02-01-2020 дата публикации
Номер: US20200003709A1
Принадлежит:
The present invention discloses an imaging device, an imaging method, and an imaging system, belonging to the field of sample image data acquisition and imaging technology. The imaging device includes: a charged particle source, a convergence system, a scanning control system, a detection module, and a spectral analysis module disposed below the detection module, where the detection module includes a plurality of pixelated detector units; and the detection module is provided with a hole thereon. The diffraction pattern is obtained by using the detection module, and the spectral analysis module performs spectral analysis on a charged particle beam passing through the hole, so as to obtain the diffraction pattern and spectral signal simultaneously by one scanning. The imaging method of the present invention is based on a hollow ptychography method, which enables toper form imaging on the diffraction pattern obtained through the detection module, with good imaging effects. 1. An imaging device , comprising:{'b': '1', 'a charged particle source (), configured to emit a charged particle;'}{'b': '2', 'a convergence system (), configured to constrain and converge a charged particle beam;'}{'b': '3', 'a scanning control system (), configured to control scanning of the charged particle beam on a sample;'}{'b': '4', 'a sample ();'}{'b': '5', 'a detection module (), configured to receive the charged particle and detect the signal strength of the charged particle; and'}{'b': 6', '5, 'a spectral analysis module () disposed below the detection module (), configured to analyze spectroscopic characteristics of the charged particle, wherein'}{'b': 5', '7', '5', '8, 'the detection module () comprises a plurality of pixelated detector units () and the detection module () is provided with a hole () thereon.'}28. The imaging device according to claim 1 , wherein the hole () is of claim 1 , but not limited to claim 1 , a circular claim 1 , square claim 1 , or annular shape.35. The ...
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