04-06-2008 дата публикации
Номер: CN0101192012A
Принадлежит:
The present invention provides an installation method for photoresist removal reactor quartz tubes, having the following steps of: firstly, manufacturing a tray with a cylindrical groove, as well as a flexible sliding blade; secondly, inlaying a lower tube mouth of a quartz tube into the groove of the tray, covering the outer wall of the quartz tube with a sheath; thirdly, pressing in an upper O-shaped sealing ring; fourthly, connecting an upper cover of the quartz tube with the sheath of the quartz tube through a bolt, compressing the O-shaped sealing ring, combining the upper cover of the quartz tube, the sheath and the quartz tube into a whole; fifthly, having the combined whole placed sideways or hung in the air, stretching the flexible sliding blade into the quartz tube from the lower tube mouth, using the flexible sliding blade to slide over a gap between the upper cover and an upper tube mouth, detecting whether the gap is even; sixthly, pressing in a lower O-shaped sealing ring; ...
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