28-09-2017 дата публикации
Номер: US20170278716A1
Принадлежит:
In order to provide a sealing sheet capable of preventing same from falling off a suction collet during conveyancing, etc., and whereby semiconductor chips can be suitably buried, the sum α of a thickness t [mm] and a storage elastic modulus G′ [Pa] at 50° C., for this sealing sheet, fulfils 300≦α≦1.5×10. 1. A sealing sheet , having a thickness t [mm] and a storage modulus G′ [Pa] at 50° C. , wherein the product α of t and G′ satisfies the following expression 1:{'br': None, 'sup': '5', '300≦α≦1.5×10.\u2003\u2003expression 1'}2. A sealing sheet with a separator claim 1 , comprising the sealing sheet recited in claim 1 , and the separator which is stacked over at least one surface of the sealing sheet claim 1 , and{'sup': 2', '2, 'claim-text': {'br': None, 'sup': 6', '9, '4.0×10≦β≦1.7×10.\u2003\u2003expression 2'}, 'having a bend elastic constant E [N/mm] at 25° C.; the sealing sheet having an area A [mm]; wherein the product β of E and A satisfies the following expression 23. A semiconductor device claim 1 , produced using the sealing sheet recited in .4. A semiconductor device claim 2 , produced using the sealing sheet with the separator that is recited in .5. The sealing sheet according to claim 1 , the area A thereof being 40000 mmor more.6. The sealing sheet with the separator according to claim 2 , the area A of the sealing sheet being 40000 mmor more.7. A production method for a semiconductor device claim 2 , comprising:step A of providing a stacked body comprising a support and one or more semiconductor chips fixed onto the support,{'claim-ref': {'@idref': 'CLM-00002', 'claim 2'}, 'step B of providing the sealing sheet with the separator that is recited in ,'}step C of arranging the sealing sheet with the separator over the semiconductor chip(s) of the stacked body, andstep D of burying the semiconductor chip(s) into the sealing sheet to forma sealed body in which the semiconductor chip(s) is/are buried in the sealing sheet. The present invention relates to a ...
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