06-03-2014 дата публикации
Номер: US20140060736A1
Methods for fabricating sublithographic, nanoscale microstructures arrays including openings and linear microchannels utilizing self-assembling block copolymers, and films and devices formed from these methods are provided. In some embodiments, the films can be used as a template or mask to etch openings in an underlying material layer. 1. A template for etching a substrate , the template comprising:{'sub': o', '0, 'having sidewalls, opposing ends, a floor, a width, and a length, the polymer matrix in first trenches comprising perpendicular cylindrical openings separated at a pitch distance of about L, and the polymer matrix in second trenches comprising linear openings extending the length of the second trenches and separated at a pitch distance of about L.'}2. The template of claim 1 , wherein the perpendicular cylindrical openings in the polymer matrix in the first trenches are in a hexagonal array.3. The template of claim 2 , wherein the ends of the first trenches are rounded.4. The template of claim 2 , wherein the width of the first trenches is about Lor about n*Lwhere n is an integer of 3 or greater.5. The template of claim 1 , wherein the perpendicular cylindrical openings are in a single line extending the length of the first trenches.6. The template of claim 5 , wherein the width of the first trenches is from about 1.5*Lto about 2*L.7. The template of claim 1 , wherein the openings in the first trenches extend through the polymer matrix to the floors of the first trenches.8. The template of claim 1 , wherein the polymer matrix is crosslinked and comprises a majority block of a self-assembled block copolymer.9. A template for etching a substrate claim 1 , the template comprising:{'sub': o', 'o, 'openings extending through a polymer matrix of a majority block of a self-assembled block copolymer film within trenches in a material, each trench having sidewalls, opposing ends, a floor, a width, and a length, the polymer matrix in first trenches comprising ...
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