23-05-2023 дата публикации
Номер: CN116148512A
Принадлежит:
The invention provides an assembling method and a mounting structure of a storage probe card, and relates to the technical field of semiconductor testing, and the assembling method comprises the following steps: S100, manufacturing a plurality of ceramic modules; s200, manufacturing a module carrier plate, and processing a plurality of identification patterns on the module carrier plate through a photoetching process; s300, manufacturing a through hole; s400, ceramic modules are mounted, specifically, the multiple ceramic modules are attached to the module carrier plate one by one through an automatic mounting machine, and the multiple positioning holes in the ceramic modules are aligned to the multiple positioning holes in the corresponding identification patterns one by one; s500, connecting the module carrier plate with the metal structural member through a plurality of metal guide columns; s600, curing the connecting end of each ceramic module and the corresponding metal guide column ...
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