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Небесная энциклопедия

Космические корабли и станции, автоматические КА и методы их проектирования, бортовые комплексы управления, системы и средства жизнеобеспечения, особенности технологии производства ракетно-космических систем

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Мониторинг СМИ

Мониторинг СМИ и социальных сетей. Сканирование интернета, новостных сайтов, специализированных контентных площадок на базе мессенджеров. Гибкие настройки фильтров и первоначальных источников.

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Поддерживает ввод нескольких поисковых фраз (по одной на строку). При поиске обеспечивает поддержку морфологии русского и английского языка
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Применить Всего найдено 15. Отображено 15.
04-05-2015 дата публикации

APPARATUS FOR TREATING SUBSTRATE

Номер: KR1020150047206A
Принадлежит:

According to an embodiment of the present invention, provided is an apparatus for heating and treating a substrate. The apparatus for treating the substrate comprises: a substrate supporting unit supporting the substrate; a medicinal fluid supply unit having a nozzle supplying medicinal fluid on the substrate supported on the substrate supporting unit; and a heating unit radiating light and heating the substrate supported on the substrate supporting unit. Since a heating member heats the substrate before the medicinal fluid is supplied on the substrate, temperature difference between the substrate and the medicinal fluid can be decreased. COPYRIGHT KIPO 2015 (450) Controller ...

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16-09-2015 дата публикации

Substrate treating apparatus and substrate treating method

Номер: KR0101553363B1
Принадлежит: 세메스 주식회사

... 본 발명은 기판 처리 장치 및 기판 처리 방법에 관한 것이다. 본 발명의 일 실시 예에 따른 기판 처리 장치는 기판이 놓이는 기판 지지 유닛; 상기 기판 지지 유닛을 감싸도록 제공되는 용기; 상방에서 하방으로 약액을 공급하는 액 공급유닛; 및 상기 기판 지지 유닛에서 위쪽으로 설정거리 이격된 높이에 제공되고, 상기 기판 및 상기 기판에 공급된 상기 약액을 가열하는 가열 유닛을 포함한다.

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13-12-2017 дата публикации

SUBSTRATE PROCESSING APPARATUS AND FLOW SUPPLY UNIT

Номер: KR1020170137246A
Принадлежит:

The present invention relates to a substrate processing apparatus and a flow supply unit. The substrate processing apparatus according to an embodiment of the present invention includes a processing chamber having a processing space; a support unit for supporting the substrate in the processing space; a processing liquid supply unit for supplying a processing liquid to the upper surface of the substrate supported by the support unit; a flow supply unit for supplying dry gas and ambient air toward the processing space; and an elevating unit for elevating and lowering the processing chamber or the support unit so that the relative height between the processing chamber and the support unit is changed. It is possible to efficiently process the substrate. COPYRIGHT KIPO 2018 ...

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20-03-2023 дата публикации

기판 처리 장치

Номер: KR20230038436A
Автор: 윤현, 황호종, 김영진
Принадлежит:

... 본 발명은 내부표면과, 상기 내부표면의 반대편에 배치되는 외부표면을 포함하는 회수통을 포함하고, 상기 내부표면에는 패턴이 형성되는 바울에 관한 것이다.

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08-07-2015 дата публикации

PROCESSING LIQUID SUPPLY UNIT

Номер: KR1020150077527A
Принадлежит:

An embodiment of the present invention is to provide a device capable of heating a liquid. A processing liquid supply unit comprises: a treatment container having an accommodating space wherein a processing liquid is accommodated in the inner side; a heater to heat the processing liquid by being located in the accommodating space; and a reflector which is provided to surround the inner side of the treatment container and reflect an electromagnetism wavelength generated from the heater. The wasted electromagnetism wavelength from scattering or absorption is minimized because the electromagnetism wavelength capable of heating the processing liquid is reflected by the reflector. COPYRIGHT KIPO 2015 ...

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21-12-2016 дата публикации

FLOATING TYPE TIDAL CURRENT GENERATING APPARATUS HAVING POWER STORAGE SYSTEM

Номер: KR1020160146175A
Автор: HWANG, HO JONG
Принадлежит:

The present invention relates to a floating generator system (FGS), manufacturing a horizontal floating body performing longitudinally repeating rolling movement and a vertical floating body performing vertically repeating yawing movement by using buoyancy of water and a force caused by a flow of the water. Moreover, the floating generator system enables the horizontal floating body and the vertical floating body to be cross-separation connected, thereby generating a rotational force to generate power. Moreover, invented is a lever generator system, wherein the principle of a lever is applied to the vertical floating body based on a water surface to enable the horizontal floating body and the vertical floating body to be cross-separation connected, thereby generating the rotational force to generate the power. Moreover, a net for fish farming is connected to each module through the floating generator system to supply uninterrupted power to equipment for farming, transporting food and a ...

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17-07-2018 дата публикации

SUBSTRATE PROCESSING APPARATUS

Номер: KR1020180081700A
Принадлежит:

In the present invention, provided is a substrate processing apparatus capable of processing a substrate in an efficient manner. According to an embodiment of the present invention, the substrate processing apparatus comprises: a processing container having a processing space; a housing which accommodates the processing container and has an opening formed on an upper portion thereof; a supporting unit which supports a substrate in the processing space; a processing liquid providing unit which provides processing liquid to an upper side of the substrate supported by the supporting unit; an air current providing unit which provides drying gas and external air in the direction of the processing space; and an elevating unit which raises and lowers the processing container or the supporting unit to change the relative height between the processing container and the support unit. The air current providing unit comprises: a fan housing which is joined to the housing, has an open lower portion ...

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09-02-2017 дата публикации

OPOOM SHIP AND CABLE GENERATOR FOR RENEWAL ENERGY AND WIRELESS COMMUNICATIONS

Номер: KR1020170015834A
Автор: HWANG, HO JONG
Принадлежит:

The present invention relates to an OPOOM ship system for renewal energy and wireless communications which comprises at least one among a horizontal OPOOM ship providing a wireless communication function, a vertical OPOOM ship providing a function of producing renewable energy, a cross OPOOM ship lightening the OPOOM ship system, a wind generator of a blade OPOOM ship, a cable generator producing high voltage, and a wireless communication system of an OPOOM ship connecting with a public communication network on the ground, and produces high-quality energy and implements a high-speed wireless communication service system. COPYRIGHT KIPO 2017 ...

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25-01-2016 дата публикации

DEVICE AND METHOD FOR PROCESSING SUBSTRATE

Номер: KR1020160008719A
Принадлежит:

The present invention provides a device and a method for processing a substrate with liquid. The substrate processing device includes: a housing providing a processing space therein; a substrate support unit supporting the substrate in the processing space; an elevating unit changing a relative position between the housing and the substrate supported by the substrate support unit to a relative position between a first position and a second position; a liquid supply unit supplying chemical and rinse liquid to the substrate supported by the substrate support unit; and a controller controlling the elevating unit and the liquid supply unit. The controller includes a chemical processing step of supplying the chemical at the first position, and an intermediate processing step including a movement step of supplying the rinse liquid while the relative position is changed from the first position to the second position. Therefore, time required for the maintenance of the housing is reduced, and throughput ...

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08-05-2015 дата публикации

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

Номер: KR1020150050287A
Принадлежит:

The present invention relates to a substrate treating apparatus and a substrate treating method. The substrate treating apparatus according to one embodiment of the present invention includes a substrate support unit on which a substrate is loaded, a container which surrounds the substrate supporter unit, a solution supply unit which supplies a chemical solution from the upper side to the lower side, and a heating unit which is located at a height separated from the substrate support unit to the upper side with a preset distance and heats the substrate and the chemical solution supplied to the substrate. COPYRIGHT KIPO 2015 ...

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17-03-2023 дата публикации

기판 가열 유닛

Номер: KR102510488B1
Принадлежит: 세메스 주식회사

... 기판 가열 유닛이 개시된다. 기판 가열 유닛은 상부에 기판이 놓여지는 회전 가능한 척 스테이지; 중공형의 형상을 갖고, 상기 척 스테이지와 결합하여 상기 척 스테이지를 회전시키는 회전부; 상기 회전부 내부를 관통하여 상기 척 스테이지 상부 중앙에 구비되고, 기판의 후면으로 처리액을 분사하는 백노즐; 상기 척 스테이지의 상부로부터 이격되어 배치되고, 상기 척 스테이지의 중심에 대해 상이한 반경 거리에서 동심적으로 배열되는 링 형상의 램프들을 갖는 발열부; 상기 발열부와 상기 척 스테이지 사이에 제공되고, 상기 발열부로부터 방사된 열 에너지를 기판을 향해 반사시키는 반사 플레이트; 및 상기 램프들 각각의 온도를 측정하기 위해 상기 반사 플레이트에 설치되는 온도센서 어셈블리들을 포함한다.

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11-08-2015 дата публикации

SUBSTRATE TREATING APPARATUS

Номер: KR0101543699B1
Автор: 김유환, 최중봉, 황호종
Принадлежит: 세메스 주식회사

... 기판 처리 장치가 개시된다. 기판 처리 장치는 상부가 개방된 처리 용기; 상기 처리 용기 내에 위치된 기판을 지지하면서 기판을 가열하는 기판 가열 유닛; 상기 기판 가열 유닛에 놓인 기판으로 처리액을 공급하는 처리액 공급 유닛을 포함하되, 상기 기판 가열 유닛은, 상부에 기판이 놓여지는 회전 가능한 척 스테이지; 중공형의 형상을 갖고, 상기 척 스테이지와 결합하여 상기 척 스테이지를 회전시키는 회전부; 및 상기 척 스테이지 내에 배치된 발열부를 포함한다.

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16-06-2015 дата публикации

SUBSTRATE HEATING UNIT

Номер: KR1020150066289A
Принадлежит:

A substrate heating unit is disclosed. The substrate heating unit comprises: a rotatable chuck stage on the top of which a substrate is laid; a hollow rotation part joined to the chuck stage to rotate the chuck stage; a back nozzle which passes through the inside of the rotation part and is arranged at the upper top of the chuck stage to inject a treatment liquid to the rear side of the substrate; a heating part which is separated from the top of the chuck stage and has ring-shaped lamps concentrically arranged around the center of the chuck stage at different radial distances; and a reflective plate provided between the heating part and the chuck stage to reflect thermal energy emitted from the heating part to the substrate; and temperature sensor assemblies installed on the reflective plate to measure the temperature of each lamp. COPYRIGHT KIPO 2015 ...

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15-02-2016 дата публикации

MARITIME COMMUNICATIONS KITE OF ELECTRIC POWER AND MARINE PRODUCTS

Номер: KR1020160016338A
Автор: HWANG, HO JONG
Принадлежит:

A communications system of a maritime connecting a city and the sea in the present invention is formed to improve an efficiency of generating electric power; achieve stabilization of a power system; automate a generation of maritime electric power; and satisfy an increased demand of communication data by connecting a maritime kite, a sea air kite, and a beach kite applying new wind energy, solar light, water turbine, and tidal power generation on the sea by a command ship rope having an optical fiber cable mounted. The communications system uses an underwater space to reduce the risks of typhoon and red tides, and achieves automation of a marine farm by being connected to the beach. The communications kite comprises at least one among the sea air kite located in the air, producing electric power; a maritime kite located on the sea or under the sea, and producing at least one marine product; and a beach kite located on the ground, producing at least one among an electric power and a marine ...

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04-05-2015 дата публикации

CHEMICAL SUPPLY UNIT

Номер: KR1020150047207A
Принадлежит:

The present invention provides an apparatus for supplying a chemical on a substrate. A chemical supply unit includes a chemical storage unit which stores the chemical, a nozzle which receives the chemical from the chemical storage unit and supplies the chemical, an arm which connects the nozzle to the chemical storage unit and has a supply path inside, and a heating member which heats the chemical supplied to the nozzle. The heating member has a buffer space inside and includes a body which is combined to the arm, and a heater which heats the body to heat the chemical supplied in the buffer space. The buffer space is connected to the supply path. Therefore, a temperature is maintained while the chemical is supplied to the nozzle. COPYRIGHT KIPO 2015 ...

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