02-01-2014 дата публикации
Номер: US20140007308A1
Принадлежит:
A probe for scanned probe microscopy is provided. The probe includes a cantilever beam and a tip. The cantilever beam extends along a generally horizontal axis. The cantilever beam has a crystal facet surface that is oriented at a tilt angle with respect to the generally horizontal axis. The tip projects outwardly from the crystal facet surface. 1. A probe for scanned probe microscopy , comprising:a cantilever beam extending along a generally horizontal axis, the cantilever beam having a crystal facet surface that is oriented at a tilt angle with respect to the generally horizontal axis; anda tip projecting outwardly from the crystal facet surface.2. The probe of claim 1 , wherein the tip is oriented generally orthogonal to the crystal facet surface.3. The probe of claim 1 , wherein the tilt angle is based on a tilt correction factor claim 1 , wherein the tilt correction factor is based on a desired angled position of the cantilever beam in a scanned probe microscopy machine.4. The probe of claim 1 , wherein the tilt angle is about 13°.5. The probe of claim 1 , wherein the crystal facet surface is selected from a group comprising: a {111} crystalline plane claim 1 , a {100} crystalline plane claim 1 , a {112} plane claim 1 , and a {110} crystalline plane.6. The probe of claim 1 , wherein the cantilever beam is constructed from is selected from the group consisting of a single-crystal silicon and a single-crystal germanium.7. The probe of claim 1 , wherein the cantilever beam includes a distal end portion claim 1 , and wherein the crystal facet surface is located at the distal end portion of the cantilever beam.8. The probe of claim 1 , further comprising a handling port claim 1 , wherein a proximate end portion of the cantilever beam is attached to the handling port.9. The probe of claim 8 , wherein handling port is constructed from a support wafer portion a buried oxide (BOX) layer and a device layer.10. The probe of claim 1 , wherein the probe is an atomic force ...
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