08-04-2015 дата публикации
Номер: CN104507249A
Автор:
YU YONG,
WANG XINGHUA,
ZHANG HANQI,
FENG GUODONG,
SHAN HONGYAN,
HUO YANG,
ZHAO ZHENYING,
WANG XIAOYAN,
YU AIHUA,
LIANG FANGHUI,
HUO DEFA,
XIA GUOHAI,
YU AIMIN
Принадлежит:
The invention discloses a rectangular waveguide microwave plasma source generating device, which comprises a rectangular waveguide resonance cavity, a gas carrying module, a regulation module, a light path module, a circuit control system, a maintaining gas control system and a sample gas carrying control system. The rectangular waveguide microwave plasma source generating device provided by the invention has the advantages that the excitation energy can be from 200W to thousands of watts, under the effect of the circuit control system, the microwave energy forms the plasma by the carrier gas ionization in the resonance cavity, the plasma contains sample spectrum information, the sample spectrum information can be transmitted out through the light path module, and the goal of analyzing substances in medium gas is achieved.
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