability and improved linearity of the differential Eddy current sensor. The accelerometer may provide lower cost alternatives to commercial grade accelerometers and lower cost and higher reliability alternatives to strategic grade accelerometers.

BIAS REDUCTION IN FORCE REBALANCED ACCELEROMETERS

A system is provided for the continuous reduction, in real time, of bias in a force rebalanced accelerometers having a proof mass coupled to an accelerometer housing by a flexure suspension. The system comprises a closed loop, force rebalance servo that provides control voltage to the proof mass to null an electrical pickoff signal that indicates the motion of the proof mass with respect to the accelerometer housing, wherein a time varying disturbance signal is injected into the force rebalance servo that results in the generation of a time varying voltage in the output of the force rebalance servo that corresponds to a magnitude of the net positive spring of the combined flexure suspension and electrostatic springs acting on the proofmass. The system also comprises a negative electrostatic spring servo that applies a negative electrostatic spring DC voltage to each of a pair of negative electrostatic forcer electrodes. 1. A system for reducing bias in an accelerometer having a proof mass coupled to an accelerometer housing by a flexure suspension and a pair of negative electrostatic forcer electrodes spaced apart from the proofmass on opposing sides , the system comprising:a force rebalance servo that provides a control signal to the proof mass in response to an electrical pickoff signal that indicates the motion of the proof mass relative to the accelerometer housing, wherein a time varying disturbance signal is injected into the force rebalance servo that results in the generation of a time varying signal in an output of the force rebalance servo that corresponds to a magnitude of a net positive spring force of the combined flexure suspension and electrostatic spring associated with bias voltages acting on the proof mass as it moves in response to the time varying disturbance signal; anda negative electrostatic spring servo that applies a negative electrostatic spring DC voltage to the pair of negative electrostatic forcer electrodes to cancel the net positive ...

ACCELEROMETERS

A method for closed loop operation of a capacitive accelerometer comprising: a proof mass; first and second sets of both fixed and moveable capacitive electrode fingers, interdigitated with each other; the method comprising: applying PWM drive signals to the fixed fingers; sensing displacement of the proof mass and changing the mark:space ratio of the PWM drive signals, to provide a restoring force on the proof mass that balances the inertial force of the applied acceleration and maintains the proof mass at a null position; detecting when the mark:space ratio for the null position is beyond a predetermined upper or lower threshold; and further modulating the PWM drive signals by extending or reducing x pulses in every y cycles, where x>1 and y>1, to provide an average mark:space ratio beyond the upper or lower threshold without further increasing or decreasing the mark length of the other pulses. 1. A method for closed loop operation of a capacitive accelerometer ,the capacitive accelerometer comprising:a substantially planar proof mass mounted to a fixed substrate by flexible support legs so as to be linearly moveable in an in-plane sensing direction in response to an applied acceleration;first and second sets of moveable capacitive electrode fingers extending from the proof mass, substantially perpendicular to the sensing direction and spaced apart in the sensing direction; andfirst and second sets of fixed capacitive electrode fingers extending substantially perpendicular to the sensing direction and spaced apart in the sensing direction;wherein the first set of fixed capacitive electrode fingers is arranged to interdigitate with the first set of moveable capacitive electrode fingers and the second set of fixed capacitive electrode fingers is arranged to interdigitate with the second set of moveable capacitive electrode fingers;the method comprising:applying an in-phase Pulse Width Modulation (PWM) drive signal to the first set of fixed capacitive electrode ...

WORKING MACHINE AND METHOD FOR DETERMINING ABNORMAL STATE OF WORKING MACHINE

A working machine according to one aspect of the present disclosure includes a main body portion, a driving device, a working tool, a grip portion and a determiner. The grip portion is attached to the main body portion and configured to be held by a user of the working machine. The determiner is configured to determine an abnormal state of the working machine when a couple moment received by the user through the grip portion exceeds a couple threshold. The couple threshold is 200 N·m per 50 ms. 1. A working machine comprising:a main body portion;a driving device attached to the main body portion and configured to rotate so as to generate rotational force;a working tool attached to one end of the main body portion so as to be driven by the rotational force generated by the driving device;a grip portion attached to the main body portion and configured to be held by a user of the working machine; anda determiner configured to determine an abnormal state of the working machine when a couple moment received by the user through the grip portion exceeds a couple threshold, the couple threshold being 200 N·m per 50 ms.2. The working machine according to further comprising a rotation speed detector configured to detect rotational speed of the driving device claim 1 ,wherein the determiner is configured to determine whether the couple moment estimated based on (i) inertia of the working tool set in advance, (ii) a variation in the rotation speed of the driving device detected by the rotation speed detector, and (iii) a distance from the working tool to the grip portion exceeds the couple threshold.3. The working machine according to further comprising:a rotation speed detector configured to detect rotational speed of the driving device; andan estimate device configured to estimate an inertia of the working tool,wherein the determiner is configured to determine whether the couple moment estimated based on (i) the inertia estimated by the estimate device, (ii) a variation in ...

IMPACT INDICATOR

According to one aspect of the present disclosure, a device and technique for impact detection includes a housing and switch circuitry having an omega-shaped switch element. A passive radio-frequency identification (RFID) module is coupled to the switch circuitry and is configured to detect a state of a circuit condition of the switch circuitry. A mass member is movable within the housing from a first position to a second position in response to receipt by the housing of an acceleration event. Movement of the mass member to the second position causes the mass member to move the switch element to change the state of the circuit condition of the switch circuitry. 1. An impact indicator , comprising:a housing;switch circuitry having an omega-shaped switch element;a passive radio-frequency identification (RFID) module coupled to the switch circuitry, the RFID module configured to detect a state of a circuit condition of the switch circuitry; anda mass member movable within the housing from a first position to a second position in response to receipt by the housing of an acceleration event, wherein movement of the mass member to the second position causes the mass member to move the switch element to change the state of the circuit condition of the switch circuitry.2. The impact indicator of claim 1 , wherein the switch element is a flexible switch element.3. The impact indicator of claim 1 , wherein the switch circuitry includes a plurality of spaced apart contacts.4. The impact indicator of claim 1 , wherein:the switch circuitry includes a plurality of spaced apart contacts; andthe switch element is movably positioned between the contacts.5. The impact indicator of claim 1 , wherein:the switch circuitry includes a plurality of spaced apart contacts; andthe switch element is retained between the contacts by a biasing force applied by the switch element to the contacts.6. The impact indicator of claim 1 , wherein the switch circuitry includes a plurality of spaced apart ...

MEMS Device, Electronic Apparatus, And Vehicle

A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface. 1. A MEMS device comprising:a base including a support portion and a fixed electrode;a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; andan abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface, whereinthe abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.2. The MEMS device according to claim 1 , whereinthe abutment portion is provided facing a corner portion of the movable body.3. The MEMS device according to claim 1 , whereina plurality of the abutment portions are provided.4. The MEMS device according to claim 1 , whereinthe hollow portion is opened in a surface on the side opposite to the abutment surface.5. The MEMS device according to claim 1 , whereinthe hollow portion is opened in a portion of the abutment surface.6. The MEMS device according to claim 1 , whereinthe hollow portion is a hole provided between the abutment surface and a surface on the opposite side.7. The MEMS device according to claim 6 , whereinthe hollow ...

PHYSICAL QUANTITY SENSOR, INERTIA MEASUREMENT DEVICE, VEHICLE POSITIONING DEVICE, PORTABLE ELECTRONIC APPARATUS, ELECTRONIC APPARATUS, AND VEHICLE

A physical quantity sensor includes a substrate, an element portion disposed so as to overlap the substrate, a conductor pattern disposed on the substrate so as to face the element portion, and a protection film covering at least a part of an exposed portion of the conductor pattern exposed from element portion in a plan view from a direction in which the substrate and the element portion overlap. 1. A physical quantity sensor comprising:a substrate;an element portion disposing overlap the substrate;a conductor pattern disposed on the substrate facing the element portion; anda protection film covering at least a part of an exposed portion of the conductor pattern exposed from the element portion in a plan view from a direction in which the substrate and the element portion overlap.2. The physical quantity sensor according to claim 1 , a movable portion including a first mass portion and a second mass portion,', 'a fixed portion attached to the substrate, and', 'a beam connecting the movable portion and the fixed portion with each other, and, 'wherein the element portion includes'} a first fixed electrode disposed to face the first mass portion, and', 'a second fixed electrode disposed to face the second mass portion., 'the conductor pattern includes'}3. The physical quantity sensor according to claim 2 ,wherein a through-hole is formed in the movable portion.4. The physical quantity sensor according to claim 2 ,wherein at least a part of a portion of the first fixed electrode facing the first mass portion is exposed from the protection film, andat least a part of a portion of the second fixed electrode facing the second mass portion is exposed from the protection film.5. The physical quantity sensor according to claim 2 ,wherein the conductor pattern includes a wiring, anda thickness of the protection film provided on the wiring is thicker than a thickness of the protection film disposed on each of the first fixed electrode and the second fixed electrode.6. The ...

High Aspect-Ratio Low Noise Multi-Axis Accelerometers

The design and fabrication of a multi-axis capacitive accelerometer is presented with sub-μg resolution based on CMOS-compatible fabrication technology that can provide large proof-mass, high-aspect ratio and a large sense electrode area within a smaller footprint that previous accelerometers. In some instances, the device footprint can be reduced by placing the sense electrodes near the top or bottom of the transducer structure such that motion of the transducer causes size of the sense gap to vary in a direction that is parallel with longitudinal axis of the support beam for the transducer structure. An extra mass can also be added to the top of the transducer structure to increase sensitivity. 1. A transducer with a high aspect ratio , comprising:a substrate;a transducer structure mounted on a top surface of the substrate and extending upwardly from the top surface of the substrate, wherein the transducer structure is comprised of a support beam integrally formed with a proof-mass; andone or more sensing electrodes mounted to the top surface of the substrate and spatially separated from the transducer structure, wherein the one or more sensing electrodes are configured to measure a change in a gap formed between the one or more electrodes and the transducer structure, such that motion of the transducer structure causes size of the gap to vary in a direction that is parallel with longitudinal axis of the cantilever beam.2. The transducer of wherein the proof-mass extends from top of the support beam downwardly along one or more side surfaces of the support beam towards the top surface of the substrate.3. The transducer of wherein the gap is formed between a bottom surface of the proof-mass facing the top surface of the substrate and the top surface of the substrate.4. The transducer of wherein dimension of the gap between the bottom surface of the proof-mass and the top surface of the substrate is less than one micron.5. The transducer of wherein the transducer ...

ACCELEROMETER CONTROL

An accelerometer closed loop control system comprising: a capacitive accelerometer comprising a proof mass moveable relative to first and second fixed capacitor electrodes; a PWM generator to generate in-phase and anti-phase PWM drive signals with an adjustable mark/space ratio, wherein said drive signals are applied to the first and second electrodes such that they are charged alternately; an output signal detector to detect a pick-off signal from the accelerometer representing a displacement of the proof mass from a null position to provide an error signal, wherein the null position is the position of the proof mass relative to the fixed electrodes when no acceleration is applied; a PWM servo operating in closed loop to vary the mark/space ratio of said PWM drive signals in response to the error signal so that mechanical inertial forces are balanced by electrostatic forces. 1. An accelerometer closed loop control system comprising:a capacitive accelerometer comprising a proof mass moveable relative to first and second fixed capacitor electrodes;a pulse width modulation (PWM) generator arranged to generate in-phase and anti-phase PWM drive signals with a drive frequency and an adjustable mark/space ratio, wherein said in-phase and anti-phase PWM drive signals are applied to the first and second fixed capacitor electrodes respectively such that they are charged alternately;an output signal detector arranged to detect a pick-off signal from the accelerometer representing a displacement of the proof mass from a null position to provide an error signal, wherein the null position is the position of the proof mass relative to the first and second fixed capacitor electrodes when no acceleration is applied;a PWM servo operating in closed loop arranged to vary the adjustable mark/space ratio of said in-phase and anti-phase PWM drive signals in response to the error signal so that mechanical inertial forces are balanced by electrostatic forces to maintain the operating point ...

LOW-POWER ACCELEROMETER

The invention relates to an accelerometer comprising a plurality of proof-masses (M-M) moveable along a measurement axis (AB); a respective spring (K-K) rigidly attached to each proof-mass, configured to exert an elastic recall on the proof-mass in the measurement axis; a fixed stop (S-S) associated with each proof-mass, arranged to intercept the proof-mass when the acceleration in the measurement axis increases by a step; and an electrical contact associated with each stop, configured to be closed when the associated proof-mass reaches the stop. The proof-masses are suspended in series with respect to one another by springs in the measurement axis, the stops being arranged to successively intercept the respective proof-masses for increasing thresholds of acceleration. 2. The accelerometer according to claim 1 , wherein each of the first and last proof-masses of the series is suspended to a fixed point by a spring.3. The accelerometer according to claim 2 , wherein the stops are arranged to intercept alternately a proof-mass of rank decreasing from the last rank of the series and a proof-mass of rank increasing from the first rank of the series.4. The accelerometer according to claim 2 , comprising two stops per proof-mass claim 2 , a first of the two stops being arranged to intercept the proof-mass in a first direction of travel along the measurement axis claim 2 , and the second stop being arranged to intercept the proof-mass in the opposite direction of travel.5. The accelerometer according to claim 1 , comprising a pair of stops for each proof-mass claim 1 , the two stops of the pair being arranged at opposite ends of the proof-mass transversely to the measurement axis.6. The accelerometer according to claim 5 , wherein each proof-mass and its two stops are configured to close the respective electrical contact when the proof-mass rests simultaneously on the two stops.7. The accelerometer according to claim 5 , wherein the two stops of a pair associated with a ...

PIEZOELECTRIC ACCELEROMETER

An acceleration change sensor includes a flexible member comprising extensions extending from a central portion. Piezoelectric capacitors are provided on respective extensions. A proof mass is coupled to the flexible member and offset from each extension of the plurality of extensions. 1. An integrated circuit (IC) , comprising:a flexible plate comprising a first pair of arms and a second pair of arms, the first pair orthogonal to the second pair;piezoelectric capacitors on each of respective arms of the first pair and on each of the arms of the second pair; anda proof mass coupled to the flexible plate and offset from the first and second pair of arms.2. The IC of claim 1 , wherein each arm of the first and second pair of arms is trapezoidal from an outside edge of the arm towards a center of the arm.3. The IC of claim 1 , wherein the arms of the first pair of arms have opposing ends and are tapered between the opposing ends.4. The IC of claim 1 , wherein the proof mass comprises silicon.5. The IC of claim 1 , wherein the arms of the first pair are parallel to each other claim 1 , and the arms of the second pair are parallel to each other.6. The IC of claim 1 , wherein the proof mass resides at least partially within a cavity of the IC claim 1 , and the IC further includes a cap on a side of the flexible plate opposite the proof mass.7. The IC of claim 1 , further comprising reference piezoelectric capacitors claim 1 , wherein the piezoelectric capacitors on the arms are subject to strain as the proof mass moves due to acceleration claim 1 , but the reference capacitors are arranged so as not to be subject to the strain.8. The IC of claim 1 , further comprising pre-amplifiers coupled to the piezoelectric capacitors claim 1 , the pre-amplifiers configured to provide a three-axis measurement of changes in acceleration.9. The IC of claim 1 , wherein the flexible plate comprises silicon dioxide.10. An acceleration change sensor claim 1 , comprising:a flexible member ...

STRESS RELIEVING SENSOR FLANGE

The disclosure describes a sensor that includes a transducer, a case, and a mounting flange. The transducer defines an input axis. The case is configured to house the transducer. The mounting flange is statically coupled to the case and flexibly coupled to the transducer. The mounting flange defines an opening and includes a plurality of flexure elements extending radially into the opening to contact the transducer. Each flexure element is configured to flex in a radial direction perpendicular to the input axis and remain fixed in an axial direction parallel to the input axis. 1. A sensor comprising:a transducer defining an input axis;a case configured to house the transducer; anda mounting flange statically coupled to the case and flexibly coupled to the transducer,wherein the mounting flange defines an opening and comprises a plurality of flexure elements extending radially into the opening to contact the transducer, each flexure element configured to flex in a radial direction perpendicular to the input axis and remain fixed in an axial direction parallel to the input axis.2. The sensor of claim 1 , wherein each flexure element of the plurality of flexure elements comprises a discrete radial pad contacting the transducer.3. The sensor of claim 1 , wherein the discrete radial pad of each of the plurality of flexure elements includes a preform configured to couple the discrete radial pad to the transducer and electrically isolate the transducer from the mounting flange.4. The sensor of claim 1 , wherein the sensor is an accelerometer.5. The sensor of claim 1 , wherein the mounting flange is a monolithic unit.6. The sensor of claim 1 , wherein the transducer further comprises an upper stator and a lower stator claim 1 , andwherein the mounting flange is configured to flexibly couple to at least one of the upper stator or the lower stator.7. The sensor of claim 6 , wherein a coefficient of thermal expansion of the upper stator or the lower stator flexibly coupled to ...

ACCELEROMETERS

In a method for open loop operation of a capacitive accelerometer, a first mode of operation comprises electrically measuring a deflection of a proof mass () from the null position under an applied acceleration using a pickoff amplifier () set to a reference voltage Vcm. A second mode of operation comprises applying electrostatic forces in order to cause the proof mass () to deflect from the null position, and electrically measuring the forced deflection so caused. In the second mode of operation the pickoff amplifier () has its input () switched from Vcm to Vss, using a reference control circuit (), so that drive amplifiers () can apply different voltages Vdd to the proof mass () and associated fixed electrodes (). 1. A method for open loop operation of a capacitive accelerometer , the capacitive accelerometer comprising:a substantially planar proof mass mounted to a fixed substrate by flexible support legs so as to be linearly moveable in an in-plane sensing direction in response to an applied acceleration;first and second sets of moveable capacitive electrode fingers extending from the proof mass, substantially perpendicular to the sensing direction and spaced apart in the sensing direction; andfirst and second sets of fixed capacitive electrode fingers extending substantially perpendicular to the sensing direction and spaced apart in the sensing direction;wherein the first set of fixed capacitive electrode fingers is arranged to interdigitate with the first set of moveable capacitive electrode fingers and the second set of fixed capacitive electrode fingers is arranged to interdigitate with the second set of moveable capacitive electrode fingers;wherein a null position is defined as a spacing of the interdigitated fixed and moveable capacitive electrode fingers when the applied acceleration is zero;the method comprising:a first mode of operation which comprises electrically measuring a deflection of the proof mass including the moveable capacitive electrode ...

Mems sensor and a semiconductor package

The MEMS sensor of the invention has movable and fixed components for measuring acceleration in a rotational mode in a direction in-plane perpendicular to spring axis. The components include an element frame, a substrate, a proof-mass a spring connected to the proof-mass and to the substrate, and comb electrodes. The MEMS sensor is mainly characterized by an arrangement of the components causing an inherent sensitivity for measuring accelerations in a range covering longitudinal and transversal accelerations. One or more of the components are tilted compared to the element frame. The semiconductor package of the invention comprises at least one MEMS sensor.

Acceleration Measurements for Impact Evaluation

The present invention comprises apparatuses and methods of detecting impacts to the head. Accelerometers attached to a user's head and neck or body is used to measure the differential acceleration of the head with respect to the neck or body. A differential acceleration exceeding a certain threshold may be indicative of the user suffering a traumatic brain injury. 1. A system for evaluating an effect of an impact , the system comprising:a first accelerometer configured to acquire acceleration data for a location on a head of a user;a second accelerometer configured to acquire acceleration data for a location on a neck of the user;means for calculating a differential acceleration of the head in comparison to the neck as a result of the impact using the acceleration data acquired by the first and second accelerometers; andmeans for evaluating the effect of the impact based on the differential acceleration.2. The system of claim 1 , wherein the means for calculating includes a processor operably coupled to the first and second accelerometers.3. The system of claim 1 , further comprising a flexible frame coupled to the first accelerometer and the second accelerometer claim 1 , wherein the flexible frame is configured to hold the first accelerometer at the location on the head and hold the second accelerometer at the location on the neck.4. The system of claim 3 , wherein the flexible frame is attached to skin of the user at each of the location on the head and the location on the neck.5. The system of claim 3 , wherein the flexible frame includes a central region configured to fit behind an ear of the user.6. The system of claim 1 , wherein the location on the head is one of: a forehead or a temple of the user.7. The system of claim 1 , wherein the location on the head is above or behind an ear of the user.8. The system of claim 1 , further comprising:a third accelerometer configured to acquire acceleration data for a second location on the head of the user;means for ...

DISCHARGE CIRCUITS, DEVICES AND METHODS

Discharge circuits, devices and methods. In some embodiments, a MEMS device can include a substrate and an electromechanical assembly implemented on the substrate. The MEMS device can further include a discharge circuit implemented relative to the electromechanical assembly. The discharge circuit can be configured to provide a preferred arcing path during a discharge condition affecting the electromechanical assembly. The MEMS device can be, for example, a switching device, a capacitance device, a gyroscope sensor device, an accelerometer device, a surface acoustic wave (SAW) device, or a bulk acoustic wave (BAW) device. The discharge circuit can include a spark gap assembly having one or more spark gap elements configured to facilitate the preferred arcing path. 1a substrate;an electromechanical assembly implemented on the substrate; anda discharge circuit implemented relative to the electromechanical assembly, the discharge circuit configured to provide a preferred arcing path during a discharge condition affecting the electromechanical assembly.. A microelectromechanical systems (MEMS) device comprising: This application is a continuation of U.S. application Ser. No. 14/685,554 filed Apr. 13, 2015, entitled MEMS DEVICES HAVING DISCHARGE CIRCUITS, which claims priority to and the benefit of the filing date of U.S. Provisional Application No. 61/979,492 filed Apr. 14, 2014, entitled MEMS DEVICES HAVING DISCHARGE CIRCUITS, the benefits of the filing dates of which are hereby claimed and the disclosures of which are hereby expressly incorporated by reference herein in their entirety.The present disclosure relates to microelectromechanical systems (MEMS) devices having discharge circuits.Microelectromechanical systems devices, or MEMS devices, typically include miniaturized mechanical and electro-mechanical elements. Such MEMS devices can include moving elements controlled by a controller to provide desired functionalities. MEMS devices are sometimes referred to as ...

ACCELEROMETERS

A method for closed loop operation of a capacitive accelerometer uses a single current source () and a single current sink () to apply an in-phase drive signal V′ to a first set of fixed capacitive electrode fingers and a corresponding anti-phase drive signal V′ to a second set of fixed capacitive electrode fingers. This provides a net electrostatic restoring force on the proof mass for balancing the inertial force of the applied acceleration and maintains the proof mass at a null position. 1. A method for closed loop operation of a capacitive accelerometer , the capacitive accelerometer comprising:a substantially planar proof mass mounted to a fixed substrate by flexible support legs so as to be linearly moveable in an in-plane sensing direction in response to an applied acceleration;first and second sets of moveable capacitive electrode fingers extending from the proof mass, substantially perpendicular to the sensing direction and spaced apart in the sensing direction; andfirst and second sets of fixed capacitive electrode fingers extending substantially perpendicular to the sensing direction and spaced apart in the sensing direction;wherein the first set of fixed capacitive electrode fingers is arranged to interdigitate with the first set of moveable capacitive electrode fingers and the second set of fixed capacitive electrode fingers is arranged to interdigitate with the second set of moveable capacitive electrode fingers;the method comprising:using a single current source and sink to apply an in-phase drive signal to the first set of fixed capacitive electrode fingers and a corresponding anti-phase drive signal to the second set of fixed capacitive electrode fingers so as to provide a net electrostatic restoring force on the proof mass for balancing the inertial force of the applied acceleration and maintaining the proof mass at a null position.2. The method of claim 1 , further comprising:using a control signal to adjust the drive signal applied to at least ...

CENTER OF GRAVITY SHIFTING FORCE DEVICE

A system for exerting forces on a user. The system includes a user-mounted device including one or more masses, one or more sensors configured to acquire sensor data, and a processor coupled to the one or more sensors. The processor is configured to determine at least one of an orientation and a position associated with the user-mounted device based on the sensor data. The processor is further configured to compute a force to be exerted on the user via the one or more masses based on a force direction associated with a force event and at least one of the orientation and the position. The processor is further configured to generate, based on the force, a control signal to change a position of the one or more masses relative to the user-mounted device. 1. A system for exerting forces on a user , the system comprising:a user-mounted device including one or more masses;one or more sensors configured to acquire sensor data; anda processor coupled to the one or more sensors and configured to:determine at least one of an orientation and a position of the user-mounted device based on the sensor data;compute a force to be exerted on the user via the one or more masses based on a force direction associated with a force event and at least one of the orientation and the position; andgenerate, based on the computed force, an actuator control signal to change a position of the one or more masses relative to the user-mounted device.2. The system of claim 1 , wherein the processor is further configured to determine that at least one of the orientation and the position has changed claim 1 , and claim 1 , in response claim 1 , generate a second actuator control signal to reposition at least one mass relative to the user-mounted device.3. The system of claim 1 , wherein the processor is configured to compute the force to be exerted on the user by computing a center of gravity associated with the one or more masses.4. The system of claim 1 , wherein the user-mounted device further ...

Physical quantity sensor, physical quantity sensor device, electronic apparatus, and vehicle

A physical quantity sensor includes: a base; wiring disposed in the base; a support that includes a first bonded surface bonded to the base and a second bonded surface bonded to the wiring; a suspension beam connected to the support; and an electrode finger supported by the suspension beam. The support is located between the first bonded surface and the suspension beam and includes a first overhang separated from the base.

PHYSICAL QUANTITY SENSOR, ELECTRONIC DEVICE, AND MOBILE BODY

A physical quantity sensor has a first movable section, a second movable section that has a rotational moment, which is generated when acceleration is applied, that is different from the first movable section, a movable section that is supported so as to be able to rock about an axis which is positioned between the first movable section and the second movable section, a first detection electrode which is arranged so as to oppose the first movable section, a second detection electrode which is arranged so as to oppose the second movable section, and a frame-form section which is arranged so as to surround at least a portion of the periphery of the movable section in planar view of the movable section and which has the same potential as the movable section. 1. A physical quantity sensor comprising:a movable electrode which includes an H-shaped support section and a movable section connected to the H-shaped support section by a pair of linking sections that extend outward from the H-shaped support section, the movable section having a first movable section which is included at one side of the H-shaped support section and a second movable section which is included at the other side of the H-shaped support section and that has a rotational moment, which is generated when acceleration is applied, that is different from the first movable section, and that is supported so as to be able to rock about an axis defined by the pair of linking sections that are positioned between the first movable section and the second movable section;a first electrode which is arranged so as to oppose the first movable section;a second electrode which is arranged so as to oppose the second movable section;a third electrode which is arranged so as to oppose the movable section, and not to overlap with the first electrode and the second electrode in a plan view of the movable section, and has the same electric potential as the movable electrode; anda peripherally arranged section which is ...

ACCELEROMETER WITH BUILT-IN TEMPERATURE CORRECTION

Systems and methods are disclosed for generating temperature compensated acceleration data in analog and digital format from a torque balance accelerometer (TBA). During manufacture of the TBA, a calibration process is used for measuring a TBA scale factor and offset. After collecting scale and offset data, said data is loaded into the memory of the TBA. Field operation of the device includes: sensing a current temperature, retrieving the closest scale and offset correction factors from memory of the TBA, and performing linear interpolation to generate a temperature-compensated output for the TBA. 1. A method for internally generating temperature compensated acceleration analog and digital output data from a torque balance accelerometer (TBA) having at least one flexure arm , comprising:ablating one side of the flexure arm to detect acceleration;performing factory calibration of the TBA by collecting scale and offset correction factors at one or more temperatures and storing the scale and offset correction factors in a memory of the TBA;during field operation, sensing a current temperature, retrieving the scale and offset correction factors associated with a current temperature from the memory of the TBA, and performing linear interpolation to generate temperature-compensated analog and digital data outputs for the TBA.2. The method of claim 1 , comprising:receiving an analog output from the TBA;reading scale and offset correction factors from two calibrated temperatures one above and one below the current temperature;determining an adjusted scale and offset correction factor for the current temperature.3. The method of claim 2 , wherein the determining an adjusted scale and offset correction factor comprises linearly interpolating the factors.4. The method of claim 1 , comprising generating as an output a temperature calibrated analog voltage proportional to an acceleration.5. The method of claim 1 , wherein the TBA includes a flapper whose movement correlates with ...

ACCELEROMETER

An accelerometer includes a planar proof mass mounted to a fixed substrate so as to be linearly moveable in an out-of-plane sensing direction in response to an applied acceleration. The proof mass includes first and second sets of moveable capacitive electrode fingers extending from the proof mass perpendicular to the sensing direction in a first in-plane direction and laterally spaced in a second in-plane direction perpendicular to the sensing direction. The moveable capacitive electrode fingers interdigitate with corresponding sets of fixed capacitive electrode fingers mounted to the substrate. The first set of fixed fingers has a thickness less than a thickness of the first set of moveable fingers; and wherein the second set of fixed fingers has a thickness greater than a thickness of the second set of moveable fingers. 1. An accelerometer comprising:a substantially planar proof mass mounted to a fixed substrate by a support, said proof mass being connected to the support by a compliant flexure so as to be linearly moveable in an out-of-plane sensing direction in response to an applied acceleration;the proof mass comprising first and second sets of moveable capacitive electrode fingers extending from the proof mass substantially perpendicular to the out-of-plane sensing direction in a first in-plane direction and laterally spaced in a second in-plane direction perpendicular to the out-of-plane sensing direction; andfirst and second fixed capacitor electrodes mounted to the fixed substrate, the first fixed capacitor electrode comprising a first set of fixed capacitive electrode fingers and the second fixed capacitor electrode comprising a second set of fixed capacitive electrode fingers; wherein the first and second sets of fixed capacitive electrode fingers extend in the first in-plane sensing direction and are laterally spaced in the second in-plane sensing direction;wherein the first set of fixed capacitive electrode fingers is arranged to interdigitate with ...

DUAL CAPACITIVE LINEARIZATION CIRCUIT

A MEMS system includes a proof mass, an anchor, an amplifier, first and second sense elements and their corresponding feedback elements. The proof mass moves responsive to a stimulus. The anchor coupled to the proof mass via a spring. The amplifier receives a proof mass signal from the proof mass and amplifies the signal to generate an output signal. The first sense element is connected between the proof mass and a first input signal and the second sense element is connected between the proof mass and a second input signal. The second input signal has a polarity opposite to the first input signal. The first feedback element is connected between the proof mass and the output signal and its charges change responsive to proof mass displacement. The second feedback element is connected between the proof mass and the output signal and its charges change in response to proof mass displacement. 1. A micro-electro-mechanical system comprising:a proof mass configured to move in response to a stimulus;an anchor coupled to the proof mass via a spring;an amplifier configured to receive a proof mass signal from the proof mass via the spring and the anchor, wherein the amplifier is configured to amplify the received proof mass signal to generate an output signal;a first sense element connected between the proof mass and a first input signal;a second sense element connected between the proof mass and a second input signal, wherein the second input signal has a polarity opposite to the first input signal;a first feedback element connected between the proof mass and the output signal, wherein the first feedback element generates a first feedback signal in response to proof mass displacement; anda second feedback element connected between the proof mass and the output signal, wherein the second feedback element generates a second feedback signal in response to proof mass displacement.2. The micro-electro-mechanical system as described in claim 1 , wherein a distance between the first ...

HIGH PERFORMANCE MICRO-ELECTRO-MECHANICAL SYSTEMS ACCELEROMETER

There is provided a resonant sensor comprising: a substrate; a proof mass suspended from the substrate by one or more flexures to allow the proof mass to move relative to the frame along a sensitive axis; a first and a second resonant element connected between the frame and the proof mass; wherein the proof mass is positioned between the first and the second resonant element along the sensitive axis, and wherein the first and the second resonant elements have a substantially identical structure to one another; and drive and sensing circuitry comprising: a first electrode assembly coupled to first drive circuitry configured to drive the first resonant element in a first mode; a second electrode assembly coupled to second drive circuitry configured to drive the second resonant element in a second mode, different to the first mode; and a sensing circuit configured to determine a measure of acceleration. 1. A resonant sensor comprising:a substrate;a proof mass suspended from the substrate by one or more flexures to allow the proof mass to move relative to the frame along a sensitive axis;a first resonant element connected between the frame and the proof mass;a second resonant element connected between the frame and the proof mass, wherein the first resonant element and the second resonant element are positioned so that the proof mass is between the first resonant element and the second resonant element along the sensitive axis, and wherein the first resonant element and the second resonant element have a substantially identical structure to one another; anddrive and sensing circuitry comprising:a first electrode assembly coupled to a first drive circuit configured to drive the first resonant element in a first mode;a second electrode assembly coupled to a second drive circuit configured to drive the second resonant element in a second mode, different to the first mode; anda sensing circuit configured to determine a measure of acceleration based on changes in resonant ...

ACCELERATION SENSOR, ESPECIALLY DUPLEX ACCELERATION SENSOR, ARRANGEMENT AND METHOD FOR DETECTING A LOSS OF ADHESION OF A VEHICLE TIRE

The invention relates to an acceleration sensor, especially a duplex acceleration sensor, an arrangement and a method for detecting a loss of road grip of a vehicle wheel (). The acceleration sensor comprises a tube () having a longitudinal axis forming a circular arc segment, and two closed ends. A mass () is arranged inside the tube () such that is able to move inside the tube () in the longitudinal direction thereof. A magnet arrangement () is designed to counteract, by way of a magnetic force exerted on the mass (), a movement of said mass () from an idle position (), and a read-out unit () is designed to detect a movement of said mass () from the idle position (). 13. An acceleration sensor for detecting a loss of road grip of a vehicle wheel () , comprising:{'b': 5', '7', '9, 'a tube () having a longitudinal axis forming a circular arc segment, and two closed ends (, ),'}{'b': 15', '315', '5', '5, 'a mass (; ) arranged inside the tube () such that it is able to move inside said tube () in the longitudinal direction thereof,'}{'b': 17', '203', '205', '317', '15', '315', '15', '315', '25, 'a magnet arrangement (; ; ; ) designed to counteract, by way of a magnetic force exerted on the mass (; ), a movement of the mass (; ) from an idle position (), and'}{'b': 608', '15', '315', '25, 'a read-out unit () designed to detect a movement of said mass (; ) from said idle position (),'}{'b': '5', 'wherein the tube () is preferably arranged at the vehicle wheel in such a way that a movement of the mass from the idle position will occur if the acceleration of the vehicle wheel changes.'}2. An acceleration sensor in accordance with claim 1 ,{'b': 17', '203', '205', '317', '5, 'wherein the magnet arrangement (; ; ; ) comprises an electric coil arrangement at least partially enclosing the tube (), in particular a circular arc coil.'}3. An acceleration sensor in accordance with claim 1 ,{'b': 17', '317', '15', '315, 'wherein the magnet arrangement comprises a magnet section (; ...

MULTI-AXIS ACCELEROMETERS WITH REDUCED CROSS-AXIS SENSITIVITY

A multi-axis accelerometer may include a proof mass, a first electrode set, and a second electrode set. The first electrode set may detect acceleration along a second axis of the accelerometer, and may include a first electrode (C) and a second electrode (C). The second electrode set may detect acceleration along a first axis of the accelerometer that is orthogonal to the second axis, and may include a third electrode (C) and a fourth electrode (C). Application of a force along only the second axis may result in the exhibition of a non-zero change in differential capacitance between at least C and C, but a zero net change in the differential capacitance between at least C and C. As such, the accelerometer may exhibit little or no cross axis sensitivity in response to the applied force. 1. A multi-axis accelerometer comprising:a proof mass;{'b': 1', '2, 'a first electrode set configured to detect acceleration along a second axis of the accelerometer, the first electrode set comprising a first electrode (C) and a second electrode (C);'}{'b': 3', '4, 'a second electrode set configured to detect acceleration along a first axis of the accelerometer that is orthogonal to the second axis, the second electrode set comprising a third electrode (C) and a fourth electrode (C);'} [{'b': 1', '2, 'a non-zero change in differential capacitance is exhibited between at least C and C, the non-zero net change in differential capacitance corresponding to acceleration along the first axis due to the force applied only along the second axis; and'}, {'b': 3', '4, 'a zero net change in differential capacitance is exhibited between at least C and C.'}], 'wherein the first and second electrode sets are configured such that in response to a force applied only along the second axis of the accelerometer2. The multi-axis accelerometer of claim 1 , wherein the first and second electrode sets are configured such that in response to a force applied only along the first axis of the accelerometer:{'b ...

SINGLE AXIS INERTIAL SENSOR WITH SUPPRESSED PARASITIC MODES

A single axis inertial sensor includes a proof mass spaced apart from a surface of a substrate. The proof mass has first, second, third, and fourth sections. The third section diagonally opposes the first section relative to a center point of the proof mass and the fourth section diagonally opposes the second section relative to the center point. A first mass of the first and third sections is greater than a second mass of the second and fourth sections. A first lever structure is connected to the first and second sections, a second lever structure is connected to the second and third sections, a third lever structure is connected to the third and fourth sections, and a fourth lever structure is connected to the fourth and first sections. The lever structures enable translational motion of the proof mass in response to Z-axis linear acceleration forces imposed on the sensor. 1. An inertial sensor comprising:a proof mass spaced apart from a planar surface of a substrate, the proof mass having a first section, a second section, a third section and a fourth section, the third section diagonally opposing the first section relative to a center point of the proof mass, the fourth section diagonally opposing the second section relative to the center point of the proof mass, each of the first and third sections having a first mass, and each of the second and fourth sections having a second mass, the first mass being greater than the second mass;a first lever structure connected to each of the first and second sections;a second lever structure connected to each of the second and third sections;a third lever structure connected to each of the third and fourth sections; anda fourth lever structure connected to each of the fourth and first sections, wherein the first, second, third, and fourth lever structures are configured to function cooperatively to enable translational motion of the first, second, third, and fourth sections of the proof mass in response to a linear ...

INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME

Disclosed herein are an inertial sensor and a method of manufacturing the same. The inertial sensor according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane a mass body disposed under a central portion of the membrane a post disposed under an edge of the membrane so as to support the membrane and a bottom cap of which the edge is provided with the first cavity into which an adhesive is introduced, wherein the adhesive bonds an edge to a bottom surface of the post, whereby the edge of the bottom cap is provided with the first cavity to introduce the adhesive into the first cavity thereby preventing the adhesive from being permeated into the post 17-. (canceled)8. A method of manufacturing an inertial sensor , comprising:(A) preparing a bottom cap;(B) forming a first cavity at an edge of the bottom cap;(C) preparing a plate-shaped membrane, a mass body disposed under a central portion of the membrane, and a post disposed under the edge of the membrane so as to support the membrane; and(D) bonding the edge of the bottom cap to the bottom surface of the post with an adhesive so as to cover the mass body and the post and introducing the adhesive into the first cavity.9. The method as set forth in claim 8 , further comprising after step (A) claim 8 , forming a spacer having a predetermined thickness on the top surface of the bottom cap claim 8 ,wherein at step (D), the gap between the bottom surface of the post and the top surface of the bottom cap is equal to the predetermined thickness.10. The method as set forth in claim 9 , wherein at the forming of the spacer claim 9 , the spacer is disposed along the outermost side or the innermost side between the post and the bottom cap.11. The method as set forth in claim 9 , further comprising after step (D) claim 9 , removing a portion corresponding to the top portion of the spacer in the membrane and the post claim 9 , a portion corresponding to the bottom portion of the ...

Inertia Sensor

There is provided an inertia sensor with low noise and high sensitivity. The inertia sensor captures a physical quantity as a change of electrostatic capacitance and detects the physical quantity based on a servo voltage generating electrostatic force that cancels the change of the electrostatic capacitance. The inertia sensor includes a detection capacitor unit that captures the physical quantity as the change of the electrostatic capacitance and a servo capacitor unit to which the servo voltage is applied. Here, the detection capacitor unit and the servo capacitor unit are connected mechanically through an insulation material. 1. An inertia sensor that captures a physical quantity as a change of electrostatic capacitance and detects the physical quantity based on a servo voltage generating electric force that cancels the change of the electrostatic capacitance , the inertia sensor comprising:a detection capacitor unit that captures the physical quantity as the change of the electrostatic capacitance; anda servo capacitor unit to which the servo voltage is applied,wherein the detection capacitor unit and the servo capacitor unit are connected mechanically through an insulation material.2. The inertia sensor according to claim 1 ,wherein the detection capacitor unit and the servo capacitor unit are separated electrically.3. The inertia sensor according to claim 1 ,wherein the detection capacitor unit includes a detection capacitor pair, andwherein the servo capacitor unit includes a servo capacitor pair.4. The inertia sensor according to claim 3 ,wherein the servo voltage includes a DC voltage component and an AC voltage component, andwherein the servo capacitor unit includesa DC voltage applying servo capacitor pair to which the DC voltage component of the servo voltage is applied andan AC voltage applying servo capacitor pair to which the AC voltage component of the servo voltage is applied.5. The inertia sensor according to claim 4 ,wherein the DC voltage ...

Variable capacitance accelerometer with meandering flexures

An accelerometer comprises a support ( 12 ), a proof mass ( 14 ) supported for movement relative to the support ( 12 ) by a plurality of mounting legs ( 16 ), a plurality of fixed capacitor fingers associated with the support ( 12 ) and a plurality of movable capacitor fingers associated with the proof mass ( 14 ), the fixed capacitor fingers being interdigitated with the movable capacitor fingers, the mounting legs ( 16 ) being of serpentine shape, each mounting leg ( 16 ) comprising at least a first generally straight section ( 16 a ), a second generally straight section ( 16 a ), and an end section ( 16 b ) of generally U-shaped form interconnecting the first and second generally straight sections ( 16 a ), wherein the thickness Te of the end section ( 16 b ) is greater than the thickness Tc of a central part ( 16 c ) of both of the first and second generally straight sections ( 16 a ).

Methods for closed loop operation of capacitive accelerometers

A capacitive accelerometer includes a proof mass, first and second fixed capacitive electrodes, and a DC biasing element arranged to apply a DC voltage (VB) to the proof mass based on a threshold acceleration value. A first closed loop circuit is arranged to detect a signal resulting from displacement of the proof mass and control the pulse width modulation signal generator to apply the first and second drive signals V1, V2 with a variable mark:space ratio. A second closed loop circuit keeps the mark:space ratio constant and to change the magnitude, VB, of the DC voltage applied to the proof mass by the DC biasing element so as to provide a net electrostatic restoring force on the proof mass for balancing the inertial force of the applied acceleration and maintaining the proof mass at a null position, when the applied acceleration is greater than a threshold acceleration value.

MULTILAYER EXCITATION RING

The disclosure describes a magnetic circuit assembly that includes a magnet assembly and an excitation ring. The magnet assembly defines a central axis and includes a pole piece and a magnet underlying the pole piece. The excitation ring includes a base and an outer ring positioned around the magnet assembly. The base includes a platform layer underlying the magnet, an upper base layer underlying the platform layer, and a lower base layer underlying the upper base layer. The outer ring overlies the upper base layer and is configured to couple to an outer radial portion of a proof mass assembly. The platform layer and lower base layer are made from high coefficient of thermal expansion (CTE) materials, while the upper base layer and outer ring are made from low CTE materials. Each relatively high CTE material has a higher CTE than each relatively low CTE material. 1. A magnetic circuit assembly comprising: a pole piece; and', 'a magnet underlying the pole piece, wherein the magnet comprises a relatively high coefficient of thermal expansion (CTE) material; and, 'a magnet assembly defining a central axis, wherein the magnet assembly comprises [ a platform layer underlying the magnet, wherein the platform layer comprises a relatively high CTE material;', 'an upper base layer underlying the platform layer, wherein the upper base layer comprises a relatively low CTE material; and', 'a lower base layer underlying the upper base layer, wherein the lower base layer comprises a relatively high CTE material; and, 'a base, comprising, 'an outer ring overlying the upper base layer and positioned around the magnet assembly, wherein the outer ring comprises a relatively low CTE material, wherein the outer ring is configured to couple to an outer radial portion of a proof mass assembly, and wherein each relatively high CTE material has a higher CTE than each relatively low CTE material., 'an excitation ring, comprising2. The magnetic circuit assembly of claim 1 , wherein each ...

MEMS DEVICE, ELECTRONIC APPARATUS, AND VEHICLE

A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface. 2. The MEMS device according to claim 1 , whereinthe abutment surface is cut at a position between the tip of the narrow width portion and the wall that the narrow width portion faces in the extending direction of the narrow width portion.3. The MEMS device according to claim 1 , further comprising a projecting portion extending toward the narrow width portion and disposed in the hollow portion.4. The MEMS device according to claim 1 , further comprising a first narrow width portion claim 1 , a second narrow width portion claim 1 , and a third narrow width portion claim 1 ,wherein the movable member has a rectangular shape with four corners, andwherein the narrow width portion, the first narrow width portion, the second narrow width portion, and the third narrow width portion are provided respectively at positions facing the four corner portions of the movable member.5. The MEMS device according to claim 1 ,wherein the movable member having a rectangular shape with four outer edges, andwherein the wall is a frame that faces the four outer edges of the movable member.6. The MEMS device according to claim 1 ,wherein the movable body includes a first movable member, a second movable member, and a beam disposed between the first movable member and the second movable member.7. The MEMS device according to claim ...

System for acceleration measurements and traumatic brain injury detection

The present invention comprises apparatuses and methods of detecting impacts to the head. Accelerometers attached to a user's head and neck or body is used to measure the differential acceleration of the head with respect to the neck or body. A differential acceleration exceeding a certain threshold may be indicative of the user suffering a traumatic brain injury.

HIGH-PRECISION MAGNETIC SUSPENSION ACCELEROMETER

A high-precision magnetic suspension accelerometer for measuring the linear acceleration of a spacecraft is provided, comprising a magnetically shielded vacuum chamber system, a magnetic displacement sensing system, a magnetic suspension control system and a small magnetic proof mass. A optical coherence displacement detection technique is utilized for precisely measuring the position and the posture of the small magnetic proof mass in real time, and a magnetic suspension control technique is utilized for precisely controlling the position and the posture of the small magnetic proof mass to be brought back to the origin, so as to keep the small magnetic proof mass in the center of the systemic inner chamber. When the spacecraft is subject to a non-conservative force, the magnitude and direction of the acceleration can be precisely measured via the measurement of currents in the position control coils due to the acceleration of the spacecraft proportional to the currents of the position control coils. The accelerometer of the invention can avoid the technical bottleneck of high-precision machining, is easy to be produced and can achieve more high-precision measurement of the acceleration vector. 1. A high-precision magnetic suspension accelerometer , comprising a magnetically shielded vacuum chamber system , an optical coherence displacement detecting system , a magnetic suspension control system and a small magnetic proof mass ,wherein, the magnetically shielded vacuum chamber system comprises a magnetically shielded outer chamber and a systemic inner chamber which is disposed inside the magnetically shielded outer chamber and vacuum, with the small magnetic proof mass disposed inside the systemic inner chamber;the optical coherence displacement detecting system, disposed on the systemic inner chamber, is used for monitoring the position and the posture of the small magnetic proof mass in real time by sending an optical signal to the small magnetic proof mass and ...

ACCELERATION SENSOR, ESPECIALLY DUPLEX ACCELERATION SENSOR, ARRANGEMENT AND METHOD FOR DETECTING A LOSS OF ADHESION OF A VEHICLE TIRE

The invention relates to an acceleration sensor, especially a duplex acceleration sensor, an arrangement and a method for detecting a loss of road grip of a vehicle wheel (). The acceleration sensor comprises a tube () having a longitudinal axis forming a circular arc segment, and two closed ends. A mass () is arranged inside the tube () such that is able to move inside the tube () in the longitudinal direction thereof. A magnet arrangement () is designed to counteract, by way of a magnetic force exerted on the mass (), a movement of said mass () from an idle position (), and a read-out unit () is designed to detect a movement of said mass () from the idle position (). 115.-. (canceled)16. An arrangement for detecting a loss of road grip of a vehicle wheel , comprising:a first acceleration sensor, anda warning unit coupled to the first acceleration sensor, the warning unit designed to inform a vehicle driver of the loss of road grip if a loss of road grip is detected by the acceleration sensor.17. An arrangement in accordance with claim 16 ,further comprising a second duplex acceleration sensor opposite to the first acceleration sensor.18. An arrangement in accordance with claim 16 , comprisinga control unit designed to control the vehicle brake and/or the vehicle engine in order to effect an acceleration of at least one vehicle wheel.19. An arrangement in accordance with claim 18 , comprising:an activation element designed to send, upon activation by a vehicle driver, an acceleration signal to the control unit in order to effect an acceleration of at least one vehicle wheel.20. A method for detecting a loss of road grip of a vehicle wheel claim 18 , comprising the steps of:a) verifying a loss of road grip of a vehicle wheel if the loss of road grip is detected by means of an acceleration sensor, wherein the verifying is executed by way ofi. a change in acceleration of the vehicle wheel by means of a vehicle brake and/or a vehicle engine, andii. the detection of a ...

ACCELEROMETERS

A method for controlling closed loop operation of a capacitive accelerometer comprises applying first in-phase and anti-phase PWM drive signals, respectively, to a first pair of fixed capacitive electrodes and applying second in-phase and anti-phase PWM drive signals, respectively, to a second pair of fixed capacitive electrodes. A displacement of a proof mass relative to fixed capacitive electrodes is sensed by measuring a pickoff signal from the proof mass and adjusting the mark-space ratio of the first and/or second PWM drive signals to provide a restoring force on the proof mass that balances an applied acceleration and maintains the proof mass at a null position. The first and second PWM drive signals applied to the first and second pairs of fixed capacitive electrodes are offset in time from one another by an offset period. 1. A method for controlling closed loop operation of a capacitive accelerometer , the capacitive accelerometer comprising: a fixed substrate; a proof mass mounted to the fixed substrate by flexible support legs for in-plane movement along a sensing axis in response to an applied acceleration , wherein the proof mass comprises a plurality of sets of moveable electrode fingers extending substantially perpendicular to the sensing axis and spaced apart along the sensing axis; at least two pairs of fixed capacitive electrodes , wherein a first pair of the fixed capacitive electrodes comprises a first fixed electrode and a fourth fixed electrode , and a second pair of the fixed capacitive electrodes comprises a second fixed electrode and a third fixed electrode , and wherein each fixed capacitive electrode comprises a set of fixed capacitive electrode fingers extending substantially perpendicular to the sensing axis and spaced apart along the sensing axis , wherein the sets of fingers of the first and third fixed electrodes are arranged to interdigitate with the sets of moveable electrode fingers with a first offset in one direction along the ...

DYNAMIC SELF-CALIBRATION OF AN ACCELEROMETER SYSTEM

One embodiment includes a method for dynamic self-calibration of an accelerometer system. The method includes forcing a proof-mass associated with a sensor of the accelerometer system in a first direction to a first predetermined position and obtaining a first measurement associated with the sensor in the first predetermined position via at least one force/detection element of the sensor. The method also includes forcing the proof-mass to a second predetermined position and obtaining a second measurement associated with the sensor in the second predetermined position via the at least one force/detection element of the sensor. The method further includes calibrating the accelerometer system based on the first and second measurements.

METHOD AND STRUCTURE OF AN INTEGRATED MEMS INERTIAL SENSOR DEVICE USING ELECTROSTATIC QUADRATURE-CANCELLATION

An integrated MEMS inertial sensor device. The device includes a MEMS inertial sensor overlying a CMOS substrate. The MEMS inertial sensor includes a drive frame coupled to the surface region via at least one drive spring, a sense mass coupled to the drive frame via at least a sense spring, and a sense electrode disposed underlying the sense mass. The device also includes at least one pair of quadrature cancellation electrodes disposed within a vicinity of the sense electrode, wherein each pair includes an N-electrode and a P-electrode. 1. An integrated MEMS inertial sensor device , the device comprising:a CMOS substrate having a surface region, the CMOS substrate having at least one CMOS IC device;a MEMS inertial sensor overlying the surface region, the MEMS inertial sensor comprising;a drive frame coupled to the surface region via at least one drive spring,a sense mass coupled to the drive frame via at least a sense spring, anda sense electrode disposed underlying the sense mass; andat least one pair of quadrature cancellation electrodes disposed within a vicinity of the sense electrode, wherein each pair includes an N-electrode and a P-electrode.2. The device of wherein the MEMS inertial sensor includes at least one drive comb or at least one drive feedback comb being configured to the drive frame and the CMOS substrate.3. The device of wherein the at least one pair of quadrature cancellation electrodes is configured such that the torques caused by the N-electrode and the P-electrode are the same when the same electrical potential is applied to them.4. The device of wherein the at least one CMOS IC device includes a drive circuit configured to provide a drive signal to the at least one pair of quadrature cancellation electrodes claim 1 , the drive circuit including at least one phase shifter and at least one gain controller.5. The device of wherein the drive signal comprises a DC signal and an AC signal.6. The device of wherein the drive signal consists of a DC ...

ATOMIC INTERFEROMETRIC GYROSCOPE

A gyroscope includes an atomic beam source to generate an atomic beam in which individual atoms are in the same state, a moving standing light wave generator to generate M moving standing light waves, an interference device to obtain an atomic beam resulting from the interaction between the atomic beam and the M moving standing light waves, a monitor to detect angular velocity by monitoring the atomic beam from the interference device and an accelerometer. The accelerometer acquires information on acceleration applied to the gyroscope and the moving standing light wave generator adjusts the drift velocity of at least M−1 moving standing light waves among the M moving standing light waves in response to the acceleration information. 1. An atomic interferometric gyroscope comprising:an atomic beam source to generate an atomic beam, individual atoms in the atomic beam being in a same energy level;a moving standing light wave generator to generate M moving standing light waves, M being a predetermined integer of 3 or more;an interference device to obtain an atomic beam resulting from interaction between the atomic beam and the M moving standing light waves;a monitor to detect angular velocity by monitoring the atomic beam from the interference device; andan accelerometer,the accelerometer acquiring information on acceleration applied to the gyroscope, andthe moving standing light wave generator adjusting drift speeds of at least M−1 moving standing light waves among the M moving standing light waves in response to the information.2. The gyroscope according to claim 1 , wherein the atomic beam source generates a cold atomic beam.3. The gyroscope according to claim 1 , whereinthe atomic interferometric gyroscope is Mach-Zehnder type atomic interferometric gyroscope, andeach of the M moving standing light waves satisfies n-th order Bragg conditions where n is a positive integer of 2 or more.4. The gyroscope according to claim 1 , wherein the atoms are alkaline earth metal ...

Measurement of Acceleration

An acceleration measuring device is disclosed, for use as a gravimeter or gradiometer for example. The device has a support and a proof mass, connected to each other by at flexures allowing displacement of the proof mass relative to the support. The support defines a space for displacement of the proof mass. The device is configured so that the modulus of the gradient of the force-displacement curve of the proof mass decreases with increasing displacement, for at least part of the force-displacement curve. This is the so-called anti-spring effect. The resonant frequency of oscillation of the proof mass is determined at least in part by the orientation of the device relative to the direction of the force due to gravity. The proof mass is capable of oscillating with a resonant frequency of 10 Hz or less. The proof mass has a mass of less than 1 gram.

ACCELEROMETER SENSOR SYSTEM

Embodiments of the invention include an accelerometer system. The system includes an accelerometer sensor comprising first and second electrode configurations and an inertial mass between the first and second electrode configurations. In one example, the accelerometer sensor being fabricated as symmetrically arranged about each of three orthogonal mid-planes. The system also includes an accelerometer controller configured to apply control signals to each of the first and second electrode configurations to provide respective forces to maintain the inertial mass at a null position between the first and second electrode configurations. The accelerometer controller can measure a first pickoff signal and a second pickoff signal associated with the respective first and second electrode configurations. The first and second pickoff signals can be indicative of a displacement of the inertial mass relative to the null position. The accelerometer controller can calculate an acceleration based on the first and second pickoff signals. 1. An accelerometer system comprising:an accelerometer sensor comprising a first electrode configuration, a second electrode configuration, and an inertial mass between the first and second electrode configurations, the accelerometer sensor being fabricated as symmetrically arranged about each of three orthogonal mid-planes associated with the accelerometer sensor; andan accelerometer controller configured to apply control signals to each of the first and second electrode configurations to provide respective forces to maintain the inertial mass at a null position between the first and second electrode configurations, the accelerometer controller being further configured to measure a first pickoff signal and a second pickoff signal associated with the respective first and second electrode configurations, the first and second pickoff signals being indicative of a displacement of the inertial mass relative to the null position, and to calculate an ...

HIGH PERFORMANCE ACCELEROMETER

A MEMS accelerometer includes a suspended spring-mass system that has a frequency response to accelerations experienced over a range of frequencies. The components of the suspended spring-mass system such as the proof masses respond to acceleration in a substantially uniform manner at frequencies that fall within a designed bandwidth for the MEMS accelerometer. Digital compensation circuitry compensates for motion of the proof masses outside of the designed bandwidth, such that the functional bandwidth of the MEMS accelerometer is significantly greater than the designed bandwidth. 1. A microelectromechanical (MEMS) accelerometer , comprising:a suspended spring-mass system comprising at least one proof mass that moves in response to acceleration, wherein the suspended spring-mass system has a designed bandwidth for sensing acceleration;sense circuitry coupled to receive an acceleration signal from the suspended spring-mass system, wherein a gain of the acceleration signal for the sensed acceleration is uniform while the sensed acceleration corresponds to the designed bandwidth, and wherein the gain varies when a frequency of the sensed acceleration exceeds the designed bandwidth; andcompensation circuitry configured to receive a sense signal that is based on an output of the sensing circuitry, wherein the compensation circuitry is further configured to modify the gain of the sense signal when the frequency of the sensed acceleration exceeds the designed bandwidth.2. The MEMS accelerometer of claim 1 , wherein the sense circuitry comprises a capacitance-to-voltage (“C2V”) converter.3. The MEMS accelerometer of claim 1 , wherein the compensation circuitry comprises a compensation filter that modifies the designed bandwidth of the MEMS.4. The MEMS sensor of claim 1 , wherein the sense circuitry further comprises filtering circuitry claim 1 , wherein the filtering circuitry modifies the gain claim 1 , the offset claim 1 , or the sensitivity of the acceleration signal ...

MIRCO-ELECTRO-MECHANICAL SYSTEM DEVICE

The present invention discloses a micro-electro-mechanical system (MEMS) device. The MEMS device includes: a substrate; a proof mass which defines an internal space inside and forms at least two capacitors with the substrate; at least two anchors connected to the substrate and respectively located in the capacitor areas of the capacitors from a cross-sectional view; at least one linkage truss located in the hollow structure, wherein the linkage truss is directly connected to the anchors or indirectly connected to the anchors through buffer springs; and multiple rotation springs located in the hollow structure, wherein the rotation springs are connected between the proof mass and the linkage truss, such that the proof mass can rotate along an axis formed by the rotation springs. There is no coupling mass which does not form a movable electrode in the connection between the proof mass and the substrate. 1. A micro-electro-mechanical system (MEMS) device , comprising:a substrate including at least two fixed electrode regions, the substrate has an out-of-plane direction which is normal to a surface of the substrate;a proof mass which defines an internal space inside, the proof mass including at least two movable electrode regions which form at least two capacitors with the at least two fixed electrode regions;at least two anchors connected to the substrate;at least one linkage truss located in the internal space, wherein the linkage truss is directly connected to the anchors or indirectly connected to the anchors through buffer springs; anda plurality of rotation springs located in the internal space, wherein each rotation spring has one end connected to the proof mass and another end connected to the linkage truss;wherein the at least two capacitors are located at two sides of a rotation axis formed by the rotation springs, such that the proof mass can rotate along the axis formed by the rotation springs for sensing a movement of the MEMS device in the out-of-plane ...

Fully differential capacitive architecture for mems accelerometer

A fully differential microelectromechanical system (MEMS) accelerometer configured to measure Z-axis acceleration is disclosed. This may avoid some of the disadvantages in traditional capacitive sensing architectures—for example, less sensitivity, low noise suppression, and low SNR, due to Brownian noise. In one embodiment, the accelerometer comprises three silicon wafers, fabricated with electrodes forming capacitors in a fully differential capacitive architecture. These electrodes may be isolated on a layer of silicon dioxide. In some embodiments, the accelerometer also includes silicon dioxide layers, piezoelectric structures, getter layers, bonding pads, bonding spacers, and force feedback electrodes, which may apply a force to the proof mass region. Fully differential MEMS accelerometers may be used in geophysical surveys, e.g., for seismic sensing or acoustic positioning.

Methods and systems for vertical trajectory determination and automatic jump detection

The present disclosure provides a jump detection system for inertial measurement unit (IMU) integrated with a barometric altimeter in the same device (IMU-baro). The processor is configured to record time-series data of both a vertical component of the measured IMU-baro acceleration and the estimated vertical velocity of the IMU-baro, detect a potential jump by comparing the vertical component of the measured IMU-baro acceleration to one or more acceleration thresholds, and, validate the potential jump by comparing a difference between a maximum velocity and a minimum velocity within a vicinity of the potential jump in the time-series data of the estimated vertical velocity of the IMU-baro to a velocity threshold.

IMPACT INDICATOR

According to one aspect of the present disclosure, a device and technique for impact detection includes a housing, switch circuitry having an omega-shaped switch element, and a mass member movable within the housing from a first position to a second position in response to receipt by the housing of an acceleration event. Movement of the mass member to the second position causes the mass member to move the switch element to change a state of a circuit condition of the switch circuitry, and the change of the state of the switch circuitry indicates receipt of the acceleration event. 1. An impact indicator , comprising:a housing;switch circuitry having an omega-shaped switch element; anda mass member movable within the housing from a first position to a second position in response to receipt by the housing of an acceleration event, wherein movement of the mass member to the second position causes the mass member to move the switch element to change a state of a circuit condition of the switch circuitry, the change of the state of the switch circuitry indicating receipt of the acceleration event.2. The impact indicator of claim 1 , wherein the switch element is a flexible switch element.3. The impact indicator of claim 1 , wherein the switch circuitry includes a plurality of spaced apart contacts.4. The impact indicator of claim 1 , wherein:the switch circuitry includes a plurality of spaced apart contacts; andthe switch element is movably positioned between the contacts.5. The impact indicator of claim 1 , wherein:the switch circuitry includes a plurality of spaced apart contacts; andthe switch element is retained between the contacts by a biasing force applied by the switch element to the contacts.6. The impact indicator of claim 1 , wherein the switch circuitry includes a plurality of spaced apart contacts claim 1 , and wherein the switch element includes a plurality of seating areas each configured to receive a respective contact in engagement therewith.7. The impact ...

Sensor

This accelerometer ( 100 ) includes a substrate ( 30 ) and a bonding member ( 90 ) that bonds the substrate ( 30 ) and a supporting member ( 50 ) to each other, and the bonding member ( 90 ) is arranged in a region (R 3 ) that straddles a first region (R 1 ) in which a first sensor element ( 11 ) is arranged and a second region (R 2 ) in which a second sensor element ( 12 ) is arranged in a plan view.

De-centralized control architecture for improved sensitivity of accelerometer-based gravity gradiometers

A method for rebalancing a group of accelerometers in a gravity gradiometer instrument (GGI) includes the steps of defining and implementing a number of groupwise actuation constrainment modes based on a design of the gravity gradiometer instrument and its accelerometers. Implementing one constrainment mode comprises differentially scaling and distributing a single electrical current to multiple accelerometers' rebalance circuitry to cancel a specific acceleration effect experienced by the group of accelerometers or gradiometer as a whole. Superposition of a number of such modes enables rebalancing the full acceleration environment experienced by the group of accelerometers, given negligible local differential acceleration effects specific to, say, an individual accelerometer of the assembly. Mathematically, the multiple of constrainment modes are encapsulated by an actuation or constrainment modal influence matrix, arranged one mode per column of the matrix, and the electrical currents of respective modes are encapsulated in a vector listing of currents.

SYSTEM AND METHODS FOR HIGHLY INTEGRATED OPTICAL READOUT MEMS SENSORS

System and methods for highly integrated optical readout MEMS sensors are provided. In one embodiment, a method for an integrated waveguide optical-pickoff sensor comprises: launching a laser beam generated by a laser light source into an integrated waveguide optical-pickoff monolithically fabricated within a first substrate, the integrated waveguide optical-pickoff including an optical input port, a coupling port, and an optical output port; and detecting an amount of coupling of the laser beam from the coupling port to a sensor component separated from the coupling port by a gap by measuring an attenuation of the laser beam at the optical output port. 1. A method for an integrated waveguide optical-pickoff sensor , the method comprising:launching a laser beam generated by a laser light source into an integrated waveguide optical-pickoff monolithically fabricated within a first substrate, the integrated waveguide optical-pickoff including an optical input port, a coupling port, and an optical output port; anddetecting an amount of coupling of the laser beam from the coupling port to a sensor component separated from the coupling port by a gap by measuring an attenuation of the laser beam at the optical output port.2. The method of claim 1 , wherein the sensor component is a static structure claim 1 , the method further comprising:determining a drift in the laser beam as generated by the laser light source as a function of the attenuation of the laser beam at the optical output port due to coupling of the laser beam into the static structure.3. The method of claim 2 , further comprising:correcting an inertial sensor measurement based on the attenuation of the laser beam, wherein the inertial sensor measurement was obtained from a second integrated waveguide optical-pickoff coupled to the laser light source.4. The method of claim 1 , wherein the sensor component is a moving sensor component.5. The method of claim 4 , wherein the moving sensor component is a micro- ...

HIGH-PRECISION PENDULOUS ACCELEROMETER

Provided is an accelerometer, and particularly to a quartz pendulous accelerometer, including a quartz meter, which is configured to sense an acceleration signal, convert the acceleration signal into an inertia torque and convert the inertia torque into a quartz meter output signal; a readout apparatus, which is configured to convert the meter output signal into an input signal recognizable by a pulse generating apparatus; a pulse generating apparatus, which is configured to perform control algorithm conversion, oversampling and digital quantization on the input signal to obtain a quantized current pulse, where the quantized current pulse is converted into an electromagnetic pulse torque for balancing the inertia torque. By means of a circuit design and a system stability design of the present disclosure, digital feedback is realized while quantizing a feedback current is implemented. Negative feedback is realized by adopting an oversampling technique, so that the linearity, the dynamic precision etc. of a closed-loop system are realized. In addition, applying a SDM achieves quantized noise shaping so as to realize purposes of low noise and digital quantity output. 1. A quartz pendulous accelerometer , comprising:a quartz meter, which is configured to sense an acceleration signal, and convert the acceleration signal into an inertia torque and convert the inertia torque into a meter output signal;a readout apparatus, which is configured to convert the meter output signal into an input signal recognizable by a pulse generating apparatus; anda pulse generating apparatus, which is configured to perform control algorithm conversion, oversampling and digital quantization on the input signal to obtain a quantized current pulse, wherein the quantized current pulse is converted into an electromagnetic pulse torque for balancing the inertia torque.2. The quartz pendulous accelerometer according to claim 1 , wherein the pulse generating apparatus comprises a control algorithm ...

MOBILE DEVICE AND METHOD FOR CHANGING CENTROID THEREOF

The present disclosure provides a mobile device and a method of changing the centroid thereof. The mobile device includes a device body, having a processor disposed therein; and a centroid changing device, including a guide rail disposed on the device body, a weight assembly slidably disposed on the guide rail, and a driving device coupled to the weight assembly, wherein the processor is electrically coupled to the driving device, and controls the weight assembly to slide along the guide rail via the driving device, to change the centroid of the device body. 1. A mobile device comprising:a device body comprising a processor disposed therein;a centroid changing device comprising a guide rail disposed on the device body;a weight assembly slidably disposed on the guide rail; anda driving device coupled to the weight assembly, wherein the processor is electrically coupled to the driving device, and controls the weight assembly to slide along the guide rail via the driving device, to change the centroid of the device body.2. The mobile device according to claim 1 , wherein the guide rail comprises a first rail and a second rail claim 1 , wherein the first rail is parallel to a length direction of the device body claim 1 , wherein the second rail is parallel to a width direction of the device body claim 1 , and wherein the weight assembly is slidably disposed on the first rail and the second rail claim 1 , respectively.3. The mobile device according to claim 2 , wherein the first rail is intersected with and perpendicular to the second rail.4. The mobile device according to claim 1 , wherein the first rail is disposed at a first angle with a length direction of the device body claim 1 , and the second rail is disposed at a second angle with a width direction of the device body claim 1 , wherein the first angle is between 0° and 90° claim 1 , and the second angle is between 0° and 90°.5. The mobile device according to claim 3 , wherein an intersection between the first ...

MULTI-AXIS ACCELEROMETER WITH REDUCED STRESS SENSITIVITY

Implementations of an accelerometer component may include: a first Z proof mass rotatable about a first axis and coupled to an anchor, the first Z proof mass including a first plurality of electrodes. Implementations may include a second Z proof mass rotatable about the first axis and coupled to the anchor, the second Z proof mass including a second plurality of electrodes. An X-axis accelerometer subcomponent may be located within a perimeter of the first Z proof mass, and a Y-axis accelerometer subcomponent may be located within a perimeter of the second Z proof mass. The first plurality of electrodes and the second plurality of electrodes may be symmetrical about each of the first axis, a second axis perpendicular to the first axis, a third axis diagonal to the first axis and second axis, and a fourth axis diagonal to the first axis and second axis. 1. An accelerometer component comprising:a first Z proof mass rotatable about a first axis and coupled to an anchor, the first Z proof mass comprising a first plurality of electrodes;a second Z proof mass rotatable about the first axis and coupled to the anchor, the second Z proof mass comprising a second plurality of electrodes;an X-axis accelerometer subcomponent located within a perimeter of the first Z proof mass; anda Y-axis accelerometer subcomponent located within a perimeter of the second Z proof mass;wherein the first plurality of electrodes and the second plurality of electrodes are symmetrical about each of the first axis, a second axis perpendicular to the first axis, a third axis diagonal to the first axis and second axis, and a fourth axis diagonal to the first axis and second axis.2. The component of claim 1 , wherein the X-axis accelerometer subcomponent is not directly mechanically coupled with the first Z proof mass.3. The component of claim 1 , wherein the Y-axis accelerometer subcomponent is not directly mechanically coupled with the second Z proof mass.4. The component of claim 1 , wherein each ...

ACCELERATION SENSOR

An acceleration sensor is provided. The acceleration sensor contains a first electrically conductive element and a second electrically conductive element. An electrically insulative element is connected to the first electrically conductive element and the second electrically conductive element, where at least a portion of the first electrically conductive element and at least a portion of the second electrically conductive element make contact with the electrically insulative element. At least one electrically conductive spring is located within a cavity of the sensor, wherein the cavity is defined by at least one surface of the first electrically conductive element, at least one surface of the electrically insulative element, and at least one surface of the second electrically conductive element. 1. A sensor , comprising:a first electrically conductive element having a first diameter on a proximate portion of the first electrically conductive element and a second diameter on a distal portion of the first electrically conductive element;a second electrically conductive element having a first diameter on a proximate portion of the second electrically conductive element and a second diameter on a distal portion of the second electrically conductive element;an electrically insulative element connected to the first electrically conductive element and the second electrically conductive element, where at least a portion of the first electrically conductive element and at least a portion of the second electrically conductive element make contact with the electrically insulative element; andat least one electrically conductive spring located within a cavity of the sensor, wherein the cavity is defined by at least one surface of the first electrically conductive element, at least one surface of the electrically insulative element, and at least one surface of the second electrically conductive element,wherein the at least one electrically conductive spring is connected to an ...

Acceleration sensor, geophone, and seismic prospecting system

Provided are acceleration sensor, geophone and seismic prospecting system with high sensitivity and low power consumption. The acceleration sensor includes a mass body displaceable with respect to a rotation shaft. The acceleration sensor includes a first AC servo control facing a first symmetrical region of the first movable portion, a second AC servo control electrode facing a second symmetrical region of the second movable portion, and a DC servo control electrode facing an asymmetrical region of the second movable portion. A first AC servo capacitive element is formed by the first movable portion and the first AC servo control electrode, a second AC servo capacitive element is formed by the second movable portion and the second AC servo control electrode, and a DC servo capacitive element is formed by the second movable portion and the DC servo control electrode.

PERFORMANCE OPTIMIZATION OF A DIFFERENTIAL CAPACITANCE BASED MOTION SENSOR

A system includes a capacitance sensor having an inertial proof mass disposed between a first electrode structure and a second electrode structure. A switching system is switchable between providing one of a positive charge pulse and a negative charge pulse to one of the first electrode structure and the second electrode structure. A controller controls the switching of the switching circuit to provide one of the positive charge pulse or the negative charge pulse to the first electrode structure during a first portion of a charge cycle time period and to provide an opposite polarity charge pulse from that provided to the first electrode structure to the second electrode structure during a second portion of the charge cycle time period to generate an error signal with respect to the inertial proof mass of the capacitance sensor. 1. A system comprising:a capacitance sensor having an inertial proof mass disposed between a first electrode structure and a second electrode structure;a switching system switchable between providing one of a positive charge pulse and a negative charge pulse to one of the first electrode structure and the second electrode structure; anda controller that controls the switching of the switching circuit to provide one of the positive charge pulse or the negative charge pulse to the first electrode structure during a first portion of a charge cycle time period and to provide an opposite polarity charge pulse from that provided to the first electrode structure to the second electrode structure during a second portion of the charge cycle time period to generate an error signal with respect to the inertial proof mass of the capacitance sensor.2. The system of claim 1 , further comprising a measuring circuit to measure charge received from the first electrode structure and the second electrode structure of the capacitance sensor.3. The system of claim 2 , wherein the measuring circuit includes an integrator to accumulate charge from the capacitance ...

MEMS PENDULUM ACCELEROMETER HAVING TWO MEASUREMENT RANGES

An accelerometer sensor having electrodes forming capacitors of capacitance that vary as a function of distances between the electrodes, a control unit being arranged to perform an operation of measuring the capacitances and a control operation that comprises selectively: a fine control stage in which a first voltage is applied between one of the stationary electrodes and the movable electrode, while the other stationary electrode is at the same potential as the movable electrode; and an extended control stage in which a second voltage is applied between one of the stationary electrodes and the movable electrode, the other stationary electrode being at the same potential as the movable electrode, and the second voltage being greater in absolute value than the first voltage. 1. An accelerometer sensor comprising a structure having fastened thereto a pendulum-forming inertial body carrying a movable electrode that is connected to a control unit that is also connected to two stationary electrodes secured to the structure in order to co-operate with the movable electrode to form two capacitors of capacitances that are variable as a function of distances between the electrodes , the control unit being arranged to perform operations of measuring the capacitances and a control operation as a function of the measured capacitances , in which a voltage is applied to the electrodes in order to maintain the pendulum in a predetermined position , these operations being performed by applying pulses , the sensor being characterized in that the control operation comprises selectively:a “fine” control stage in which a first voltage is applied between one of the stationary electrodes and the movable electrode, while the other stationary electrode is at the same potential as the movable electrode; oran “extended” control stage in which a second voltage is applied between one of the stationary electrodes and the movable electrode, the other stationary electrode being at the same ...

VIBRATION RECTIFICATION ERROR CORRECTION CIRCUIT, PHYSICAL QUANTITY SENSOR MODULE, STRUCTURE MONITORING DEVICE, AND CORRECTION VALUE ADJUSTMENT METHOD OF VIBRATION RECTIFICATION ERROR CORRECTION CIRCUIT

A vibration rectification error correction circuit includes a first correction circuit that obtains a digital value based on a signal to be measured output from a sensor element configured to measure a physical quantity and corrects a vibration rectification error of the digital value by a correction function based on a product of values obtained by biasing the digital value.

Inertial force sensor

An inertial force sensor has a first sensor element, a second sensor element, a first signal processor, a second signal processor, and a power controller. The first sensor element converts a first inertial force to an electric signal, and the second sensor element converts a second inertial force to an electric signal. The first signal processor is connected to the first sensor element, and outputs a first inertial force value. The second signal processor is connected to the second sensor element, and outputs a second inertial force value. The power controller is connected to the first signal processor and the second signal processor, and changes power supplied to the second signal processor based on the first inertial force value.

WINDOW SENSING DEVICE WITH MOVEMENT DETECTION

A window sensing device with movement detection enables use of a window sensing arrangement to provide an indication even when a window sash that is open is moved, while an alarm system is armed. The window sensing device includes an accelerometer configured to sense movement of a window sash in a given direction. A magnetic sensor is configured to sense presence of a magnet when the window sash is in a closed position. An electronic controller outputs a normal state wireless signal when the magnetic sensor senses the magnet and outputs an alarm state wireless signal when the magnetic sensor does not sense the presence of the magnet. When the electronic controller is outputting an alarm state wireless signal and the accelerometer senses movement of a window sash, the electronic controller outputs an indication of movement of a window sash in a given direction. 1. A window sensing device for securing to a window sash comprising:a housing,an accelerometer configured to sense movement of a window sash in a given direction of travel,a magnetic sensor configured to sense presence of a magnet,a wireless transmitter circuit, andan electronic controller configured to receive an input from the accelerometer and an input from the magnetic sensor, the electronic controller configured to control the wireless transmitter circuit to output a normal state wireless signal when the magnetic sensor senses the presence of the magnet and to output an alarm state wireless signal when the magnetic sensor does not sense the presence of the magnet, and when the electronic controller is controlling the wireless transmitter circuit to output an alarm state wireless signal and the accelerometer senses movement of a window sash, the electronic controller is configured to output an indication of movement of a window sash.2. The window sensing device according to claim 1 , wherein the indication of movement provided by the electronic controller when the electronic controller is controlling the ...

Low-power accelerometer

An accelerometer comprising a plurality of proof-masses moveable along a measurement axis; a respective spring rigidly attached to each proof-mass, configured to exert an elastic recall on the proof-mass in the measurement axis; and a fixed stop associated with each proof-mass, arranged to intercept the proof-mass when the acceleration in the measurement axis increases by a step. The proof-masses are suspended in series with respect to one another by springs in the measurement axis, the stops being arranged to successively intercept the respective proof-masses for increasing thresholds of acceleration.

Vibrating Device, Vibrating Device Module, Electronic Apparatus, And Vehicle

A vibrating device includes: a base body containing mobile ions; a movable member disposed facing and spaced apart from the base body; and a conductor section disposed so as to cover at least a portion of the movable member. A first voltage whose potential periodically changes based on a reference potential is applied to the movable member. A second voltage that is at the reference potential when time-averaged is applied to the conductor section. The second voltage is constant at the reference potential. 1. A vibrating device comprising:a base body containing mobile ions;a movable member overlapping the base body in a plan view, the movable member being configured to selectively receive a first voltage; anda conductor overlapping the movable member in the plan view, the conductor being configured to selectively receive a second voltage,wherein the first voltage has a potential that periodically changes based on a reference potential, andthe second voltage is at a time-averaged value of the reference potential.2. The vibrating device according to claim 1 , whereinthe second voltage is constant.3. The vibrating device according to claim 1 , further comprising:an electrode on the base body, the electrode facing the movable member,wherein the movable member is rotatably displaceable toward the base body, andthe electrode outputs an electrical signal in response to the displacement of the movable member.4. The vibrating device according to claim 3 , whereinthe electrode is configured to receive the second voltage.5. The vibrating device according to claim 1 , further comprising:a conductor layer on the base body, the conductor layer being on an opposite side of the base body as the movable member.6. The vibrating device according to claim 1 , whereinthe conductor includes a lid body bonded to the base body and accommodating the movable member between the base body and the lid body.7. The vibrating device according to claim 1 , whereinthe conductor includes a perimeter ...

IMPACT INDICATOR

According to one aspect of the present disclosure, a device and technique for impact detection includes a housing enclosing a mass member where the housing is configured to enable movement of the mass member from a first position to a second position within the housing in response to receipt by the housing of an acceleration event. The impact indicator also includes switch circuitry and a passive radio-frequency identification (RFID) module coupled to the switch circuitry. Responsive to movement of the mass member from the first position to the second position, the mass member causes a change in the switch circuitry where the change in the switch circuitry causes a change in a value output by the RFID module when activated. 1. An impact indicator , comprising:a housing enclosing a mass member, the housing configured to enable movement of the mass member from a first position to a second position within the housing in response to receipt by the housing of an acceleration event;switch circuitry; anda passive radio-frequency identification (RFID) module coupled to the switch circuitry; andwherein responsive to movement of the mass member from the first position to the second position, the mass member causes a change in the switch circuitry, wherein the change in the switch circuitry causes a change in a value output by the RFID module when activated.2. The impact indicator of claim 1 , wherein the mass member comprises a conductive element configured to engage spaced apart contacts of the switch circuitry.3. The impact indicator of claim 1 , wherein the mass member comprises a conductive element claim 1 , and wherein movement of the mass member from the first position to the second position causes a change in a contact state between the conductive element and spaced apart contacts of the switch circuitry.4. The impact indicator of claim 1 , wherein the switch circuitry comprises at least one switch element configured to be movably positioned to engage a contact of the ...

MEMS SENSOR STRUCTURE COMPRISING MECHANICALLY PRELOADED SUSPENSION SPRINGS

A MEMS sensor comprising preloaded suspension springs and a method for mechanically preloading suspension springs of a MEMS sensor are described. The MEMS sensor comprises a MEMS support structure; a plurality of suspension springs connected to said support structure; and, a proof mass flexibly suspended by said suspension springs; wherein at least one of said suspension springs is mechanically preloaded with a compressive force for reducing the natural frequency of said proof mass. 1. A MEMS sensor comprising:a support structure;a plurality of suspension springs connected to the support structure;a proof mass flexibly suspended by the suspension springs forming a proof mass-spring system, the proof mass configured to move in a sensing direction along a sensing axis of the sensor;each of the suspension springs including a first connection point connecting a first end of the suspension spring to the support structure and a second connection point connecting a second end of the suspension spring to the proof mass;each of the suspension springs being mechanically preloaded with a compressive force for reducing a natural frequency of said proof mass-spring systemeach of the suspension springs being connected in a predetermined orientation with respect to the proof mass, the orientation comprising an initial offset angle φ0 defined by a first direction associated with the compressive force and a second direction defined by a line connecting the first connection point with the second connection points, the initial offset angle φ0 compensating gravity when the sensing axis of the sensor has a component along a direction of gravity.2. The MEMS sensor according to claim 1 , wherein initial offset angle φ0 introduces for each of the suspension springs a force component perpendicular to the sensing direction and a force component in the sensing direction.3. The MEMS sensor according to further comprising at least one actuator for mechanically applying the compressive force to ...

Accelerometer

An accelerometer is provided for detecting acceleration which employs a flapper ring clamped at raised points between upper and lower portions of a magnet structure. The flapper is suspended by a bifilar hinge on the ring between two permanent magnets. Coils are mounted on opposite sides of the flapper, each encircling one of the permanent magnets and separated therefrom by an air gap. Each side of the flapper has a metallic coating thereby forming a capacitor with an inner face of the magnet structure on each side of the flapper. As the accelerometer is accelerated, the flapper is displaced relative to the magnet structure thus increasing the capacitance of one capacitor and decreasing the capacitance of the other capacitor. Electrical signals proportional to the change in the capacitances, and therefore proportional to the acceleration, are fed through a servo loop to the coil which set up a magnetic field which interacts with the magnetic fields of the permanent magnets to oppose the displacement of the flapper.

Dynamic offset correction for calibration of MEMS sensor

A hand-held processor system for processing data from an integrated MEMS device disposed within a hand-held computer system and method. A dynamic offset correction (DOC) process computes 3-axis accelerometer biases without needing to know the orientation of the device. Arbitrary output biases can be corrected to ensure consistent performance A system of linear equations is formed using basic observations of gravity measurements by an acceleration measuring device, conditioned upon constraints in data quality, degree of sensed motion, duration, and time separation. This system of equations is modified and solved when appropriate geometric diversity conditions are met.

MEMS sensor and a semiconductor package

The MEMS sensor of the invention has movable and fixed components for measuring acceleration in a rotational mode in a direction in-plane perpendicular to spring axis. The components include an element frame, a substrate, a proof-mass a spring connected to the proof-mass and to the substrate, and comb electrodes. The MEMS sensor is mainly characterized by an arrangement of the components causing an inherent sensitivity for measuring accelerations in a range covering longitudinal and transversal accelerations. One or more of the components are tilted compared to the element frame. The semiconductor package of the invention comprises at least one MEMS sensor.

Micromachined accelerometer gyroscope

An integrated rate and acceleration sensor includes at least one accelerometer formed from a substantially planar silicon body. The at least one micro-silicon accelerometer (MSA) includes a first frame and a proof mass suspended from the first frame by first flexures. The at least one accelerometer has an associated sensitive axis and an associated rate axis that is orthogonally disposed to the sensitive axis. The integrated sensor further includes structure for dithering or vibrating the proof mass along a dither axis that is disposed perpendicularly to both the rate and the sensitive axes. The dithering structure includes at least first and second interdigitated electrodes. Finger portions of the electrodes are disposed for exerting an electrostatic force upon a portion of the planar body in response to an oscillatory drive signal. The portion of the planar body has a plurality of linear grooves formed therein, the plurality of linear grooves being disposed in a parallel orientation with the finger portions. A vibrating accelerometer gyro (VAG) structure is constructed by micromachining techniques such that the linear momenta of two vibrating MSAs balance one another. A symmetrical disposition of the vibrating proof masses tends to balance the linear momenta of the MSAs, and increases the resonance amplification factor (Q).

Mems accelerometer having a flux concentrator between parallel magnets

Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. An example MEMS accelerometer includes a housing, a proof mass suspended within the housing by at least one torsional flexure, at least one planar coil on the proof mass that extends on both sides of an axis of rotation of the proof mass, at least one magnet oriented such that a north-south axis of the at least one magnet is oriented approximately orthogonal to the rotational axis of the proof mass, at least one pole piece located outside the coil, and at least one magnetic flux concentrator located inside the coil opposite the at least one of the at least one pole pieces. A method includes sensing a change in capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil between the magnetic flux concentrator and the pole piece.

MEMS accelerometer

Microelectromechanical (MEMS) accelerometer and acceleration sensing methods. A MEMS accelerometer includes a proof mass suspended by at least one hinge type flexure, at least one planar coil located on the proof mass, and at least one magnet positioned such that a magnetic flux field passes through the at least one planar coil at an angle between approximately 30 degrees and approximately 60 degrees relative to the coil plane. In an example embodiment, the angle is approximately 45 degrees. The at least one magnet may include a first annular magnet positioned on a first side of the proof mass and a second annular magnet positioned on a second side of the proof mass. A method includes sensing a capacitance of a pickoff in the MEMS accelerometer and rebalancing the MEMS accelerometer by sending a current through the planar coil.

Improvements in and relating to accelerometers

759,585. Electric measuring systems. BRITISH THOMSON-HOUSTON CO., Ltd. March 24, 1953 [March 24, 1952], No. 7519/52. Class 40(1) An accelerometer comprises a movable armature centrally mounted between two pairs of salient poles the axes of which are perpendicular, one pair of poles carrying A.C. energized coils and the other pair of coils in which current is induced when the armature is displaced from a mutual position along the axis of the first pair of poles, means being provided for producing from this current a voltage of such sense and magnitude that when applied to the coils on the first pair of poles creates a force tending to restore the armature, this voltage being used as a measure of acceleration along the axis of the first pair of poles. For measuring acceleration along the direction x-x only, Fig. 1, current from an A.C. source 4 flowing in the motor windings 14 and 15 induces an e.m.f. in opposing position-sensing coils 16 and 17, the resultant phase and magnitude of which correspond to the direction and magnitude of the armature displacement from its zero-central position. This e.m.f. is amplified at 5 and fed through a phase-sensitive detector 6 stabilizer network 7 and amplifier 8 to coils 14 and 15. The interaction of the flux produced by this current and by a fixed D.C., from source 12 in the opposed coils 16 and 17 causes a restoring force on the armature which balances the accelerating force. The output of detector 6, which is thus proportional to the acceleration, is measured at 9, 10. In a modification for measuring mutually perpendicular acceleration components Fig. 2, a further four coils 19, 20, 21 22 having similar functions to those described above are mounted so that the two pairs of motor coils 14, 15 and 20, 22 are on poles at right angles to each other as are the pairs 16, 17 and 19, 21 of position sensing coils. The two pairs of motor coils are supplied from respective sources 4, 4<SP>1</SP>, with currents of different ...

Integrated accelerometer assembly

ABSTRACT An assembly for use in a dry accelerome-ter. The assembly includes a flat ceramic base with an interior aperture, two metal hinges and a pendulous mass supported within the aperture by such hinges. A light emitting diode and photodetector are provided for measur-ing movement of the pendulous mass. The assembly is readily fabricated and tested with batch processes.

Miniature inertial grade high shock and vibration capability accelerometer and method with axis alignment and stability features

An accelerometer contained in a sealed case with a total volume of one cubic inch containing a seismic mass on a moving system having pivots supported by a support base within the case. A pair of spring support members are disposed between the support base and the moving system containing the seismic mass. The spring support members are in the form of split leaf spring supports having a viscoelastic material between the leaf springs with a pivot bearing in each member. The viscoelastic material performs a damping function for the spring-mass system represented by the moving system supported on the leaf springs. Mechanical stops are provided surrounding the moving system at positions which limit motion of the moving system structure when subjected to shock and vibration for relieving forces exerted by the moving system pivots on the pivot bearings.

Linear accelerometer mechanism

Linear accelerometer mechanism having a housing and a pendulous member. Means is provided for pivotally mounting the pendulous member in the housing. A torque coil is carried by the pendulous member and first and second magnets are mounted in the torque coil for establishing a magnetic field in the vicinity of the torque coil. A conducting planar element is carried by the pendulous member and pick-off means is mounted within the housing in the vicinity of the pendulous member.

Accelerometer

A one-piece support frame is used to support a pair of capacitor plates and a lightweight longitudinally reinforced pendulum having a paddle on one end. The paddle is positioned midway between the capacitor plates forming a pair of capacitors. Attached to the pendulum is an axle which in turn is supported between two flexures by means of jeweled pivoted bearings. The ends of the flexures are rigidly secured to the support frame, and a desired pressure of the bearings against the axle is maintained by means of adjustment screws. Also attached to the pendulum is a torque coil which interacts with a magnetic assembly, secured to the support frame, to restore the paddle to the midpoint between the capacitor plates when the pendulum has been subjected to an acceleration force. Secured to the support frame above and parallel to the pendulum is a thick film circuit board containing an integrated circuit and associated hybrid elements for applying time varying voltages to each capacitor so that the currents flowing through the capacitors can be used as a measure of the difference in capacitance due to deflection of the paddle. The circuitry also includes an output circuit having a servo-compensated network for applying a restoring current to the torque coil wherein the gain and frequency characteristics of the servo system are independent of an impedance used to measure the restoring current.

Linear accelerometer mechanism

Linear accelerometer mechanism having a mounting flange with an opening therein. A body is to be carried by the mounting flange and also has an opening therein. A float, a pendulous elongated member having one end secured to the float and a cylindrical torque coil secured to the other end of the pendulous member are disposed in the opening of the body. Means is provided for pivotally mounting the float, the pendulous member and the torque coil in the body to permit pivotal movement about a pivot axis. A planar conducting element is carried by the pendulous member. Pickoff means is carried by the body adjacent to the planar conducting element. First and second covers are disposed on opposite sides of the flange and close the body and are secured to the flange to aid in providing liquid-tight seals between the covers and the flange.

容量型加速度センサ

加速度センサーおよび加速度センサーの製造方法

(57)【要約】 【課題】 応答性および精度が優れ、小型でかつ安価な 機械的な加速度センサーおよびその製造方法を提供す る。 【解決手段】 第２基板１２に、貫通孔１４と貫通孔１ ４の内周面に形成された第１接点１５と第１接点１５に 接続されている第１ボンディング・パッド１６とを形成 し、第３基板１３に、平面形状が円形の凹部１７と凹部 １７に設けられた導電性球体２１の底部と一部において 接触する第２接点１８と第２接点１８に接続された第２ ボンディング・パッド１９とを形成し、貫通孔１４内に 導電性球体２１を収納して第１基板１１と第２基板１２ と第３基板１３とを積層接合して加速度センサーを構成 する。貫通孔１４に収納された導電性球体２１は、加速 度が加わると、凹部１７から飛び出して第１接点１５と 第２接点１８とを電気的に接続させて、ＯＮ信号を出力 する。

座標入力装置

(57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。