03-01-2019 дата публикации
Номер: US20190006384A1
Принадлежит:
A semiconductor memory device includes a semiconductor layer having a termination region surrounding a device region, the termination region including a first stacked body having a first, insulating, layer located on a surface of the substrate, a second, conductive, layer located over the first layer, and a third, insulating, layer located over the second layer, an opening extending through the first stacked body, a fourth, insulating, layer located in the opening in the first stacked body and over the surface of the semiconductor substrate in the opening, a fifth, insulating, layer, located over the fourth layer, and a wall surrounding the device region, the wall extending inwardly of the opening and contacting one of the surface of the semiconductor substrate or a nitride material on the surface of the substrate, wherein the composition of the third and fifth layers is different from that of the first and third layers. 1. A semiconductor memory device , comprising:a semiconductor substrate comprising a termination region surrounding a device region thereof, the termination region comprising a first stacked body extending around the device region and including a first layer composed of an insulating material located on a surface of the substrate, a second layer composed of a conductive material located over the first layer, and a third layer composed of an insulating material located over the second layer;an opening extending through the first stacked body and extending around the device region;a fourth layer, composed of an insulating material, located in the opening in the first stacked body and over the surface of the semiconductor substrate in the opening;a fifth layer, composed of an insulating material, located over the fourth layer; anda wall surrounding the device region, the wall extending inwardly of the opening and contacting one of the surface of the semiconductor substrate or a nitride material on the surface of the substrate, whereinthe composition of ...
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