12-10-2015 дата публикации
Номер: KR101558148B1
The present invention relates to a manufacturing method of a feed-through comprising: a first step of preparing a base which is formed by mixing one or more of a group consisting of Al_2O__3, Y_2O_3, Al_2O_3/Y_2O_3, ZrO_2, AlC, TiN, AlN, TiC, MgO, CaO, CeO_2, TiO_2, BN, SiO_2, SiC, YAG, Mullite, and AlF_3 which are ceramic materials, and is formed in a cylindrical shape; a second step of forming multiple electrode grooves which are incoming to the inside to be radially separated from each other on the outer peripheral face of the base; a third step of forming an electrode layer on the outer peripheral face of the base by thermal spray coating; a fourth step of polishing the outer peripheral face of the electrode layer, making the upper portion of the electrode layer be the same as the electrode groove upper portion of the base, and polishing such that only an electrode remains between the electrode grooves; a fifth step of forming an insulation layer to surround the base and the outer circumference ...
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