04-07-2019 дата публикации
Номер: US20190206942A1
Принадлежит:
Embodiments of the present disclosure describe techniques and configurations for a memory device comprising a memory array having a plurality of wordlines disposed in a memory region of a die. Fill regions may be disposed between respective pairs of adjacent wordlines of the plurality of wordlines. The fill regions may include a first dielectric layer and a second dielectric layer disposed on the first dielectric layer. The first dielectric layer may comprise organic (e.g., carbon-based) spin-on dielectric material (CSOD). The second dielectric layer may comprise a different dielectric material than the first dielectric layer, such as, for example, inorganic dielectric material. Other embodiments may be described and/or claimed. 1a memory array comprising a plurality of wordlines; andfill regions between respective pairs of adjacent wordlines of the plurality of wordlines, wherein one or more of the fill regions includes a first dielectric material and a second dielectric material disposed on the first dielectric material, wherein the first dielectric material comprises an organic spin-on dielectric material (CSOD), and wherein the second dielectric material comprises a second dielectric material that is different from the first dielectric material.. An apparatus comprising: This application is a continuation application of U.S. patent application Ser. No. 15/612,245, entitled “DUAL-LAYER DIELECTRIC IN MEMORY DEVICE”, filed Jun. 2, 2017, now U.S. Pat. No. 10,134,809, which is a divisional application of U.S. patent application Ser. No. 14/998,194, entitled “DUAL-LAYER DIELECTRIC IN MEMORY DEVICE”, filed Dec. 23, 2015, now U.S. Pat. No. 9,704,923, and claims priority to the Ser. Nos. 15/612,245 and 14/998,194 applications. The disclosures of Ser. Nos. 15/612,245 and 14/998,194 are hereby fully incorporated by reference.Embodiments of the present disclosure generally relate to the field of integrated circuits (IC), and more particularly, to fabrication techniques for ...
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