ACTIVE FILTRATION SYSTEM FOR CONTROLLING CLEANROOM ENVIRONMENTS

This invention is in the field of systems and methods for controlling contamination in high purity environments. This invention relates generally to particulate filtering and treatment of molecular contamination and process gases in enclosures, such as cleanrooms, contamination controlled manufacturing environments, mini-environments, isolators, glove boxes and restricted air barrier systems (RABS). The invention is capable of chemically transforming molecular contamination and process gases into less reactive or inert reaction products while at the same time decreasing the level of biological and nonbiological particulates.

Active filtration system for controlling cleanroom environments

This invention is in the field of systems and methods for controlling contamination in high purity environments. This invention relates generally to particulate filtering and treatment of molecular contamination and process gases in enclosures, such as cleanrooms, contamination controlled manufacturing environments, mini-environments, isolators, glove boxes and restricted air barrier systems (RABS). The invention is capable of chemically transforming molecular contamination and process gases into less reactive or inert reaction products while at the same time decreasing the level of biological and nonbiological particulates.

DETECTING NANOPARTICLES ON PRODUCTION EQUIPMENT AND SURFACES

Provided herein is a particle analyzer that is operably connected to a probe unit that is capable of both dislodging particles from a surface and sampling the particles after they have been dislodged. The devices and methods described herein may be lightweight and/or handheld, for example, so that they may be used within a cleanroom environment to clean and sample permanent surfaces and tools. The devices may include optical particle counters that use scattered, obscured or emitted light to detect particles, including condensation particle counting systems or split detection optical particle counters to increase the sensitivity of the device and thereby facilitate detection of smaller particles, while avoiding the increased complexity typically required for the detection of nanoscale particles, such as particles less than 100 nm in effective diameter. 1. A device for removal and detection of particles on a surface comprising:a particle analyzer having an inlet;a sample probe having a sampling port, wherein said sampling port is fluidically connected to said inlet by a flow path;an ejection system operably connected to said sample probe, wherein said ejection system is configured to direct matter, energy or a combination of matter and energy onto said surface to dislodge said particles from said surface; anda vacuum system operably connected to said sampling port, wherein said vacuum system is configured to force said dislodged particles in a collection region proximate to said sample probe through said sampling port, along said flow path and into said particle analyzer at said inlet.2. The device of claim 1 , wherein said particle analyzer is a non-optical particle counter.3. The device of claim 1 , wherein said particle analyzer is an optical particle counter.4. (canceled)5. The device of claim 1 , wherein said particle analyzer is a condensation particle counter claim 1 , and said inlet of said condensation particle counter introduces a sample stream containing ...

FLUID REFRACTIVE INDEX OPTIMIZING PARTICLE COUNTER

Provided herein are systems and methods of optical particle counters which account and adjust for the refractive index of the carrier fluid being analyzed. The provided systems are robust and may be implemented in a variety of optical particle counters including obscured light, reflected light, emitted light and scattered light particle counters. The described systems may be useful with any fluid, including gases or liquids. In some cases, the system can account for the differences in refractive index between two liquids, for example, ultrapure water and an acid, such as sulfuric, hydrochloric, hydrofluoric, acetic, phosphoric, chromic phosphoric, and the like. By accounting for the refractive index of the carrier fluid, the described systems and methods are also more sensitive and able to more accurately detect and characterize smaller particles, including nanoscale sized particles. 1. An optical particle analyzer comprising:an optical source for generating a beam of electromagnetic radiation;a flow chamber for flowing a fluid containing particles along a flow direction through the beam of electromagnetic radiation, thereby generating scattered or emitted electromagnetic radiation;an optical collection system for collecting and directing said scattered or emitted electromagnetic radiation from a viewing region onto a detector;a refractive index optimizer operably connected to one or more of said optical source, said optical collection system or said detector to control a focal point of said beam of electromagnetic radiation in said flowing fluid of particles based on a refractive index of said flowing fluid and optimize the collection of said electromagnetic radiation by said detector.2. The optical particle analyzer of claim 1 , wherein said refractive index optimizer comprises a beam shaping optical assembly optically positioned between said optical source and said flow chamber; wherein said refractive index optimizer adjusts a beam shape or a beam position of ...

DETECTING NANOPARTICLES ON PRODUCTION EQUIPMENT AND SURFACES

Provided herein is a particle analyzer that is operably connected to a probe unit that is capable of both dislodging particles from a surface and sampling the particles after they have been dislodged. The devices and methods described herein may be lightweight and/or handheld, for example, so that they may be used within a cleanroom environment to clean and sample permanent surfaces and tools. The devices may include optical particle counters that use scattered, obscured or emitted light to detect particles, including condensation particle counting systems or split detection optical particle counters to increase the sensitivity of the device and thereby facilitate detection of smaller particles, while avoiding the increased complexity typically required for the detection of nanoscale particles, such as particles less than 100 nm in effective diameter. 140.-. (canceled)41. A device for dislodging particles from a surface and detecting said dislodged particles , the device comprising:a particle analyzer comprising an inlet, an electromagnetic radiation source configured to interact with said dislodged particles, and an electromagnetic radiation detector configured to detect electromagnetic radiation emitted from said dislodged particles;a sample probe having a sampling port, wherein said sampling port is fluidically connected to said inlet by a flow path;an ejection system operably connected to said sample probe, wherein said ejection system is configured to direct matter, energy or a combination of matter and energy onto said surface to dislodge said particles from said surface; anda vacuum system operably connected to said sampling port, wherein said vacuum system is configured to force said dislodged particles in a collection region proximate to said sample probe through said sampling port, along said flow path and into said particle analyzer at said inlet for real-time detection of said dislodged particles.42. The device of claim 41 , wherein said particle ...

Slurry Monitor Coupling Bulk Size Distribution and Single Particle Detection

Provided herein are particle detection systems, and related methods configured to characterize a liquid sample, comprising: a first probe configured to determine a first parameter set of a plurality of first particles in a liquid sample, the first particles characterized by a size characteristic selected from a first size range; wherein the first parameter set comprises a first size distribution and a first concentration; and a second probe configured to determine a second parameter set of one or more second particles in the liquid sample, the second particles being characterized by a size characteristic selected from a second size range; wherein the second parameter set comprises a second size distribution and a second concentration. 1. A particle detection system configured to characterize a liquid sample , said particle detection system comprising: 'wherein said first parameter set comprises a first size distribution and a first concentration; and', 'a first probe configured to determine a first parameter set of a plurality of first small particles in said liquid sample, said first particles being characterized by a size characteristic selected from a first size range;'} 'wherein said second parameter set comprises a second size distribution and a second concentration;', 'a second probe configured to determine a second parameter set of one or more second large particles in said liquid sample, said second particles being characterized by a size characteristic selected from a second size range;'}wherein said first size distribution has an average first size and said second size distribution has an average second size, and said average first size is less than said average second size, and said first concentration is greater than said second concentration.2. The system of claim 1 , wherein the first size range and the second size range overlap.3. The system of claim 1 , wherein the first size range does not overlap with the second size range.4. The system of claim 1 ...

Slurry Monitor Coupling Bulk Size Distribution and Single Particle Detection

Provided herein are particle detection systems, and related methods configured to characterize a liquid sample, comprising: a first probe configured to determine a first parameter set of a plurality of first particles in a liquid sample, the first particles characterized by a size characteristic selected from a first size range; wherein the first parameter set comprises a first size distribution and a first concentration; and a second probe configured to determine a second parameter set of one or more second particles in the liquid sample, the second particles being characterized by a size characteristic selected from a second size range; wherein the second parameter set comprises a second size distribution and a second concentration. 1. A particle detection system configured to characterize a liquid sample , said particle detection system comprising: 'wherein said first parameter set comprises a first size distribution and a first concentration; and', 'a first probe configured to determine a first parameter set of a plurality of first particles in said liquid sample, said first particles being characterized by a size characteristic selected from a first size range;'} 'wherein said second parameter set comprises a second size distribution and a second concentration.', 'a second probe configured to determine a second parameter set of one or more second particles in said liquid sample, said second particles being characterized by a size characteristic selected from a second size range;'}2. The system of claim 1 , wherein the first size range and the second size range overlap.3. (canceled)4. The system of claim 1 , wherein the first size range is characterized by a size that is less than or equal to 200 nm and the second size-size is characterized by a size that is greater than 200 nm.5. (canceled)6. (canceled)7. (canceled)8. The system of further comprising a third probe claim 1 , said third probe configured to determine a third parameter set of a plurality of third ...

Advanced systems and methods for interferometric particle detection and detection of particles having small size dimensions

The present invention relates to interferometric detection of particles and optical detection of particles having size dimensions less than or equal to 100 nm. Systems and methods are provided exhibiting enhanced alignment and stability for interferometric detection of particles and/or optical detection of particles having size dimensions less than or equal to 100 nm. Systems and methods are provided that include compensation means for mitigating the impact of internal and external stimuli and changes in operating conditions that can degrade the sensitivity and reliability of particle detection via optical methods, including interferometric-based techniques and/or systems for optical detection of particles having size dimensions less than or equal to 100 nm.

Advanced systems and methods for interferometric particle detection and detection of particles having small size dimensions

Optical isolator stabilized laser optical particle detector systems and methods

A particle detection system may include a laser optical source providing a beam of electromagnetic radiation, one or more beam shaping elements for receiving the beam of electromagnetic radiation, an optical isolator disposed in the path of the beam, a particle interrogation zone disposed in the path of the beam, wherein particles in the particle interrogation zone interact with the beam of electromagnetic radiation, and a first photodetector configured to detect light scattered and/or transmitted from the particle and a controller configured to adjust the beam power based on a signal from the second photodetector, wherein the optical isolator is configured to filter optical feedback.

Enhanced dual-pass and multi-pass particle detection

A particle detection system may include a light source, a first beam splitter, a particle interrogation zone, a reflecting surface, a second beam splitter, a first photodetector, and a second photodetector. The first beam splitter may be configured to split the source beam into an interrogation beam and a reference beam. The particle interrogation zone may be disposed in the path of the interrogation beam. The reflecting surface may be configured to reflect the interrogation beam back on itself. The second beam splitter may be configured to: (i) receive the reference beam and side scattered light from one or more particles interacting with the interrogation beam in the particle interrogation zone; and (ii) produce a first component beam and second component beam. The first photodetector may be configured to detect the first component beam. The second photodetector may be configured to detect the second component beam.

Condensation particle counters and methods of use

Disclosed is a method for detecting and/or growing particles, comprising controlling the surface area exposed to the saturator region by monitoring at least one of a depth of the working liquid on the saturator surface, the surface area exposed to the saturator region, or a volume of the working liquid on the saturator surface. Also disclosed is an apparatus or system for detecting and/or growing particles, comprising a fluidics system configured to control the surface area exposed to the saturator region by monitoring at least one of a depth of the working liquid on the saturator surface, the surface area exposed to the saturator region, or a volume of the working liquid on the saturator surface. Certain aspects do not employ one or more porous structures for vapor generation, nor a separate carrier fluid flow or inlet comprising a carrier fluid and vaporized working liquid for combining with the sample flow in the saturator region.

Modular particle counter with docking station

Modular docking station and methods for sampling and monitoring gas and other fluids, where a sampling device is able to be removably attached to the docking station, thereby allowing the sampling device to be replaced without having to remove or disconnect the docking station from the rest of the sampling system. This allows the docking station to remain connected to the rest of the system with minimal or no interruption and reduces maintenance costs and time when replacing the sampling device.

Ensemble manifold, system and method for monitoring particles in clean environments

A system for detecting particles in a clean environment includes an ensemble manifold (440) having a plurality of sample ports (442), a delivery port (448), and flow junction (446) having no open-close valves or other flow selectors connecting all of said sample ports to said delivery port. In one embodiment, the ensemble manifold (540) is mounted directly on a particle detector (570) using a snap-on connector. A plurality of fluid sources (442) are located in a clean environment (410), each of the fluid sources fluidically connected to one of the sample ports (442).

Advanced systems and methods for interferometric particle detection and detection of particles having small size dimensions

The present invention relates to interferometric detection of particles and optical detection of particles having size dimensions less than or equal to 100 nm. Systems and methods are provided exhibiting enhanced alignment and stability for interferometric detection of particles and/or optical detection of particles having size dimensions less than or equal to 100 nm. Systems and methods are provided that include compensation means for mitigating the impact of internal and external stimuli and changes in operating conditions that can degrade the sensitivity and reliability of particle detection via optical methods, including interferometric-based techniques and/or systems for optical detection of particles having size dimensions less than or equal to 100 nm.

Enhanced dual-pass and multi-pass particle detection

A particle detection system may include a light source, a first beam splitter, a particle interrogation zone, a reflecting surface, a second beam splitter, a first photodetector, and a second photodetector. The first beam splitter may be configured to split the source beam into an interrogation beam and a reference beam. The particle interrogation zone may be disposed in the path of the interrogation beam. The reflecting surface may be configured to reflect the interrogation beam back on itself. The second beam splitter may be configured to: (i) receive the reference beam and side scattered light from one or more particles interacting with the interrogation beam in the particle interrogation zone; and (ii) produce a first component beam and second component beam. The first photodetector may be configured to detect the first component beam. The second photodetector may be configured to detect the second component beam.

Compact intelligent aerosol and fluid manifold

A manifold system and methods of collecting samples, where the manifold system comprises multiple input sample ports and a preferably rotatable flow focusing element. The manifold system is able to sample aerosols and gases from multiple sample points, such as from cleanrooms and manufacturing environments, for collection and analysis. The flow focusing element reduces cross talk and cross contamination of particles, including nanoparticles, between different samples.

Advanced systems and methods for interferometric particle detection and detection of particles having small size dimensions

The present invention relates to interferometric detection of particles and optical detection of particles having size dimensions less than or equal to 100 nm. Systems and methods are provided exhibiting enhanced alignment and stability for interferometric detection of particles and/or optical detection of particles having size dimensions less than or equal to 100 nm. Systems and methods are provided that include compensation means for mitigating the impact of internal and external stimuli and changes in operating conditions that can degrade the sensitivity and reliability of particle detection via optical methods, including interferometric-based techniques and/or systems for optical detection of particles having size dimensions less than or equal to 100 nm.

Ensemble manifold, system and method for monitoring particles in clean environments

Ensemblekollektor, System und Verfahren zur Teilchenüberwachung in Reinraumumgebungen

Ensemblekollektorsystem (400, 500) zur Bereitstellung einer Ensembleströmung zu einem Teilchendetektor (450, 570), wobei das System aufweist: mehrere Probenahmeöffnungen (442, 542); eine Durchflußzelle eines Teilchendetektors, in der durch die Probenahmeöffnungen fließende Fluide ohne Verwendung von Schaltventilen oder anderen Durchflußwählern vereinigt werden; und eine mit der Durchflußzelle verbundene Auslaßöffnung.

Ensemble manifold, system and method for monitoring particles in clean environments

A system for detecting particles in a clean environment includes an ensemble manifold (440) having a plurality of sample ports (442), a delivery port (448), and flow junction (446) having no open-close valves or other flow selectors connecting all of said sample ports to said delivery port. In one embodiment, the ensemble manifold (540) is mounted directly on a particle detector (570) using a snap-on connector. A plurality of fluid sources (442) are located in a clean environment (410), each of the fluid sources fluidically connected to one of the sample ports (442).

Advanced systems and methods for interferometric particle detection and detection of particles having small size dimensions

The present invention relates to interferometric detection of particles and optical detection of particles having size dimensions less than or equal to 100 nm. Systems and methods are provided exhibiting enhanced alignment and stability for interferometric detection of particles and/or optical detection of particles having size dimensions less than or equal to 100 nm. Systems and methods are provided that include compensation means for mitigating the impact of internal and external stimuli and changes in operating conditions that can degrade the sensitivity and reliability of particle detection via optical methods, including interferometric-based techniques and/or systems for optical detection of particles having size dimensions less than or equal to 100 nm.

Ensemble manifold system and method for monitoring particles in clean environments

Polydispersed particle challenge sample volume calibration of optical particle counters

A method of calibrating an optical particle counter may include performing first and second calibration procedures. The first calibration procedure may include performing sensitivity calibration and/or channel size calibration of the optical particle counter under calibration using a monodispersed particle standard. The second calibration procedure may include sample volume calibration. The sample volume calibration may include: flowing a polydispersed particle calibration sample dispersed in a fluid through the optical particle counter under calibration to produce a first signal output; flowing the polydispersed particle calibration sample dispersed in the fluid through a reference optical particle counter to produce a reference signal output; comparing the first signal output with the reference signal output; and adjusting, in response to the comparing, an effective sample volume parameter stored in a computer readable memory of the optical particle counter under calibration.

Polydispersed particle challenge sample volume calibration of optical particle counters

A method of calibrating an optical particle counter may include performing first and second calibration procedures. The first calibration procedure may include performing sensitivity calibration and/or channel size calibration of the optical particle counter under calibration using a monodispersed particle standard. The second calibration procedure may include sample volume calibration. The sample volume calibration may include: flowing a polydispersed particle calibration sample dispersed in a fluid through the optical particle counter under calibration to produce a first signal output; flowing the polydispersed particle calibration sample dispersed in the fluid through a reference optical particle counter to produce a reference signal output; comparing the first signal output with the reference signal output; and adjusting, in response to the comparing, an effective sample volume parameter stored in a computer readable memory of the optical particle counter under calibration.

Optical isolator stabilized laser optical particle detector systems and methods

A particle detection system may include a laser optical source providing a beam of electromagnetic radiation, one or more beam shaping elements for receiving the beam of electromagnetic radiation, an optical isolator disposed in the path of the beam, a particle interrogation zone disposed in the path of the beam, wherein particles in the particle interrogation zone interact with the beam of electromagnetic radiation, and a first photodetector configured to detect light scattered and/or transmitted from the particle and a controller configured to adjust the beam power based on a signal from the second photodetector, wherein the optical isolator is configured to filter optical feedback.

Active filtration system for controlling cleanroom environments

This invention is in the field of systems and methods for controlling contamination in high purity environments. This invention relates generally to particulate filtering and treatment of molecular contamination and process gases in enclosures, such as cleanrooms, contamination controlled manufacturing environments, mini-environments, isolators, glove boxes and restricted air barrier systems (RABS). The invention is capable of chemically transforming molecular contamination and process gases into less reactive or inert reaction products while at the same time decreasing the level of biological and nonbiological particulates.

Method of treating a cleanroom enclosure

This invention is in the field of systems and methods for controlling contamination in high purity environments. This invention relates generally to particulate filtering and treatment of molecular contamination and process gases in enclosures, such as cleanrooms, contamination controlled manufacturing environments, mini-environments, isolators, glove boxes and restricted air barrier systems (RABS). The invention is capable of chemically transforming molecular contamination and process gases into less reactive or inert reaction products while at the same time decreasing the level of biological and nonbiological particulates.