VIBRATION MODULE

PROBLEM TO BE SOLVED: To obtain a necessary vibration output with a slight variation and to secure long life, high reliability and impact resistance by reciprocating an exciting weight held by a spring with a driving coil and transferring the vibration of the weight at that time to outside to make notice by sound. SOLUTION: A spring 310 is joined to an exciting weight 100 by cauking or the like, and is stuck to a driving coil block 200 by welding or the like. The driving coil block 200 holds a driving coil 220 with a driving coil frame 210. A magnet 110 magnetized in the radial direction of the weight 100 and the driving coil 220 are made opposite to each other in their radial direction leaving a minute space between them. A driving current is fed to the driving coil 220 from a terminal 510 as an electric signal. Electromagnetic force is generated by the driving current and the magnet 110 to vibrate the weight 100 in the vertical axis direction at nearly the resonance frequency determined ...

感放射線性樹脂組成物、重合体及び化合物

レジストパターン形成方法

RADIATION SENSITIVE RESIN COMPOSITION, POLYMER, AND COMPOUND

PROBLEM TO BE SOLVED: To provide a radiation sensitive resin composition forming a resist pattern which is prevented from top loss and pattern collapse and has good squareness and sufficient LWR suppressing performance. SOLUTION: The radiation sensitive resin composition contains a [A] polymer having a structural unit (1) including a structure in which an ester group having a tertiary carbon in a side chain bonds to a nitrogen atom. The structural unit (1) is preferably a structural unit included in a side chain of (meth)acrylate. The [A] polymer preferably includes at least one structural unit selected from a group consisting of a structural unit containing a lactone structure and a structural unit containing a cyclic carbonate structure. COPYRIGHT: (C)2012,JPO&INPIT ...

感放射線性樹脂組成物、レジストパターン形成方法及び重合体

感放射線性樹脂組成物及びそれにより形成されるレジスト被膜

RADIATION SENSITIVE RESIN COMPOSITION

PROBLEM TO BE SOLVED: To provide a radiation sensitive resin composition which satisfies not only fundamental characteristics such as sensitivity, resolution or light exposure margin, but also LWR (line width roughness) performance. SOLUTION: The radiation sensitive resin composition contains: a polymer component (A) comprising one or more kinds of polymers; a radiation sensitive acid generator (B); and a solvent (C). The polymer component (A) contains a repeating unit (a1) represented by general formula (a1) and a repeating unit (a2) represented by general formula (a2). In the general formulas (a1) and (a2), R1 represents hydrogen atom or methyl group; R2 represents divalent hydrocarbon group; and R3 represents hydrogen atom or alkyl group. In the general formula (a2), R4 represents a single bond or divalent hydrocarbon group, and A1 represents trivalent organic group. COPYRIGHT: (C)2011,JPO&INPIT ...

感放射線性樹脂組成物、重合体及び化合物

RADIATION-SENSITIVE RESIN COMPOSITION AND POLYMER

PROBLEM TO BE SOLVED: To provide a novel radiation-sensitive resin composition having excellent sensitivity, resolution and exposure latitude and a polymer used in the composition or the like. SOLUTION: The radiation-sensitive resin composition includes [A] a polymer having a structural unit represented by formula (I) and [B] a radiation-sensitive acid generator; wherein R1 is H or methyl; R2 is a 1C-20C hydrocarbon group, and R2 is preferably 1C-4C alkanediyl. COPYRIGHT: (C)2012,JPO&INPIT ...

レジストパターン形成方法、感放射線性樹脂組成物及びレジスト膜

パターン形成方法及び感放射線性樹脂組成物