16-04-2020 дата публикации
Номер: US20200118721A1
A film resistor and a film sensor are disclosed. In an embodiment a film resistor includes a piezoresistive layer comprising a MAXphase, wherein M comprises at least one transition metal, A comprises a main-group element, and X comprises carbon and/or nitrogen, and wherein n=1, 2 or 3. 115-. (canceled)16. A film resistor comprising:{'sub': 1+n', 'n, 'a piezoresistive layer comprising a MAXphase,'}wherein M comprises at least one transition metal, A comprises a main-group element, and X comprises carbon and/or nitrogen, andwherein n=1, 2 or 3.17. The film resistor according to claim 16 , wherein M comprises a single transition metal or two transition metals M1 claim 16 ,M2.18. The film resistor according to claim 16 ,wherein M comprises at least one of Sc, Ti, V, Cr, Mn, Zr, Nb, Mo, Hf or Ta, andwherein A is one of Al, Si, P, S, Ga, Ge, As, Cd, In, Sn, Tl, Pb or Bi.19. The film resistor according to claim 16 , wherein the piezoresistive layer consists essentially of the MAXphase.20. The film resistor according to claim 16 , wherein the piezoresistive layer comprises an oxide claim 16 , a nitride or a carbide.21. The film resistor according to claim 20 , wherein the oxide is present at least in part as a surface oxide of the piezoresistive layer.22. The film resistor according to claim 16 , wherein the piezoresistive layer has a coefficient of thermal expansion of between 8 ppm/K and 14 ppm/K inclusive.23. The film resistor according to claim 16 , wherein the piezoresistive layer has a specific resistance of greater than 1 μΩ/m at a temperature of 20° C.24. The film resistor according to claim 16 , wherein the piezoresistive layer has a k factor claim 16 , which indicates a ratio of a relative change in resistance (ΔR/R) to a relative change in length (ΔL/L) of the piezoresistive layer claim 16 , of greater than 2.25. A thin-film sensor comprising:{'claim-ref': {'@idref': 'CLM-00016', 'claim 16'}, 'the film resistor according to .'}26. The thin-film sensor according ...
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