17-03-2022 дата публикации
Номер: US20220084997A1
Принадлежит:
The present disclosure provides a fan-out packaging structure and a method of fabricating the same. The fan-out packaging structure includes a redistribution layer, a passivation layer, a semiconductor chip, a first packaging layer, a groove, first metal bumps, second metal bumps, an adapter board, a stacked chip package, a passive element, and a filling layer. By means of the present disclosure, various chips performing different functions can be integrated into one packaging structure, thereby improving the integration level of the fan-out packaging structure. By means of the redistribution layer, the adapter board, and the first and second metal bumps, a three-dimensional vertically stacked packaging is achieved. As the result, in addition to improved integration level, the conduction paths in the packaging structure can be effectively shortened, thereby reducing power consumption, increasing the transmission speed, and increasing the data processing capacity. 1. A method of fabricating a fan-out chip package , comprising following steps:providing a support substrate, and forming a separation layer on the support substrate;forming a passivation layer on the separation layer, wherein the passivation layer comprises a first surface in contact with the separation layer and a second surface opposite to the first surface;providing a semiconductor chip, wherein the semiconductor chip is disposed on the second surface of the passivation layer, a back side of the semiconductor chip is bonded to the passivation layer, and a front side of the semiconductor chip faces away from the second surface of the passivation layer;packaging the passivation layer and the semiconductor chip by a first packaging layer, wherein a pad of the semiconductor chip is configured to be exposed from the first packaging layer;forming a redistribution layer on the first packaging layer, wherein the redistribution layer comprises a first surface in contact with the first packaging layer and a ...
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