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Небесная энциклопедия

Космические корабли и станции, автоматические КА и методы их проектирования, бортовые комплексы управления, системы и средства жизнеобеспечения, особенности технологии производства ракетно-космических систем

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Мониторинг СМИ

Мониторинг СМИ и социальных сетей. Сканирование интернета, новостных сайтов, специализированных контентных площадок на базе мессенджеров. Гибкие настройки фильтров и первоначальных источников.

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Поддерживает ввод нескольких поисковых фраз (по одной на строку). При поиске обеспечивает поддержку морфологии русского и английского языка
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Применить Всего найдено 53. Отображено 53.
18-09-2013 дата публикации

Transferring and scheduling method of scalable video coding (SVC) video

Номер: CN103313054A
Принадлежит:

The invention relates to a transferring and scheduling method of a scalable video coding (SVC) video, wherein transfer and scheduling of the SVC video in a channel time varying environment for cognitive radio is optimized so as to further optimize subjective quality of the video at the receiving end by means of adaptability of scalability of SVC to the time varying channel by coordinating factors which comprehensively affect subjective experience of an information source, the channel and the receiving end. According to the method provided by the invention, the state of a buffer area at the receiving end is considered in transmission and schedule of the SVC video aiming at the characteristics of CR (Cognitive Radio) network, and data with higher contribution to subjective experience of the video are preferably sent under limited resources, so that the underflow probability of the buffer area at the receiving end is reduced. The underflow probability of the buffer area at the receiving end ...

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04-07-2012 дата публикации

Automatic speed changer

Номер: CN102537309A
Принадлежит:

The invention discloses an automatic speed changer, which comprises a main clutch 500, an input shaft 201, a multimode controllable gear-shifter group 100, an odd intermediate shaft 203, an even intermediate shaft 204 and an output shaft 202, wherein the odd intermediate shaft 203 and the even intermediate shaft 204 are respectively connected in parallel to a position between the output shaft 202 and the multimode controllable gear-shifter group 100 after being connected with a multistage driving device, a pre-gearing device is arranged on each gear of the multistage driving device, a power-transmitting line is together formed by all the parts, and an automatic gear-shifting function with uninterrupted power transmission can be realized by matching corresponding control means and strategies. The automatic speed changer has the advantages that the control difficulty and cost can be simultaneously lowered, and the driving efficiency and the gear-shifting quality are improved.

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25-09-2013 дата публикации

Bag-type compensation device of vertical-type filter press

Номер: CN103316512A
Принадлежит:

The invention discloses a bag-type compensation device of a vertical-type filter press. The bag-type compensation device of the vertical-type filter press comprises a movable pressing plate, an elastic bag and an outer shell, wherein the bag is arranged outside the outer shell; the movable pressing plate is arranged on the upper part of the outer shell, and is matched with the outer shell; the bag is supported under the movable pressing plate; the outer shell is provided with a spacing switch for controlling the motion of the movable pressing plate; the bag is provided with a pipeline which penetrates through the outer shell and is connected with a high-pressure device. The bag-type compensation device of the vertical-type filter press provided by the invention is high in speed, simple to operate and use, high in reliability, and low in cost.

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15-01-2014 дата публикации

Method and device for archiving historical data

Номер: CN103514295A
Принадлежит:

The invention discloses a method for archiving historical data. The method for archiving the historical data comprises the steps of (1) extracting the historical data matched with a task to be edited from a whole historical database containing data which are collected, are stored and are related to tasks; (2) editing the extracted historical data, and forming archived historical data; (3) setting a task identification for the archived historical data, and storing the archived historical data with the task identification on a preset task archived historical database. When the method for archiving the historical data is applied, the access speed of the historical data of the task can be increased.

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09-03-2017 дата публикации

TECHNIQUES AND SYSTEMS FOR MODEL-BASED CRITICAL DIMENSION MEASUREMENTS

Номер: US20170069080A1
Принадлежит: KLA-Tencor Corporation

A reticle is inspected with an imaging system to obtain a measured image of a structure on the reticle, and the structure has an unknown critical dimension (CD). Using a model, a calculated image is generated using a design database that describes a pattern used to form the structure on the reticle. The model generates the calculated image based on: optical properties of reticle materials of the structure, a computational model of the imaging system, and an adjustable CD. A norm of a difference between the measured and calculated images is minimized by adjusting the adjustable CD and iteratively repeating the operation of generating a calculated image so as to obtain a final CD for the unknown CD of the structure. Minimizing the norm of the difference is performed simultaneously with respect to the adjustable CD and one or more uncertain parameters of the imaging system.

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11-09-2013 дата публикации

Forming and pressurizing method of wall plate with omega-shaped reinforcing rib

Номер: CN103286960A
Принадлежит:

The invention relates to a forming and pressurizing method of a wall plate with an omega-shaped reinforcing rib, which comprises the following steps of: (1) solidifying and shaping the omega-shaped reinforcing rib (1) in advance, and then combining the omega-shaped reinforcing rib (1) with the wall plate (2); (2) filling a prefabricated tubular column-shaped vacuum bag (3) into an inner cavity (4) formed between the omega-shaped reinforcing rib (1) and the wall plate (2), laying an outer vacuum bag (5) on the outer surface of the omega-shaped reinforcing rib (1) and the wall plate (2), connecting the space between the outer surface of the column-shaped vacuum bag (3) and the inner surface of the omega-shaped reinforcing rib (1) with the other space between the inner surface of the outer vacuum bag (5) and the outer surfaces of the omega-shaped reinforcing rib (1) and the wall plate (2), and sealing; and (3) vacuumizing the space, keeping the vacuum degree at 0.06 to 0.09 MPa, then heating ...

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22-01-2014 дата публикации

Method for building floor plan map and floor plan map generating system

Номер: CN103530456A
Принадлежит:

The invention discloses a method for building a floor plan map. The method includes the steps that an original floor plan is uploaded; classification plan cutting is carried out on the uploaded floor plan according to a preset plan cutting scheme to form a plan map, and the formed plan map is stored; according to a pre-query object contained in the original floor plan, information of the pre-query object is set in the formed plan map, and the set information of the pre-query object is stored; a detail display image is built for the set pre-query object in the plan map, detail information of the pre-query object is set in the built detail display image, and the detail display image and the detail information of the pre-query object are stored; the correlation relation between the detail display image corresponding to the set pre-query object in the plan map and the plan map is built. By using the method for building the floor plan map, the effective amount of information of the floor plan ...

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27-11-2013 дата публикации

Casement window hardware device with limiting and security-protection functions, and window body

Номер: CN103410390A
Автор: Liu Yanwei
Принадлежит:

The invention discloses a casement window locking device with limiting and security-protection functions, and a window body. The casement window locking device comprises a handle base and a handle which are fixed on the side edge of an sash, wherein a shifting fork is controlled by the handle; a limiting guide rod is driven to vertically slide by the shifting fork; a vertical sliding groove in the limiting guide rod is in sliding fit with the tail end of a limiting pulling rod on a limiting device; the limiting device has a locking position; the sash can be controlled to be opened and positioned by the rotation angle of the handle. According to the device and the window body, the locking strength is high, a good positioning function is provided, the whole sash can be opened completely, the danger caused by the factor that a user separates the limiting pulling rod from the vertical sliding groove can be prevented, the structure is simple, the installation is easy, and the requirements of ...

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27-09-2016 дата публикации

Photoemission monitoring of EUV mirror and mask surface contamination in actinic EUV systems

Номер: US0009453801B2
Принадлежит: KLA-Tencor Corporation, KLA-TENCOR CORP

Photoelectron emission mapping systems for use with EUV (extreme ultraviolet) mask inspection and lithography systems are described. The mapping systems may be used to provide photoelectron emission maps for EUV photolithography masks and/or EUV mirrors. The systems use EUV photoelectron sources used for mask inspection or photolithography to impinge EUV light on the masks and/or mirrors. The EUV light generates photoelectron on the surfaces of the mask and/or mirrors and the photoelectrons are collected and analyzed by detectors placed away from optical spaces of the EUV chamber.

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29-01-2014 дата публикации

Spatially scalable method and system for transcoding from H.264/AVC to SVC

Номер: CN103546754A
Принадлежит:

The invention relates to a spatially scalable method for transcoding from H.264/AVC to SVC. The method includes: decoding a source video stream using H.264/AVC codes to obtain decoded source video frames and coding mode information corresponding to the source video frames; sampling the source video frames to obtain various kinds of intermediate video frames with different resolutions; generating corresponding selectable coding mode information for the intermediate video frames according to the coding mode information; selecting optimal coding mode information for the intermediate video frames according to the selectable coding mode information and inter-layer prediction mode information, realizing SVC coding by using the optimal coding mode information to obtain various kinds of SVC video streams of different resolution layers. By the method, transcoding from H.264/AVC to SVC can be achieved effectively, high transcoding efficiency is achieved, and no excessive storage space needs to be ...

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22-01-2014 дата публикации

Geographic information data fusion system

Номер: CN103530354A
Принадлежит:

The invention discloses a geographic information data fusion system which comprises a geographic information data interface unit, an information exchange platform unit and an information application front-end processor unit. The geographic information data interface unit is used for classifying and storing input geographic information data according to a geographic information data classification table. The information exchange platform unit is used for reading the geographic information data in the geographic information data interface unit according to a preset refresh cycle, converting the geographic information data into geographic information data in a preset format and outputting the geographic information data. The information application front-end processor unit is used for extracting personal information contained in the geographic information data output by the information exchange platform unit, obtaining activity track information corresponding to the personal information from ...

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11-09-2013 дата публикации

Drilling and punching integrated hydraulic drill bit

Номер: CN103291219A
Принадлежит:

The invention discloses a drilling and punching integrated hydraulic drill bit which comprises a drill bit body. A through hole, extending axially, penetrates the whole drill bit body and comprises a nozzle hole portion in the front and a valve hole portion in the middle. The back end of the nozzle hole is designed into a conical surface, and a reversing valve is arranged in the valve hole portion and comprises a protrusion block and a spring. The protrusion block is provided with a connection hole extending axially and a side hole communicated with the connection hole, the front end of the connection hole is blind, the front end of the protrusion block is designed into a conical surface which is in fitting seal with the conical surface of the back end of the nozzle hole portion. The drill bit body is further provided with a side nozzle hole, and an inner end port of the side nozzle hole leads to a big hole of the valve hole portion while an outer end port of the side nozzle hole leads ...

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22-07-2015 дата публикации

Testing device and method for far-mid distance protection layer mining protection range

Номер: CN104793251A
Принадлежит:

The invention relates to a testing device and method for a far-mid distance protection layer mining protection range. The testing device comprises a computer data processing system, a downhole electromagnetic signal transmitting unit and a ground electromagnetic signal receiving unit; the downhole electromagnetic signal transmitting unit comprises an electromagnetic receiving apparatus and a receiving coil. Primary pulse signals are transmitted in the downhole, an electromagnetic receiver is used for measuring transient electromagnetic signals at the position corresponding to the ground along trend and tendency lines, whole-space transient response is achieved, intensity of the receiving electromagnetic signals is greatly increased, and detecting precision is improved; the protection range of far-mid distance protection layer mining is accurately determined by adopting a mine-ground large fixed source loop transient electromagnetic method and comparatively analyzing difference of apparent ...

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23-01-2018 дата публикации

Techniques and systems for model-based critical dimension measurements

Номер: US0009875534B2
Принадлежит: KLA-Tencor Corporation, KLA-TENCOR CORP

A reticle is inspected with an imaging system to obtain a measured image of a structure on the reticle, and the structure has an unknown critical dimension (CD). Using a model, a calculated image is generated using a design database that describes a pattern used to form the structure on the reticle. The model generates the calculated image based on: optical properties of reticle materials of the structure, a computational model of the imaging system, and an adjustable CD. A norm of a difference between the measured and calculated images is minimized by adjusting the adjustable CD and iteratively repeating the operation of generating a calculated image so as to obtain a final CD for the unknown CD of the structure. Minimizing the norm of the difference is performed simultaneously with respect to the adjustable CD and one or more uncertain parameters of the imaging system.

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22-01-2014 дата публикации

Electronic map service platform and electronic map data linkage displaying method

Номер: CN103530356A
Принадлежит:

The invention discloses an electronic map service platform and an electronic map data linkage displaying method. The electronic map data linkage displaying method includes the steps of after a two-dimensional electronic map display command is received, according to the longitude and latitude scopes of a to-be-displayed two-dimensional electronic map related to the two-dimensional electronic map display command, loading two-dimensional foundation map data within the longitude and latitude scopes of a two-dimensional foundation map database, loading service data of a landmark object within the longitude and latitude scopes in a service database, and conducting two-dimensional electronic map display; after a three-dimensional electronic map display command is received, determining the longitude and latitude scopes of a to-be-displayed three-dimensional electronic map according to a measuring scale and the longitude and the latitude of a center point of the two-dimensional electronic map displayed ...

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22-08-2012 дата публикации

Fault-tolerance rate distortion optimization video coding method and device based on structure similarity (SSIM) evaluation

Номер: CN102647591A
Принадлежит:

The invention relates to a fault-tolerance rate distortion optimization video coding method and a fault-tolerance rate distortion optimization video coding device based on subjective visual structure similarity (SSIM) evaluation. The method comprises the following steps that: the SSIM is used as the distortion evaluation standard to be combined with information feedback of signal channels, and the end-to-end distortion estimation based on the SSIM evaluation is carried out at the coding end; the bit number required by the coding node is calculated according to the in-frame or inter-frame coding mode; the video fault-tolerance coding rate distortion optimization is carried out through calculating fault-tolerance Lagrangian factors, and the optimum coding mode is found under the condition of easy-to-fail network transmission. The method and the device provided by the invention solve the problem that the distortion evaluation in the traditional combined signal source signal channel video coding ...

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22-01-2014 дата публикации

Method and system for visualization deduction based on electronic map

Номер: CN103530370A
Принадлежит:

The invention discloses a method and system for visualization deduction based on an electronic map. The method comprises the steps that after a deduction server receives a visualization deduction instruction, and longitude and latitude information and linkage information of deduction resources related to a deduction path are read from a buffering server and are in local cache according to the name of the related deduction path in the electronic map; then, a simulation motorcade is started, and the simulation motorcade advances from the starting point of the deduction path along the deduction path towards the end point of the deduction path; in the advancing process, the longitude and latitude of the current advancing position of the simulation motorcade are used as base points, the longitude and latitude information and the linkage information of each deduction resource in a set longitude and latitude range in front of the base points are read from the local cache, linkage is carried out ...

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30-10-2013 дата публикации

Automobile body pitching angle detection system, control system and corresponding automobile

Номер: CN103376087A
Принадлежит:

The invention provides a detection system and a control system for an automobile body pitching angle and an automobile with the detection system or the control system. The detection system comprises a front torsion bar mechanism, a rear torsion bar mechanism, a hydraulic coupling system, a displacement measurement device and a pitching angle calculation unit. When the automobile inclines longitudinally, the translation motion of a front suspension and a rear suspension of the automobile in the vertical direction relative to an automobile body is converted into movement of a piston in the hydraulic coupling system, so that the pitching angle of the automobile body can be calculated according to the displacement of the piston. The detection system provided by the invention is simple in structure, convenient to mount, high in precision and low in cost and can accurately measure the pitching angle of the automobile body of the automobile in real time. The control system provided by the invention ...

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31-10-2012 дата публикации

Multi-path pre-impregnation belt laying method

Номер: CN102756483A
Принадлежит:

The invention discloses a multi-path laying programming method by laying track planning. When the laying track is planned, multi-starting-point laying is adopted, and the programming process comprises the following key points: the determination of the laying sequence, combination tailoring, the rotating mode of a laying device, and the enlargement size of an edge laying blocking. According to the method, the work efficiency of an automatic belt laying machine is improved, the utilization ratio of the material is improved, the edge quality of the belt is improved, and the advanced use effect of the automatic belt laying machine can be ensured.

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22-07-2015 дата публикации

Simulating device and method for diameter change rule of gas extraction borehole

Номер: CN104792616A
Принадлежит:

The invention belongs to the technical field of coal mine gas disaster prevention and control as well as coal-bed gas extraction, and discloses a simulating device and method for a diameter change rule of a gas extraction borehole. The device comprises a true triaxial pressure test device, an optical borehole deformation observation device, a coal mass crack evolution observation device and a main machine. The magnitude of stresses in different directions is changed through the true triaxial pressure test device, and the diameter change rule of coal masses with different strength at different stress states can be researched by the aid of the optical borehole deformation observation device; real-time observation and image shooting can be performed on crack evolution of coal masses around the extraction borehole through a microscope and a camera of the coal mass crack evolution observation device. The device and the method have the important significance in determination of the reasonable ...

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15-01-2014 дата публикации

Wall-climbing robot with passive compression structure and biomimetic claws

Номер: CN103507870A
Принадлежит:

The invention belongs to the technical field of machine manufacturing, and particularly relates to a wall-climbing robot with a passive compression structure and biomimetic claws. The wall-climbing robot comprises an upper machine body plate, a lower machine body plate, a crank block, the claws and a tail. The upper machine body plate and the lower machine body plate are respectively connected with at least three claws, wherein the claws are symmetrically distributed left and right, and all the claws are connected with the upper machine body plate and the lower machine plate body through elastic leaf springs. The elastic leaf springs deform directionally to provide pre-compression for the claws in a passive mode. According to the wall-climbing robot, the structural design of the one-way elastic claws is adopted, and the claws have the characteristics of being capable of sliding and fixedly clawing and adhering when the wall-climbing robot moves. When the claws slide upward along a wall ...

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17-04-2013 дата публикации

Novel regeneration method of PDP (Plasma Display Panel) barrier

Номер: CN103050352A
Принадлежит:

The invention discloses a novel regeneration method of a PDP (Plasma Display Panel) barrier. The method comprises the steps of: coating the lower layer of the barrier to a barrier regeneration substrate generated in front of a barrier sintering furnace and casting the barrier regeneration substrate to the barrier sintering furnace to sinter; then, carrying out off-line processing for the sintered barrier regeneration substrate and further carrying out off-line processing for the regeneration substrate with an abnormal film of the barrier and the regeneration substrate with poor pattern size of the barrier; then, etching the regeneration substrates by a barrier etcher; and finally, re-coating the completely etched regeneration substrates after off-line processing according to a normal screen process flow. The invention further discloses regeneration liquid-barrier etching liquid nitric acid. The nitric acid is reacted with inorganic power of barrier material to finally separate the barrier ...

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18-07-2012 дата публикации

Wireless video transmission method

Номер: CN102595143A
Принадлежит:

The invention provides a wireless video transmission method, which comprises the following steps of: setting an initial coded quantization parameter range; estimating a rate distortion model according to the initial coded quantization parameter range, and narrowing a quantization parameter range according to the model; searching for an optimal coded quantization parameter and an optimal adaptive modulation coding mode from the narrowed quantization parameter range; and coding video data according to the optimal coded quantization parameter, configuring a physical layer in the optimal adaptive modulation coding mode, and transmitting a current band data packet. The wireless video transmission method is cross-layer optimized, and is low in calculation complexity. The rate distortion characteristics of multi-channel video coding are utilized, and the calculation complexity of the cross-layer optimized wireless video transmission is lowered by rate distortion estimation and coding block mode ...

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04-07-2012 дата публикации

Tablet containing paroxetine and preparation method thereof

Номер: CN102525966A
Автор: Liu Yanwei, Ren Xia
Принадлежит:

The invention discloses a tablet containing paroxetine and a preparation method thereof. The tablet is composed of paroxetine hydrochloride and auxiliary materials accepted in pharmacy and prepared in a wet granulation process, thereby not affecting tablet manufacturing modes and guaranteeing quality and stability of tablets. The tablet is simple in preparation method, wide in application scope, convenient to transport and store and suitable for scale production. The preparation method is convenient to operate.

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30-10-2013 дата публикации

CPG control system of wall-climbing robot imitating flexible structure of feet of gecko

Номер: CN103376742A
Принадлежит:

The invention belongs to the field of four-footed gecko-imitating robots and particularly relates to CPG neural network control used for gecko-imitating four-footed coordinated motion and toe detachment and attachment control. A CPG control system of a wall-climbing robot imitating the flexible structure of the feet of a gecko comprises a higher central nervous module, a CPG neutral network module, a signal processing module, an execution module and a sensor module. Because a CPG network is adopted for imitating a motion control system of the animal, particularly imitating a rhythmic motion control system of the animal, a CPG multi-foot coordinated motion control system is built, the principle of a coordinated motion control algorithm with the higher nerve cells and the CPG as the core is obtained, and coordination is improved.

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03-10-2017 дата публикации

Delta die and delta database inspection

Номер: US0009778205B2
Принадлежит: KLA-Tencor Corporation, KLA-TENCOR CORP

Disclosed are methods and apparatus for inspecting a photolithographic reticle. An inspection tool is used to obtain a plurality of patch area images of each patch area of each die of a set of identical dies on a reticle. An integrated intensity value for each patch area image is determined. A gain is applied to the integrated intensity value for each patch area image based on a pattern sparseness metric of such patch area image and its relative value to other patch area images' pattern sparseness metric. A difference between the integrated intensity value of each patch of pairs of the dies, which each pair includes a test die and a reference die, is determined to form a difference intensity map of the reticle. The difference intensity map correlates with a feature characteristic variation that depends on feature edges of the reticle.

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20-11-2013 дата публикации

Method and device for quickly testing water seepage properties of low-intensity heat-insulating materials for shafts and drifts

Номер: CN103398932A
Принадлежит:

The invention discloses a method and a device for quickly testing the water seepage properties of low-intensity heat-insulating materials for shafts and drifts. After a quick-hardening waterproof swelling colloid layer is injected between a long cylindrical precast test block and a seamless steel tube, one end of the seamless steel tube is connected into a confined water pipe by using a screw thread, and the other end of the seamless steel tube is placed in a water containing measuring jug. Confined water after seeping from the precast test block enters the water containing measuring jug, and a permeability coefficient can be calculated according to a seepage flow and related device parameters. The method and the device disclosed by the invention has the characteristics of being convenient to manufacture, easy to operate, easy and liable, low in test cost, and the like, and can quickly realize a test on the water seepage properties of the low-intensity heat-insulating materials under general ...

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22-01-2014 дата публикации

Wall-climbing robot with adhesive bands

Номер: CN103523108A
Принадлежит:

The invention belongs to the technical field of machine manufacturing, and particularly relates to a wall-climbing robot with adhesive bands. The wall-climbing robot comprises a drive unit and an execution unit, and the drive unit comprises a direct-current gear motor and a gear set. The execution unit comprises a front wheel axle, a rear wheel axle, wheels and the adhesive bands, and the adhesive bands are clamped in the grooves of the wheels and are made of rubber materials with stickiness. The wall-climbing robot further comprises a chassis, and the direct-current gear motor is fixed to the front end of the chassis. The chassis is designed to have a beetle elytra type arc-face structure. A tail structure capable of adjusting precompression is arranged at the rear end of the chassis. The wall-climbing robot has high strength and is light, the technical design of adhesion and a moving mode is adopted, and the wall-climbing robot can be suitable for advancing on various complex occasions ...

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28-11-2013 дата публикации

PHOTOEMISSION MONITORING OF EUV MIRROR AND MASK SURFACE CONTAMINATION IN ACTINIC EUV SYSTEMS

Номер: US20130313442A1

Photoelectron emission mapping systems for use with EUV (extreme ultraviolet) mask inspection and lithography systems are described. The mapping systems may be used to provide photoelectron emission maps for EUV photolithography masks and/or EUV mirrors. The systems use EUV photoelectron sources used for mask inspection or photolithography to impinge EUV light on the masks and/or mirrors. The EUV light generates photoelectron on the surfaces of the mask and/or mirrors and the photoelectrons are collected and analyzed by detectors placed away from optical spaces of the EUV chamber. 1. A photoelectron emission mapping system for photolithography masks , comprising:a mask defect inspection stage;a photoelectron source used for mask inspection; anda photoelectron detector located outside a beam path between the photoelectron source and the mask defect inspection stage, wherein the photoelectron detector is configured to detect photoelectrons emitted from a surface of a mask coupled to the mask defect inspection stage when light from the photoelectron source impinges on the mask during inspection of the mask;wherein the surface of the mask is biased at a lower voltage than a region around the photoelectron detector during use.2. The system of claim 1 , wherein the photoelectron detector is located outside the optics space envelopes of the photoelectron source and the mask defect inspection stage.3. The system of claim 1 , further comprising fiber optics located between the photoelectron source and the photoelectron detector claim 1 , wherein the fiber optics are used to introduce a time delay between emission of light from the photoelectron source and detection of photoelectrons by the photoelectron detector during use.4. The system of claim 1 , wherein the photoelectron detector is configured to detect at least one of intensity and electron spectrum of the photoelectrons emitted from the mask surface.5. The system of claim 1 , wherein the system is configured to assess ...

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20-02-2014 дата публикации

Optical Characterization Systems Employing Compact Synchrotron Radiation Sources

Номер: US20140048707A1
Автор: Daniel C. Wack, Yanwei Liu
Принадлежит: KLA Tencor Corp

A compact synchrotron radiation source includes an electron beam generator, an electron storage ring, one or more wiggler insertion devices disposed along one or more straight sections of the electron storage ring, the one or more wiggler insertion devices including a set of magnetic poles configured to generate a periodic alternating magnetic field suitable for producing synchrotron radiation emitted along the direction of travel of the electrons of the storage ring, wherein the one or more wiggler insertion devices are arranged to provide light to a set of illumination optics of a wafer optical characterization system or a mask optical characterization system, wherein the etendue of a light beam emitted by the one or more wiggler insertion devices is matched to the illumination optics of the at least one of a wafer optical characterization system and the mask optical characterization system.

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06-03-2014 дата публикации

WAVE FRONT ABERRATION METROLOGY OF OPTICS OF EUV MASK INSPECTION SYSTEM

Номер: US20140063490A1
Принадлежит:

Disclosed is test structure for measuring wave-front aberration of an extreme ultraviolet (EUV) inspection system. The test structure includes a substrate formed from a material having substantially no reflectivity for EUV light and a multilayer (ML) stack portion, such as a pillar, formed on the substrate and comprising a plurality of alternating pairs of layers having different refractive indexes so as to reflect EUV light. The pairs have a count equal to or less than 15. 1. A test structure for measuring wave-front aberration of an extreme ultraviolet (EUV) inspection system , comprising:a substrate formed from a material having substantially no reflectivity for EUV light; anda multilayer (ML) stack portion formed on the substrate and comprising a plurality of alternating pairs of layers having different refractive indexes so as to reflect EUV light, wherein the ML stack portion is arranged on the substrate to expose a portion of the substrate.2. The test structure of claim 1 , wherein each pair comprises (i) a molybdenum (Mo) layer and a silicon (Si) layer claim 1 , (ii) a Ru layer and a Si layer claim 1 , or (iii) a Mo layer and a Si layer interfaced with a carbon (C) based barrier layer.3. The test structure of claim 1 , further comprising a capping layer over the ML stack portion formed from a material that prevents oxidation of the ML stack portion and is substantially transparent claim 1 , wherein the capping layer is comprised of Ru claim 1 , diamond-like carbon (DLC) claim 1 , Si or platinum (Pt).4. The test structure of claim 1 , wherein the alternating pairs of layers of the ML stack portion are non-periodic and each alternating pair has a thickness that is optimized so that EUV light diffracted from the test structure substantially fills an entrance pupil area of the inspection system and/or has an optimized peak reflectivity.5. The test structure of claim 1 , wherein a count of the pairs is equal to or less than ten.6. The test structure of claim 1 , ...

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20-01-2022 дата публикации

Systems and Methods for Theft Prevention and Detection

Номер: US20220020254A1
Автор: Liu Yanwei
Принадлежит:

A system and method for premises theft prevention and detection. A system comprises a media capture device, a target area and target object at a workstation, and operably configured code in non-transitory computer readably storage media. A system recognizes a theft or misappropriation and can notify a business owner or police. The system is powered by machine-learning algorithms that progressively improve accuracy and precision in theft detection. 1. A system for premises theft prevention and detection , the system comprisinga. At least one media capture device capable of capturing multimedia from individual activity at a workstation;b. A target object referenced in a target area at a workstation;c. A hardware architecture comprising a non-transitory computer readable storage medium having computer readable program code embodied therewith, the computer readable program code comprising computer readable program code for processing and buffering video, adjusting video, and producing confidence estimates based on parameters to identify an instance of theft or misappropriation; andd. operably configured code for a suspicious gesture recognition algorithm or for a hybrid sensor classification algorithm for detecting an instance of a theft or misappropriation.2. The system of claim 1 , the system further comprising an Internet connection over a system network.3. The system of wherein the target object is money.4. The system of wherein the target object is inventory goods.5. The system of wherein the media capture device is a surveillance camera.6. The system of wherein the surveillance camera is coupled with at least one sensor.7. The at least one sensor of whereby the sensor is capable of detecting weight claim 6 , motion claim 6 , density claim 6 , temperature claim 6 , or direction.8. The sensor classification algorithm of whereby multimedia content is scanned claim 8 , buffered claim 8 , and a confidence estimate is produced according to gesture parameters.9. The ...

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15-05-2014 дата публикации

Phase Grating For Mask Inspection System

Номер: US20140131586A1
Принадлежит: KLA-TENCOR CORPORATION

Spectral Purity Filters, or SPFs, are disclosed. Such SPFs are designed to block out the 1030 nm drive laser and other undesired out of band light in a EUV mask inspection system. Different phase grating configurations for near normal incidence and grazing incidence are provided in the present disclosure and are configured specifically for EUV mask inspection. 1. A phase grating on a mirror , comprising:a substrate;a plurality of continuous base bilayers positioned on the substrate; anda plurality of gratings positioned on the plurality of continuous base bilayers, wherein each of the plurality of gratings is formed using between 10 and 200 bilayers.2. The phase grating of claim 1 , wherein the continuous base bilayers and the plurality of gratings are formed using at least one of: Mo/Si bilayers claim 1 , Ru/Si bilayers claim 1 , Ru/C bilayers claim 1 , Mo/C bilayers claim 1 , Mo/C bilayers claim 1 , Si/C bilayers claim 1 , La/B bilayers claim 1 , La/B4C bilayers claim 1 , Ru/B4C bilayers claim 1 , Ti/B4C bilayers claim 1 , LaN/B4C bilayers or LaN/B bilayers.3. The phase grating of claim 1 , wherein each of the plurality of gratings is formed using between 33 and 43 bilayers.4. The phase grating of claim 1 , wherein the gratings are arranged in at least one of: a parallel manner claim 1 , a radial manner claim 1 , an off-axis radial manner claim 1 , a combination of different parallel sections claim 1 , a combination of different radial sections claim 1 , or a combination of parallel and radial sections.5. The phase grating of claim 4 , wherein a pitch of the gratings is a predetermined value between 5 and 1000 um.6. The phase grating of claim 4 , wherein a duty ratio of the gratings is a predetermined value between 0.7 and 1.5.7. The phase grating of claim 1 , wherein a depth of the gratings is between 100 and 600 nm.8. The phase grating of claim 1 , further comprising:a coating containing at least one of: Ru, C, Pt, Pd, Au, Nb, Nb2O5, SiO2, TiO2 or RuO2 deposited ...

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19-03-2020 дата публикации

Method for Measuring Capacity of Energy Storage Devices in Hybrid Bus

Номер: US20200086758A1
Принадлежит:

The present disclosure discloses a method for measuring capacity of energy storage devices in a hybrid bus, and belongs to the technical field of energy management and control of hybrid buses. The method comprises the steps of obtaining required power Pof the hybrid bus for round trips on a selected bus line for for one or more times and then obtaining average required power P; determining energy storage capacity of a short-term energy storage device of the hybrid bus, specifically including the step that Fourier transformation is carried out on the required power Pto obtain a relation model between the required power Pand time periods; and determining energy storage capacity of a long-term energy storage device of the hybrid bus, specifically including the steps that n supply and demand mismatch power Pare calculated, wherein P=P−P, that the obtained n Pare connected end to end, and that then a maximum value of the sum of any q connected data is calculated, wherein the obtained maximum value is the energy storage capacity of the long-term energy storage device. 1. A method for measuring capacity of energy storage devices in a hybrid bus , comprising the following steps:{'sub': usage', 'usage avg, 'obtaining an actual load energy demand value of the hybrid bus for round trips on a selected bus line for one or more times per unit time, namely, required power P, and then adding up and averaging corresponding required power within a needed time range of the hybrid bus for round trips on the selected bus line for one or more times so as to obtain average required power P;'} [{'sub': usage', 'usage', 'usage, 'carrying out Fourier transformation on the required power Pto obtain a relation model between the required power Pand time periods, wherein a vertical axis is data of the required power P, an abscissa axis is values of the time periods T=1/f, and f is frequency;'}, {'sub': i', 'i', 'i, 'carrying out per-unit value normalization on the corresponding required power ...

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21-04-2016 дата публикации

CRITICAL DIMENSION UNIFORMITY ENHANCEMENT TECHNIQUES AND APPARATUS

Номер: US20160110858A1
Автор: Fang Hawren, Liu Yanwei
Принадлежит: KLA-TENCOR CORPORATION

Disclosed are methods and apparatus for inspecting a photolithographic reticle. Modeled images of a plurality of target features of the reticle are obtained based on a design database for fabricating the reticle. An inspection tool is used to obtain a plurality of actual images of the target features of the reticle. The modelled and actual images are binned into a plurality of bins based on image properties of the modelled and actual images, and at least some of the image properties are affected by one or more neighbor features of the target features on the reticle in a same manner. The modelled and actual images from at least one of the bins are analyzed to generate a feature characteristic uniformity map for the reticle. 1. A method of inspecting a photolithographic reticle , the method comprising:obtaining modeled images of a plurality of target features of the reticle based on a design database for fabricating the reticle;from an inspection tool, obtaining a plurality of actual images of the target features of the reticle;binning the modelled images and the actual images into a plurality of bins based on image properties of the modelled and actual images, wherein at least some of the image properties of each bin are affected by one or more neighbor features of the target features on the reticle in a same manner; andanalyzing the modelled images and the actual images from at least one of the bins to generate a feature characteristic uniformity map for the reticle.2. The method of claim 1 , wherein the feature characteristic uniformity map for each bin is a critical dimension uniformity (CDU) map for each bin.3. The method of claim 2 , wherein each modelled image includes a target feature having a CD value and a surrounding area claim 2 , and wherein each modelled image incorporates at least a portion of the optical properties of the inspection tool.4. The method of claim 3 , wherein each bin contains modeled images that contain a near-constant CD error for the CD ...

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01-07-2021 дата публикации

METHOD FOR PREPARING PRECURSOR OF RECOMBINANT HUMAN INSULIN OR ANALOGUE THEREOF

Номер: US20210198311A1
Принадлежит: JIANGSU HENGRUI MEDICINE CO., LTD.

Disclosed is a method for preparing a precursor of a recombinant human insulin or an analogue thereof, comprising: a. bacterial fermentation, centrifuging a fermentation broth in a continuous flow to collect a supernatant; b. filtering the supernatant in step (a) by means of a hollow fiber membrane and collecting the filtrate; and c. purifying the filtrate in the step (b) by means of a chromatography column. The method has the advantages of streamlined steps, scalability, no use of organic solvents, high yield, etc. The purity of the insulin precursor can exceed 90%, the host cell protein removal rate exceeds 90%, and the exogenous DNA removal rate is 89% or greater, achieving less than 0.1 ng/mg. 1. A method for preparing a precursor of recombinant human insulin or an analogue thereof comprising the following steps:a. performing continuous flow centrifugation on obtained fermentation broth after the fermentation of bacteria, and collecting a light liquid;b. filtering the light liquid in step a by hollow fiber membrane filtration and collecting obtained filtrate;c. purifying the filtrate in the step b by chromatography column.2. The method of claim 1 , wherein the hollow fiber membrane has a pore size of 0.22 μm or 0.45 μm; or claim 1 , the hollow fiber membrane has a molecular weight cut-off of 500-1000 KDa.3. The method of claim 1 , wherein the hollow fiber membrane filtration in step b is a cyclical tangential flow filtration.4. The method of claim 1 , comprising the following steps:a. performing continuous flow centrifugation on obtained fermentation broth after the fermentation of bacteria, and collecting a light liquid and a heavy liquid respectively; diluting the heavy liquid at least once and then performing centrifugation again to obtain another light liquid, and pooling two obtained light liquids into one;b. filtering the light liquid obtained in step a by a cyclical tangential flow filtration using a hollow fiber membrane and collecting the filtrate;c. ...

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16-08-2018 дата публикации

Threaded-connection anti-loosening locking device

Номер: US20180231048A1
Автор: Yanwei Liu
Принадлежит: Guangzhou Shinedason Manufacture Co Ltd

A threaded-connection anti-loosening locking device includes: a bolt ( 4 ) having an external thread screw, a nut ( 3 ) having an internal thread, a locking member for locking rotation of the nut on the bolt, and a locking pad ( 1 ) for further limiting rotation of the locking member. By means of matching of the locking member and the locking pad ( 1 ), the rotation of the nut can be prevented by utilizing the matching relationship of mutual locking during vibration, and the current fixation relationship can be prevented from being loosened.

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01-10-2015 дата публикации

DELTA DIE AND DELTA DATABASE INSPECTION

Номер: US20150276617A1
Принадлежит: KLA-TENCOR CORPORATION

Disclosed are methods and apparatus for inspecting a photolithographic reticle. An inspection tool is used to obtain a plurality of patch area images of each patch area of each die of a set of identical dies on a reticle. An integrated intensity value for each patch area image is determined. A gain is applied to the integrated intensity value for each patch area image based on a pattern sparseness metric of such patch area image and its relative value to other patch area images' pattern sparseness metric. A difference between the integrated intensity value of each patch of pairs of the dies, which each pair includes a test die and a reference die, is determined to form a difference intensity map of the reticle. The difference intensity map correlates with a feature characteristic variation that depends on feature edges of the reticle. 1. A method of inspecting a photolithographic reticle , the method comprising:using an inspection tool to obtain a plurality of patch area images of each patch area of each die of a set of identical dies on a reticle;determining an integrated intensity value for each patch area image;applying a gain to the integrated intensity value for each patch area image based on a pattern sparseness metric of such patch area image and its relative value to other patch area images' pattern sparseness metric; anddetermining a difference between the integrated intensity value of each patch of pairs of the dies, which each pair includes a test die and a reference die, to form a difference intensity map of the reticle, wherein the difference intensity map correlates with a feature characteristic variation that depends on feature edges of the reticle.2. The method of claim 1 , wherein each die's patch area images are aligned with the patch area images of a same one of the dies.3. The method of claim 1 , wherein the integrated intensity value for each patch area image is an average intensity value for a plurality of subareas of the patch area image.4. ...

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14-04-2021 дата публикации

Method for preparing precursor of recombinant human insulin or analogue thereof

Номер: EP3805257A1
Принадлежит: Jiangsu Hengrui Medicine Co Ltd

Disclosed is a method for preparing a precursor of a recombinant human insulin or an analogue thereof, comprising: a. bacterial fermentation, centrifuging a fermentation broth in a continuous flow to collect a supernatant; b. filtering the supernatant in step (a) by means of a hollow fiber membrane and collecting the filtrate; and c. purifying the filtrate in the step (b) by means of a chromatography column. The method has the advantages of streamlined steps, scalability, no use of organic solvents, high yield, etc. The purity of the insulin precursor can exceed 90%, the host cell protein removal rate exceeds 90%, and the exogenous DNA removal rate is 89% or greater, achieving less than 0.1 ng/mg.

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30-03-2021 дата публикации

METHODS FOR PREPARING A RECOMBINANT OR HUMAN INSULIN PRECURSOR OF THE SAME, RECOMBINANT HUMAN INSULIN OR ANALOG OF THE SAME AND ACILLATE INSULIN ANALOG

Номер: BR112020023485A2
Принадлежит: JIANGSU HENGRUI MEDICINE CO., LTD.

é revelado um método para preparar um precursor de uma insulina humana recombinante ou um análogo da mesma, compreendendo: a. fermentação bacteriana, centrifugação de um caldo de fermentação em um fluxo contínuo para coletar um sobrenadante; b. filtrar o sobrenadante na etapa (a) por meio de uma membrana de fibra oca e coletar o filtrado; e c. purificar o filtrado na etapa (b) por meio de uma coluna de cromatografia. o método possui as vantagens de etapas dinamizadas, escalabilidade, nenhum uso de solventes orgânicos, alto rendimento etc. a pureza do precursor da insulina pode exceder 90%, a taxa de remoção de proteína da célula hospedeira excede 90% e a taxa de remoção de dna exógeno é de 89% ou maior, alcançando menos de 0,1 ng/mg.

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28-11-2019 дата публикации

Method for preparing precursor of recombinant human insulin or analogue thereof

Номер: CA3100869A1
Принадлежит: Jiangsu Hengrui Medicine Co Ltd

Disclosed is a method for preparing a precursor of a recombinant human insulin or an analogue thereof, comprising: a. bacterial fermentation, centrifuging a fermentation broth in a continuous flow to collect a supernatant; b. filtering the supernatant in step (a) by means of a hollow fiber membrane and collecting the filtrate; and c. purifying the filtrate in step (b) by means of a chromatography column. The method has the advantages of streamlined steps, scalability, no use of organic solvents, high yield, etc. The purity of the insulin precursor can exceed 90%, the host cell protein removal rate exceeds 90%, and the exogenous DNA removal rate is 89% or greater, achieving less than 0.1 ng/mg.

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27-03-2020 дата публикации

一种植脂末生产中的冷凝水循环利用系统

Номер: CN210193431U

本实用新型公开了一种植脂末生产中的冷凝水循环利用系统,包括冷凝水暂存罐,所述冷凝水暂存罐的进水端连接有冷凝水进管,所述冷凝水的出水端分别连接多个加热盘管的进水端,所述多个加热盘管的出水端均连接冷凝水暂存罐的进水端,所述加热盘管的上方固定有料罐;还包括与冷凝水暂存罐出水端连接的集水池,该集水池分别连接暖气管道、清洁管道和消防管道。本冷凝水循环利用系统将冷凝水收集起来,并对冷凝水进行二次和三次利用,实现冷凝水的循环利用,从而减少浪费,降低生产成本。

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04-04-2024 дата публикации

Mask for X-Ray Lithography and Metrology

Номер: US20240112913A1
Принадлежит: Individual

A mask apparatus for x-ray lithography and metrology where the x-ray absorber material is embedded in diamond and then covered with a thermally conductive material to provide requisite thermal conductivity when irradiated with x-rays. The apparatus then includes a hollow holder that is thermally interfaced with the mask and may also include means for external thermal control. The mask apparatus allows for transmission of x-rays from a lithography beam as well as metrology beams of other wavelengths including UV, IR, visible, and others.

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12-03-2024 дата публикации

Systems and methods for theft prevention and detection

Номер: US11928942B2
Автор: Yanwei Liu
Принадлежит: Jfm International Corp

A system and method for premises theft prevention and detection. A system comprises a media capture device, a target area and target object at a workstation, and operably configured code in non-transitory computer readably storage media. A system recognizes a theft or misappropriation and can notify a business owner or police. The system is powered by machine-learning algorithms that progressively improve accuracy and precision in theft detection.

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26-08-2021 дата публикации

Integriertes Pumpstationssystem zum Abtrennen der Regenwasserkomponenten und Verbessern der Regenwasserqualität und dessen Bauverfahren

Номер: DE102021104014A1

Die vorliegende Erfindung offenbart ein integriertes Pumpstationssystem zum Abtrennen der Regenwasserkomponenten und Verbessern der Regenwasserqualität und dessen Bauverfahren, wobei das Pumpstationssystem eine Regenwasser- und Abwasserleitung, einen Füllstandanzeiger und ein Zeitrelais, die ans Ausgabeende der Regenwasser- und Abwasserleitung angeschlossenen sind, ein jeweils an ein stromabwärtiges Ende des Zeitrelais angeschlossenes erstes Schleusentor und zweites Schleusentor, eine an ein stromabwärtiges Ende des ersten Schleusentors angeschlossene erste Abwasserleitung, einen an ein stromabwärtiges Ende des zweiten Schleusentors angeschlossenen Filter mit gemischtem Filtermaterial, eine an ein stromabwärtiges Ende des Filters mit gemischtem Filtermaterial angeschlossene Wasserpumpe sowie ein aufnehmendes Gewässer, eine stromabwärtige Entwässerungsleitung oder eine Kläranlage, die an ein stromabwärtiges Ende der Wasserpumpe angeschlossen sind, umfasst. durch eine kombinierte Verwendung des Füllstandanzeigers, des Zeitrelais und der Schleusentore ist die vorliegende Erfindung förderlich dafür, eine differenzierte Umleitungsbehandlung durchzuführen, durch den Filter mit gemischtem Filtermaterial wird eine gezielte Behandlung für das Regenwasser durchgeführt, dadurch kann das Regenwasser weiterhin gereinigt werden; mit der Anordnung der Unfallauslassöffnung wird es sichergestellt, dass das einströmende Wasser nicht unmittelbar ins aufnehmende Gewässer eintritt und eine Behandlung der nächsten Stufe durchgeführt wird; dabei ist ein Durchflussmesser angeordnet, was förderlich für eine Überwachung der Verstopfungssituation des Filters mit gemischtem Filtermaterial ist.

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31-03-2020 дата публикации

提高水泥窑分析用高温样气成分代表性的采集装置

Номер: CN210221596U

本实用新型公开了一种提高水泥窑分析用高温样气成分代表性的采集装置,包括一个安装在旋窑窑尾密封口附近的采样探头,旋窑窑尾密封口设有机械密封圈,机械密封圈附近设有采样孔,采样探头穿过采样孔进入旋窑内部进行采样,采样探头还分别设有:用于冷却采样探头的冷却水供排水管道,以及用于对采样探头的前端进行冲洗除尘的洗涤水供水管道。该提高水泥窑分析用高温样气成分代表性的采集装置,把采样点移到窑尾窑口处,将探头穿过窑口密封圈,插入窑内,变固定安装为自动推拉方式。由此可以达到长期、连续、不失真的采集烟气样气的目的,从根本上保证烟气成分样品的代表性。

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15-05-2014 дата публикации

Phase grating for mask inspection system

Номер: WO2014074904A1
Принадлежит: KLA-TENCOR CORPORATION

Spectral Purity Filters, or SPFs, are disclosed. Such SPFs are designed to block out the 1030 nm drive laser and other undesired out of band light in a EUV mask inspection system. Different phase grating configurations for near normal incidence and grazing incidence are provided in the present disclosure and are configured specifically for EUV mask inspection.

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03-04-2020 дата публикации

一种电力设备保护套

Номер: CN210247248U
Принадлежит: Individual

本实用新型公开了一种电力设备保护套,包括第一保护套和梯形滑槽,所述第一保护套的内壁开设有第一固定孔,且第一保护套的两侧壁均开设有梯形滑槽,所述第一保护套的一侧设置有第二保护套,且第一保护套的前表面嵌入设置有扬声器,所述梯形滑槽的内侧壁开设置有限位孔,所述限位孔的内侧壁固定连接有第二触片,所述第一固定孔的内侧壁嵌入设置有第一触片,所述第一触片的一端固定连接有第一弹簧,所述第一弹簧的一端固定连接有第一石墨烯柱。本实用新型中通过使用者将第一保护套套在电力设备的外部后,在将第二保护套侧壁固定连接的梯形滑块插入第一保护套侧壁开设的梯形滑槽内,从而方便使用者安装和拆卸保护套。

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06-10-2021 дата публикации

Systems and methods for theft prevention and detection

Номер: EP3888006A1
Автор: Yanwei Liu
Принадлежит: Jfm International Corp

A system and method for premises theft prevention and detection, A system comprises a media capture device, a target area and target object at a workstation, and operably configured code in non-transitory computer readably storage media. A system recognizes a theft or misappropriation and can notify a business owner or police. The system is powered by machine learning algorithms that progressively improve accuracy and precision in theft detection.

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04-07-2024 дата публикации

Techniken und systeme für modellbasierte messungen der kritischen dimension

Номер: DE112016004012B4
Принадлежит: KLA Tencor Corp

Verfahren zur Messung eines Bias einer kritischen Dimension auf einem Retikel (M), wobei das Verfahren umfasst:Inspizieren des Retikels (M) mit einem Abbildungssystem (650), um ein gemessenes Bild einer Struktur auf dem Retikel (M) zu erhalten, wobei die Struktur einen unbekannten Wert der kritischen Dimension hat;Erzeugen eines berechneten Bildes unter Verwendung eines Modells und einer Design-Datenbank, welche ein Muster beschreibt, das verwendet wurde, um die Struktur auf dem Retikel (M) zu bilden, für welche das gemessene Bild erhalten wurde, wobei das Modell das berechnete Bild auf Grundlage optischer Eigenschaften von Retikel-Materialien, die der Struktur entsprechen, eines Computermodells des Abbildungssystems (650) und einer anpassbaren kritischen Dimension erzeugt;Minimieren einer Norm einer Differenz zwischen dem gemessenen und dem berechneten Bild durch Anpassen der anpassbaren kritischen Dimension und iterativer Wiederholung des Vorgangs der Erzeugung eines berechneten Bildes, so dass sich eine letztendliche kritische Dimension gemäß Modell ergibt, wobei das Minimieren der Norm der Differenz gleichzeitig durchgeführt wird hinsichtlich der anpassbaren kritischen Dimension und hinsichtlich eines oder mehrerer unbestimmter Parameter des Abbildungssystems (650); undDefinieren des unbekannten Werts der kritischen Dimension als die letzte kritische Dimension, die sich in einer Minimierung der Norm der Differenz ergeben hat, dadurch gekennzeichnet, dass das gemessene Bild und das berechnete Bild jeweils einen Satz an Bildern umfassen, der bei mehreren Ansichten erfasst wurde, wobei sich zwei Ansichten durch zumindest einen oder mehrere Abbildungsparameter unterscheiden, die einen Reflektions- oder einen Transmissionsmodus, eine Verteilung in der Beleuchtungspupille, eine Beleuchtungspolarisation, eine numerische Apertur und Form der Erfassungspupille, eine Fokuseinstellung und eine Pupillenfilterphase und -amplitude beinhalten.

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27-03-2020 дата публикации

一种循环式列管加热器

Номер: CN210198147U

本实用新型公开了一种循环式列管加热器,包括加热罐,所述加热罐的内部沿着所述加热罐的轴向设有若干加热列管,所述加热罐的筒体的上下两侧分别连通有蒸汽管和冷凝水管,还包括纯水罐,所述纯水罐的出水端通过进水管与所述加热罐底部的进水端连通,所述加热罐顶部的出水端通过回水管连通与所述纯水罐的进水端连通;所述加热罐的顶部的出水端还与出水管连通。本实用新型的循环式列管加热器,热蒸汽将纯水加热后,一部分热水经出水管进入生产车间,另一部分经回水管回流纯水罐内,与纯水罐内的冷水混合后形成温水,当纯水罐内的温水进入加热罐内能够快速被加热,从而减少加热时间,提高加热效率。

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28-11-2013 дата публикации

Photoemission monitoring of euv mirror and mask surface contamination in actinic euv systems

Номер: WO2013177477A1
Принадлежит: KLA-TENCOR CORPORATION

Photoelectron emission mapping systems for use with EUV (extreme ultraviolet) mask inspection and lithography systems are described. The mapping systems may be used to provide photoelectron emission maps for EUV photolithography masks and/or EUV mirrors. The systems use EUV photoelectron sources used for mask inspection or photolithography to impinge EUV light on the masks and/or mirrors. The EUV light generates photoelectron on the surfaces of the mask and/or mirros and the photoelectrons are collected and analyzed by detectors placed away from optical spaces of the EUV chamber.

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