17-02-2022 дата публикации
Номер: US20220050124A1
Принадлежит:
An inertial sensor includes a movable mass, a torsion element, and a suspension system suspending the movable mass apart from a surface of a substrate. The torsion element is coupled to the movable mass for enabling motion of the movable mass about an axis of rotation in response to a force imposed upon the movable mass in a direction perpendicular to the surface of the substrate. The suspension system includes first and second anchors attached to the substrate and displaced away from the axis of rotation, a beam connected to the movable mass via the torsion element, a first folded spring coupled between the first anchor and a first beam end of the beam, and a second folded spring coupled between the second anchor and a second beam end of the beam. 1. An inertial sensor comprising:a movable mass spaced apart from a surface of a substrate;a torsion element coupled to the movable mass and configured to enable motion of the movable mass about an axis of rotation in response to a force imposed upon the movable mass in a direction that is perpendicular to the surface of the substrate; and{'claim-text': ['a first anchor attached to the substrate;', 'a first folded spring having first and second spring ends, the first spring end being coupled to the first anchor;', 'a second anchor attached to the substrate, each of the first and second anchors being displaced away from the axis of rotation;', 'a second folded spring having third and fourth spring ends, the third spring end being coupled to the second anchor;', 'a beam connected to the movable mass via the torsion element, the beam having first and second beam ends, the first beam end being coupled to the second spring end of the first folded spring, and the second beam end being coupled to the fourth spring end of the second folded spring; and', 'a coupler positioned at and aligned with the axis of rotation, wherein a midpoint of the beam between the first and second beam ends is connected to the coupler, and the torsion ...
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